Base pattern forming material for electrode and wiring material absorption, electrode and wiring forming method, and method of manufacturing image forming apparatus
    1.
    发明授权
    Base pattern forming material for electrode and wiring material absorption, electrode and wiring forming method, and method of manufacturing image forming apparatus 失效
    用于电极和布线材料吸收的基底图案形成材料,电极和布线形成方法以及制造图像形成装置的方法

    公开(公告)号:US07115432B2

    公开(公告)日:2006-10-03

    申请号:US10627645

    申请日:2003-07-28

    IPC分类号: H01L21/00

    摘要: A fine electrode and wiring pattern with a good adhesive property is easily formed using a water-based solution easy to handle and small in environmental load, thereby improving a stability of a manufacturing process of an image-forming apparatus in the case where the water-based solution is used in the manufacturing process. A base pattern is formed using a base pattern forming material for electrode and wiring material absorption which is a water-based solution containing a water-soluble photosensitive resin component and a water-soluble metallic compound including rhodium, bismuth, ruthenium, vanadium, chromium, tin, lead, or silicon. An organic metallic compound is absorbed in the base pattern and then baking is conducted to form electrodes and wirings.

    摘要翻译: 使用易于处理的水性溶液和环境负荷小的容易地形成具有良好粘附性的细电极和布线图案,从而提高了图像形成装置的制造过程的稳定性, 在制造过程中使用基于溶液的解决方案。 使用作为含有水溶性感光性树脂成分的水性溶液和包含铑,铋,钌,钒,铬等的水溶性金属化合物的电极用基材图案形成材料和布线材料吸收形成基体图案, 锡,铅或硅。 有机金属化合物被吸收到基底图案中,然后进行烘烤以形成电极和布线。

    Method of manufacturing electroconductive member pattern, and methods of manufacturing electron source and image displaying apparatus each using the same
    4.
    发明授权
    Method of manufacturing electroconductive member pattern, and methods of manufacturing electron source and image displaying apparatus each using the same 失效
    制造导电构件图案的方法,以及制造电子源的方法和使用其的图像显示装置

    公开(公告)号:US07858145B2

    公开(公告)日:2010-12-28

    申请号:US11211550

    申请日:2005-08-26

    IPC分类号: B05D5/12

    摘要: Provided is a method for producing a pattern of an electroconductive member, comprising: a step of forming a resin film on a substrate surface; a step of incorporating the first metal component into the resin by applying to the resin a liquid which contains a complex of a first metal component, which contains also a second metal component different from the first component, and to which a compound forming a complex with the second metal component is contacting or contacted preliminary; and a step of baking the resin film to form the electroconductive member from the first metal component incorporated into the resin film. Thus, the second metal component is prevented from adversely affecting the first metal component to be incorporated into the resin.

    摘要翻译: 提供一种用于制造导电构件图案的方法,包括:在衬底表面上形成树脂膜的步骤; 将第一金属成分加入到树脂中的步骤是向树脂施加含有第一金属成分的复合物的液体,该第一金属成分也含有与第一成分不同的第二金属成分,并且与其形成复合物的化合物 第二金属组分接触或接触初步; 以及从结合到树脂膜中的第一金属成分烘烤树脂膜以形成导电构件的步骤。 因此,防止了第二金属成分对要结合到树脂中的第一金属成分的不良影响。

    Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern
    5.
    发明授权
    Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern 失效
    金属或金属化合物图案和图案形成方法,以及使用该图案的电子发射器件,电子源和图像形成装置

    公开(公告)号:US07964336B2

    公开(公告)日:2011-06-21

    申请号:US12409569

    申请日:2009-03-24

    IPC分类号: G03F7/26

    摘要: The present invention is to provide a method for forming various patterns such as a metal or metal compound pattern, in which the amounts of the materials constituting the pattern which are removed during the formation step can be suppressed to the minimum. The method comprises a resin pattern forming step of forming on the surface of a substrate a resin pattern capable of absorbing a solution containing metal components, an absorbing step of dipping the resin pattern in the solution containing metal components to make the resin pattern absorb the solution containing metal components, a washing step of washing the substrate having formed thereon the resin pattern that has absorbed the solution containing metal components, and a burning step of burning the resin pattern after washing.

    摘要翻译: 本发明提供一种用于形成诸如金属或金属化合物图案的各种图案的方法,其中可以将在形成步骤期间被去除的构成图案的材料的量抑制到最小。 该方法包括在基板的表面上形成能够吸收含有金属成分的溶液的树脂图案的树脂图案形成步骤,将树脂图案浸渍在含有金属成分的溶液中以使树脂图案吸收溶液的吸收步骤 洗涤步骤,洗涤其上形成有吸收了含有金属成分的溶液的树脂图案的基板,以及在洗涤后烧结树脂图案的燃烧工序。

    Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern
    6.
    发明授权
    Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern 失效
    金属或金属化合物图案和图案形成方法,以及使用该图案的电子发射器件,电子源和图像形成装置

    公开(公告)号:US07556913B2

    公开(公告)日:2009-07-07

    申请号:US10910273

    申请日:2004-08-04

    IPC分类号: G03F7/00

    摘要: The present invention is to provide a method for forming various patterns such as a metal or metal compound pattern, in which the amounts of the materials constituting the pattern which are removed during the formation step can be suppressed to the minimum. The method comprises a resin pattern forming step of forming on the surface of a substrate a resin pattern capable of absorbing a solution containing metal components, an absorbing step of dipping the resin pattern in the solution containing metal components to make the resin pattern absorb the solution containing metal components, a washing step of washing the substrate having formed thereon the resin pattern that has absorbed the solution containing metal components, and a burning step of burning the resin pattern after washing.

