公开(公告)号：US07198447B2

公开(公告)日：2007-04-03

申请号：US10360597

申请日：2003-02-06

申请人： Kazuhiro Morimitsu ,  Tatsuhisa Matsunaga ,  Masanori Kaneko ,  Kouichi Noto ,  Hidehiro Yanagawa ,  Masaki Matsushima

发明人： Kazuhiro Morimitsu ,  Tatsuhisa Matsunaga ,  Masanori Kaneko ,  Kouichi Noto ,  Hidehiro Yanagawa ,  Masaki Matsushima

IPC分类号： H01L21/677 ,  B65B21/02 ,  B65B69/00 ,  B65G65/34

CPC分类号： H01L21/67757 ,  Y10S414/137 ,  Y10S414/139

摘要： A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat transfer mechanism for transferring the boats among the first, second and third stages; and a substrate transfer mechanism for transferring the substrate(s) from the carrier to the boat held by the first stage. A controller controls the first stage, the boat transfer mechanism and the substrate transfer mechanism so that the boat transfer mechanism transfers one of the boats from the second stage to the first stage, the substrate transfer mechanism then transfers the substrate(s) from the carrier to the boat held by the first stage, and the first stage then moves the boat into the processing chamber for processing.

摘要翻译： 公开了一种半导体器件制造装置。 该装置包括用于放置载体的载体保持台; 第一，第二和第三阶段各自用于一次一个地保持第一和第二船，每个船保持一个或多个基底; 在第一，第二和第三阶段转运船只的船只转运机构; 以及用于将基板从载体转移到由第一级保持的船的基板传送机构。 控制器控制第一阶段，船只传送机构和基板传送机构，使得船只传送机构将其中一个船从第二阶段转移到第一阶段，然后基板传送机构将载体从载体 到第一阶段所持有的船，然后第一阶段将船移动到处理室中进行处理。

公开(公告)号：US06641350B2

公开(公告)日：2003-11-04

申请号：US09834913

申请日：2001-04-16

申请人： Takanobu Nakashima ,  Tatsuhisa Matsunaga ,  Hidehiro Yanagawa

发明人： Takanobu Nakashima ,  Tatsuhisa Matsunaga ,  Hidehiro Yanagawa

IPC分类号： F26B2106

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.

摘要翻译： 基板处理设备包括两个荚支撑台和两个可独立操作的荚门开启器。 每个荚支撑台能够在其上放置用于在其中容纳基底的荚。 每个荚门开启器具有允许访问放置在相应的荚支撑台上的荚内的基底的装置。

公开(公告)号：US06927165B2

公开(公告)日：2005-08-09

申请号：US10674345

申请日：2003-10-01

申请人： Tatsuhisa Matsunaga ,  Masahiro Teramoto ,  Norio Akutsu ,  Kouichi Noto

发明人： Tatsuhisa Matsunaga ,  Masahiro Teramoto ,  Norio Akutsu ,  Kouichi Noto

IPC分类号： C23C16/44 ,  C23C16/54 ,  H01L21/205 ,  H01L21/22 ,  H01L21/285 ,  H01L21/31 ,  H01L21/673 ,  H01L21/677 ,  H01L21/683 ,  H01L21/687 ,  H01L21/44 ,  C23C16/00 ,  H01L21/1469

CPC分类号： H01L21/67757 ,  C23C16/54 ,  H01L21/28556 ,  H01L21/67781 ,  H01L21/68707

摘要： A substrate processing apparatus includes a housing, a process tube for performing variable batch processes on substrates, and product substrate carriers. The product substrate carriers have a capacity of a predetermined number of substrates. A number of the product substrates processed during one batch process are less than or equal to the predetermined number of the substrates. All of the product substrates contained in one product substrate carrier is processed in the process tube at a same time.

