公开(公告)号：US4848879A

公开(公告)日：1989-07-18

申请号：US63788

申请日：1987-06-22

申请人： Yukuo Nishimura ,  Yuko Miyajima ,  Kazuo Minoura ,  Takeshi Baba ,  Kazuhiko Matsuoka ,  Masayuki Usui ,  Atsushi Someya

发明人： Yukuo Nishimura ,  Yuko Miyajima ,  Kazuo Minoura ,  Takeshi Baba ,  Kazuhiko Matsuoka ,  Masayuki Usui ,  Atsushi Someya

IPC分类号： G02F1/01 ,  G06K15/12

CPC分类号： G02F1/0147 ,  G06K15/1252 ,  G06K15/1257 ,  G06K15/129

摘要： This specification discloses a light modulating device comprising a liquid medium whose physical properties are variable by heat, and a heat-generating element for heating the liquid medium to such a degree that boiling does not occur to the liquid medium. The specification also discloses a light modulation apparatus comprising a liquid medium whose physical properties are variable by heat, a heat-generating element for heating the liquid medium to such a degree that boiling does not occur to the liquid medium, and a optical system for taking out one of a light flux modulated by the variation in physical properties of the liquid medium and a light flux not modulated by said variation from a state in which the light fluxes are mixedly present.

摘要翻译： 本说明书公开了一种光调制装置，其特征在于，具有通过热量物理性质变化的液体介质的光调制装置，以及用于将液体介质加热至液体介质不发生沸腾的程度的发热元件。 本说明书还公开了一种光调制装置，其特征在于，具有通过热量物理性质变化的液体介质，用于将液体介质加热到不会发生液体介质的程度的发热元件，以及用于摄取的光学系统 通过液体介质的物理变化的变化调制的光通量中的一种以及不被所述变化调制的光束与光束混合存在的状态。

公开(公告)号：US4729641A

公开(公告)日：1988-03-08

申请号：US45184

申请日：1987-04-30

申请人： Kazuhiko Matsuoka ,  Kazuo Minoura ,  Masayuki Usui ,  Yukuo Nishimura ,  Takeshi Baba ,  Atsushi Someya ,  Yuko Suga ,  Kazuyo Matsumoto

发明人： Kazuhiko Matsuoka ,  Kazuo Minoura ,  Masayuki Usui ,  Yukuo Nishimura ,  Takeshi Baba ,  Atsushi Someya ,  Yuko Suga ,  Kazuyo Matsumoto

IPC分类号： G02F1/01 ,  G02F1/133 ,  G02F1/1335 ,  G02F1/29 ,  G02F1/13

CPC分类号： G02F1/132 ,  G02F1/0147 ,  G02F1/1335 ,  G02F1/29 ,  G02F2001/294 ,  G02F2201/305

摘要： A functional optical element comprises a first optical member, a second optical member provided in contact with said first optical member, the interface between said first optical member and said second optical member being non-flat planar, a means for changing the refractive index of said second optical member, said means for changing refractive index being capable of creating selectively a first state in which said first optical member and said second optical member have an equal refractive index and a second state in which said first optical member and said second optical member have different refractive indices by changing the refractive index of said second optical member.

摘要翻译： 功能性光学元件包括第一光学构件，与所述第一光学构件接触设置的第二光学构件，所述第一光学构件和所述第二光学构件之间的界面是非平坦平面的，用于改变所述第一光学构件的折射率的装置 第二光学构件，所述用于改变折射率的装置能够选择性地产生所述第一光学构件和所述第二光学构件具有相等折射率的第一状态和第二状态，其中所述第一光学构件和所述第二光学构件具有 通过改变所述第二光学构件的折射率来实现不同的折射率。

公开(公告)号：US4865426A

公开(公告)日：1989-09-12

申请号：US290806

申请日：1988-12-23

申请人： Kazuhiko Matsuoka ,  Masayuki Usui ,  Kazuo Minoura ,  Takeshi Baba ,  Atsushi Someya ,  Yukuo Nishimura

