公开(公告)号：US5422486A

公开(公告)日：1995-06-06

申请号：US58959

申请日：1993-05-07

申请人： Karl H. Herrmann ,  Steffen Beck ,  Hans P. Feuerbaum ,  Jurgen Frosien ,  Andreas Benez ,  Stefan Lanio ,  Gerold Schonecker

发明人： Karl H. Herrmann ,  Steffen Beck ,  Hans P. Feuerbaum ,  Jurgen Frosien ,  Andreas Benez ,  Stefan Lanio ,  Gerold Schonecker

IPC分类号： H01J37/244 ,  G01N23/00

CPC分类号： H01J37/244 ,  H01J2237/151

摘要： The invention relates to a scanning electron beam device in which at least one electrostatic reflector is provided for reflection of a secondary electron beam emitted by the primary electron beam on the object. This reflector is preferably located outside the beam path of the primary electron beam, and at least one electron-optical element which effects a preliminary deflection of the secondary electron beam by a small angle with respect to the beam path of the primary electron beam is provided between the object and the reflector. Such an arrangement makes it possible with comparatively low technical expenditure to reflect the secondary electron beam by a relatively large angle with respect to the unaffected primary electron beam which travels on a straight axis.

摘要翻译： 本发明涉及一种扫描电子束装置，其中提供至少一个静电反射器用于反射由一次电子束在物体上发射的二次电子束。 该反射器优选位于一次电子束的光束路径的外侧，并且提供至少一个电子光学元件，该电子光学元件相对于一次电子束的光束路径以小的角度实现二次电子束的初步偏转 物体与反射体之间。 这样的布置使得相对于在直轴上行进的未受影响的一次电子束相对较大的角度反射二次电子束，可以以相对较低的技术支出反射二次电子束。

公开(公告)号：US4241259A

公开(公告)日：1980-12-23

申请号：US030378

申请日：1979-04-16

申请人： Hans P. Feuerbaum ,  Johann Otto

发明人： Hans P. Feuerbaum ,  Johann Otto

IPC分类号： H01J37/20 ,  G01R31/302 ,  H01J37/18 ,  H01J37/28 ,  H01L21/66 ,  H01J9/38

CPC分类号： H01J37/18

摘要： A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample chamber, and the sample holder or its base form a cover for the sample chamber permitting simple and troublefree contact with the sample. Use of the electron microscope for the testing of integrated circuits is disclosed.

摘要翻译： 具有电子光学柱和用于试样的样品室的扫描电子显微镜在真空中设置在其中，其中样品保持器直接或间接地形成用于样品室的气密密封。 电子光学柱优选悬浮在样品室下方，并且样品保持器或其基座形成用于样品室的盖，允许与样品的简单且无故障的接触。 公开了使用电子显微镜进行集成电路的测试。

公开(公告)号：US4292519A

公开(公告)日：1981-09-29

申请号：US98645

申请日：1979-11-29

申请人： Hans P. Feuerbaum

发明人： Hans P. Feuerbaum

IPC分类号： G01N23/225 ,  G01R31/305 ,  H01J37/26 ,  H01J49/48

CPC分类号： H01J49/488 ,  G01R31/305 ,  H01J37/266

摘要： The invention relates to a device for contact free potential measurements of integrated circuits by means of measuring the energy of the secondary electrons released at the measuring location. One collector electrode 16 and one opposing field electrode 18 are arranged in succession at a predetermined distance from the measuring point with the electrodes 16 and 18 being formed as grid electrodes and arranged parallel to the flat surface of the circuit being tested. The secondary electrons are intercepted by a scintillator where their energy can be measured and the device makes it possible to have contact free potential measurements on paths of integrated circuit wafers.

摘要翻译： 本发明涉及通过测量在测量位置释放的二次电子的能量的集成电路的无接触电位测量装置。 一个集电极电极16和一个相对的场电极18被连续布置在离测量点预定距离处，其中电极16和18形成为栅电极并且平行于被测电路的平坦表面布置。 二次电子被闪烁体截取，其中它们的能量可以被测量，并且该器件使得可以在集成电路晶片的路径上进行无接触电位测量。

