摘要:
Calibration curve data is collected by measuring transmitted light intensities of a treating solvent while solvent temperature is varied. Also measured are a standard transmitted light intensity (transmitted light intensity of a standard treating solution prepared at a predetermined concentration and temperature) and a reference transmitted light intensity (transmitted light intensity of the solvent). Estimated transmitted light intensity of the solvent when its temperature is the same as that of the standard treating solution, is derived from the temperature of the standard treating solution and the calibration curve data stored. A correction factor is computed from a ratio between the reference transmitted light intensity and estimated transmitted light intensity. Then, transmittance of the standard treating solution (standard transmittance) is computed from the standard transmitted light intensity, reference transmitted light intensity and a correction factor. Subsequently, transmitted light intensity of a treating solution for actual use in treating substrates (sample transmitted light intensity) is measured. A sample transmittance of this treating solution is derived from the sample transmitted light intensity, reference transmitted light intensity and a correction factor. Concentration of the treating solution is controlled based on the standard and sample transmittance.
摘要:
The purity of a liquid chemical agent is improved simultaneously with obtaining a homogeneous concentration of a specific chemical in the agent, thereby improving the quality of substrate processing steps. Pure water is supplied from a pure water supply (30) into a process tank (1) by opening an opening/closing valve (33) on a pure water supply system (7) and by closing an opening/closing valve (19) on a circulation system (5). After the process tank (1) is completely charged with pure water, the opening/closing valve (33) is closed while the opening/closing valve (19) is opened. This closes a pipe conduit (11) of the circulation system (5) and allows pure water in the process tank (1) to be circulated through the circulation system (5) by a pump (13). A first opening/closing valve (49) on a gas supply system (9) is subsequently opened to allow hydrogen chloride gas from a hydrogen chloride gas supply (40) to be fed into a mixing unit (17) of the circulation system (5). This results in mixing of the hydrogen chloride gas with pure water in the mixing unit (17) to make a liquid chemical agent.
摘要:
A light source device includes a reflector that reflects light received from an arc tube toward an illumination receiving area, and a housing that houses the reflector to form a space through which cooling air for cooling the arc tube flows. The housing has three delivery ports disposed side by side as ports from each of which the cooling air is delivered into the space. A first delivery port included in the three delivery ports is located such that the center of the first delivery port is disposed substantially at a position aligned with the optical axis of the arc tube. Second and third delivery ports included in the three delivery ports are disposed in the vicinity of one and the other sides of the first delivery port, respectively, with respect to the optical axis.
摘要:
It is required for a gas turbine combustor to exhaust low NOx. The gas turbine combustor is provided with a combustion tube which has a cooling passage through which cooling air flows in a double wall structure. The cooling passage has a main cooling air supply opening opened to a side of a combustion zone. The cooling air supplied from the main cooling air supply opening is guided to a direction along an inner wall surface of the combustion tube by a guide. The cooling air flows through the cooling passage inside the combustion tube, and then is reused for film cooling along the inner wall surface. Thus, it is possible to save cooling air. Therefore, a more part of the air supplied from a compressor can be used as air for combustion and it becomes possible to exhaust low NOx.
摘要:
An asynchronous branching module (102) outputs transfer data received in accordance with a handshake protocol to any of branch destinations. An asynchronous arbitration module (101) merges transfer paths of the transfer data. A congestion detection module (111) receives an arbitration result signal from the asynchronous arbitration module (101) and outputs congestion information indicating presence/absence of congestion to a merge source. A congestion avoiding path calculation module (112) receives the congestion information and exclusively performs a process of storing the congestion information into a congestion information storage memory, and a process of making the asynchronous branching module (102) preferentially select, as a transfer branch destination, a branch destination generating no congestion information indicative of the presence of congestion from branch destinations leading to a destination, on the basis of the congestion information and the destination information of the transfer data.
摘要:
An engine generator for driving an air motor to energize an engine is provided which reduces an installation space and facility and running costs. The engine generator (EG) is attached to a fire extinguishing facility (14). The fire extinguishing facility is designed to eject unburnable gas supplied from gas containers (11) and comprises an air motor (10) for driving an engine, and a valve unit (12) designed to drive in response to an instruction signal, control a pressure of the unburnable gas from the gas container and supply the pressure controlled unburnable gas to the air motor (10).
摘要:
Alight source device includes a reflector that reflects light received from an arc tube toward an illumination receiving area, and a housing that houses the reflector to form a space through which cooling air for cooling the arc tube flows. The housing has three delivery ports disposed side by side as ports from each of which the cooling air is delivered into the space. A first delivery port included in the three delivery ports is located such that the center of the first delivery port is disposed substantially at a position aligned with the optical axis of the arc tube. Second and third delivery ports included in the three delivery ports are disposed in the vicinity of one and the other sides of the first delivery port, respectively, with respect to the optical axis.
摘要:
A fuel nozzle for a gas turbine combustor includes: an internal cylinder; a burner cylinder concentrically provided on the outer circumference of the internal cylinder in the vicinity of its distal end to surround the distal end portion of the internal cylinder; an air passage provided between the burner cylinder and the internal cylinder for delivering combustion air; a space provided at an axial center of the internal cylinder and extending in the axial direction of the internal cylinder; a plurality of inner passages provided at approximately equal intervals in the circumferential direction of the internal cylinder for injecting fluid through its distal end portion; and at least one communication portion provided on the upstream side of the distal end portion of the internal cylinder and extending from the outer wall of the internal cylinder toward the inner side in the radial direction to communicate with the space.
摘要:
To provide a dynamic image receiving apparatus which receives dynamic image streams coded with inter-frame prediction such as MPEG from a plurality of channels, and collects the dynamic image streams containing intra-frame coded pictures from each channel in a short time. The dynamic image receiving apparatus includes: a time information accumulative processing device which accumulates code receiving time of the intra-frame coded picture of the dynamic image stream, and periodicity time information containing one of or both of presentation time information and decoding time information contained in the dynamic image stream for each dynamic image stream of the plurality of channels; code receiving time predicting devices which predict the code receiving time of the intra-frame coded pictures based on the periodicity time information; and a channel selection control device which controls channel selection of the dynamic image stream to be received based on the predicted code receiving time information.
摘要:
A liquid crystal display device includes a panel having pixel electrodes arranged at intersections of a plurality of signal lines via switching elements for transmitting display data and a plurality of scanning lines for transmitting control signals, and a control circuit for controlling the panel. The liquid crystal panel is divided into first pixel regions and second pixel regions adjacent to the first pixel regions. The control circuit carries out impulse driving in which the control signals transmitted to each of the scanning lines are activated two times in one frame period for displaying an image. The control circuit writes the display data in either one of the pixel regions and writes reset data in the other pixel regions when the control signals are activated once of the two times. By writing the reset data in the pixel regions, the display data written in an immediately preceding frame are reset. In consecutive frames, the display data written in the pixel regions are always reset in one frame period. Therefore, blurring in a moving image can be alleviated. Since writing the display data and the reset data is carried out separately in the first pixel regions and in the second pixel regions, flicker is prevented from occurring in a display screen.