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1.发明申请公开(公告)号：US20050018955A1
公开(公告)日：2005-01-27
申请号：US10500086
申请日：2002-12-12
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
IPC分类号： G02B6/35 , H01L25/065 , H04Q11/00 , G02B6/26
CPC分类号： G02B6/3596 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3582 , G02B6/3584 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0058
摘要： The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.
摘要翻译： 导光基板2具有反射镜容纳槽24和光导。 根据反射镜31相对于凹槽24的前进和后退，导光板将输入到输入端口的光输入到选定的输出端口。致动器基板4具有反射镜31和将反射镜31放置在其中的致动器 反射镜朝向基板4的状态，或反射镜从基板4突出的状态。导光基板2和致动器基板4使用对准标记对齐，并且与间隔件3相接合， 当反射镜31朝向基板4被拉入时，反射镜31从凹槽24缩回，并且当反射镜31从基板4突出时，反射镜31前进到凹槽24中。该对准在所有 反射镜31被朝向基板4拉入。
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公开(公告)号：US07092593B2
公开(公告)日：2006-08-15
申请号：US11099253
申请日：2005-04-04
IPC分类号： G02B6/26
CPC分类号： G02B6/358 , G02B6/3516 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0858 , H02K33/18 , H02K41/0354
摘要： A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.
摘要翻译： 可移动板通过弯曲部件固定到基板上，并可相对于基板上下移动。 基板用作固定电极。 可移动板具有第二电极部分，其通过施加在这些电极部分和基板上的电压和设置在磁场中的电流路径而在这些电极部分和基板之间产生静电力，并且产生 动力时洛伦兹力。 镜子进入和退出光路。 当可动板从静电力增加的下部位置移动到上部位置时，控制部分控制电流，使得洛伦兹力在向下取向上产生并且当可动板从中间位置移动时逐渐减小 到上位。
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3.发明授权公开(公告)号：US07010200B2
公开(公告)日：2006-03-07
申请号：US10500086
申请日：2002-12-12
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
IPC分类号： G02B6/26
CPC分类号： G02B6/3596 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3582 , G02B6/3584 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0058
摘要： The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.
摘要翻译： 导光基板2具有反射镜容纳槽24和光导。 根据反射镜31相对于凹槽24的前进和后退，导光体将输入到输入端口的光导入所选择的输出端口。 致动器基板4具有将反射镜31置于反射镜朝向基板4的状态的反射镜31和致动器，或反射镜从基板4突出的状态。 导光基板2和致动器基板4使用对准标记对齐并且与间隔件3相接合，使得当反射镜31朝向基板4被拉入时，反射镜31从凹槽24缩回，并且使得反射镜31前进 当反射镜31从基板4突出时，进入凹槽24。 在将所有的反射镜31朝向基板4拉入的状态下进行该对准。
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公开(公告)号：US20050213878A1
公开(公告)日：2005-09-29
申请号：US11099253
申请日：2005-04-04
IPC分类号： B81B3/00 , B81B7/04 , G01P15/125 , G02B6/26 , G02B6/35 , G02B6/42 , G02B26/08 , G02F1/09 , H02K33/18 , H02K41/035
CPC分类号： G02B6/358 , G02B6/3516 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0858 , H02K33/18 , H02K41/0354
摘要： A movable plate 21 is fastened to a substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable plate 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror 12 which advances into and withdraws from the optical path is disposed on the movable plate 21. When the movable plate 21 is caused to move from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate 21 is moving from an intermediate position to the upper position. As a result, the mobility range of the movable part can be expanded without applying a high voltage or sacrificing compact size, and the power consumption can be reduced; furthermore, the reliability in the case of long-term operation can be increased.
