公开(公告)号：US5416426A

公开(公告)日：1995-05-16

申请号：US176116

申请日：1993-12-30

申请人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

发明人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

IPC分类号： G01R19/00 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/00

CPC分类号： G01R31/305

摘要： A method of measuring a voltage with an electron beam apparatus considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.

摘要翻译： 用电子束装置测量电压的方法考虑到S曲线的变化引起的会聚因子的变化以及随机扫描测量相位的二次电子信号电平的误差，以准确地 测量电压。 该方法测量样品上的电压测量点的电压，通过将平均值为0 V的探针电压叠加在测量电压上与测量电压无关，准备分析电压，用分析仪测量二次电子信号电平 根据二次电子信号电平和探针电压之间的相关关系，根据探头电压的自相关计算S曲线周围设置的限幅电平周围的收敛系数，并根据收敛因数更新分析电压， 从而更新测量的电压。

公开(公告)号：US5300880A

公开(公告)日：1994-04-05

申请号：US854531

申请日：1992-03-19

申请人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

发明人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

IPC分类号： G01R19/00 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/00 ,  G01N23/00

CPC分类号： G01R31/305

摘要： A method of measuring a voltage with an electron beam apparatus considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.

摘要翻译： 用电子束装置测量电压的方法考虑到S曲线的变化引起的会聚因子的变化以及随机扫描测量相位的二次电子信号电平的误差，以准确地 测量电压。 该方法测量样品上的电压测量点的电压，通过将平均值为0 V的探针电压叠加在测量电压上与测量电压无关，准备分析电压，用分析仪测量二次电子信号电平 根据二次电子信号电平和探针电压之间的相关关系，根据探头电压的自相关计算S曲线周围设置的限幅电平周围的收敛系数，并根据收敛因数更新分析电压， 从而更新测量的电压。

公开(公告)号：US5825912A

公开(公告)日：1998-10-20

申请号：US783304

申请日：1997-01-10

申请人： Kazuo Okubo ,  Hironori Teguri ,  Akio Ito

发明人： Kazuo Okubo ,  Hironori Teguri ,  Akio Ito

IPC分类号： G01R31/307 ,  G06K9/46 ,  G06T7/00 ,  G21K1/00

CPC分类号： G06T7/0006 ,  G01R31/307 ,  G06K9/4609 ,  G06T7/0044 ,  G06T7/0085 ,  G06T2207/10061 ,  G06T2207/30121 ,  G06T2207/30148

摘要： An Electron Beam Tester which corrects deformation of a secondary electron image produced from scanning a sample with an electron beam. The secondary electron image is stored in a storage unit. Luminance data of the stored image is accumulated to obtain a projected luminance distribution. The projected luminance distribution data is then analyzed by a parallelism evaluation unit to obtain a rotation angle. Then the rotation angle is used to determine maximum parallelism and correct deformation of the secondary electron image by providing deflection control which transforms the deflectors .

摘要翻译： 一种电子束测试仪，用于校正用电子束扫描样品产生的二次电子图像的变形。 二次电子图像被存储在存储单元中。 存储的图像的亮度数据被累积以获得投影亮度分布。 然后通过平行度评估单元分析投影亮度分布数据以获得旋转角度。 然后通过提供变换偏转器的偏转控制，旋转角度用于确定二次电子图像的最大平行度和正确变形。

公开(公告)号：US5872862A

公开(公告)日：1999-02-16

申请号：US810736

申请日：1997-02-06

申请人： Kazuo Okubo ,  Hironori Teguri ,  Akio Ito

发明人： Kazuo Okubo ,  Hironori Teguri ,  Akio Ito

IPC分类号： G01R31/307 ,  G06K9/46 ,  G06T7/00 ,  G06K9/00

CPC分类号： G06T7/0006 ,  G01R31/307 ,  G06K9/4609 ,  G06T7/0044 ,  G06T7/0085 ,  G06T2207/10061 ,  G06T2207/30121 ,  G06T2207/30148

