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公开(公告)号：US07766341B2
公开(公告)日：2010-08-03
申请号：US11631156
申请日：2005-03-23
申请人： Katsuya Okumura , Shoichi Kitagawa , Shigenobu Itoh , Kazuhiro Sugata , Kazuhiro Arakawa , Hiroshi Tomita
发明人： Katsuya Okumura , Shoichi Kitagawa , Shigenobu Itoh , Kazuhiro Sugata , Kazuhiro Arakawa , Hiroshi Tomita
CPC分类号： F16J15/106 , F16J15/104
摘要： A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retaining surface 121, a second retaining surface 122, and a circumferential surface 123. The sealing member 510 includes a first surface 511 in contact with the first retaining surface 121, a second surface 512 in contact with the retaining surface 122, and an inner surface 513 located inside the seal holding part 510 and tapered to have a diameter becoming smaller from the first surface 511 side to the second surface 512 side. An engagement portion 515 engaged in the seal holding part 120 is formed protruding from an outer surface 514 located on the circumferential surface 123 side and on the first surface 511 side. When the sealing member 510 is fitted in the seal holding part 120 while the engagement portion 515 is pressed, the sealing member 510 is placed such that the inner surface 513 on the first surface 511 side protrudes inward and the outer surface 514 is in contact with the circumferential surface 123.
摘要翻译： 其中装配在密封保持部分120中的密封构件510弹性变形以密封流路连接部分的密封结构。 密封保持部分120在流动通道侧开口并且包括第一保持表面121，第二保持表面122和周向表面123.密封构件510包括与第一保持表面121接触的第一表面511， 与保持表面122接触的第二表面512和位于密封保持部510内的内表面513，并且具有从第一表面511侧到第二表面512侧的直径变小的锥形。 接合在密封保持部120中的接合部515从位于圆周表面123侧和第一表面511侧的外表面514形成。 当密封构件510在接合部分515被按压时装配在密封保持部分120中时，密封构件510被放置成使得第一表面511侧的内表面513向内突出，并且外表面514与 圆周表面123。
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公开(公告)号：US20080111321A1
公开(公告)日：2008-05-15
申请号：US11631156
申请日：2005-03-23
申请人： Katsuya Okumura , Shoichi Kitagawa , Shigenobu Itoh , Kazuhiro Sugata , Kazuhiro Arakawa , Hiroshi Tomita
发明人： Katsuya Okumura , Shoichi Kitagawa , Shigenobu Itoh , Kazuhiro Sugata , Kazuhiro Arakawa , Hiroshi Tomita
IPC分类号： F16J15/10
CPC分类号： F16J15/106 , F16J15/104
摘要： A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retaining surface 121, a second retaining surface 122, and a circumferential surface 123. The sealing member 510 includes a first surface 511 in contact with the first retaining surface 121, a second surface 512 in contact with the retaining surface 122, and an inner surface 513 located inside the seal holding part 510 and tapered to have a diameter becoming smaller from the first surface 511 side to the second surface 512 side. An engagement portion 515 engaged in the seal holding part 120 is formed protruding from an outer surface 514 located on the circumferential surface 123 side and on the first surface 511 side. When the sealing member 510 is fitted in the seal holding part 120 while the engagement portion 515 is pressed, the sealing member 510 is placed such that the inner surface 513 on the first surface 511 side protrudes inward and the outer surface 514 is in contact with the circumferential surface 123.
摘要翻译： 其中装配在密封保持部分120中的密封构件510弹性变形以密封流路连接部分的密封结构。 密封保持部分120在流动通道侧开口并且包括第一保持表面121，第二保持表面122和周向表面123。 密封构件510包括与第一保持表面121接触的第一表面511，与保持表面122接触的第二表面512和位于密封保持部510内部的锥形以使直径变小的内表面513 从第一表面511侧到第二表面512侧。 接合在密封保持部120中的接合部515从位于圆周表面123侧和第一表面511侧的外表面514形成。 当密封构件510在接合部分515被按压时装配在密封保持部分120中时，密封构件510被放置成使得第一表面511侧的内表面513向内突出，并且外表面514与 圆周表面123。
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公开(公告)号：US07942647B2
公开(公告)日：2011-05-17
申请号：US11665983
申请日：2005-09-26
CPC分类号： F04B43/06
摘要： An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a pin 24 that protrudes toward the diaphragm 23 is provided in a position that is offset from the center of the wall surface 22c. When the diaphragm 23 is deformed toward the operating chamber 26 by the suction of an operation air into the operating chamber 26 during drawing in the chemical liquid, a part of the diaphragm 23 opposing to the pin 24 rides on the pin 24 and this part becomes a slightly convex shape toward the pump chamber 25. When the operation air is supplied from the opening 22d into the operating chamber 26 during the discharge of the chemical liquid, the deformation begins first from the part of the diaphragm 23 riding on the pin 24.
