公开(公告)号：US20210010136A1

公开(公告)日：2021-01-14

申请号：US16915614

申请日：2020-06-29

申请人： Kateeva, Inc.

发明人： Karl Mathia ,  Jesse Lu ,  Jerry Chang ,  Matt Audet ,  Stephen Baca ,  Vadim Mashevsky ,  David C. Darrow

IPC分类号： C23C16/48 ,  C23C16/02 ,  C23C16/54

摘要： A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

公开(公告)号：US11679602B2

公开(公告)日：2023-06-20

申请号：US16915614

申请日：2020-06-29

申请人： Kateeva, Inc.

发明人： Karl Mathia ,  Jesse Lu ,  Jerry Chang ,  Matt Audet ,  Stephen Baca ,  Vadim Mashevsky ,  David C. Darrow

IPC分类号： B41J3/28 ,  B41J11/42 ,  B41J11/00 ,  H05K3/12 ,  B41J3/407

CPC分类号： B41J11/42 ,  B41J3/28 ,  B41J3/407 ,  B41J11/00 ,  B41J11/009 ,  H05K3/125 ,  H05K3/1241 ,  B41J2202/09

摘要： A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

公开(公告)号：US20230347667A1

公开(公告)日：2023-11-02

申请号：US18314503

申请日：2023-05-09

申请人： Kateeva, Inc.

发明人： Karl Mathia ,  Jesse Lu ,  Jerry Chang ,  Matt Audet ,  Stephen Baca ,  Vadim Mashevsky ,  David C. Darrow

IPC分类号： B41J11/42 ,  B41J11/00 ,  H05K3/12 ,  B41J3/28 ,  B41J3/407

CPC分类号： B41J11/42 ,  B41J11/00 ,  H05K3/1241 ,  B41J3/28 ,  H05K3/125 ,  B41J11/009 ,  B41J3/407 ,  B41J2202/09

摘要： A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

公开(公告)号：US20220126606A1

公开(公告)日：2022-04-28

申请号：US17451561

申请日：2021-10-20

申请人： Kateeva, Inc.

发明人： Jerry Chang ,  Matt Audet

IPC分类号： B41J11/00

摘要： A deposition device is described. The deposition device has a substrate support and an imaging system disposed to image a portion of a substrate positioned on the substrate support. The imaging system comprises an LED light source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

公开(公告)号：US20240017555A1

公开(公告)日：2024-01-18

申请号：US18462261

申请日：2023-09-06

申请人： Kateeva, Inc.

发明人： Jerry Chang ,  Jesse Lu ,  Matt Audet

IPC分类号： B41J11/00

CPC分类号： B41J11/00218

摘要： A deposition device is described. The deposition device has a substrate support and an imaging system disposed to image a portion of a substrate positioned on the substrate support. The imaging system comprises an LED light source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

公开(公告)号：US11780242B2

公开(公告)日：2023-10-10

申请号：US17451561

申请日：2021-10-20

申请人： Kateeva, Inc.

发明人： Jerry Chang ,  Matt Audet

IPC分类号： B41J11/00

CPC分类号： B41J11/00218

摘要： A deposition device is described. The deposition device has a substrate support and an imaging system disposed to image a portion of a substrate positioned on the substrate support. The imaging system comprises an LED light source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.