摘要： An electron beam tester scans a sample with an electron beam to provide a secondary electron image, matches wiring patterns of the secondary electron image with wiring patterns prepared from CAD data, measures voltages of the wiring patterns, and corrects deformation of the secondary electron image. The electron beam tester comprises a pattern matching unit, a wiring pattern tester, a secondary electron image corrector, a wiring pattern inspection unit, and a pattern matching processor. The pattern matching unit simply and quickly matches the wiring patterns of the secondary electron image with the wiring patterns prepared from the CAD data. The wiring pattern tester detects slippage between layers of a multilayered semiconductor chip and correctly positions the electron beam on the chip during a pattern matching operation. The secondary electron image corrector accurately and automatically corrects deformation of the secondary electron image. The wiring pattern inspection unit simply and correctly determines a threshold used for preparing a binary image, to correctly carry out a pattern matching operation. The pattern matching processor accurately detects edges out of a blurred image, to correctly carry out a pattern matching operation.

摘要翻译： 电子束测试仪用电子束扫描样品以提供二次电子图像，使二次电子图像的配线图案与由CAD数据制备的布线图匹配，测量布线图案的电压并校正二次电子图像的变形。 电子束测试器包括图案匹配单元，布线图案测试器，二次电子图像校正器，布线图案检查单元和图案匹配处理器。 图案匹配单元简单快速地将二次电子图像的布线图案与从CAD数据准备的布线图案相匹配。 布线图案测试仪在模式匹配操作期间检测多层半导体芯片的层之间的滑动并且将电子束正确地放置在芯片上。 二次电子图像校正器精确自动地校正二次电子图像的变形。 布线图案检查单元简单且正确地确定用于准备二值图像的阈值，以正确地执行模式匹配操作。 模式匹配处理器准确地检测模糊图像中的边缘，以正确地执行模式匹配操作。

公开(公告)号：US5600734A

公开(公告)日：1997-02-04

申请号：US357983

申请日：1994-12-19

申请人： Kazuo Okubo ,  Hironori Teguri ,  Akio Ito

发明人： Kazuo Okubo ,  Hironori Teguri ,  Akio Ito

IPC分类号： G01R31/307 ,  G06K9/46 ,  G06T7/00 ,  G06K9/00

CPC分类号： G06T7/0006 ,  G01R31/307 ,  G06K9/4609 ,  G06T7/0044 ,  G06T7/0085 ,  G06T2207/10061 ,  G06T2207/30121 ,  G06T2207/30148

摘要： An electron beam tester scans a sample with an electron beam to provide a secondary electron image, matches wiring patterns of the secondary electron image with wiring patterns prepared from CAD data, measures voltages of the wiring patterns, and corrects deformation of the secondary electron image. The electron beam tester comprises a pattern matching unit, a wiring pattern tester, a secondary electron image corrector, a wiring pattern inspection unit, and a pattern matching processor. The pattern matching unit simply and quickly matches the wiring patterns of the secondary electron image with the wiring patterns prepared from the CAD data. The wiring pattern tester detects slippage between layers of a multilayered semiconductor chip and correctly positions the electron beam on the chip during a pattern matching operation. The secondary electron image corrector accurately and automatically corrects deformation of the secondary electron image. The wiring pattern inspection unit simply and correctly determines a threshold used for preparing a binary image, to correctly carry out a pattern matching operation. The pattern matching processor accurately detects edges out of a blurred image, to correctly carry out a pattern matching operation.

摘要翻译： 电子束测试仪用电子束扫描样品以提供二次电子图像，使二次电子图像的配线图案与由CAD数据制备的布线图匹配，测量布线图案的电压并校正二次电子图像的变形。 电子束测试器包括图案匹配单元，布线图案测试器，二次电子图像校正器，布线图案检查单元和图案匹配处理器。 图案匹配单元简单快速地将二次电子图像的布线图案与从CAD数据准备的布线图案相匹配。 布线图案测试仪在模式匹配操作期间检测多层半导体芯片的层之间的滑动并且将电子束正确地放置在芯片上。 二次电子图像校正器精确自动地校正二次电子图像的变形。 布线图案检查单元简单且正确地确定用于准备二值图像的阈值，以正确地执行模式匹配操作。 模式匹配处理器准确地检测模糊图像中的边缘，以正确地执行模式匹配操作。