发明人： Kazuhiko Matsuoka ,  Masayuki Usui ,  Kazuo Minoura ,  Takeshi Baba ,  Atsushi Someya ,  Yukuo Nishimura

IPC分类号： G02B3/12

CPC分类号： G02B3/12

摘要： A variable aberration imaging optical system comprises an imaging optical system and an optical device disposed in the optical system and capable of controlling the imaging characteristic of the imaging optical system. The optical device has a medium for forming an index gradient therein by heat, and a device for imparting heat to a desired position on the medium.

摘要翻译： 可变像差成像光学系统包括成像光学系统和设置在光学系统中并且能够控制成像光学系统的成像特性的光学装置。 光学装置具有用于通过加热形成折射率梯度的介质，以及用于将热量传递到介质上的期望位置的装置。

公开(公告)号：US4872743A

公开(公告)日：1989-10-10

申请号：US144643

申请日：1988-01-11

申请人： Takeshi Baba ,  Kazuhiko Matsuoka ,  Masayuki Usui ,  Kazuo Minoura ,  Atsushi Someya ,  Masayuki Suzuki

发明人： Takeshi Baba ,  Kazuhiko Matsuoka ,  Masayuki Usui ,  Kazuo Minoura ,  Atsushi Someya ,  Masayuki Suzuki

IPC分类号： G02B3/14 ,  G02F1/01 ,  G02F1/29 ,  G06K15/02 ,  G06K15/12 ,  G11B7/09 ,  G11B7/135 ,  H04N1/028 ,  H04N5/225

CPC分类号： G02F1/0147 ,  G02B3/14 ,  G02F1/29 ,  G06K15/029 ,  G06K15/1252 ,  G11B7/0908 ,  G11B7/1372 ,  H04N1/028 ,  H04N5/2253

摘要： An optical element whose focal length is variable comprises a medium whose refractive index is variable by temperature, a heating device for imparting heat to the medium to cause an index gradient resulting from a temperature distribution to be created in the medium, and a device for controlling the amount of heat imparted to the medium by the heating device to vary the shape of the index gradient formed in the medium.

摘要翻译： 焦距可变的光学元件包括其折射率随温度变化的介质，用于向介质施加热量以引起由介质中产生的温度分布导致的折射率梯度的加热装置，以及控制装置 由加热装置赋予介质的热量以改变在介质中形成的折射率梯度的形状。

公开(公告)号：US4641920A

公开(公告)日：1987-02-10

申请号：US586971

申请日：1984-03-07

申请人： Kazuhiko Matsuoka ,  Masayuki Usui ,  Kazuo Minoura ,  Takesi Baba ,  Atsushi Someya

发明人： Kazuhiko Matsuoka ,  Masayuki Usui ,  Kazuo Minoura ,  Takesi Baba ,  Atsushi Someya

IPC分类号： B41J2/44 ,  B41J2/445 ,  G02B5/04 ,  G02B27/09 ,  G02B27/14 ,  G02F1/19

CPC分类号： G02B27/0927 ,  G02B27/09 ,  G02B27/0972 ,  G02B27/144 ,  G02B27/145

摘要： An optical element having the function of changing the cross-sectional intensity distribution of an incident light beam is comprised of a plurality of prisms. The optical element spatially combines a light beam having been amplitude-divided by an amplitude-dividing mirror provided on the joined surface of the prisms and a light beam having been totally reflected by a total-reflection mirror provided on the outermost one of the prisms to thereby change the cross-sectional intensity distribution of the light beam entering the optical element.

