公开(公告)号：US06457366B1

公开(公告)日：2002-10-01

申请号：US09540051

申请日：2000-03-31

申请人： Kazuhiko Hidaka ,  Kaoru Matsuki ,  Kiyokazu Okamoto

发明人： Kazuhiko Hidaka ,  Kaoru Matsuki ,  Kiyokazu Okamoto

IPC分类号： G01N2900

CPC分类号： G01B21/04 ,  G01B5/012 ,  G01B7/004 ,  G01B7/012

摘要： A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body (23) which moves a contact-type vibrating probe (100) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector (5) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller (31) for controlling movement of the support body (23) so that change in state quantity of a detection signal detected by the detector is constant.

摘要翻译： 提供接触式振动探针的移动控制机构，其中接触式振动探头可用作测量的探头，可以高精度地测量工件的连续测量和构造。 用于控制移动具有高检测精度的接触式振动探针（100）的支撑体（23）的移动的移动控制机构包括：用于使触针沿轴向振动的振动器，用于检测振动的检测器（5） 所述第二振动器用于使所述触针在与所述工件的端面大致平行的方向上振动;以及控制器，用于控制所述支撑体（23）的移动，使得所述触针的状态量变化 由检测器检测到的检测信号是恒定的。

公开(公告)号：US06848315B2

公开(公告)日：2005-02-01

申请号：US10075650

申请日：2002-02-14

申请人： Kaoru Matsuki ,  Kazuhiko Hidaka ,  Kiyokazu Okamoto

发明人： Kaoru Matsuki ,  Kazuhiko Hidaka ,  Kiyokazu Okamoto

IPC分类号： G01B7/00 ,  G01B21/00 ,  G01D5/20 ,  G01H9/00 ,  G01H11/02 ,  G01H11/04 ,  G01B5/016

CPC分类号： G01D5/2086 ,  G01B7/003

摘要： A stylus structure (40) integrally incorporating a stylus (2), a vibrator (4), a detector (6), a first secondary magnetic circuit (12) and a second primary magnetic circuit (21), and a stylus support (30) integrally incorporating a first primary magnetic circuit (11) and a second secondary magnetic circuit (22) are mutually fittable, thereby achieving signal transmission by the respective magnetic circuits using no electrical contact.

摘要翻译： 一体地结合有触针（2），振动器（4），检测器（6），第一次级磁路（12）和第二主磁路（21）的触针结构（40）和触控笔支架 ）与第一主磁路（11）和第二次级磁路（22）整合成相互配合，从而通过不使用电接触的各个磁路实现信号传输。

公开(公告)号：US06307084B1

公开(公告)日：2001-10-23

申请号：US09477948

申请日：2000-01-05

申请人： Kaoru Matsuki ,  Kiyokazu Okamoto ,  Kazuhiko Hidaka

发明人： Kaoru Matsuki ,  Kiyokazu Okamoto ,  Kazuhiko Hidaka

IPC分类号： G01B7012

CPC分类号： G01B7/012

摘要： A contact location detecting mechanism (1) of a touch signal probe (10) includes a rotary motion generator (30) for scanningly moving a stylus (102) on a plane (A), a phase value detector (50) for detecting a phase value (&thgr;) indicating a rotation position of the scanning rotary motion, and a contact location detector (70)for detecting a contact location of a contact portion (102A) based on a detection signal value (V) detected by the detector (103B) and the phase value (&thgr;). Since the contact location of the contact portion (102A) can be detected by the contact location detector (70), the touch signal probe (10) can be used for a profiling measurement and continuous measurement of a workpiece.

摘要翻译： 触摸信号探针（10）的接触位置检测机构（1）包括用于扫描地在平面（A）上移动触针（102）的旋转运动发生器（30），用于检测相位 指示扫描旋转运动的旋转位置的值（theta），以及用于基于由检测器（103B）检测到的检测信号值（V）检测接触部分（102A）的接触位置的接触位置检测器（70） 和相位值（theta）。 由于接触部分（102A）的接触位置可以由接触位置检测器（70）检测，所以触摸信号探针（10）可用于对工件进行测量和连续测量。

公开(公告)号：US20050076522A1

公开(公告)日：2005-04-14

申请号：US10614203

申请日：2003-07-08

申请人： Kaoru Matsuki ,  Kazuhiko Hidaka

发明人： Kaoru Matsuki ,  Kazuhiko Hidaka

IPC分类号： G01B21/20 ,  G01B5/28 ,  G01B7/28 ,  G01B21/30 ,  G01B5/20

CPC分类号： G01B5/28 ,  G01B7/28 ,  G01B21/30

摘要： A surface profile measuring instrument for measuring a surface profile of a workpiece has: a probe having a stylus provided with a measuring portion for measuring a surface of a workpiece at a tip end thereof and a detector for outputting a detection signal which varies depending on a measurement condition between the surface of the workpiece and the measuring portion; a scanning mechanism for relatively moving the measuring portion along the surface of the workpiece; a memory (46) that stores a position information of the contact portion when the detection signal reaches a predetermined reference signal value; a vibration inclination angle calculator (51) that calculates a response variation factor (vibration inclination angle θ) that applies variation to the detection signal from the surface of the workpiece; and a profile processor (53) that corrects the position information to obtain an actual profile of the surface of the workpiece using the response variation factor.

