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公开(公告)号：US20230347667A1
公开(公告)日：2023-11-02
申请号：US18314503
申请日：2023-05-09
申请人： Kateeva, Inc.
发明人： Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
CPC分类号： B41J11/42 , B41J11/00 , H05K3/1241 , B41J3/28 , H05K3/125 , B41J11/009 , B41J3/407 , B41J2202/09
摘要： A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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公开(公告)号：US20210010136A1
公开(公告)日：2021-01-14
申请号：US16915614
申请日：2020-06-29
申请人： Kateeva, Inc.
发明人： Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
摘要： A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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公开(公告)号：US11679602B2
公开(公告)日：2023-06-20
申请号：US16915614
申请日：2020-06-29
申请人： Kateeva, Inc.
发明人： Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
CPC分类号： B41J11/42 , B41J3/28 , B41J3/407 , B41J11/00 , B41J11/009 , H05K3/125 , H05K3/1241 , B41J2202/09
摘要： A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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