THIN FILM TRANSISTOR HAVING A BARRIER LAYER AS A CONSTITUTING LAYER AND Cu-ALLOY SPUTTERING TARGET USED FOR SPUTTER FILM FORMATION OF THE BARRIER LAYER
    2.
    发明申请
    THIN FILM TRANSISTOR HAVING A BARRIER LAYER AS A CONSTITUTING LAYER AND Cu-ALLOY SPUTTERING TARGET USED FOR SPUTTER FILM FORMATION OF THE BARRIER LAYER 有权
    具有作为构成层的障碍层的薄膜晶体管和用于形成障碍层的溅射膜的铜合金溅射靶

    公开(公告)号:US20110309444A1

    公开(公告)日:2011-12-22

    申请号:US13138159

    申请日:2009-10-22

    IPC分类号: H01L29/772

    摘要: This Cu alloy sputtering target includes, in terms of atomic percent: Al: 1% to 10%; and Ca: 0.1% to 2%, with the balance being Cu and 1% or less of inevitable impurities. This thin film transistor includes: a gate electrode layer joined to the surface of a glass substrate through an adhesion layer; a gate insulating layer; a Si semiconductor layer; an n-type Si semiconductor layer; a barrier layer; a wire layer composed of a drain electrode layer and a source electrode layer, both of which are mutually divided; a passivation layer; and a transparent electrode layer, wherein the barrier layer is formed by sputtering under an oxidizing atmosphere using the Cu alloy sputtering target.

    摘要翻译: 该Cu合金溅射靶的原子百分比:Al:1〜10% Ca:0.1〜2%,余量为Cu和1%以下不可避免的杂质。 该薄膜晶体管包括:通过粘合层接合到玻璃基板的表面的栅电极层; 栅极绝缘层; Si半导体层; n型Si半导体层; 阻挡层; 由漏极电极层和源电极层构成的导线层,两者都相互分开; 钝化层; 以及透明电极层,其中通过使用Cu合金溅射靶在氧化气氛下通过溅射形成阻挡层。

    Thin film transistor having a barrier layer as a constituting layer and Cu-alloy sputtering target used for sputter film formation of the barrier layer
    3.
    发明授权
    Thin film transistor having a barrier layer as a constituting layer and Cu-alloy sputtering target used for sputter film formation of the barrier layer 有权
    具有作为构成层的阻挡层和用于阻挡层的溅射膜形成的Cu合金溅射靶的薄膜晶体管

    公开(公告)号:US08658009B2

    公开(公告)日:2014-02-25

    申请号:US13138159

    申请日:2009-10-22

    IPC分类号: C23C14/34

    摘要: This Cu alloy sputtering target includes, in terms of atomic percent: Al: 1% to 10%; and Ca: 0.1% to 2%, with the balance being Cu and 1% or less of inevitable impurities. This thin film transistor includes: a gate electrode layer joined to the surface of a glass substrate through an adhesion layer; a gate insulating layer; a Si semiconductor layer; an n-type Si semiconductor layer; a barrier layer; a wire layer composed of a drain electrode layer and a source electrode layer, both of which are mutually divided; a passivation layer; and a transparent electrode layer, wherein the barrier layer is formed by sputtering under an oxidizing atmosphere using the Cu alloy sputtering target.

    摘要翻译: 该Cu合金溅射靶的原子百分比:Al:1〜10% Ca:0.1〜2%,余量为Cu和1%以下不可避免的杂质。 该薄膜晶体管包括:通过粘合层接合到玻璃基板的表面的栅电极层; 栅极绝缘层; Si半导体层; n型Si半导体层; 阻挡层; 由漏极电极层和源电极层构成的导线层,两者都相互分开; 钝化层; 以及透明电极层,其中通过使用Cu合金溅射靶在氧化气氛下通过溅射形成阻挡层。

    Thin-film transistor and intermediate of thin-film transistor
    4.
    发明授权
    Thin-film transistor and intermediate of thin-film transistor 有权
    薄膜晶体管和薄膜晶体管的中间体

    公开(公告)号:US08502285B2

    公开(公告)日:2013-08-06

    申请号:US12737797

    申请日:2009-09-24

    IPC分类号: H01L29/786

    摘要: This thin-film transistor includes a drain electrode film and a source electrode film, each of which includes a composite copper alloy film including a copper alloy underlayer that is formed so as to come into contact with a barrier film and a Cu layer that is formed on the copper alloy underlayer. One aspect of the copper alloy underlayer includes a concentrated layer including 2 mol % to 30 mol % of Ca, 20 mol % to 50 mol % of oxygen, and Cu and inevitable impurities as the balance. Another aspect of the copper alloy underlayer includes a concentrated layer including 2 mol % to 30 mol % of Ca, 1 mol % to 10 mol % in total of one or more selected from the group consisting of Al, Sn, and Sb, 20 mol % to 50 mol % of oxygen, and Cu and inevitable impurities as the balance.