摘要翻译： 用于测量工件的表面轮廓的表面轮廓测量仪具有：具有触针的探针，其具有测量部分，用于测量其尖端处的工件的表面;以及检测器，用于输出检测信号，该检测信号根据 工件表面与测量部分之间的测量条件; 扫描机构，用于使所述测量部分沿着所述工件的表面相对移动; 存储器（46），当所述检测信号达到预定的参考信号值时，存储所述接触部分的位置信息; 振动倾斜角计算器，计算对来自工件表面的检测信号的变化的响应变化系数（振动倾斜角θ）; 以及轮廓处理器（53），其使用所述响应变化因子来校正所述位置信息以获得所述工件的表面的实际轮廓。

公开(公告)号：US06516669B2

公开(公告)日：2003-02-11

申请号：US09855986

申请日：2001-05-15

申请人： Kaoru Matsuki ,  Kazuhiko Hidaka ,  Masanori Arai

发明人： Kaoru Matsuki ,  Kazuhiko Hidaka ,  Masanori Arai

IPC分类号： G01B5016

CPC分类号： G01B7/016 ,  B23Q17/20

摘要： A stylus 20 is mounted directly on detector 32 and the detector 32 is mounted directly on a holder 10. Thus, an vibration-type contact detection sensor 1 is formed in a state in which the holder 10 and the stylus 20 are placed out of contact with each other and the stylus 20 and the detector 32 are placed in contact with each other. Therefore, attenuation of vibration and status change of the stylus 20 by the holder 10 can be circumvented and vibration and status change of the stylus 20 can be propagated directly to the detector 32, so that the detector 32 can detect vibration and status change of the stylus 20 with high sensitivity, and contact with a workpiece can be detected with high sensitivity.

公开(公告)号：US07100429B2

公开(公告)日：2006-09-05

申请号：US10614203

申请日：2003-07-08

申请人： Kaoru Matsuki ,  Kazuhiko Hidaka

发明人： Kaoru Matsuki ,  Kazuhiko Hidaka

IPC分类号： G01B5/20

CPC分类号： G01B5/28 ,  G01B7/28 ,  G01B21/30

摘要： A surface profile measuring instrument for measuring a surface profile of a workpiece has: a probe having a stylus provided with a measuring portion for measuring a surface of a workpiece at a tip end thereof and a detector for outputting a detection signal which varies depending on a measurement condition between the surface of the workpiece and the measuring portion; a scanning mechanism for relatively moving the measuring portion along the surface of the workpiece; a memory (46) that stores a position information of the contact portion when the detection signal reaches a predetermined reference signal value; a vibration inclination angle calculator (51) that calculates a response variation factor (vibration inclination angle θ) that applies variation to the detection signal from the surface of the workpiece; and a profile processor (53) that corrects the position information to obtain an actual profile of the surface of the workpiece using the response variation factor.

摘要翻译： 用于测量工件的表面轮廓的表面轮廓测量仪具有：具有触针的探针，其具有测量部分，用于测量其尖端处的工件的表面;以及检测器，用于输出检测信号，该检测信号根据 工件表面与测量部分之间的测量条件; 扫描机构，用于使所述测量部分沿着所述工件的表面相对移动; 存储器（46），当所述检测信号达到预定的参考信号值时，存储所述接触部分的位置信息; 振动倾斜角计算器，计算对来自工件表面的检测信号的变化的响应变化系数（振动倾斜角θ）; 以及轮廓处理器（53），其使用所述响应变化因子来校正所述位置信息以获得所述工件的表面的实际轮廓。

公开(公告)号：US08198786B2

公开(公告)日：2012-06-12

申请号：US13020711

申请日：2011-02-03

申请人： Kaoru Matsuki

发明人： Kaoru Matsuki

IPC分类号： H02N2/04 ,  H02N1/00

CPC分类号： H02N2/025

摘要： An inertial driving actuator includes a fixing member, a moving element that is fixed to the fixing member and generates a small displacement by extension and contraction, an oscillation substrate that is fixed to the moving element and is moved linearly reciprocally by the small displacement, and a moving body that is moved by reciprocal movement of the oscillation substrate. The moving body has a first electrode. The oscillation substrate has a second electrode, the area of the facing portion of the second electrode and the first electrode changing continuously as the moving body moves. The actuator further includes a frictional force controller that controls a frictional force generated between the oscillation substrate and moving body, and a position detector that detects the position of the moving body on the basis of the electrostatic capacitance of the facing portion of the first electrode and the second electrode.