摘要翻译： 具有改变入射光束的横截面强度分布的功能的光学元件由多个棱镜组成。 光学元件通过设置在棱镜的接合表面上的分压镜和被设置在最外面的棱镜上的全反射镜全反射的光束空间地组合了被光分割的光束， 从而改变进入光学元件的光束的横截面强度分布。

公开(公告)号：US4306776A

公开(公告)日：1981-12-22

申请号：US99924

申请日：1979-12-03

申请人： Atsushi Someya

发明人： Atsushi Someya

IPC分类号： G02B15/20 ,  G02B15/173 ,  G02B15/22 ,  G02B15/14

CPC分类号： G02B15/173

摘要： In the disclosed zoom lens of the mechanical compensation type, a first movable lens group, a second movable lens group, a third movable lens group and a fixed lens group are located in sequence from the object end. The first, second and third lens groups are simultaneously moved along the optical axis independently of each so as to change the focal length. The first movable lens group is placed closer to the image at the end of the wide angle position rather than at the end of the telephoto position, while during zooming, the axial movement of the first movable lens from the extreme wide angle position to the extreme telephoto position is smaller than that of the third movable lens group. On the other hand, during focusing, the second and the third lens groups are fixed, while the first movable lens group is moved.

摘要翻译： 在所公开的机械补偿型变焦镜头中，从物体端依次设置第一可移动透镜组，第二可移动透镜组，第三可移动透镜组和固定透镜组。 第一，第二和第三透镜组同时沿光轴独立地移动以改变焦距。 第一可移动透镜组在广角位置的末端放置得更靠近图像，而不是在远摄位置的结束处，而在变焦期间，第一可移动透镜从极端广角位置到极端的轴向运动 长焦位置小于第三可移动透镜组的远摄位置。 另一方面，在聚焦期间，第二透镜组和第三透镜组是固定的，而第一可移动透镜组移动。

公开(公告)号：US4132463A

公开(公告)日：1979-01-02

申请号：US737157

申请日：1976-10-29

申请人： Keiichi Sakaguchi ,  Atsushi Someya

发明人： Keiichi Sakaguchi ,  Atsushi Someya

IPC分类号： G02B7/105 ,  G02B15/22 ,  G03B17/14 ,  G02B15/18

CPC分类号： G02B15/22 ,  G02B7/105 ,  G03B17/14

摘要： A zoom optical system is composed of a positive focusing lens group, a negative variating lens group, a negative compensating lens group and a positive rear fixed lens group. A rotating grooved cam moves the variating lens group and the compensating lens group in a given relation to each other along the optical axis in the normal focusing range. The focusing lens group is moved along the optical axis normal range for focusing. The variating lens group is kept stationary on the optical axis while the compensating lens group is moved along the optical axis during close-range focusing.

摘要翻译： 变焦光学系统由正聚焦透镜组，负变量透镜组，负补偿透镜组和正后固定透镜组组成。 旋转槽凸轮在正常对焦范围内沿着光轴使变化透镜组和补偿透镜组以给定关系彼此移动。 聚焦透镜组沿着光轴正常范围移动以进行聚焦。 变焦透镜组在光轴上保持静止，而补偿透镜组在近距离对焦期间沿着光轴移动。

公开(公告)号：US08519659B2

公开(公告)日：2013-08-27

申请号：US12812012

申请日：2008-02-08

申请人： Atsushi Someya

发明人： Atsushi Someya

IPC分类号： G05B5/00

CPC分类号： B30B15/142 ,  B30B15/148 ,  B30B15/285 ,  B30B15/287

摘要： Provided is a low-cost control device for an electric servo press, which is excellent in operability and operation efficiency, capable of abruptly stopping a servomotor in a safe and reliable manner within a short time period in response to an abrupt stop command while avoiding hard actuation of a mechanical brake, even in the case of runaway of the servomotor or the like. An electric servo press performs switching to rotation stop control for a servomotor according to an abrupt stop motion based on an abrupt stop command signal to perform brake actuation to cause a mechanical brake to actually start braking and to forcibly interrupt rotational drive power to the servomotor at a scheduled stop time at which the servomotor is stopped according to the abrupt stop motion.