摘要翻译： 可移动板21通过挠曲部件27a和27b固定到基板11上，并且可相对于基板11上下移动。 基板11也用作固定电极。 可移动板21具有第二电极部分23a和23b，其可以通过施加在这些电极部分和基板11上的电压而在这些电极部分和基板11之间产生静电力，以及电流通路25， 被设置在磁场中，并且当通电时产生洛伦兹力。 在可动板21上设置有从光路前进和退出的反射镜12。 当可动板21从静电力增加的下部位置移动到上部位置时，控制部分控制电流，使得向下方向产生洛伦兹力并逐渐减小，而可动板21 从中间位置移动到上位置。 结果，可以在不施加高电压或牺牲紧凑尺寸的情况下扩大可移动部件的移动范围，并且可以降低功耗; 此外，可以增加长期运行情况下的可靠性。
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公开(公告)号：US20050163421A1
公开(公告)日：2005-07-28
申请号：US10509012
申请日：2003-03-28
CPC分类号： G01D5/35345 , G01D5/342
摘要： A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.
摘要翻译： 波导型光学器件执行诸如检测插入板相对于凹槽的相对位置的监视。 波导型光学器件包括设置在第一光波导和第二光波导的交叉位置处的槽; 插入板，其设置成可插入到所述凹槽中; 用于施加静态磁场的装置，使得插入板的速度矢量（A）和其磁场矢量（B）的矢量积不为零; 具有电线的悬臂，其中包括布置部分，所述布线部分位于垂直于所述速度矢量和所述磁场矢量的方向上并且支撑所述插入板; 以及用于通过检测在所述电线中感应出的电流来检测所述插入板到所述凹槽的相对位置的装置。
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公开(公告)号：US07006722B2
公开(公告)日：2006-02-28
申请号：US10509012
申请日：2003-03-28
IPC分类号： G02B6/26
CPC分类号： G01D5/35345 , G01D5/342
摘要： A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.
摘要翻译： 波导型光学器件执行诸如检测插入板相对于凹槽的相对位置的监视。 波导型光学器件包括设置在第一光波导和第二光波导的交叉位置处的槽; 插入板，其设置成可插入到所述凹槽中; 用于施加静态磁场的装置，使得插入板的速度矢量（A）和其磁场矢量（B）的矢量积不为零; 具有电线的悬臂，其中包括布置部分，所述布线部分位于垂直于所述速度矢量和所述磁场矢量的方向上并且支撑所述插入板; 以及用于通过检测在所述电线中感应出的电流来检测所述插入板到所述凹槽的相对位置的装置。
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公开(公告)号：US07082251B2
公开(公告)日：2006-07-25
申请号：US10509018
申请日：2003-03-27
IPC分类号： G02B6/00
CPC分类号： G02B6/3572 , G02B6/3514 , G02B6/353 , G02B6/3548 , G02B6/3566 , G02B6/3584 , G02B6/3596
摘要： An optical device is configured such that an insertion plate is held by a flat cantilever having electric wiring, and the flat magnet is placed in such a manner that the magnet faces a surface of the cantilever opposite to the other surface of the cantilever facing an optical waveguide, and that the current flowing through the electric wiring is controlled in this state so that the Lorentz force caused by the interaction between the current and the magnetic field displaces the cantilever to drive the insertion plate, and to insert or remove the insertion plate into or out of the slit provided in the optical waveguide to switch the optical path of signal light or to adjust the quantity of an optical beam.
摘要翻译： 光学装置被构造成使得插入板由具有电布线的平坦悬臂保持，并且平坦磁体以这样的方式放置，使得磁体面对悬臂的与面向光学的悬臂的另一个表面相对的表面 并且在该状态下控制流过电线的电流，使得由电流和磁场之间的相互作用引起的洛伦兹力驱使悬臂驱动插入板，并将插入板插入或移除 或者设置在光波导中的狭缝中，以切换信号光的光路或者调整光束的量。
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公开(公告)号：US20050163428A1
公开(公告)日：2005-07-28
申请号：US10509018
申请日：2003-03-27
CPC分类号： G02B6/3572 , G02B6/3514 , G02B6/353 , G02B6/3548 , G02B6/3566 , G02B6/3584 , G02B6/3596
摘要： An optical device is configured such that an insertion plate is held by a flat cantilever having electric wiring, and the flat magnet is placed in such a manner that the magnet faces a surface of the cantilever opposite to the other surface of the cantilever facing an optical waveguide, and that the current flowing through the electric wiring is controlled in this state so that the Lorentz force caused by the interaction between the current and the magnetic field displaces the cantilever to drive the insertion plate, and to insert or remove the insertion plate into or out of the slit provided in the optical waveguide to switch the optical path of signal light or to adjust the quantity of an optical beam.