摘要翻译： 基板处理装置包括壳体，用于在基板上进行可变批处理的处理管和产品基板载体。 产品基板载体具有预定数量的基板的容量。 在一个批处理过程中处理的许多产品基底小于或等于预定数量的基底。 包含在一个产品衬底载体中的所有产品基底在处理管中同时被处理。

公开(公告)号：USRE43023E1

公开(公告)日：2011-12-13

申请号：US12724026

申请日：2010-03-15

申请人： Takanobu Nakashima ,  Tatsuhisa Matsunaga ,  Hidehiro Yanagawa

发明人： Takanobu Nakashima ,  Tatsuhisa Matsunaga ,  Hidehiro Yanagawa

IPC分类号： F26B21/06

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.

摘要翻译： 基板处理设备包括两个荚支撑台和两个可独立操作的荚门开启器。 每个荚支撑台能够在其上放置用于在其中容纳基底的荚。 每个荚门开启器具有允许访问放置在相应的荚支撑台上的荚内的基底的装置。

公开(公告)号：US06638860B2

公开(公告)日：2003-10-28

申请号：US09963382

申请日：2001-09-27

申请人： Tatsuhisa Matsunaga ,  Masahiro Teramoto ,  Norio Akutsu ,  Kouichi Noto

发明人： Tatsuhisa Matsunaga ,  Masahiro Teramoto ,  Norio Akutsu ,  Kouichi Noto

IPC分类号： H01L2144

CPC分类号： H01L21/67757 ,  C23C16/54 ,  H01L21/28556 ,  H01L21/67781 ,  H01L21/68707

摘要： A substrate processing apparatus includes a housing, a process tube for performing variable batch processes on substrates, and product substrate carriers. The product substrate carriers have a capacity of a predetermined number of substrates. A number of the product substrates processed during one batch process are less than or equal to the predetermined number of the substrates. All of the product substrates contained in one product substrate carrier is processed in the process tube at a same time.

公开(公告)号：US06658321B2

公开(公告)日：2003-12-02

申请号：US09956820

申请日：2001-09-21

申请人： Akihiro Osaka ,  Masaki Murobayashi ,  Tatsuhisa Matsunaga ,  Kouichi Noto

发明人： Akihiro Osaka ,  Masaki Murobayashi ,  Tatsuhisa Matsunaga ,  Kouichi Noto

IPC分类号： G06F700

CPC分类号： H01L21/67276 ,  H01L21/68

摘要： Substrate positioning and substrate transporting are processed in parallel, thereby reducing substrate transfer apparatus wait time and improving substrate processing throughput. A substrate transfer apparatus 1 is configured in a single unit, a plural number of wafers W prior to notch alignment is transported at one time from a substrate accommodating container to a substrate alignment apparatus 22, and the plural number of notch aligned wafers is transported from the substrate alignment apparatus 22 to a boat 21. Two stages (upper and lower) of notch alignment units 4 and 5 that configure the substrate alignment apparatus 22 operate independently, and are capable of performing notch alignment, in total, on a number of wafers to be processed that is twice the number of wafers transported at one time by the substrate transfer apparatus 1. While notch alignment is being performed in the one notch alignment unit 4, notch aligned wafers W are transported by the substrate transfer apparatus from the other notch alignment unit 5 to the boat 21, and then wafers prior to notch alignment are transported from the substrate accommodating container to the other notch alignment unit 5.

公开(公告)号：US06540469B2

公开(公告)日：2003-04-01

申请号：US09945643

申请日：2001-09-05

申请人： Tatsuhisa Matsunaga ,  Kouichi Noto

发明人： Tatsuhisa Matsunaga ,  Kouichi Noto

IPC分类号： B65G4907

CPC分类号： H01L21/67757 ,  C23C16/54 ,  H01L21/67781 ,  Y10S414/137

摘要： A substrate processing apparatus includes a process tube for processing a plurality of substrates, two boats for accommodating the substrates, two boat elevators, a substrate transfer unit for loading and unloading the substrates into and from the boats when the boats are at the first position. In this apparatus, each boat elevator has one boat mounted thereon and each of the boat elevators carries a corresponding boat between a first position located below the process tube and two corresponding second positions. Each of the boat elevators performs loading and unloading the corresponding boat into and from the process tube at the first position. Further, in the apparatus, a center position of the process tube is disposed inside a triangle formed by connecting the substrate transfer unit and the two boat elevators.