公开(公告)号：US5331275A

公开(公告)日：1994-07-19

申请号：US987959

申请日：1992-12-09

申请人： Kazuyuki Ozaki ,  Shinichi Wakana ,  Yoshiro Goto ,  Akio Ito ,  Kazuo Okubo ,  Soichi Hama ,  Akira Fujii ,  Yoko Sato

发明人： Kazuyuki Ozaki ,  Shinichi Wakana ,  Yoshiro Goto ,  Akio Ito ,  Kazuo Okubo ,  Soichi Hama ,  Akira Fujii ,  Yoko Sato

IPC分类号： G01R1/067 ,  G01R31/26 ,  G01R1/073 ,  G01R31/02

CPC分类号： G01Q20/04 ,  B82Y35/00 ,  G01Q60/30 ,  G01R1/067 ,  G01R1/06705 ,  G01R1/06711 ,  G01R1/06727 ,  Y10S977/852

摘要： A probing device includes a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, a unit for moving the moving member relatively to the sample, a transducing unit for generating information of voltage or current by means of light, a connecting unit having a low electric resistance, for connecting the transducing unit and the end portion of the probe, a detecting unit for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring unit for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting unit, by way of the transducing unit when the probe is contacted with the measurement point. By the constitution, it is possible to realize a voltage measurement with both an enhanced space resolution and an enhanced time resolution. Also, by using the probing device in an integrated circuit testing apparatus or system, it is possible to realize a stable probing to a minute wiring without increasing an electrical load with respect to the minute wiring and thus contribute to an improvement in the precision of a voltage measurement.

摘要翻译： 探测装置包括微小探针，其中至少一个端部由导电材料形成，悬臂具有一个连接有探针的端部，另一端固定在可沿着X方向移动相对于样品的移动部件 ，Y和Z，用于相对于样品移动移动部件的单元，用于通过光产生电压或电流的信息的转换单元，具有低电阻的连接单元，用于连接换能单元和端部 的检测单元，用于通过所述移动构件与所述样本的相对接近来检测由所述探针和所述样本之间产生的力而在所述悬臂中产生的物理量的变化的检测单元，以及用于测量所述电极的电压的电压测量单元 在探针与测量点接触时，通过换能单元，基于检测单元的输出确定样本上的测量点。 通过该结构，可以实现具有增强的空间分辨率和增强的时间分辨率的电压测量。 此外，通过在集成电路检测装置或系统中使用探测装置，可以在不增加相对于微小布线的电负载的情况下实现对微小布线的稳定探测，并且因此有助于提高 电压测量。

公开(公告)号：US20090115275A1

公开(公告)日：2009-05-07

申请号：US12256013

申请日：2008-10-22

申请人： Tetsuya Higashihara ,  Makoto Hasegawa ,  Kazuo Okubo

发明人： Tetsuya Higashihara ,  Makoto Hasegawa ,  Kazuo Okubo

IPC分类号： H02K5/167 ,  H02K15/14

CPC分类号： H02K5/1675 ,  Y10T29/49009

摘要： A spindle motor, comprising a base having a cylindrical drawn portion formed by plastic working, a sleeve that is inserted in the drawn portion, a shaft that is inserted in a state of being rotatable relative to the sleeve, and a lubricant that fills the gap between the sleeve and the shaft, in which the sleeve is affixed with an adhesive agent to the drawn portion inner periphery, wherein there are adhesive reservoirs around the inner periphery of the drawn portion. These adhesive reservoirs are formed during a series of plastic working steps in which the cylindrical drawn portion is formed.

摘要翻译： 一种主轴电动机，包括具有通过塑性加工形成的圆柱形拉伸部分的基部，插入到拉伸部分中的套筒，以相对于套筒可旋转的状态插入的轴以及填充间隙的润滑剂 在套筒和轴之间，其中套筒用粘合剂固定到拉伸部分的内周边，其中在拉伸部分的内周周围存在粘合剂储存器。 这些粘合剂储存器在其中形成有圆柱形拉伸部分的一系列塑料加工步骤中形成。

公开(公告)号：US07432608B2

公开(公告)日：2008-10-07

申请号：US10489313

申请日：2004-01-07

申请人： Kazuo Okubo ,  Kazumichi Kato ,  Yuzo Takakado ,  Hirosuke Imabayashi ,  Toshio Miki ,  Masami Morita ,  Hideki Tamura ,  Katsuyoshi Nakano ,  Yushi Sato ,  Tomoyuki Matsunaga ,  Tetsuyuki Kimura ,  Nobuhiro Saito ,  Tetsunari Kobayakawa ,  Kenji Yamaguchi

