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公开(公告)号:US07851278B2
公开(公告)日:2010-12-14
申请号:US12000599
申请日:2007-12-14
申请人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
发明人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
CPC分类号: H01L31/0203 , H01L27/1446 , H01L27/14618 , H01L31/048 , H01L2924/0002 , Y02E10/50 , H01L2924/00
摘要: The present invention provides a semiconductor device formed over an insulating substrate, typically a semiconductor device having a structure in which mounting strength to a wiring board can be increased in an optical sensor, a solar battery, or a circuit using a TFT, and which can make it mount on a wiring board with high density, and further a method for manufacturing the same. According to the present invention, in a semiconductor device, a semiconductor element is formed on an insulating substrate, a concave portion is formed on a side face of the semiconductor device, and a conductive film electrically connected to the semiconductor element is formed in the concave portion.
摘要翻译: 本发明提供一种半导体器件,其形成在绝缘基板上,通常是半导体器件,其具有可以在光学传感器,太阳能电池或使用TFT的电路中增加布线板的安装强度的结构,并且其可以 使其安装在高密度的布线板上,并且还提供其制造方法。 根据本发明,在半导体器件中,半导体元件形成在绝缘基板上,在半导体器件的侧面形成有凹部,与半导体元件电连接的导电膜形成在凹部 一部分。
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公开(公告)号:US07335951B2
公开(公告)日:2008-02-26
申请号:US10957747
申请日:2004-10-05
申请人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
发明人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
IPC分类号: H01L27/01
CPC分类号: H01L31/0203 , H01L27/1446 , H01L27/14618 , H01L31/048 , H01L2924/0002 , Y02E10/50 , H01L2924/00
摘要: The present invention provides a semiconductor device formed over an insulating substrate, typically a semiconductor device having a structure in which mounting strength to a wiring board can be increased in an optical sensor, a solar battery, or a circuit using a TFT, and which can make it mount on a wiring board with high density, and further a method for manufacturing the same. According to the present invention, in a semiconductor device, a semiconductor element is formed on an insulating substrate, a concave portion is formed on a side face of the semiconductor device, and a conductive film electrically connected to the semiconductor element is formed in the concave portion.
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公开(公告)号:US08242585B2
公开(公告)日:2012-08-14
申请号:US12965367
申请日:2010-12-10
申请人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
发明人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
IPC分类号: H01L29/06 , H01L31/0352
CPC分类号: H01L31/0203 , H01L27/1446 , H01L27/14618 , H01L31/048 , H01L2924/0002 , Y02E10/50 , H01L2924/00
摘要: The present invention provides a semiconductor device formed over an insulating substrate, typically a semiconductor device having a structure in which mounting strength to a wiring board can be increased in an optical sensor, a solar battery, or a circuit using a TFT, and which can make it mount on a wiring board with high density, and further a method for manufacturing the same. According to the present invention, in a semiconductor device, a semiconductor element is formed on an insulating substrate, a concave portion is formed on a side face of the semiconductor device, and a conductive film electrically connected to the semiconductor element is formed in the concave portion.
摘要翻译: 本发明提供一种半导体器件,其形成在绝缘基板上,通常是半导体器件,其具有可以在光学传感器,太阳能电池或使用TFT的电路中增加布线板的安装强度的结构,并且其可以 使其安装在高密度的布线板上,并且还提供其制造方法。 根据本发明,在半导体器件中,半导体元件形成在绝缘基板上,在半导体器件的侧面形成有凹部,与半导体元件电连接的导电膜形成在凹部 一部分。
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公开(公告)号:US20080108205A1
公开(公告)日:2008-05-08
申请号:US12000599
申请日:2007-12-14
申请人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
发明人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
CPC分类号: H01L31/0203 , H01L27/1446 , H01L27/14618 , H01L31/048 , H01L2924/0002 , Y02E10/50 , H01L2924/00
摘要: The present invention provides a semiconductor device formed over an insulating substrate, typically a semiconductor device having a structure in which mounting strength to a wiring board can be increased in an optical sensor, a solar battery, or a circuit using a TFT, and which can make it mount on a wiring board with high density, and further a method for manufacturing the same. According to the present invention, in a semiconductor device, a semiconductor element is formed on an insulating substrate, a concave portion is formed on a side face of the semiconductor device, and a conductive film electrically connected to the semiconductor element is formed in the concave portion.
