Concentration controlling method and a substate treating apparatus
utilizing same
    1.
    发明授权
    Concentration controlling method and a substate treating apparatus utilizing same 失效
    浓度控制方法和利用其的子状态处理装置

    公开(公告)号:US5715173A

    公开(公告)日:1998-02-03

    申请号:US490830

    申请日:1995-06-15

    IPC分类号: G01N21/31 G01N21/59

    CPC分类号: G01N21/314

    摘要: Calibration curve data is collected by measuring transmitted light intensities of a treating solvent while solvent temperature is varied. Also measured are a standard transmitted light intensity (transmitted light intensity of a standard treating solution prepared at a predetermined concentration and temperature) and a reference transmitted light intensity (transmitted light intensity of the solvent). Estimated transmitted light intensity of the solvent when its temperature is the same as that of the standard treating solution, is derived from the temperature of the standard treating solution and the calibration curve data stored. A correction factor is computed from a ratio between the reference transmitted light intensity and estimated transmitted light intensity. Then, transmittance of the standard treating solution (standard transmittance) is computed from the standard transmitted light intensity, reference transmitted light intensity and a correction factor. Subsequently, transmitted light intensity of a treating solution for actual use in treating substrates (sample transmitted light intensity) is measured. A sample transmittance of this treating solution is derived from the sample transmitted light intensity, reference transmitted light intensity and a correction factor. Concentration of the treating solution is controlled based on the standard and sample transmittance.

    摘要翻译: 通过测量溶剂温度变化时处理溶剂的透射光强度来收集校准曲线数据。 还测量了标准透射光强度(以预定浓度和温度制备的标准处理溶液的透射光强度)和参考透射光强度(溶剂的透射光强度)。 当其温度与标准处理溶液的温度相同时,估计的溶剂的透射光强度来自标准处理溶液的温度和存储的校准曲线数据。 根据参考透射光强度和估计的透射光强度之间的比率来计算校正因子。 然后,根据标准透射光强度,参考透射光强度和校正因子计算标准处理溶液的透光率(标准透射率)。 接着,测定实际用于处理基板的处理液的透射光强度(样品透射光强度)。 该处理溶液的样品透射率来自样品透射光强度,参考透射光强度和校正因子。 处理溶液的浓度基于标准和样品透射率进行控制。

    Chemical agent producing device and method thereof
    2.
    发明授权
    Chemical agent producing device and method thereof 失效
    化学试剂生产装置及其方法

    公开(公告)号:US5674410A

    公开(公告)日:1997-10-07

    申请号:US271081

    申请日:1994-07-06

    摘要: The purity of a liquid chemical agent is improved simultaneously with obtaining a homogeneous concentration of a specific chemical in the agent, thereby improving the quality of substrate processing steps. Pure water is supplied from a pure water supply (30) into a process tank (1) by opening an opening/closing valve (33) on a pure water supply system (7) and by closing an opening/closing valve (19) on a circulation system (5). After the process tank (1) is completely charged with pure water, the opening/closing valve (33) is closed while the opening/closing valve (19) is opened. This closes a pipe conduit (11) of the circulation system (5) and allows pure water in the process tank (1) to be circulated through the circulation system (5) by a pump (13). A first opening/closing valve (49) on a gas supply system (9) is subsequently opened to allow hydrogen chloride gas from a hydrogen chloride gas supply (40) to be fed into a mixing unit (17) of the circulation system (5). This results in mixing of the hydrogen chloride gas with pure water in the mixing unit (17) to make a liquid chemical agent.