摘要翻译： 供给/取出通道22b的开口22d位于操作室26（凹部区域22a）的内壁面22c的中央部，并且朝向隔膜23突出的销24设置在 偏离壁表面22c的中心。 当隔膜23在吸入化学液体期间通过将操作空气吸入操作室26而朝向操作室26变形时，与销24相对的隔膜23的一部分骑在销24上，并且该部分变为 朝向泵室25的稍凸起的形状。当在排出化学液体期间从开口22d向操作室26供给操作空气时，变形首先从隔膜23的一部分在销24上开始。
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公开(公告)号：US20080089794A1
公开(公告)日：2008-04-17
申请号：US11665983
申请日：2005-09-26
IPC分类号： F04B43/06
CPC分类号： F04B43/06
摘要： An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a pin 24 that protrudes toward the diaphragm 23 is provided in a position that is offset from the center of the wall surface 22c. When the diaphragm 23 is deformed toward the operating chamber 26 by the suction of an operation air into the operating chamber 26 during drawing in the chemical liquid, a part of the diaphragm 23 opposing to the pin 24 rides on the pin 24 and this part becomes a slightly convex shape toward the pump chamber 25. When the operation air is supplied from the opening 22d into the operating chamber 26 during the discharge of the chemical liquid, the deformation begins first from the part of the diaphragm 23 riding on the pin 24.
摘要翻译： 供给/取出通道22b的开口22d位于操作室26的内壁表面22c的中心部分（凹入区域22a）处，并且向隔膜23突出的销24设置在 从壁面22c的中心偏移的位置。 当隔膜23在吸入化学液体期间通过将操作空气吸入操作室26而朝向操作室26变形时，与销24相对的隔膜23的一部分骑在销24上，并且该部分变为 朝向泵室25的略呈凸起的形状。当在排出化学液体期间将操作空气从开口22d供应到操作室26中时，变形首先从隔膜23的一部分上穿过销24 。
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公开(公告)号：US20070297927A1
公开(公告)日：2007-12-27
申请号：US11665969
申请日：2005-07-29
IPC分类号： F04B43/073
CPC分类号： F04B43/073
摘要： An opening 22d of a supply/withdrawal passage 22b is positioned at the center part of the internal wall surface 22c of the operating chamber 26 (concave area 22a), and a cross-shaped venting groove 22e extending from the opening 22d of the passage 22b to the periphery of the wall surface 22c is formed in the wall surface 22c. Thus, an operating air in the chamber 26 is discharged (sucked) through the passage 22b during drawing in the chemical liquid. Since the opening 22d communicates with the venting groove 22e extending to the periphery of the chamber 26, if the center of the diaphragm 23 covers the opening 22d first, the operating air in the chamber 26 can be continuously evacuated (drew out) from the venting groove 22e positioned on the outside of the center part which first comes into contact with the opening 22d
摘要翻译： 供给/取出通路22b的开口部22d位于操作室26（凹部区域22a）的内壁面22c的中央部，以及从开口部延伸的十字形排气槽22e 在墙壁表面22c中形成通道22b的壁面22c的周边22d。 因此，在抽取化学液体期间，室26中的操作空气通过通道22b被排出（吸入）。 由于开口22d与延伸到室26的周边的排气槽22e连通，如果隔膜23的中心首先覆盖开口22d，则室26中的操作空气可以被连续抽出（抽出） 从位于中心部分的外部的通风槽22e首先与开口22d接触
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公开(公告)号：US07988429B2
公开(公告)日：2011-08-02
申请号：US11659727
申请日：2005-07-29
CPC分类号： F04F1/06 , F04B43/073 , Y10T137/3124
摘要： A chemical liquid supply system that prevents the generation of heat during operation in a pump and allows downsizing the discharge pump for instilling a chemical liquid from a tip nozzle. Compressed air is supplied to an upper space of a resist bottle and the chemical liquid is conferred positive pressure and sent out to a pump chamber of a discharge pump, thereby the pump chamber is filled with a resist liquid. This eliminates the need of a conventional construction where a spring or others are used to drive a flexible membrane of the discharge pump to the operation chamber side to take in the resist liquid. As a result, no electric motor is used, so there is obviously no risk of heat damage to a semiconductor wafer and the discharge pump itself can be further downsized.
摘要翻译： 一种化学液体供应系统，其防止在泵中操作期间产生热量并且允许排气泵小型化以从尖端喷嘴滴入化学液体。 将压缩空气供给到抗蚀剂瓶的上部空间，并将化学液体赋予正压，并送出到排出泵的泵室，由此泵室中填充有抗蚀剂液体。 这消除了使用弹簧等来驱动排出泵的柔性膜到操作室侧以吸收抗蚀剂液体的常规结构的需要。 结果，不使用电动机，因此显然没有对半导体晶片的热损伤的风险，并且可以进一步减小排出泵本身的尺寸。
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公开(公告)号：US20070267065A1
公开(公告)日：2007-11-22
申请号：US11659727
申请日：2005-07-29
CPC分类号： F04F1/06 , F04B43/073 , Y10T137/3124
摘要： A chemical liquid supply system that prevents the generation of heat during operation in a pump and allows downsizing the discharge pump for instilling a chemical liquid from a tip nozzle. Compressed air is supplied to an upper space of a resist bottle and the chemical liquid is conferred positive pressure and sent out to a pump chamber of a discharge pump, thereby the pump chamber is filled with a resist liquid. This eliminates the need of a conventional construction where a spring or others are used to drive a flexible membrane of the discharge pump to the operation chamber side to take in the resist liquid. As a result, no electric motor is used, so there is obviously no risk of heat damage to a semiconductor wafer and the discharge pump itself can be further downsized.
