公开(公告)号：US5416426A

公开(公告)日：1995-05-16

申请号：US176116

申请日：1993-12-30

申请人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

发明人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

IPC分类号： G01R19/00 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/00

CPC分类号： G01R31/305

摘要： A method of measuring a voltage with an electron beam apparatus considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.

摘要翻译： 用电子束装置测量电压的方法考虑到S曲线的变化引起的会聚因子的变化以及随机扫描测量相位的二次电子信号电平的误差，以准确地 测量电压。 该方法测量样品上的电压测量点的电压，通过将平均值为0 V的探针电压叠加在测量电压上与测量电压无关，准备分析电压，用分析仪测量二次电子信号电平 根据二次电子信号电平和探针电压之间的相关关系，根据探头电压的自相关计算S曲线周围设置的限幅电平周围的收敛系数，并根据收敛因数更新分析电压， 从而更新测量的电压。

公开(公告)号：US5300880A

公开(公告)日：1994-04-05

申请号：US854531

申请日：1992-03-19

申请人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

发明人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

IPC分类号： G01R19/00 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/00 ,  G01N23/00

CPC分类号： G01R31/305

摘要： A method of measuring a voltage with an electron beam apparatus considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.

摘要翻译： 用电子束装置测量电压的方法考虑到S曲线的变化引起的会聚因子的变化以及随机扫描测量相位的二次电子信号电平的误差，以准确地 测量电压。 该方法测量样品上的电压测量点的电压，通过将平均值为0 V的探针电压叠加在测量电压上与测量电压无关，准备分析电压，用分析仪测量二次电子信号电平 根据二次电子信号电平和探针电压之间的相关关系，根据探头电压的自相关计算S曲线周围设置的限幅电平周围的收敛系数，并根据收敛因数更新分析电压， 从而更新测量的电压。

公开(公告)号：US5517028A

公开(公告)日：1996-05-14

申请号：US341103

申请日：1994-11-18

申请人： Akio Ito ,  Hazuhiro Kakazawa ,  Takayuki Anbe

发明人： Akio Ito ,  Hazuhiro Kakazawa ,  Takayuki Anbe

IPC分类号： H01J37/10 ,  G01R31/307 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/268 ,  G01R31/307

摘要： An electron beam apparatus comprises, inside of an objective lens for focussing a primary electron beam e1 and irradiating it on a sample surface, a secondary electron energy analyzer having a retarding mesh electrode for analyzing the energy of a secondary electron e2 emitted from a point on the sample surface at which the primary electron beam e1 is irradiated. The secondary electron energy analyzer comprises a collimation unit for forming one or more electrostatic lenses by a nonuniform electrical field distribution and for having an electrostatic lens collimate the trajectory of a secondary electron e2 for its injection into a retarding grids (mesh electrode). The collimation unit comprises at least three cylindrical electrodes positioned between the sample surface and the retarding grid (mesh electrode) and numbered first, second and third from the one closest to the sample surface. An external power supply module applies an appropriate voltage to each of these cylindrical electrodes for having each duo of neighboring cylindrical electrodes form an electrostatic lens.

摘要翻译： 电子束装置包括在用于聚焦一次电子束e1并将其照射在样品表面上的物镜内部的二次电子能量分析器，其具有用于分析从一点上发射的二次电子e2的能量的延迟网孔电极 一次电子束e1被照射的样品表面。 二次电子能量分析仪包括：准直单元，用于通过不均匀的电场分布形成一个或多个静电透镜，并且具有使静电透镜准直二次电子e2的轨迹以将其注入延迟网格（网状电极）。 准直单元包括位于样品表面和延迟格栅（网状电极）之间的至少三个圆柱形电极，并且距离最接近样品表面的第一，第二和第三编号。 外部电源模块对这些圆柱形电极中的每一个施加适当的电压，以使相邻圆柱形电极的每个二极管形成静电透镜。