摘要翻译： 提供一种电动伺服压机的低成本控制装置，其操作性和操作效率优异，能够在短时间内突然停止伺服电动机以响应于突然停止命令同时避免硬 即使在伺服电动机等的失控的情况下，机械制动器的致动。 电动伺服压力机基于突然停止指令信号，根据突然停止运动切换到伺服电动机的停转控制，进行制动动作，使机械制动器实际上开始制动，并强制地将转动驱动力中断到伺服电机 伺服电动机根据突然停止运动停止的预定停止时间。

公开(公告)号：US07094994B2

公开(公告)日：2006-08-22

申请号：US10795347

申请日：2004-03-09

申请人： Kenichi Oyama ,  Atsushi Someya ,  Yuko Yamaguchi

发明人： Kenichi Oyama ,  Atsushi Someya ,  Yuko Yamaguchi

IPC分类号： H05B3/68 ,  H05B3/02 ,  C23C16/00

CPC分类号： H01L21/67248 ,  H01L21/67103 ,  H01L21/67109 ,  H05B3/68

摘要： A semiconductor wafer heat treatment apparatus and method, which can carry out a heat treatment to suppress variations in line widths within a surface on a semiconductor wafer and the like, includes: a heating plate for heating a semiconductor wafer to a predetermined temperature; a temperature measuring unit for measuring temperatures when heating the semiconductor wafer or a semiconductor wafer equivalent placed on the heating plate, at portions divided into a plurality of regions; and a controller for controlling the temperatures of the semiconductor wafer, and based on the temperature measurement result of the temperature measuring unit, the controller controls the temperature in heating the semiconductor wafer, for each of the plurality of regions. In cooling after the heating process, based on the temperature measurement result, the controller controls the temperature in cooling the semiconductor wafer, for each of the plurality of regions.

摘要翻译： 可以进行热处理以抑制半导体晶片等的表面内的线宽的变化的半导体晶片热处理装置和方法包括：将半导体晶片加热到预定温度的加热板; 温度测量单元，用于在分成多个区域的部分测量加热半导体晶片或放置在加热板上的半导体晶片等效物时的温度; 以及用于控制半导体晶片的温度的控制器，并且基于温度测量单元的温度测量结果，控制器控制对于多个区域中的每个区域加热半导体晶片的温度。 在加热处理后的冷却中，基于温度测量结果，控制器控制对于多个区域中的每个区域来冷却半导体晶片的温度。

公开(公告)号：US5311282A

公开(公告)日：1994-05-10

申请号：US853834

申请日：1992-03-19

申请人： Atsushi Someya ,  Tohru Ogawa

发明人： Atsushi Someya ,  Tohru Ogawa

IPC分类号： G03F7/22 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G01B9/02

CPC分类号： G03F7/70425 ,  G03F7/70716

摘要： A high precision stepping aligner includes a stage for carrying thereon an object and drivable to move the object stepwise relative to an exposing position so as to align a plurality of portions of the object in succession with the exposing position, where each of the portions is exposed to exposure light. The stage is moved stepwise first in the X-direction and then in the Y-direction. Thereafter, the stepping movement in the X-direction and the stepping movement in the Y-direction are repeated one after another so that the stage traces a substantially spiral stepping pattern. A mirror for reflecting a beam of light for positioning the stage is disposed on the stage with a heat insulating material interposed therebetween.

摘要翻译： 高精度的步进对准器包括用于在其上承载物体并可被驱动以相对于曝光位置逐步移动物体的台阶，以便将物体的多个部分与曝光位置相对准，其中每个部分被暴露 曝光光。 台阶在X方向上先沿着Y方向逐步移动。 此后，一个接一个地重复X方向的步进运动和Y方向的步进运动，使得工作台跟踪大致螺旋形的步进模式。 用于反射用于定位舞台的光束的反射镜设置在舞台上，隔着隔热材料。