公开(公告)号：US4412191A

公开(公告)日：1983-10-25

申请号：US287133

申请日：1981-07-27

申请人： Hans P. Feuerbaum ,  Gerald Tobolka

发明人： Hans P. Feuerbaum ,  Gerald Tobolka

IPC分类号： G01R19/155 ,  G01R29/14 ,  G01R31/302 ,  G01R31/305 ,  H03H9/64 ,  H03H9/00

CPC分类号： G01R31/305 ,  G01R29/14

摘要： For quantitative potential measurement of surface-wave filters, an alternating voltage with amplitude U.sub.E.sbsb.i is connected to an input transducer of the surface-wave filter. At a local region for measurement on the filter, an alternating voltage of amplitude U.sub.P arises. For each such measuring location, the voltage U.sub.P is compared to a nominal value and if it deviates therefrom, this deviation is utilized to control an amplitude of the input voltage U.sub.E.sbsb.i so as to maintain the voltage U.sub.P substantially constant. For the various measurement locations, the changes of the input voltage U.sub.E.sbsb.i are analyzed and a local attenuation factor for each measured region in the filter may be determined. By knowing a frequency of the driving alternating voltage, conclusions can be drawn concerning specific characteristics of the filter.

摘要翻译： 对于表面波滤波器的定量电位测量，具有振幅UEi的交流电压连接到表面波滤波器的输入换能器。 在用于测量滤波器的局部区域，产生振幅UP的交流电压。 对于每个这样的测量位置，将电压UP与标称值进行比较，并且如果其偏离，则该偏差用于控制输入电压UE i的幅度，以便将电压UP保持在基本恒定。 对于各种测量位置，分析输入电压UEi的变化，并且可以确定滤波器中每个测量区域的局部衰减因子。 通过知道驱动交流电压的频率，可以得出关于滤波器的具体特性的结论。

公开(公告)号：US4223220A

公开(公告)日：1980-09-16

申请号：US22493

申请日：1979-03-21

申请人： Hans P. Feuerbaum

发明人： Hans P. Feuerbaum

IPC分类号： G01R31/26 ,  G01R13/00 ,  G01R19/00 ,  G01R29/14 ,  G01R31/302 ,  G01R31/305 ,  H01J37/28 ,  H01L21/66 ,  G01N23/00

CPC分类号： G01R31/305 ,  G01R13/00

摘要： A method for electronically imaging the potential distribution in an electronic component such as an integrated circuit in which the phase of the pulses of the primary electron beam is shifted by a time delay with respect to the potential distribution in the component with a multiple of the frequency of the line deflection of the primary electron beam on the component and a frequency synchronous therewith chosen as the frequency of the time delay.

摘要翻译： 一种用于电子成像诸如集成电路的电子部件中的电势分布的方法，其中一次电子束的脉冲的相位相对于具有倍数的倍数的分量中的电位分布偏移了时间延迟 的一次电子束在分量上的线偏转和与其同步的频率被选择为时间延迟的频率。

公开(公告)号：US4277679A

公开(公告)日：1981-07-07

申请号：US105892

申请日：1979-12-21

申请人： Hans P. Feuerbaum

发明人： Hans P. Feuerbaum

IPC分类号： H01J37/28 ,  G01R31/26 ,  G01R31/302 ,  G01R31/305 ,  H01J37/26 ,  H01J49/48 ,  H01L21/66 ,  G01N23/00

CPC分类号： H01J49/488 ,  G01R31/305 ,  H01J37/266

摘要： A method and apparatus for the contact-free potential measurement at an electronic component using an electron beam wherein a predetermined potential is applied to the measuring point and the output voltage of a controlled gain amplifier is set to a predetermined reference value U.sub.S by means of controlling a photomultiplier voltage U.sub.PM and the photomultiplier voltage U.sub.PM is maintained constant. The measuring voltage U.sub.M is then determined from the difference of the voltages U.sub.R -U.sub.S between the control unit output voltage U.sub.R and the index value voltage U.sub.S. The method and apparatus allow the quantitative potential measurement to be made on the conducting paths of an integrated circuit without utilizing manual adjustments.

摘要翻译： 使用电子束的电子部件的无接触电位测定方法和装置，其中通过控制将控制增益放大器的预定电位施加到测量点并将受控增益放大器的输出电压设置为预定的参考值US 光电倍增管电压UPM和光电倍增管电压UPM保持不变。 然后根据控制单元输出电压UR和指标值电压US之间的电压UR-US的差确定测量电压UM。 该方法和装置允许在集成电路的导电路径上进行定量电位测量，而不用手动调整。