    摘要翻译: 该薄膜晶体管包括漏电极膜和源极电极膜,它们都包括复合铜合金膜,该复合铜合金膜包括形成为与阻挡膜接触的铜合金底层和形成的Cu层 在铜合金底层上。 铜合金底层的一个方面包括含有2mol%至30mol%的Ca,20mol%至50mol%的氧以及Cu和不可避免的杂质作为余量的浓缩层。 铜合金底层的另一方面包括含有2摩尔%至30摩尔%的Ca,1摩尔%至10摩尔%的浓度的浓缩层,其中选自由Al,Sn和Sb组成的组中的一种或多种,​​20mol 50%摩尔的氧,以及Cu和不可避免的杂质作为天平。

    Catheter
    7.
    外观设计
    Catheter 有权

    公开(公告)号:USD540468S1

    公开(公告)日:2007-04-10

    申请号:US29237266

    申请日:2005-08-30

    申请人: Satoru Mori

    设计人: Satoru Mori

    Phase change film for semiconductor nonvolatile memory and sputtering target for forming phase change film
    8.
    发明申请
    Phase change film for semiconductor nonvolatile memory and sputtering target for forming phase change film 审中-公开
    用于半导体非易失性存储器的相变膜和用于形成相变膜的溅射靶

    公开(公告)号:US20070053786A1

    公开(公告)日:2007-03-08

    申请号:US10572216

    申请日:2004-09-08

    IPC分类号: C22C28/00

    摘要: A phase change film for a semiconductor nonvolatile memory and a sputtering target for forming the phase change film. The phase change film for a semiconductor nonvolatile memory and the sputtering target for forming the phase change film have a composition containing 10 to 25 atomic % of Ge, 10 to 25 atomic % of Sb, 1 to 10 atomic % of Ga, and 10 atomic % or less of B, Al, C, Si and lanthanoid elements, with the balance being Te and inevitable impurities.

    摘要翻译: 用于半导体非易失性存储器的相变膜和用于形成相变膜的溅射靶。 用于半导体非易失性存储器的相变膜和用于形成相变膜的溅射靶具有包含10至25原子%的Ge,10至25原子%的Sb,1至10原子%的Ga和10原子的组成 B,Al,C,Si和镧系元素的%以下,余量为Te和不可避免的杂质。

    Guidewires twist releasing device
    9.
    发明授权
    Guidewires twist releasing device 有权
    导丝扭转释放装置

    公开(公告)号:US08147427B2

    公开(公告)日:2012-04-03

    申请号:US12661665

    申请日:2010-03-22

    IPC分类号: A61M25/00

    摘要: To provide a means capable easily releasing twist of two or more guidewires passed through a guiding catheter without pulling out the guidewires. A twist releasing apparatus has a shaft, a first tube formed at the tip of the shaft and has a first lumen through which two or more guidewires can be passed, a second tube disposed through a gap at the tip side in the axis direction relative to the first tube and has a second lumen through the two or more guidewires can be passed, and a connection portion for connecting the first tube and the second tube so that the two or more guidewires can be passed through the first lumen and the second lumen. The second tube has a slit that is formed in an axis direction and can be elastically deformed. The connection portion can be elastically deformed into a curved shape in the axis direction.

    摘要翻译: 提供能够容易地释放通过导向导管而不拉出导线的两根或多根导线的扭转的装置。 扭转释放装置具有轴,第一管形成在所述轴的尖端处,并且具有第一管腔,通过所述第一管腔可以通过两个或更多个引导线;第二管,其相对于所述轴线方向设置在所述尖端侧的轴向方向上的间隙 可以通过第一管并且具有通过两个或更多个导丝的第二管腔,以及用于连接第一管和第二管的连接部分,使得两个或更多个导丝可以穿过第一管腔和第二管腔。 第二管具有沿轴向形成并且可以弹性变形的狭缝。 连接部能够在轴向上弹性变形为弯曲形状。

    Guidewires twist releasing device
    10.
    发明申请
    Guidewires twist releasing device 有权
    导丝扭转释放装置

    公开(公告)号:US20100286565A1

    公开(公告)日:2010-11-11

    申请号:US12661665

    申请日:2010-03-22

    IPC分类号: A61M25/09

    摘要: To provide a means capable easily releasing twist of two or more guidewires passed through a guiding catheter without pulling out the guidewires. A twist releasing apparatus has a shaft, a first tube formed at the tip of the shaft and has a first lumen through which two or more guidewires can be passed, a second tube disposed through a gap at the tip side in the axis direction relative to the first tube and has a second lumen through the two or more guidewires can be passed, and a connection portion for connecting the first tube and the second tube so that the two or more guidewires can be passed through the first lumen and the second lumen. The second tube has a slit that is formed in an axis direction and can be elastically deformed. The connection portion can be elastically deformed into a curved shape in the axis direction.

    摘要翻译: 提供能够容易地释放通过导向导管而不拉出导线的两根或多根导线的扭转的装置。 扭转释放装置具有轴,第一管形成在所述轴的尖端处,并且具有第一管腔,通过所述第一管腔可以通过两个或更多个引导线;第二管,其相对于所述轴线方向设置在所述尖端侧的轴向方向上的间隙 可以通过第一管并且具有通过两个或更多个导丝的第二管腔,以及用于连接第一管和第二管的连接部分,使得两个或更多个导丝可以穿过第一管腔和第二管腔。 第二管具有沿轴向形成并且可以弹性变形的狭缝。 连接部能够在轴向上弹性变形为弯曲形状。