摘要翻译: 本发明提供一种半导体器件,其形成在绝缘基板上,通常是半导体器件,其具有可以在光学传感器,太阳能电池或使用TFT的电路中增加布线板的安装强度的结构,并且其可以 使其安装在高密度的布线板上,并且还提供其制造方法。 根据本发明,在半导体器件中,半导体元件形成在绝缘基板上,在半导体器件的侧面形成有凹部,与半导体元件电连接的导电膜形成在凹部 一部分。
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公开(公告)号:US20050116310A1
公开(公告)日:2005-06-02
申请号:US10957747
申请日:2004-10-05
申请人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
发明人: Kazuo Nishi , Hiroki Adachi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara , Tomoyuki Aoki , Eiji Sugiyama , Hironobu Takahashi
IPC分类号: H01L23/538 , H01L21/00 , H01L23/00 , H01L27/06 , H01L27/12 , H01L27/14 , H01L27/144 , H01L27/146 , H01L29/78 , H01L29/786 , H01L29/792 , H01L29/861 , H01L31/00 , H01L31/02 , H01L31/0203 , H01L31/0392 , H01L31/048 , H01L31/18
CPC分类号: H01L31/0203 , H01L27/1446 , H01L27/14618 , H01L31/048 , H01L2924/0002 , Y02E10/50 , H01L2924/00
摘要: The present invention provides a semiconductor device formed over an insulating substrate, typically a semiconductor device having a structure in which mounting strength to a wiring board can be increased in an optical sensor, a solar battery, or a circuit using a TFT, and which can make it mount on a wiring board with high density, and further a method for manufacturing the same. According to the present invention, in a semiconductor device, a semiconductor element is formed on an insulating substrate, a concave portion is formed on a side face of the semiconductor device, and a conductive film electrically connected to the semiconductor element is formed in the concave portion.
摘要翻译: 本发明提供一种半导体器件,其形成在绝缘基板上,通常是半导体器件,其具有可以在光学传感器,太阳能电池或使用TFT的电路中增加布线板的安装强度的结构,并且其可以 使其安装在高密度的布线板上,并且还提供其制造方法。 根据本发明,在半导体器件中,半导体元件形成在绝缘基板上,在半导体器件的侧面形成有凹部,与半导体元件电连接的导电膜形成在凹部 一部分。
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公开(公告)号:US07888714B2
公开(公告)日:2011-02-15
申请号:US11226472
申请日:2005-09-15
申请人: Hidekazu Takahashi , Junya Maruyama , Daiki Yamada , Naoto Kusumoto , Kazuo Nishi , Hiroki Adachi , Yuusuke Sugawara
发明人: Hidekazu Takahashi , Junya Maruyama , Daiki Yamada , Naoto Kusumoto , Kazuo Nishi , Hiroki Adachi , Yuusuke Sugawara
IPC分类号: H01L31/062
CPC分类号: H01L27/1214 , H01L27/14609 , H01L27/14645 , H01L27/14692
摘要: Considering further promotion of high output and miniaturization of a sensor element, it is an object of the present invention to form a plurality of elements in a limited area so that an area occupied by the element is reduced for integration. It is another object to provide a process which improves the yield of a sensor element. According to the present invention, a sensor element using an amorphous silicon film and an output amplifier circuit constituted by a thin film transistor are formed over a substrate having an insulating surface. In addition, a metal layer for protecting an exposed wire when a photoelectric conversion layer of the sensor element is patterned is provided between the photoelectric conversion layer and the wire connected to the thin film transistor.
摘要翻译: 考虑到传感器元件的高输出和小型化的进一步促进,本发明的目的是在有限的区域中形成多个元件,使得元件占据的面积减小以便集成。 另一个目的是提供一种提高传感器元件的产量的方法。 根据本发明,在具有绝缘表面的基板上形成使用非晶硅膜的传感器元件和由薄膜晶体管构成的输出放大电路。 此外,在光电转换层与连接到薄膜晶体管的导线之间设置用于在传感器元件的光电转换层被图案化时用于保护裸线的金属层。
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公开(公告)号:US20070187790A1
公开(公告)日:2007-08-16
申请号:US11226472
申请日:2005-09-15
申请人: Hidekazu Takahashi , Junya Maruyama , Daiki Yamada , Naoto Kusumoto , Kazuo Nishi , Hiroki Adachi , Yuusuke Sugawara
发明人: Hidekazu Takahashi , Junya Maruyama , Daiki Yamada , Naoto Kusumoto , Kazuo Nishi , Hiroki Adachi , Yuusuke Sugawara
IPC分类号: H01L31/0203
CPC分类号: H01L27/1214 , H01L27/14609 , H01L27/14645 , H01L27/14692
摘要: [Abstract]Considering further promotion of high output and miniaturization of a sensor element, it is an object of the present invention to form a plurality of elements in a limited area so that an area occupied by the element is reduced for integration. It is another object to provide a process which improves the yield of a sensor element. According to the present invention, a sensor element using an amorphous silicon film and an output amplifier circuit constituted by a thin film transistor are formed over a substrate having an insulating surface. In addition, a metal layer for protecting an exposed wire when a photoelectric conversion layer of the sensor element is patterned is provided between the photoelectric conversion layer and the wire connected to the thin film transistor.