摘要翻译： 光学装置被构造成使得插入板由具有电布线的平坦悬臂保持，并且平坦磁体以这样的方式放置，使得磁体面对悬臂的与面向光学的悬臂的另一个表面相对的表面 并且在该状态下控制流过电线的电流，使得由电流和磁场之间的相互作用引起的洛伦兹力驱使悬臂驱动插入板，并将插入板插入或移除 或者设置在光波导中的狭缝中，以切换信号光的光路或者调整光束的量。
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9.发明授权公开(公告)号：US06954562B2
公开(公告)日：2005-10-11
申请号：US10755388
申请日：2004-01-13
CPC分类号： G02B6/3596 , G02B6/132 , G02B6/136 , G02B6/3512 , G02B6/3546 , G02B2006/12097
摘要： A matrix switch of an optical waveguide type which has low transmission loss variations and includes uniform grooves with a deep vertical cross section is provided. A switching part for selecting between a light path extending from an input port of a first set of optical waveguides 111-11m to an output port of the first set of optical waveguides 111-11m and a light path extending from an input port of the first set of optical waveguides 111-11m to an output port of a second set of optical waveguides 121-12n is arranged for insertion into a switching groove arranged at each of the intersections of the first set of optical waveguides 111-11m and the second set of optical waveguides 121-12n. Each of the switching grooves is arranged on an imaginary straight line connecting intersections of the first set of optical waveguides 111-11m and the second set of optical waveguides 121-12n.
摘要翻译： 提供了具有低传输损耗变化并且包括具有深垂直横截面的均匀凹槽的光波导型矩阵开关。 一种切换部件，用于在从第一组光波导11 1〜11 m的输入端口延伸到第一组光学器件的输出端口的光路之间进行选择 波导11 1〜11 3和从第一组光波导11的输入端口延伸的光路11 1〜11＆lt; m 2到第二组光波导12 1〜12 N n的输出端口被布置成插入到布置在每个交点处的切换槽中 第一组光波导11 1〜11 3和第二组光波导12 1〜12 N 2 / >。 每个开关槽布置在连接第一组光波导11 1〜11 2和第二组光波导12组合的交叉点的假想直线上 > 1 n 。
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10.发明授权Photosensitive resin composition and process for forming photo-resist pattern using the same 失效光敏树脂组合物及使用其形成光刻胶图案的方法
公开(公告)号：US4702990A
公开(公告)日：1987-10-27
申请号：US733505
申请日：1985-05-10
CPC分类号： G03F7/094
摘要： The present invention provides a photosensitive resin composition used to form a top resist layer of a multilayer resist system, the composition comprising a photosensitive polyphenylsilsesquioxane represented by the following general formula (I) of: ##STR1## wherein X is selected from the group consisting of acryloyloxymethyl, methacryloyloxymethyl, and cinnamoyloxymethyl; and l, m and n are zero or positive integers but l and m do not take the value of zero simultaneously; and a bisazide compound added to act as a cross-linking agent.The photosensitive resin composition has high sensitivity to UV light and excellent resistance to reactive ion etching under oxygen gas (O.sub.2 RIE).
摘要翻译： 本发明提供一种用于形成多层抗蚀剂体系的顶层抗蚀剂层的感光性树脂组合物，该组合物包含由以下通式（I）表示的感光性聚苯基倍半硅氧烷：其中X选自 由丙烯酰氧基甲基，甲基丙烯酰氧基甲基和肉桂酰氧基甲基组成的组; l，m和n为零或正整数，但l和m不同时取零值; 并加入双叠氮化合物作为交联剂。 感光性树脂组合物对紫外线具有高灵敏度，并且在氧气（O 2 RIE）下具有优异的抗反应离子蚀刻性。
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