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公开(公告)号：US06863281B2
公开(公告)日：2005-03-08
申请号：US10235585
申请日：2002-09-05
申请人： Kazunori Endou , Hiroshi Inazumachi
发明人： Kazunori Endou , Hiroshi Inazumachi
CPC分类号： B23Q3/154 , Y10T279/23
摘要： One object of the present invention is to provide a chucking apparatus and its production method that is capable of carrying out holding, alignment, transport and so forth without causing problems such as the generation of particles. In order to achieve this object, the present invention provides a chucking apparatus provided with a base in which protrusions or grooves are formed on one of its faces to form an irregular surface, and the apical surfaces of protrusions of the irregular surface serve as a chucking surface for chucking and holding a plate-shaped sample, wherein the apical and lateral surfaces of the above protrusions, and the bottom surfaces of the above indentations, are all polished.
摘要翻译： 本发明的一个目的是提供一种能够进行保持，对准，运输等的夹持装置及其制造方法，而不会产生诸如颗粒的产生的问题。 为了达到上述目的，本发明提供了一种夹持装置，其具有在其一个面上形成突起或槽的基部，形成不规则的表面，并且不规则表面的突起的顶端面用作夹紧 用于夹紧和保持板状样品的表面，其中上述突起的顶部和侧表面以及上述凹陷的底表面都被抛光。
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公开(公告)号：US07175714B2
公开(公告)日：2007-02-13
申请号：US10613574
申请日：2003-07-03
申请人： Takeshi Ootsuka , Kazunori Endou
发明人： Takeshi Ootsuka , Kazunori Endou
CPC分类号： H01J37/32009 , C23C16/4581 , H01J37/3255
摘要： An electrode-built-in susceptor comprises a mounting plate and a supporting plate which are made of an aluminium-nitride-group-sintered member, an inner electrode which is made of a conductive aluminium-nitride-tantalum-nitride-composite-sintered-member or a conductive aluminium-nitride-tungsten-composite-sintered-member so as to be formed between the mounting plate and the supporting plate, power supplying terminals 16, 16 which is disposed in fixing holes 13, 13 which are formed on the supporting plate so as to be attached to the inner electrode. The power supplying terminals are made of a conductive aluminium-nitride-tantalum-nitride-composite-sintered-member.By doing this, it is possible to provide an electrode-built-in susceptor which has superior durability under a high temperature oxidizing atmosphere condition and a method for manufacturing an electrode-built-in susceptor with a high product yield and a low production cost.
摘要翻译： 电极内置基座包括由氮化铝基烧结构件制成的安装板和支撑板，由导电氮化铝 - 氮化钽 - 复合烧结构件制成的内部电极， 构件或导电性氮化铝 - 钨复合烧结构件，以形成在安装板和支撑板之间;供电端子16,16，其设置在形成在支撑件上的固定孔13,13中; 板，以便附接到内电极。 供电端子由导电氮化铝 - 氮化钽 - 复合烧结构件制成。 通过这样做，可以提供一种在高温氧化气氛条件下具有优异的耐久性的电极内置基座，以及具有高产品收率和低生产成本的电极内置基座的制造方法。
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公开(公告)号：US06872908B2
公开(公告)日：2005-03-29
申请号：US10270886
申请日：2002-10-11
申请人： Takeshi Ootsuka , Kazunori Endou , Mamoru Kosakai
发明人： Takeshi Ootsuka , Kazunori Endou , Mamoru Kosakai
IPC分类号： C04B35/581 , C04B35/645 , C23C16/458 , H01J37/32 , H01L21/02 , H01L21/68 , H01L21/683 , B23K9/00
CPC分类号： C04B35/581 , B32B18/00 , B32B2315/02 , C04B35/6264 , C04B35/645 , C04B37/025 , C04B2235/3206 , C04B2235/3225 , C04B2235/3826 , C04B2235/3865 , C04B2235/404 , C04B2235/5445 , C04B2235/6581 , C04B2235/77 , C04B2235/80 , C04B2235/94 , C04B2235/963 , C04B2237/08 , C04B2237/403 , C04B2237/62 , C23C16/4581 , C23C16/4586 , H01J37/32009 , H01J37/32559
摘要： There is provided a susceptor with a built-in electrode and a manufacturing method therefor, in which there is no danger of corrosive gas or plasma or the like penetrating to the inside of the substrate, which has excellent corrosion resistance and plasma resistance, in which nonconductivity under high temperatures is improved, and in which leakage current does not occur. A susceptor with a built-in electrode 21 according to the present invention comprises: a mounting plate 22 and a support plate 23 which are formed from aluminum nitride based sintered bodies; an internal electrode 24 formed from either an aluminum nitride and tungsten composite sintered body or an aluminum nitride and molybdenum composite sintered body, which is formed between the mounting plate 22 and the support plate 23; and power supply terminals 26 which are provided in the support plate 23 and are electrically connected to the internal electrode 24, and both surfaces of the internal electrode 24 are coated with a nonconductive material 30 comprising AlN particles.
摘要翻译： 提供一种具有内置电极的基座及其制造方法，其中不存在腐蚀性气体或等离子体等侵入基板内部的危险，其具有优异的耐腐蚀性和等离子体电阻，其中 在高温下的非导电性提高，并且不会发生漏电流。 根据本发明的具有内置电极21的感受体包括：由氮化铝基烧结体形成的安装板22和支撑板23; 由安装板22和支撑板23之间形成的由氮化铝和钨复合烧结体形成的内部电极24或氮化铝和钼复合烧结体; 以及设置在支撑板23中并与内部电极24电连接的电源端子26，并且内部电极24的两个表面均涂覆有包含AlN颗粒的非导电材料30。
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公开(公告)号：US06444957B1
公开(公告)日：2002-09-03
申请号：US09836434
申请日：2001-04-16
IPC分类号： H05B368
CPC分类号： H01L21/67103 , H05B3/143 , H05B3/74
摘要： The present invention provides a heating apparatus that displays a high heating efficiency and a long product life. In addition, present invention provides a heating apparatus that has no limitations with respect to the materials comprising its heat insulating material, which displays an even greater product life and, moreover, can be manufactured easily at low cost. This heating apparatus is characterized in comprising: a loading plate on which an object to be heated is placed; a support plate that is integrated into a single body with the loading plate; a heating element that is sandwiched in between the loading plate and the support plate; and at least one pair of electrodes, one terminal of which is connected to the aforementioned heating element; wherein, the aforementioned loading plate and support plate each respectively comprises a ceramics sintered body, such that the coefficient of thermal conductivity of the ceramics sintered body comprising the loading plate is greater than the coefficient of thermal conductivity of the ceramics sintered body comprising the support plate. In addition, a heat insulating material may be installed at the base of at least the aforementioned heating element.
摘要翻译： 本发明提供一种显示高加热效率和长的产品寿命的加热装置。 此外，本发明提供一种加热装置，其对于包括其隔热材料的材料没有限制，其显示出更大的产品寿命，并且还可以以低成本容易地制造。 该加热装置的特征在于包括：加载对象物被放置在其上的装载板; 支撑板，与装载板整合成单体; 夹在所述装载板和所述支撑板之间的加热元件; 以及至少一对电极，其一端连接到上述加热元件; 其特征在于，上述装载板和支撑板各自分别包括陶瓷烧结体，使得包括装载板的陶瓷烧结体的导热系数大于包括支撑板的陶瓷烧结体的导热系数 。 此外，绝热材料可以至少安装在上述加热元件的基部。
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