    摘要翻译: 本发明提供一种用于形成诸如金属或金属化合物图案的各种图案的方法,其中可以将在形成步骤期间被去除的构成图案的材料的量抑制到最小。 该方法包括在基板的表面上形成能够吸收含有金属成分的溶液的树脂图案的树脂图案形成步骤,将树脂图案浸渍在含有金属成分的溶液中以使树脂图案吸收溶液的吸收步骤 洗涤步骤,洗涤其上形成有吸收了含有金属成分的溶液的树脂图案的基板,以及在洗涤后烧结树脂图案的燃烧工序。

    Formation method of electroconductive pattern, and production method of electron-emitting device, electron source, and image display apparatus using this
    8.
    发明申请
    Formation method of electroconductive pattern, and production method of electron-emitting device, electron source, and image display apparatus using this 失效
    导电图案的形成方法,电子发射器件的制造方法,电子源和使用该方法的图像显示装置

    公开(公告)号:US20050266589A1

    公开(公告)日:2005-12-01

    申请号:US11138332

    申请日:2005-05-27

    IPC分类号: H01J9/02 H01L21/00

    摘要: In regard to an electroconductive pattern including a high resistivity region partially, by forming a pattern with a photosensitive resin, making the pattern absorb liquid containing a metal component, and baking this, an electroconductive film of metal oxide is formed, this electroconductive film is further covered by a gas shielding layer, and portions which are not shielded are reduced selectively to be made low resistance metal film regions. Since the material which constitutes the electroconductive pattern is hardly removed, a load concerning material reuse is mitigated and material cost is reduced.

    摘要翻译: 关于包括高电阻率区域的导电图案,通过用感光树脂形成图案,使图案吸收含有金属成分的液体,并进行烘烤,形成金属氧化物的导电膜,该导电膜进一步 由气体屏蔽层覆盖,并且不被屏蔽的部分选择性地降低以制成低电阻金属膜区域。 由于构成导电图案的材料几乎不被去除,所以减轻了与材料再利用有关的负担,降低了材料成本。

    Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern
    9.
    发明授权
    Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern 失效
    金属或金属化合物图案和图案形成方法,以及使用该图案的电子发射器件,电子源和图像形成装置

    公开(公告)号:US06833224B2

    公开(公告)日:2004-12-21

    申请号:US10122344

    申请日:2002-04-16

    IPC分类号: G03F700

    摘要: The present invention is to provide a method for forming various patterns such as a metal or metal compound pattern, in which the amounts of the materials constituting the pattern which are removed during the formation step can be suppressed to the minimum. The method comprises a resin pattern forming step of forming on the surface of a substrate a resin pattern capable of absorbing a solution containing metal components, an absorbing step of dipping the resin pattern in the solution containing metal components to make the resin pattern absorb the solution containing metal components, a washing step of washing the substrate having formed thereon the resin pattern that has absorbed the solution containing metal components, and a burning step of burning the resin pattern after washing.

    摘要翻译: 本发明提供一种用于形成诸如金属或金属化合物图案的各种图案的方法,其中可以将在形成步骤期间被去除的构成图案的材料的量抑制到最小。 该方法包括在基板的表面上形成能够吸收含有金属成分的溶液的树脂图案的树脂图案形成步骤,将树脂图案浸渍在含有金属成分的溶液中以使树脂图案吸收溶液的吸收步骤 洗涤步骤,洗涤其上形成有吸收了含有金属成分的溶液的树脂图案的基板,以及在洗涤后烧结树脂图案的燃烧工序。

    Formation method of electroconductive pattern, and production method of electron-emitting device, electron source, and image display apparatus using this
    10.
    发明授权
    Formation method of electroconductive pattern, and production method of electron-emitting device, electron source, and image display apparatus using this 失效
    导电图案的形成方法,电子发射器件的制造方法,电子源和使用该方法的图像显示装置

    公开(公告)号:US07314768B2

    公开(公告)日:2008-01-01

    申请号:US11138332

    申请日:2005-05-27

    IPC分类号: H01L21/00 H01L21/44

    摘要: In regard to an electroconductive pattern including a high resistivity region partially, by forming a pattern with a photosensitive resin, making the pattern absorb liquid containing a metal component, and baking this, an electroconductive film of metal oxide is formed, this electroconductive film is further covered by a gas shielding layer, and portions which are not shielded are reduced selectively to be made low resistance metal film regions. Since the material which constitutes the electroconductive pattern is hardly removed, a load concerning material reuse is mitigated and material cost is reduced.

    摘要翻译: 关于包括高电阻率区域的导电图案,通过用感光树脂形成图案,使图案吸收含有金属成分的液体,并进行烘烤,形成金属氧化物的导电膜,该导电膜进一步 由气体屏蔽层覆盖,并且不被屏蔽的部分选择性地降低以制成低电阻金属膜区域。 由于构成导电图案的材料几乎不被去除,所以减轻了与材料再利用有关的负担,降低了材料成本。