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1.发明授权公开(公告)号：US08278908B2
公开(公告)日：2012-10-02
申请号：US12396579
申请日：2009-03-03
IPC分类号： G01R19/00 , G01R31/305
摘要： A charged particle beam system for measuring a sample such as a photomask is provided. The system is capable of adjusting its condition with high accuracy to measure the sample even when a back surface of the sample is charged. The charged particle beam system measures an electric potential distribution on the back surface of the sample during a process for transporting the sample. The system controls the degree of charge neutralization of the sample based on the result of the measurement, or estimates or calculates an electric potential distribution appearing on a front surface of the sample and obtained when the sample is placed on the sample holder or the like. The system is capable of measuring or inspecting the sample such as a photomask at high speed and with high accuracy even when the sample has a large amount of charges accumulated on its surface different from its pattern surface.
摘要翻译： 提供了用于测量诸如光掩模的样品的带电粒子束系统。 该系统能够以高精度调整其状态，即使在样品的背面被充电时也可以测量样品。 带电粒子束系统在传送样品的过程中测量样品背面上的电位分布。 该系统基于测量结果控制样品的电荷中和度，或者估计或计算出现在样品前表面上的电位分布，并将样品放置在样品架上等时获得。 该系统能够即使在样品具有与其图案表面不同的表面上积累的大量电荷时，也可以高精度，高精度地测量或检查诸如光掩模的样品。
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公开(公告)号：US07737416B2
公开(公告)日：2010-06-15
申请号：US12038179
申请日：2008-02-27
申请人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
发明人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
IPC分类号： G01B15/00 , H01L21/677
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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3.发明申请METHOD FOR MEASURING ELECTRIC POTENTIAL ON SAMPLE, AND CHARGED PARTICLE BEAM SYSTEM 有权用于测量样品电荷和充电颗粒束系统的方法公开(公告)号：US20090224749A1
公开(公告)日：2009-09-10
申请号：US12396579
申请日：2009-03-03
摘要： A charged particle beam system for measuring a sample such as a photomask is provided. The system is capable of adjusting its condition with high accuracy to measure the sample even when a back surface of the sample is charged. The charged particle beam system measures an electric potential distribution on the back surface of the sample during a process for transporting the sample. The system controls the degree of charge neutralization of the sample based on the result of the measurement, or estimates or calculates an electric potential distribution appearing on a front surface of the sample and obtained when the sample is placed on the sample holder or the like. The system is capable of measuring or inspecting the sample such as a photomask at high speed and with high accuracy even when the sample has a large amount of charges accumulated on its surface different from its pattern surface.
摘要翻译： 提供了用于测量诸如光掩模的样品的带电粒子束系统。 该系统能够以高精度调整其状态，即使在样品的背面被充电时也可以测量样品。 带电粒子束系统在传送样品的过程中测量样品背面上的电位分布。 该系统基于测量结果控制样品的电荷中和度，或者估计或计算出现在样品前表面上的电位分布，并将样品放置在样品架上等时获得。 该系统能够即使在样品具有与其图案表面不同的表面上积累的大量电荷时，也可以高精度，高精度地测量或检查诸如光掩模的样品。
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公开(公告)号：US20110198512A1
公开(公告)日：2011-08-18
申请号：US13125586
申请日：2009-10-15
IPC分类号： G21K5/08
CPC分类号： H01J37/28 , H01J37/20 , H01J2237/0206 , H01J2237/022 , H01J2237/2003 , H01J2237/24578 , H01J2237/24592 , H01J2237/2817 , H01L21/67739
摘要： An object of the invention is to provide a charged corpuscular beam apparatus which is equipped with a static elimination mechanism suitable for eliminating electric charges deposited on front and back surfaces of a specimen. To achieve the foregoing object, there is proposed a static elimination mechanism which includes a first ionizer for eliminating electric charges from the front surface of the specimen, and a second ionizer for eliminating electric charges from the back surface of the specimen. The first and second ionizers are disposed in a mini-environment, and are arranged along a downflow in the mini-environment. A specimen carrying mechanism is disposed so that the specimen can pass between the two ionizers.
摘要翻译： 本发明的一个目的是提供一种装有静电消除机构的带电红细胞束装置，该静电消除机构适于消除沉积在试样前表面和后表面上的电荷。 为了实现上述目的，提出了一种静电消除机构，其包括：用于从试样前表面除去电荷的第一离子发生器和用于消除试样背面电荷的第二离子发生器。 第一和第二离子发生器设置在迷你环境中，并沿微型环境中的下流布置。 设置样本运送机构，使样本能够在两个电离器之间通过。
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公开(公告)号：US20110142578A1
公开(公告)日：2011-06-16
申请号：US13057602
申请日：2009-07-29
IPC分类号： B65G49/06 , H01L21/677
CPC分类号： H01J37/20 , H01J2237/2007 , H01J2237/20221 , H01L21/67742
摘要： A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism.
摘要翻译： 样品输送机构最小化特别是通过光掩模代表的样品损坏的风险，并且样品输送机构提供用于保持样品以便悬挂的样品保持机构，并且被配置为使得靠近图案表面的部分 样品与用于悬挂样品的凸缘的突出部分分离，从而阻止图案表面和构成输送机构的构件之间的接触。
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公开(公告)号：US08585112B2
公开(公告)日：2013-11-19
申请号：US13057602
申请日：2009-07-29
IPC分类号： B25J15/10 , H01L21/677
CPC分类号： H01J37/20 , H01J2237/2007 , H01J2237/20221 , H01L21/67742
摘要： A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism.
摘要翻译： 样品输送机构最小化特别是通过光掩模代表的样品损坏的风险，并且样品输送机构提供用于保持样品以便悬挂的样品保持机构，并且被配置为使得靠近图案表面的部分 样品与用于悬挂样品的凸缘的突出部分分离，从而阻止图案表面和构成输送机构的构件之间的接触。
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公开(公告)号：US08173971B2
公开(公告)日：2012-05-08
申请号：US12788037
申请日：2010-05-26
申请人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
发明人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
IPC分类号： G01B15/00 , H01L21/677
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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公开(公告)号：US20100230592A1
公开(公告)日：2010-09-16
申请号：US12788037
申请日：2010-05-26
申请人： Takashi GUNJI , Hidetoshi Sato , Katsuya Kawakami , Hideko Yatabe
发明人： Takashi GUNJI , Hidetoshi Sato , Katsuya Kawakami , Hideko Yatabe
IPC分类号： H01J37/20 , H01J37/28 , H01J37/18 , H01L21/677 , H01L21/673
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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公开(公告)号：US20080203302A1
公开(公告)日：2008-08-28
申请号：US12038179
申请日：2008-02-27
申请人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
发明人： Takashi Gunji , Hidetoshi Sato , Katsuya Kawakami , Hideki Yatabe
IPC分类号： G01B15/00 , H01L21/677
CPC分类号： H01L21/67769 , H01J37/20 , H01J37/28 , H01J2237/201 , H01J2237/204 , H01J2237/2816 , H01J2237/2817 , H01L21/67236 , H01L21/67259 , H01L21/67742
摘要： There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.
摘要翻译： 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。
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