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公开(公告)号:US20210010136A1
公开(公告)日:2021-01-14
申请号:US16915614
申请日:2020-06-29
Applicant: Kateeva, Inc.
Inventor: Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
Abstract: A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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公开(公告)号:US11679602B2
公开(公告)日:2023-06-20
申请号:US16915614
申请日:2020-06-29
Applicant: Kateeva, Inc.
Inventor: Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
CPC classification number: B41J11/42 , B41J3/28 , B41J3/407 , B41J11/00 , B41J11/009 , H05K3/125 , H05K3/1241 , B41J2202/09
Abstract: A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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公开(公告)号:US09961782B2
公开(公告)日:2018-05-01
申请号:US15642037
申请日:2017-07-05
Applicant: Kateeva, Inc.
Inventor: Digby Pun , David C. Darrow , Robert B. Lowrance , Alexander Sou-Kang Ko
IPC: H01L21/67 , H01L21/68 , B05C5/02 , H01L23/02 , H01L23/28 , H05K3/46 , B05D5/12 , B41J29/393 , B41J2/01 , H01L21/683
CPC classification number: H05K3/4644 , B05C5/0208 , B05D5/12 , B41J2/01 , B41J3/407 , B41J13/0027 , B41J29/393 , H01L21/67 , H01L21/6715 , H01L21/6776 , H01L21/67784 , H01L21/68 , H01L21/683 , H05K3/4679 , H05K2203/0104 , H05K2203/013 , H05K2203/0736 , H05K2203/166
Abstract: A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an “ideal” conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being “played back” during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.
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公开(公告)号:US20250058572A1
公开(公告)日:2025-02-20
申请号:US18939899
申请日:2024-11-07
Applicant: Kateeva, Inc.
Inventor: Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
Abstract: A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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公开(公告)号:US20180014410A1
公开(公告)日:2018-01-11
申请号:US15642037
申请日:2017-07-05
Applicant: Kateeva, Inc.
Inventor: David C. Darrow , Digby Pun , Robert B. Lowrance , Alexander Sou-Kang Ko
CPC classification number: H05K3/4644 , B05C5/0208 , B05D5/12 , B41J2/01 , B41J3/407 , B41J13/0027 , B41J29/393 , H01L21/67 , H01L21/6715 , H01L21/6776 , H01L21/67784 , H01L21/68 , H01L21/683 , H05K3/4679 , H05K2203/0104 , H05K2203/013 , H05K2203/0736 , H05K2203/166
Abstract: A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an “ideal” conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being “played back” during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.
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公开(公告)号:US12172430B2
公开(公告)日:2024-12-24
申请号:US18314503
申请日:2023-05-09
Applicant: Kateeva, Inc.
Inventor: Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
Abstract: A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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公开(公告)号:US20190297733A1
公开(公告)日:2019-09-26
申请号:US16435911
申请日:2019-06-10
Applicant: Kateeva, Inc.
Inventor: David C. Darrow , Digby Pun , Robert B. Lowrance , Alexander Sou-Kang Ko
Abstract: A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an “ideal” conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being “played back” during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.
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公开(公告)号:US10420225B2
公开(公告)日:2019-09-17
申请号:US15816443
申请日:2017-11-17
Applicant: Kateeva, Inc.
Inventor: David C. Darrow , Digby Pun , Robert B. Lowrance , Alexander Sou-Kang Ko
IPC: H05K3/46 , B05C5/02 , H01L23/02 , H01L23/28 , B05D5/12 , B41J29/393 , B41J3/407 , B41J13/00 , H01L51/00 , B41J2/01 , H01L21/67 , H01L21/683 , H01L21/677 , H01L21/68
Abstract: A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an “ideal” conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being “played back” during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.
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公开(公告)号:US20230347667A1
公开(公告)日:2023-11-02
申请号:US18314503
申请日:2023-05-09
Applicant: Kateeva, Inc.
Inventor: Karl Mathia , Jesse Lu , Jerry Chang , Matt Audet , Stephen Baca , Vadim Mashevsky , David C. Darrow
CPC classification number: B41J11/42 , B41J11/00 , H05K3/1241 , B41J3/28 , H05K3/125 , B41J11/009 , B41J3/407 , B41J2202/09
Abstract: A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
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10.
公开(公告)号:US20180229497A1
公开(公告)日:2018-08-16
申请号:US15851419
申请日:2017-12-21
Applicant: Kateeva, Inc.
Inventor: David C. Darrow , Christopher Buchner , Robert B. Lowrance , Kevin John Li
IPC: B41J2/045
CPC classification number: B41J2/04505 , B41J2/04586 , B41J2/2135 , B41J11/0095 , B41J25/308
Abstract: This disclosure provides a high precision measurement system for rapid, accurate determination of height of a deposition source relative to a deposition target substrate. In one embodiment, each of two transport paths of an industrial printer mounts a camera and a high precision sensor. The cameras are used to achieve registration between split transport axes, and the positions of the high precision sensors are each precisely determined in terms of xy position. One of the high precision sensors is used to measure height of the deposition source, while another measures height of the target substrate. Relative z axis position between these sensors is identified to provide for precise z-coordinate identification of both source and target substrate. Disclosed embodiments permit dynamic, real-time, high precision height measurement to micron or submicron accuracy.
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