    摘要翻译: 同时提高液体化学试剂的纯度,同时获得试剂中特定化学物质的均匀浓度,从而提高底物处理步骤的质量。 通过打开纯净水供应系统(7)上的打开/关闭阀(33)并通过关闭打开/关闭阀(19)将净水从纯净水供应(30)供应到处理罐(1)中 循环系统(5)。 在处理罐(1)完全充满纯水之后,打开/关闭阀(19)打开时关闭阀(33)。 这封闭了循环系统(5)的管道导管(11),并允许处理罐(1)中的纯水通过泵(13)循环通过循环系统(5)。 随后打开气体供应系统(9)上的第一开/关阀(49),以便将来自氯化氢气体供应源(40)的氯化氢气体送入循环系统(5)的混合单元(17) )。 这导致在混合单元(17)中将氯化氢气体与纯水混合以制备液体化学试剂。

    Projector light source having three cooling airflow delivery ports
    3.
    发明授权
    Projector light source having three cooling airflow delivery ports 有权
    投影机光源具有三个冷却气流输送口

    公开(公告)号:US09063400B2

    公开(公告)日:2015-06-23

    申请号:US13526622

    申请日:2012-06-19

    申请人: Katsunori Tanaka

    发明人: Katsunori Tanaka

    摘要: A light source device includes a reflector that reflects light received from an arc tube toward an illumination receiving area, and a housing that houses the reflector to form a space through which cooling air for cooling the arc tube flows. The housing has three delivery ports disposed side by side as ports from each of which the cooling air is delivered into the space. A first delivery port included in the three delivery ports is located such that the center of the first delivery port is disposed substantially at a position aligned with the optical axis of the arc tube. Second and third delivery ports included in the three delivery ports are disposed in the vicinity of one and the other sides of the first delivery port, respectively, with respect to the optical axis.

    摘要翻译: 光源装置包括将从电弧管接收的光朝向照明接收区域反射的反射器,以及容纳反射器以形成用于冷却电弧管的冷却空气流过的空间的壳体。 壳体具有并排设置的三个输送端口,每个端口将冷却空气输送到空间中。 包括在三个输送端口中的第一输送端口被定位成使得第一输送口的中心基本上位于与电弧管的光轴对准的位置。 包括在三个输送口中的第二和第三输送口分别相对于光轴设置在第一输送口的一侧和另一侧附近。

    Cooling structure of gas turbine combustor
    4.
    发明授权
    Cooling structure of gas turbine combustor 有权
    燃气轮机燃烧器的冷却结构

    公开(公告)号:US08813502B2

    公开(公告)日:2014-08-26

    申请号:US12598100

    申请日:2008-09-24

    摘要: It is required for a gas turbine combustor to exhaust low NOx. The gas turbine combustor is provided with a combustion tube which has a cooling passage through which cooling air flows in a double wall structure. The cooling passage has a main cooling air supply opening opened to a side of a combustion zone. The cooling air supplied from the main cooling air supply opening is guided to a direction along an inner wall surface of the combustion tube by a guide. The cooling air flows through the cooling passage inside the combustion tube, and then is reused for film cooling along the inner wall surface. Thus, it is possible to save cooling air. Therefore, a more part of the air supplied from a compressor can be used as air for combustion and it becomes possible to exhaust low NOx.

    摘要翻译: 燃气轮机燃烧器需要排出低NOx。 燃气轮机燃烧器设置有燃烧管,该燃烧管具有冷却空气以双壁结构流动的冷却通道。 冷却通道具有向燃烧区侧面敞开的主冷却空气供给口。 从主冷却空气供给口供给的冷却空气通过引导件被引导到燃烧管的内壁面的方向。 冷却空气流过燃烧管内的冷却通道,然后再次用于沿内壁表面进行膜冷却。 因此,可以节省冷却空气。 因此,从压缩机供给的空气的一部分能够用作燃烧用空气,能够排出低NOx。

    Asynchronous logic circuit, semiconductor circuit, and path calculation method in asynchronous logic circuit
    5.
    发明授权
    Asynchronous logic circuit, semiconductor circuit, and path calculation method in asynchronous logic circuit 失效
    异步逻辑电路,半导体电路和异步逻辑电路中的路径计算方法