公开(公告)号：US06737613B2

公开(公告)日：2004-05-18

申请号：US10395179

申请日：2003-03-25

申请人： Takatomo Yamaguchi ,  Kazuhiro Morimitsu ,  Tatsuhisa Matsunaga

发明人： Takatomo Yamaguchi ,  Kazuhiro Morimitsu ,  Tatsuhisa Matsunaga

IPC分类号： F27B514

CPC分类号： H01L21/67303 ,  C30B31/10 ,  H01L21/67109

摘要： A heat treatment apparatus includes a vertically disposed process tube defining a reaction chamber therein; a main heater for heating the reaction chamber, the main heater being disposed outside of the process tube; a boat for holding a plurality of wafers, the boat being loaded into and unloaded from the reaction chamber; and a boat rotating device for rotating the boat. The boat rotating device is provided with a rotatable hollow shaft assembly and a fixed shaft coaxially disposed inside the rotatable hollow shaft assembly. A sub-heater is attached to an upper end of the fixed shaft, and the boat and an insulating portion are disposed on the rotatable hollow shaft assembly.

摘要翻译： 一种热处理设备，包括在其中限定反应室的垂直设置的处理管; 用于加热反应室的主加热器，主加热器设置在处理管的外部; 用于保持多个晶片的船，所述船被装载到所述反应室中并从所述反应室卸载; 以及用于旋转船的船旋转装置。 船用旋转装置设置有可旋转的空心轴组件和同轴地设置在可旋转中空轴组件内部的固定轴。 副加热器附接到固定轴的上端，并且船和绝缘部分设置在可旋转的中空轴组件上。

公开(公告)号：US5371931A

公开(公告)日：1994-12-13

申请号：US941964

申请日：1992-09-08

申请人： Takeshi Kawana ,  Toshiyuki Amimoto ,  Yasuhiro Fujita ,  Yuuji Enomoto ,  Tatsuya Niinomi ,  Sadao Ohara ,  Shin Hashizume ,  Yasuo Shibasaki ,  Tatsuhisa Matsunaga ,  Takeshi Yano

发明人： Takeshi Kawana ,  Toshiyuki Amimoto ,  Yasuhiro Fujita ,  Yuuji Enomoto ,  Tatsuya Niinomi ,  Sadao Ohara ,  Shin Hashizume ,  Yasuo Shibasaki ,  Tatsuhisa Matsunaga ,  Takeshi Yano

IPC分类号： B23P21/00 ,  B23Q41/00 ,  B29C37/00 ,  B29C43/58 ,  B29C45/00 ,  B29C45/26 ,  B29C45/40 ,  B29C45/46 ,  B29C45/76 ,  B23Q7/14 ,  B29C69/00

CPC分类号： B29C45/0084 ,  B29C37/00 ,  B29C45/46 ,  B29C2037/90 ,  Y10T29/5191 ,  Y10T29/53409

摘要： Software and hardware such as part feeding and assembling devices constituting a production system are simplified with the use of a plurality of processing and assembly integrated units in which processing and assembling of parts are coupled and integrated in accordance with products to be produced. The necessities for an automatic warehouse and an automated ground vehicle are eliminated by getting rid of futility of mere movements of the parts. A fundamental idea is that a production system is constructed of units in which three sections--a section for processing a raw material, a check functional section and an assembling section--are integrally combined in accordance with the products to be produced. The parts are processed, checked and assembled by single units just in time while targeting molded parts of plastic and pressed parts.

摘要翻译： 通过使用多个处理和组装集成单元简化了诸如构成生产系统的部件供给和组装装置的软件和硬件，其中部件的加工和组装根据要生产的产品被联接和集成。 自动仓库和自动化地面车辆的必需品通过摆脱零件的单纯运动的徒劳无功而消除。 一个基本思想是，生产系统由单元构成，其中三个部分 - 用于处理原料的部分，检查功能部分和组装部分 - 根据要生产的产品整体地组合。 零件由塑料和压制零件成型部件及时处理，检查和组装。