发明人： Kazuo Okubo ,  Kazumichi Kato ,  Yuzo Takakado ,  Hirosuke Imabayashi ,  Toshio Miki ,  Masami Morita ,  Hideki Tamura ,  Katsuyoshi Nakano ,  Yushi Sato ,  Tomoyuki Matsunaga ,  Tetsuyuki Kimura ,  Nobuhiro Saito ,  Tetsunari Kobayakawa ,  Kenji Yamaguchi

IPC分类号： B23K9/10 ,  F02N15/06

CPC分类号： F03D9/25 ,  F03D3/005 ,  F03D9/11 ,  H02K7/003 ,  H02K7/10 ,  H02K7/183 ,  Y02E10/721 ,  Y02E10/74 ,  Y02P70/523 ,  Y10T74/13

摘要： The present invention provides an electric generator for achieving the cost reduction of the electric generator itself from the view point of the structure of the electric generator, and the cost reduction of the generation of electricity from the view point of the performance of the electric generator, and a power supply equipment for use in this electric generator.

摘要翻译： 本发明提供一种用于从发电机的结构的观点来实现发电机本身的成本降低的发电机，以及从发电机的性能的观点出发的电力的成本降低， 以及用于该发电机的供电设备。

公开(公告)号：US20060196594A1

公开(公告)日：2006-09-07

申请号：US10549470

申请日：2004-03-19

申请人： Masaru Shimizu ,  Kazuo Okubo ,  Kikuo Yoneoka

发明人： Masaru Shimizu ,  Kazuo Okubo ,  Kikuo Yoneoka

IPC分类号： B32B37/00

CPC分类号： B65H23/0204 ,  A61F13/15747 ,  B65H23/038 ,  B65H45/09

摘要： A folding apparatus of the present invention comprises a folding section 40 for folding a web W in two so that opposite side edges W1, W2 of the web W are in a predetermined positional relationship with respect to each other; a correction section 90 for correcting a moving direction of the web W by contacting the web W in the folding section 40; a detecting section 41, 103 for detecting a reference portion W1, W2 of the web to be used as a reference in a web folding operation so as to output positional information regarding a position of the detected reference portion W1, W2; and a control section 3 for controlling the correction section 90 based on the positional information so as to change a state of contact of the contact of the correction section 90 with the web W.

摘要翻译： 本发明的折叠装置包括折叠部分40，用于将卷筒纸W折叠成两个，使得卷筒纸W的相对侧边缘W 1，W 2相对于彼此处于预定的位置关系; 校正部90，用于通过使折叠部40中的幅材W接触来校正幅材W的移动方向; 用于检测在卷筒纸折叠操作中用作基准的纸幅的基准部分W 1，W 2的检测部分41,103，以输出关于检测到的基准部分W 1，W 2的位置的位置信息; 以及控制部分3，用于基于位置信息控制校正部分90，以便改变校正部分90与纸幅W的接触的接触状态。

公开(公告)号：US06364922B1

公开(公告)日：2002-04-02

申请号：US09611669

申请日：2000-07-06

申请人： Akira Tanaka ,  Kazuo Okubo ,  Yoko Suzuki

发明人： Akira Tanaka ,  Kazuo Okubo ,  Yoko Suzuki

IPC分类号： B65D8538

CPC分类号： H01L21/67772 ,  H01L21/67393

摘要： A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

摘要翻译： 一种基材输送容器，其具有载体盒，该载体盒包括容器主体和门，其密封地密封地覆盖设置在容器主体前部的开口。 分区在载体箱中形成循环流动路径。 循环流路具有空气朝向基板流动的流路和空气朝向风扇流动的流路。 衬底承载部分设置在空气朝向衬底流动的流动路径中，以便衬底的主表面近似平行于空气流向衬底的流动路径。 颗粒去除过滤器和气态杂质捕获过滤器被放置在空气流向基板的流动路径中的基板承载部分的上游侧。 用于驱动风扇的风扇电动机被并入载体箱中以形成用于循环通过循环流路的气流。