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公开(公告)号：US20090289098A1
公开(公告)日：2009-11-26
申请号：US12085964
申请日：2006-11-30
申请人： Katsumi Terada , Mikio Kawakami
发明人： Katsumi Terada , Mikio Kawakami
CPC分类号： H01L24/81 , H01L24/75 , H01L2224/16 , H01L2224/75 , H01L2224/75744 , H01L2224/75745 , H01L2224/759 , H01L2224/81121 , H01L2224/81203 , H01L2224/81208 , H01L2224/81801 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01055 , H01L2924/01067 , H01L2924/014 , H01L2924/14 , H01L2924/351 , H01L2924/00
摘要： A chip mounting apparatus is provided with a drive control means. The drive control means is provided with a tool holder whereupon a tool for applying pressure to a chip is mounted, a holder supporting means for supporting the tool holder to be vertically moved, a drive means for vertically moving the holder supporting means, and a position detecting means for detecting a relative position of the tool holder to the holder supporting means. The drive control means controls the height and the pressurizing force of the tool, based on the position of the tool holder when the tool and the chip are one over another and brought into contact with a substrate. A chip mounting method is also provided. Short-circuit failures between adjacent solder bumps can be prevented and chips can be mounted with high yield and reliability.
摘要翻译： 芯片安装装置具有驱动控制装置。 驱动控制装置设置有工具架，安装用于向芯片施加压力的工具，用于支撑待垂直移动的工具架的保持器支撑装置，用于垂直移动保持器支撑装置的驱动装置和位置 检测装置，用于检测工具架到保持器支撑装置的相对位置。 驱动控制装置基于工具和芯片彼此重叠并与基板接触的位置来控制工具的高度和加压力。 还提供了芯片安装方法。 可以防止相邻焊料凸点之间的短路故障，并且可以以高产率和可靠性安装芯片。
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公开(公告)号：US07918953B2
公开(公告)日：2011-04-05
申请号：US11979595
申请日：2007-11-06
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记由可移动识别装置读取，用于定位要彼此粘合的对象。 对准方法包括在识别装置在其完全停止之前的移动期间读取识别标记的步骤，以及通过基于所述识别装置的位置反馈信号校正已经读取的标记识别位置来识别识别标记的绝对位置的步骤 移动识别装置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除确保可移动识别装置的完全停止的建立时间的必要性，并且显着地减少对准时间和安装节奏。
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公开(公告)号：US20080073027A1
公开(公告)日：2008-03-27
申请号：US11979595
申请日：2007-11-06
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记由可移动识别装置读取，用于定位要彼此粘合的对象。 对准方法包括在识别装置在其完全停止之前的移动期间读取识别标记的步骤，以及通过基于所述识别装置的位置反馈信号校正已经读取的标记识别位置来识别识别标记的绝对位置的步骤 移动识别装置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除确保可移动识别装置的完全停止的建立时间的必要性，并且显着地减少对准时间和安装节奏。
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公开(公告)号：US07299545B2
公开(公告)日：2007-11-27
申请号：US10509882
申请日：2003-03-27
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记由可移动识别装置读取，用于定位要彼此粘合的对象。 对准方法包括在识别装置在其完全停止之前的移动期间读取识别标记的步骤，以及通过基于所述识别装置的位置反馈信号校正已经读取的标记识别位置来识别识别标记的绝对位置的步骤 移动识别装置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除确保可移动识别装置的完全停止的建立时间的必要性，并且显着地减少对准时间和安装节奏。
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公开(公告)号：US20050274869A1
公开(公告)日：2005-12-15
申请号：US10509882
申请日：2003-03-27
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
IPC分类号： H01L21/68 , H01L23/544 , H05K13/00 , G02B7/04
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks (A, B, C, D) are read by movable recognition means (5) for positioning objects (2, 4) to be bonded to each other. An alignment method includes a step of reading the recognition marks (A, B, C, D) during movement of the recognition means (5) before its complete stop, and a step of identifying absolute positions of the recognition marks (A, B, C, D) by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition means (5). A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition means (5), and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记（A，B，C，D）由可移动识别装置（5）读取，用于定位待彼此粘合的物体（2,4）。 对准方法包括在识别装置（5）完全停止之前移动期间读取识别标记（A，B，C，D）的步骤，以及识别识别标记（A，B， C），D）通过基于移动识别装置（5）的位置反馈信号校正已读取的标记识别位置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除了确保可移动识别装置（5）的完全停止的建立时间的必要性，并且显着减少对准时间和安装节奏。
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