    公开(公告)号:US08589611B2

    公开(公告)日:2013-11-19

    申请号:US13379614

    申请日:2010-06-09

    申请人: Katsunori Tanaka

    发明人: Katsunori Tanaka

    IPC分类号: G06F12/00

    摘要: An asynchronous branching module (102) outputs transfer data received in accordance with a handshake protocol to any of branch destinations. An asynchronous arbitration module (101) merges transfer paths of the transfer data. A congestion detection module (111) receives an arbitration result signal from the asynchronous arbitration module (101) and outputs congestion information indicating presence/absence of congestion to a merge source. A congestion avoiding path calculation module (112) receives the congestion information and exclusively performs a process of storing the congestion information into a congestion information storage memory, and a process of making the asynchronous branching module (102) preferentially select, as a transfer branch destination, a branch destination generating no congestion information indicative of the presence of congestion from branch destinations leading to a destination, on the basis of the congestion information and the destination information of the transfer data.

    摘要翻译: 异步分支模块(102)将根据握手协议接收的传送数据输出到任何分支目的地。 异步仲裁模块(101)合并传送数据的传送路径。 拥塞检测模块(111)从异步仲裁模块(101)接收仲裁结果信号,并向合并源输出指示有无拥塞的拥塞信息。 拥塞避免路径计算模块(112)接收拥塞信息,并且专门进行将拥塞信息存储到拥塞信息存储存储器中的处理,并且使异步分支模块(102)优先选择作为传送分支目的地 分支目的地,基于所述拥塞信息和所述传送数据的目的地信息,生成不指示来自通向目的地的分支目的地的拥塞的拥塞信息的分支目的地。

    ENGINE GENERATOR
    6.
    发明申请
    ENGINE GENERATOR 有权
    发动机发电机

    公开(公告)号:US20130134719A1

    公开(公告)日:2013-05-30

    申请号:US13634802

    申请日:2011-03-16

    IPC分类号: F02N7/08

    摘要: An engine generator for driving an air motor to energize an engine is provided which reduces an installation space and facility and running costs. The engine generator (EG) is attached to a fire extinguishing facility (14). The fire extinguishing facility is designed to eject unburnable gas supplied from gas containers (11) and comprises an air motor (10) for driving an engine, and a valve unit (12) designed to drive in response to an instruction signal, control a pressure of the unburnable gas from the gas container and supply the pressure controlled unburnable gas to the air motor (10).

    摘要翻译: 提供一种用于驱动空气马达以使发动机通电的发动机发电机,其减少了安装空间和设备和运行成本。 发动机发电机(EG)连接到灭火设备(14)。 该灭火设备被设计成喷射从气体容器(11)供应的不可燃气体,并且包括用于驱动发动机的气动马达(10)和设计成响应于指令信号驱动的阀单元(12),控制压力 的来自气体容器的不可燃气体,并将压力控制的不可燃气体供应到气动马达(10)。

    LIGHT SOURCE DEVICE AND PROJECTOR
    7.
    发明申请
    LIGHT SOURCE DEVICE AND PROJECTOR 有权
    光源设备和投影机

    公开(公告)号:US20130010267A1

    公开(公告)日:2013-01-10

    申请号:US13526622

    申请日:2012-06-19

    申请人: Katsunori Tanaka

    发明人: Katsunori Tanaka

    IPC分类号: G03B21/16 F21V29/00

    摘要: Alight source device includes a reflector that reflects light received from an arc tube toward an illumination receiving area, and a housing that houses the reflector to form a space through which cooling air for cooling the arc tube flows. The housing has three delivery ports disposed side by side as ports from each of which the cooling air is delivered into the space. A first delivery port included in the three delivery ports is located such that the center of the first delivery port is disposed substantially at a position aligned with the optical axis of the arc tube. Second and third delivery ports included in the three delivery ports are disposed in the vicinity of one and the other sides of the first delivery port, respectively, with respect to the optical axis.