摘要翻译： 一种化学液体供应系统，其防止在泵中操作期间产生热量并且允许排气泵小型化以从尖端喷嘴滴入化学液体。 将压缩空气供给到抗蚀剂瓶的上部空间，并将化学液体赋予正压，并送出到排出泵的泵室，由此泵室中填充有抗蚀剂液体。 这消除了使用弹簧等来驱动排出泵的柔性膜到操作室侧以吸收抗蚀剂液体的常规结构的需要。 结果，不使用电动机，因此显然没有对半导体晶片的热损伤的风险，并且可以进一步减小排出泵本身的尺寸。
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公开(公告)号：US07090190B2
公开(公告)日：2006-08-15
申请号：US11188635
申请日：2005-07-26
IPC分类号： F16K31/363 , F16K51/00
CPC分类号： F16K31/1245 , F16K1/523 , F16K7/17
摘要： There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, bringing a diaphragm into close contact with a valve seat. In this state, when compressed air is supplied into a pilot chamber, moving the piston, the diaphragm is brought out of contact with the valve seat. Then, the piston comes into contact with a nut and the diaphragm is stopped providing a fixed clearance between the diaphragm and the valve seat. An opened state is established. Of course, the nut can be moved to any desired position by means of a serve motor or the like, so that a position at which the piston comes into contact with the nut can be changed.
摘要翻译： 公开了一种流量控制阀，其通过在打开状态下通过接触确定活塞的停止位置来调节流量，并且能够进行远程和高精度的流量调节。 在关闭状态下，复位弹簧的作用力作用在活塞上，使隔膜与阀座紧密接触。 在这种状态下，当压缩空气被供应到先导室中时，移动活塞，隔膜与阀座脱离接触。 然后，活塞与螺母接触，隔膜停止，在隔膜和阀座之间提供固定间隙。 建立了一个开放的状态。 当然，也可以通过伺服马达等将螺母移动到任意的位置，从而可以改变活塞与螺母接触的位置。
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9.发明授权Assembling structure of actuator part of fluid control valve, and fluid control valve formed with the structure 有权流体控制阀执行器部件的组装结构以及结构形成的流体控制阀公开(公告)号：US08839808B2
公开(公告)日：2014-09-23
申请号：US12914175
申请日：2010-10-28
IPC分类号： F16K31/00 , F16K31/122
CPC分类号： F16K31/1221 , Y10T137/0497 , Y10T137/598 , Y10T137/6116
摘要： In an assembling structure of an actuator part of a chemical liquid valve, a cover is formed with a protrusion extending in a radial direction of a valve element, and a cylinder is formed with an engagement part engageable with the protrusion. A cover is placed to hold a spring in a compressed state in the cylinder and make a cap part cover an opening of the cylinder. The protrusion and the engagement part are engaged with each other to integrally connect the cylinder and the cover without separating from each other.
摘要翻译： 在化学液体阀的致动器部件的组装结构中，盖形成有沿阀元件的径向延伸的突起，并且气缸形成有与突起接合的接合部。 放置一个盖子以将压缩状态的弹簧保持在气缸中，并使盖部分覆盖气缸的开口。 突起和接合部分彼此接合以将气缸和盖体一体地连接，而不会彼此分离。
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公开(公告)号：US20140158230A1
公开(公告)日：2014-06-12
申请号：US14233278
申请日：2012-08-20
CPC分类号： F16K23/00 , F16K7/17 , F16K15/185 , F16K17/048 , Y10T137/7924
摘要： In a liquid drip prevention valve, an input port is formed in the upper face of a flow passage block, and an output port is formed in the lower face, which opposes the upper face of the flow passage block. In addition, a valve chamber is formed on a side face of the flow passage block, and an air block abuts the side face. Furthermore, a diaphragm valve makes contact with a valve seat when pressure is applied with respect to a back side chamber of the diaphragm valve and separates from the valve seat when the back side chamber is brought to negative pressure, thus forming the liquid drip prevention valve.
摘要翻译： 在液体防滴阀中，在流路块的上表面形成有输入口，在与流路块的上表面相对的下表面形成有输出口。 此外，在流路块的侧面形成有阀室，空气块与侧面抵接。 此外，当隔膜阀相对于隔膜阀的后侧室施加压力时，隔膜阀与阀座接触，并且当后侧室处于负压时与阀座分离，从而形成防液阀 。
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