Atmospheric pressure, elevated temperature gas desorption apparatus
    1.
    发明授权
    Atmospheric pressure, elevated temperature gas desorption apparatus 失效
    大气压,高温气体解吸装置

    公开(公告)号:US5482524A

    公开(公告)日:1996-01-09

    申请号:US285421

    申请日:1994-08-03

    摘要: An atmospheric pressure, elevated temperature gas desorption apparatus which enables quanitiative analysis of impurities absorbed in or on the surface of a solid sample (semiconductor wafer, optical disc, etc.) is disclosed. The atmospheric pressure, elevated temperature gas desorption apparatus for desorbing impurities absorbed in or on the surface of a plate-like solid sample 18 into a carrier gas 19 in a chamber 6 under an atmospheric pressure while increasing the temperature of the solid sample 18 includes a desorption room 7A provided in the chamber 6 and connected through to a first gas supply system 1 for supplying the carrier gas 19, for desorbing impurities absorbed in or on the surface of the solid sample 18 into the carrier gas 19. A sample support room 7B is provided in the chamber 6 and is separated from the desorption room 7A by a partition member 6A. The solid sample 18 is in close contact with the partition member 6A. A heater 8 for heating the solid sample 18 is in close contact with the partition member 6A. A reserve room 9 is connected to the sample support room 7B and to a second gas supply system 13 for supplying a purge gas.

    摘要翻译: 公开了一种大气压高温气体解吸装置,其能够对固体样品(半导体晶片,光盘等)表面中或表面上吸收的杂质进行量化分析。 吸附在板状固体样品18中的表面上或其上的杂质的大气压高温气体解吸装置在大气压下在室6中的载气19中同时增加固体样品18的温度包括 解吸室7A设置在室6中,并连接到用于供给载气19的第一气体供应系统1,用于将吸收在固体样品18中或其表面上的杂质解吸到载体气体19中。样品支撑室7B 设置在室6中,并通过分隔构件6A与解吸室7A分离。 固体样品18与分隔构件6A紧密接触。 用于加热固体样品18的加热器8与分隔构件6A紧密接触。 预备室9连接到样品支撑室7B和用于供给吹扫气体的第二气体供给系统13。

    Atmospheric pressure compensating means for an engine intake system
    3.
    发明授权
    Atmospheric pressure compensating means for an engine intake system 失效
    用于发动机进气系统的大气压力补偿装置

    公开(公告)号:US3943899A

    公开(公告)日:1976-03-16

    申请号:US457546

    申请日:1974-04-03

    CPC分类号: F02M23/09 Y02T10/146

    摘要: Atmospheric pressure compensating means for an engine intake system, which includes an air bypass passage extending between the upstream side and downstream side of a throttle valve in an engine intake passage, and a control valve provided in the bypass passage for controlling the bypass passage area in accordance with pressure difference between the atmospheric pressure and suction pressure in said intake passage so that said passage area is increased in response to a decrease in said pressure difference.

    摘要翻译: 一种用于发动机进气系统的大气压力补偿装置,包括在发动机进气通道中的节流阀的上游侧和下游侧之间延伸的空气旁路通道和设置在旁路通道中的控制阀,用于控制旁通通道面积 根据所述进气通道中的大气压力和吸入压力之间的压力差,使得所述通道面积响应于所述压力差的减小而增加。