    摘要翻译: 光源装置包括将从电弧管接收的光朝向照明接收区域反射的反射器,以及容纳反射器以形成用于冷却电弧管的冷却空气流过的空间的壳体。 壳体具有并排设置的三个输送端口,每个端口将冷却空气输送到空间中。 包括在三个输送端口中的第一输送端口被定位成使得第一输送口的中心基本上位于与电弧管的光轴对准的位置。 包括在三个输送口中的第二和第三输送口分别相对于光轴设置在第一输送口的一侧和另一侧附近。

    FUEL NOZZLE, GAS TURBINE COMBUSTOR WITH THE SAME, AND GAS TURBINE WITH THE SAME
    8.
    发明申请
    FUEL NOZZLE, GAS TURBINE COMBUSTOR WITH THE SAME, AND GAS TURBINE WITH THE SAME 有权
    燃油喷嘴,带有相同气体的燃气轮机,以及与之相同的燃气涡轮

    公开(公告)号:US20120180490A1

    公开(公告)日:2012-07-19

    申请号:US13216966

    申请日:2011-08-24

    IPC分类号: F23R3/28 B05B15/00

    摘要: A fuel nozzle for a gas turbine combustor includes: an internal cylinder; a burner cylinder concentrically provided on the outer circumference of the internal cylinder in the vicinity of its distal end to surround the distal end portion of the internal cylinder; an air passage provided between the burner cylinder and the internal cylinder for delivering combustion air; a space provided at an axial center of the internal cylinder and extending in the axial direction of the internal cylinder; a plurality of inner passages provided at approximately equal intervals in the circumferential direction of the internal cylinder for injecting fluid through its distal end portion; and at least one communication portion provided on the upstream side of the distal end portion of the internal cylinder and extending from the outer wall of the internal cylinder toward the inner side in the radial direction to communicate with the space.

    摘要翻译: 一种用于燃气轮机燃烧器的燃料喷嘴,包括:内筒; 燃烧器筒同心地设置在内圆筒的远端附近的外周上,以包围内筒的前端部; 设置在燃烧器筒和内筒之间用于输送燃烧空气的空气通道; 设置在所述内筒的轴心且在所述内筒的轴向延伸的空间; 多个内通道,其在所述内筒的圆周方向上以相等的间隔设置,用于通过其前端部分喷射流体; 以及至少一个连通部,其设置在所述内筒的前端部的上游侧,并且从所述内筒的外壁向径向内侧延伸,与所述空间连通。

    DYNAMIC IMAGE RECEIVING APPARATUS, DYNAMIC IMAGE RECEIVING METHOD AND PROGRAM
    9.
    发明申请
    DYNAMIC IMAGE RECEIVING APPARATUS, DYNAMIC IMAGE RECEIVING METHOD AND PROGRAM 有权
    动态图像接收装置,动态图像接收方法和程序

    公开(公告)号:US20100246673A1

    公开(公告)日:2010-09-30

    申请号:US12680491

    申请日:2008-09-19

    IPC分类号: H04N7/12

    CPC分类号: H04N21/4307 H04N19/44

    摘要: To provide a dynamic image receiving apparatus which receives dynamic image streams coded with inter-frame prediction such as MPEG from a plurality of channels, and collects the dynamic image streams containing intra-frame coded pictures from each channel in a short time. The dynamic image receiving apparatus includes: a time information accumulative processing device which accumulates code receiving time of the intra-frame coded picture of the dynamic image stream, and periodicity time information containing one of or both of presentation time information and decoding time information contained in the dynamic image stream for each dynamic image stream of the plurality of channels; code receiving time predicting devices which predict the code receiving time of the intra-frame coded pictures based on the periodicity time information; and a channel selection control device which controls channel selection of the dynamic image stream to be received based on the predicted code receiving time information.

    摘要翻译: 提供一种动态图像接收装置,其接收从多个频道接收诸如MPEG之类的帧间预测编码的动态图像流,并且在短时间内收集每个信道中包含帧内编码图像的动态图像流。 动态图像接收装置包括:时间信息累积处理装置,其累积动态图像流的帧内编码图像的代码接收时间,以及包含显示时间信息和解码时间信息中的一个或两个的周期性时间信息 针对所述多个频道的每个动态图像流的所述动态图像流; 代码接收时间预测装置,其基于周期时间信息来预测帧内编码图像的代码接收时间; 以及频道选择控制装置,其基于预测的代码接收时间信息来控制要接收的动态图像流的频道选择。