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公开(公告)号：US08585112B2
公开(公告)日：2013-11-19
申请号：US13057602
申请日：2009-07-29
IPC分类号： B25J15/10 , H01L21/677
CPC分类号： H01J37/20 , H01J2237/2007 , H01J2237/20221 , H01L21/67742
摘要： A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism.
摘要翻译： 样品输送机构最小化特别是通过光掩模代表的样品损坏的风险，并且样品输送机构提供用于保持样品以便悬挂的样品保持机构，并且被配置为使得靠近图案表面的部分 样品与用于悬挂样品的凸缘的突出部分分离，从而阻止图案表面和构成输送机构的构件之间的接触。
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公开(公告)号：US20110142578A1
公开(公告)日：2011-06-16
申请号：US13057602
申请日：2009-07-29
IPC分类号： B65G49/06 , H01L21/677
CPC分类号： H01J37/20 , H01J2237/2007 , H01J2237/20221 , H01L21/67742
摘要： A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism.
摘要翻译： 样品输送机构最小化特别是通过光掩模代表的样品损坏的风险，并且样品输送机构提供用于保持样品以便悬挂的样品保持机构，并且被配置为使得靠近图案表面的部分 样品与用于悬挂样品的凸缘的突出部分分离，从而阻止图案表面和构成输送机构的构件之间的接触。
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公开(公告)号：US07737416B2
公开(公告)日：2010-06-15
申请号：US12038179
申请日：2008-02-27
申请人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
发明人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
IPC分类号： G01B15/00 , H01L21/677
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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公开(公告)号：US08173971B2
公开(公告)日：2012-05-08
申请号：US12788037
申请日：2010-05-26
申请人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
发明人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
IPC分类号： G01B15/00 , H01L21/677
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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公开(公告)号：US20100230592A1
公开(公告)日：2010-09-16
申请号：US12788037
申请日：2010-05-26
申请人： Takashi GUNJI , Hidetoshi Sato , Katsuya Kawakami , Hideko Yatabe
发明人： Takashi GUNJI , Hidetoshi Sato , Katsuya Kawakami , Hideko Yatabe
IPC分类号： H01J37/20 , H01J37/28 , H01J37/18 , H01L21/677 , H01L21/673
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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公开(公告)号：US20080203302A1
公开(公告)日：2008-08-28
申请号：US12038179
申请日：2008-02-27
申请人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
发明人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
IPC分类号： G01B15/00 , H01L21/677
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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7.发明申请公开(公告)号：US20140081786A1
公开(公告)日：2014-03-20
申请号：US14122497
申请日：2011-09-12
申请人： Hidetoshi Sato
发明人： Hidetoshi Sato
CPC分类号： G01T7/12 , G06Q20/201 , G06Q20/208 , G07G1/0045 , G07G1/009 , G08B21/182
摘要： Provided is a POS system including: a storage part for storing a product code for identifying a product and a radiation dose or a radioactivity threshold defined for each product code, the product code and the radiation dose or the radioactivity threshold being associated with each other; a scanner part including a product reading part for reading a product code attached to a product, and a radioactivity measurement part for measuring a radiation dose emitted from the product or radioactivity defined based on the radiation dose; a comparison part for comparing a radiation does or a radioactivity threshold corresponding to the product code read by the product code reading part and a value measured by the radioactivity measurement part with each other; and an alert output part for outputting an alert when the measured value exceeds the threshold.
摘要翻译： 提供一种POS系统，包括：存储部件，用于存储用于识别产品的产品代码以及为每个产品代码定义的辐射剂量或放射性阈值，产品代码和辐射剂量或放射性阈值彼此相关联; 扫描器部分，包括用于读取附加到产品上的产品代码的产品读取部分和用于测量从产品发射的辐射剂量或基于辐射剂量定义的放射性的放射性测量部件; 比较部分，用于比较与产品代码读取部分读取的产品代码相对应的放射线阈值或放射性阈值与由放射性测量部件测量的值彼此之间; 以及警报输出部，用于当测量值超过阈值时输出警报。
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公开(公告)号：US08461457B2
公开(公告)日：2013-06-11
申请号：US13029640
申请日：2011-02-17
IPC分类号： H02G3/22
CPC分类号： H02G3/22 , Y10T16/063
摘要： A grommet includes an outer body and an inner body. The outer body, is formed with a wire insertion hole through which a wire is inserted, and has a panel fitting portion at a circumferential portion thereof. The panel fitting portion fits in a first panel hole having a first diameter. The inner body, is attached to the outer body, and has a locking fitting portion at a circumferential portion thereof. The locking fitting portion fits in a second panel hole having a second diameter smaller than the first diameter and locks an inner edge portion of the second panel hole.
摘要翻译： 索环包括外体和内体。 外壳形成有电线插入孔，电线插入其中，并且在其周向部分具有面板配合部。 面板装配部分装配在具有第一直径的第一面板孔中。 内体附接到外体，并且在其周向部分具有锁定配合部分。 锁定配合部分配合在具有小于第一直径的第二直径的第二面板孔中，并且锁定第二面板孔的内边缘部分。
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公开(公告)号：US20110203833A1
公开(公告)日：2011-08-25
申请号：US13029640
申请日：2011-02-17
IPC分类号： H02G3/22
CPC分类号： H02G3/22 , Y10T16/063
摘要： A grommet includes an outer body and an inner body. The outer body, is formed with a wire insertion hole through which a wire is inserted, and has a panel fitting portion at a circumferential portion thereof. The panel fitting portion fits in a first panel hole having a first diameter. The inner body, is attached to the outer body, and has a locking fitting portion at a circumferential portion thereof. The locking fitting portion fits in a second panel hole having a second diameter smaller than the first diameter and locks an inner edge portion of the second panel hole.
摘要翻译： 索环包括外体和内体。 外壳形成有电线插入孔，电线插入其中，并且在其周向部分具有面板配合部。 面板装配部分装配在具有第一直径的第一面板孔中。 内体附接到外体，并且在其周向部分具有锁定配合部分。 锁定配合部分配合在具有小于第一直径的第二直径的第二面板孔中，并且锁定第二面板孔的内边缘部分。
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公开(公告)号：US20090193986A1
公开(公告)日：2009-08-06
申请号：US12306699
申请日：2007-06-28
IPC分类号： B41L13/00
CPC分类号： H05K3/1225 , B41F15/36 , B41P2215/14 , H05K2203/082
摘要： [Problems]To provide a printing device capable of improving the printing accuracy by preventing positional displacement of a stencil.[Means for Solving the Problems]A printing device of the invention applies paste on a stencil 51 onto a substrate by spreading the paste by sliding a squeegee 61 along a surface of the stencil 51 disposed on the substrate W. Outer attracting means for holding the stencil 51 by attracting an undersurface side thereof is provided on the outside of a squeegee sliding region in which the squeegee 61 slides over the stencil 51.
摘要翻译： [问题]提供能够通过防止模板的位置偏移来提高打印精度的打印装置。 解决问题的手段本发明的打印装置通过沿着设置在基板W上的模板51的表面滑动刮板61而将糊状物涂布在基板上，将糊料涂布在基板上。外部吸引装置 通过吸引其下表面侧的模板51设置在刮板61滑动在刮板51上的刮板滑动区域的外侧。
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