摘要翻译： 惯性驱动致动器包括固定构件，固定到固定构件并通过伸缩收缩而产生小位移的移动元件，固定到移动元件并通过小位移线性往复运动的振荡基板，以及 通过振荡基板的往复运动而移动的移动体。 移动体具有第一电极。 振荡基板具有第二电极，第二电极的对置部分的区域和第一电极随着移动体移动而连续变化。 致动器还包括：摩擦力控制器，其控制在振荡基板和移动体之间产生的摩擦力;以及位置检测器，其基于第一电极的相对部分的静电电容检测移动体的位置;以及 第二电极。

公开(公告)号：US07911114B2

公开(公告)日：2011-03-22

申请号：US11443637

申请日：2006-05-31

申请人： Kaoru Matsuki

发明人： Kaoru Matsuki

IPC分类号： H01L41/04 ,  H02N2/04 ,  H02N1/04

CPC分类号： H02N1/004 ,  G02B7/102

摘要： An impact drive actuator comprises a fixing member, a vibrator, a vibrating member, a movable body, a drive circuit, and a friction adjustment section. The friction adjustment section includes a first electrode disposed on a surface of the movable body that faces the vibrating member and a second electrode disposed on a surface of the vibrating member that faces the movable body and electrically isolated from the first electrode. An electrostatic force is caused to act between the first and second electrodes to change an electrostatic force between the vibrating member and movable body so as to change the frictional force acting between the movable body and vibrating member.

摘要翻译： 冲击驱动致动器包括固定构件，振动器，振动构件，可动体，驱动电路和摩擦调节部。 所述摩擦调整部包括设置在所述可动体的面向所述振动部件的表面上的第一电极和设置在所述振动部件的面向所述可动体的表面并与所述第一电极电隔离的第二电极。 使静电力作用在第一和第二电极之间，以改变振动件和可移动体之间的静电力，从而改变作用在可移动体和振动件之间的摩擦力。

公开(公告)号：US20090007561A1

公开(公告)日：2009-01-08

申请号：US12167750

申请日：2008-07-03

申请人： Kaoru Matsuki

发明人： Kaoru Matsuki

IPC分类号： F01B29/00

CPC分类号： F03G7/065 ,  F05B2270/303

摘要： To provide a position control method for a shape memory alloy actuator that improves positioning accuracy of the actuator while ensuring satisfactory response until achieving positioning, the method includes a commanded resistance value setting step of setting a commanded resistance value that corresponds to the predetermined length, a resistance value measurement step of measuring the value of resistance, a resistance value comparison step of comparing the commanded resistance value and the measured resistance value, a first control step of controlling the length of the shape memory alloy using a first gain based on the result of comparison until the commanded resistance value is reached, a termination determination step of making a determination as to a condition for terminating the first control step, and a second control step of keeping the moving body stationary, upon determination of termination in the termination determination step, by retaining the length of the shape memory alloy using a second gain smaller than the first gain based on the result of the comparison, wherein the second control step is continued until a commanded resistance value is set again, thereby performing position control of the moving body.

摘要翻译： 为了提供形状记忆合金致动器的位置控制方法，其提高致动器的定位精度，同时确保到达定位之前的满意的响应，该方法包括：指令电阻值设定步骤，设定与预定长度对应的指令电阻值， 电阻值测量步骤，测量电阻值的电阻值比较步骤，比较指令电阻值和测量电阻值的电阻值比较步骤，基于第一增益的结果控制形状记忆合金的长度的第一控制步骤 比较直到达到指定的电阻值，终止确定步骤，确定终止第一控制步骤的条件;以及第二控制步骤，在确定终止确定步骤中的终止时，保持移动体静止; 通过保留形状记忆的长度 使用基于比较结果的小于第一增益的第二增益，其中继续第二控制步骤直到再次设定指令电阻值，从而执行移动体的位置控制。

公开(公告)号：US07462975B2

公开(公告)日：2008-12-09

申请号：US11880202

申请日：2007-07-20

申请人： Kaoru Matsuki

发明人： Kaoru Matsuki

IPC分类号： H01L41/08

CPC分类号： H02N2/025

摘要： An actuator includes a vibrating substrate having a first electrode on a surface thereof and configured to be reciprocally moved according to a minute displacement of a vibrator, a moving body arranged on the surface of a vibrating substrate and having a second electrode on a surface thereof which faces the first electrode with an insulating layer disposed therebetween, and a controller configured to move the moving body by applying voltage between the first and second electrodes to exert electrostatic adsorptive force therebetween and controlling frictional force between the vibrating substrate and the moving body. The actuator further includes an electric field reduction area configured to shield an electric field occurring between the first and second electrodes by the voltage applied therebetween in a portion which lies outside the first electrode on the surface of the vibrating substrate and faces the moving body.

摘要翻译： 致动器包括：振动基板，其表面上具有第一电极，并且构造成根据振动器的微小位移往复移动，移动体布置在振动基板的表面上，并且在其表面上具有第二电极， 面对具有设置在其间的绝缘层的第一电极，以及控制器，被配置为通过在第一和第二电极之间施加电压来移动移动体，以在其间施加静电吸附力并控制振动衬底和移动体之间的摩擦力。 所述致动器还包括电场减小区域，所述电场减少区域被配置为通过施加在所述第一和第二电极之间的电压来屏蔽位于所述振动衬底的所述表面上的所述第一电极外侧并面向所述移动体的部分中的电压。