摘要翻译: [摘要]考虑到进一步促进传感器元件的高输出和小型化,本发明的目的是在有限的区域中形成多个元件,使得元件占据的面积减小以便集成。 另一个目的是提供一种提高传感器元件的产量的方法。 根据本发明,在具有绝缘表面的基板上形成使用非晶硅膜的传感器元件和由薄膜晶体管构成的输出放大电路。 此外,在光电转换层与连接到薄膜晶体管的导线之间设置用于在传感器元件的光电转换层被图案化时用于保护裸线的金属层。
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公开(公告)号:US08258512B2
公开(公告)日:2012-09-04
申请号:US12752388
申请日:2010-04-01
申请人: Kazuo Nishi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara
发明人: Kazuo Nishi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara
IPC分类号: H01L29/04
CPC分类号: H01L27/14665 , H01L27/14632 , H01L27/14634 , H01L27/14636 , H01L27/1469 , H01L27/14692
摘要: An object of the present invention to provide a semiconductor device manufactured in short time by performing the step of forming the thin film transistor and the step of forming the photoelectric conversion layer in parallel, and to provide a manufacturing process thereof. According to the present invention, a semiconductor device is manufactured in such a way that a thin film transistor is formed over a first substrate, a photoelectric conversion element is formed over a second substrate, and the thin film transistor and the photoelectric conversion element are connected electrically by sandwiching a conductive layer between the first and second substrates opposed to each other so that the thin film transistor and the photoelectric conversion element are located between the first and second substrates. Thus, a method for manufacturing a semiconductor device which suppresses the increase in the number of steps and which increases the throughput can be provided.
摘要翻译: 本发明的目的在于提供一种通过进行薄膜晶体管的形成工序和并联形成光电转换层的工序,在短时间内制造的半导体器件,并提供其制造工艺。 根据本发明,制造半导体器件,使得在第一衬底上形成薄膜晶体管,在第二衬底上形成光电转换元件,并且连接薄膜晶体管和光电转换元件 通过将导电层夹在彼此相对的第一和第二基板之间,使得薄膜晶体管和光电转换元件位于第一和第二基板之间。 因此,可以提供一种制造半导体器件的方法,该方法抑制步骤数量的增加并增加通过量。
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公开(公告)号:US20080001148A1
公开(公告)日:2008-01-03
申请号:US11579141
申请日:2005-05-16
申请人: Kazuo Nishi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara
发明人: Kazuo Nishi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara
CPC分类号: H01L27/14665 , H01L27/14632 , H01L27/14634 , H01L27/14636 , H01L27/1469 , H01L27/14692
摘要: An object of the present invention to provide a semiconductor device manufactured in short time by performing the step of forming the thin film transistor and the step of forming the photoelectric conversion layer in parallel, and to provide a manufacturing process thereof. According to the present invention, a semiconductor device is manufactured in such a way that a thin film transistor is formed over a first substrate, a photoelectric conversion element is formed over a second substrate, and the thin film transistor and the photoelectric conversion element are connected electrically by sandwiching a conductive layer between the first and second substrates opposed to each other so that the thin film transistor and the photoelectric conversion element are located between the first and second substrates. Thus, a method for manufacturing a semiconductor device which suppresses the increase in the number of steps and which increases the throughput can be provided.
摘要翻译: 本发明的目的在于提供一种通过进行薄膜晶体管的形成工序和并联形成光电转换层的工序,在短时间内制造的半导体器件,并提供其制造工艺。 根据本发明,制造半导体器件,使得在第一衬底上形成薄膜晶体管,在第二衬底上形成光电转换元件,并且连接薄膜晶体管和光电转换元件 通过将导电层夹在彼此相对的第一和第二基板之间,使得薄膜晶体管和光电转换元件位于第一和第二基板之间。 因此,可以提供一种制造半导体器件的方法,该方法抑制步骤数量的增加并增加通过量。
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公开(公告)号:US07691686B2
公开(公告)日:2010-04-06
申请号:US11579141
申请日:2005-05-16
申请人: Kazuo Nishi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara
发明人: Kazuo Nishi , Junya Maruyama , Naoto Kusumoto , Yuusuke Sugawara
CPC分类号: H01L27/14665 , H01L27/14632 , H01L27/14634 , H01L27/14636 , H01L27/1469 , H01L27/14692
摘要: An object of the present invention to provide a semiconductor device manufactured in short time by performing the step of forming the thin film transistor and the step of forming the photoelectric conversion layer in parallel, and to provide a manufacturing process thereof. According to the present invention, a semiconductor device is manufactured in such a way that a thin film transistor is formed over a first substrate, a photoelectric conversion element is formed over a second substrate, and the thin film transistor and the photoelectric conversion element are connected electrically by sandwiching a conductive layer between the first and second substrates opposed to each other so that the thin film transistor and the photoelectric conversion element are located between the first and second substrates. Thus, a method for manufacturing a semiconductor device which suppresses the increase in the number of steps and which increases the throughput can be provided.
摘要翻译: 本发明的目的在于提供一种通过进行薄膜晶体管的形成工序和并联形成光电转换层的工序,在短时间内制造的半导体器件,并提供其制造工艺。 根据本发明,制造半导体器件,使得在第一衬底上形成薄膜晶体管,在第二衬底上形成光电转换元件,并且连接薄膜晶体管和光电转换元件 通过将导电层夹在彼此相对的第一和第二基板之间,使得薄膜晶体管和光电转换元件位于第一和第二基板之间。 因此,可以提供一种制造半导体器件的方法,该方法抑制步骤数量的增加并增加通过量。
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