Method of controlling mover device
    1.
    发明授权
    Method of controlling mover device 失效
    控制动力装置的方法

    公开(公告)号:US07597531B2

    公开(公告)日:2009-10-06

    申请号:US11044632

    申请日:2005-01-28

    摘要: Embodiments of the invention are directed to a method of controlling a mover device The method includes generating a moving force from a moving force generating unit to move a processing base with respect to a movable base, thereby moving the processing base with respect to a fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base. The method further includes controlling the moving velocity of the processing base with respect to the fixed base.

    摘要翻译: 本发明的实施例涉及一种控制移动器装置的方法。该方法包括从移动力产生单元产生移动力以相对于可移动基座移动处理基座,从而相对于固定基座移动处理基座 作为处理基座相对于可移动基座移动的结果; 通过由从移动力产生单元产生的移动力产生的反作用力使处于移动方向的方向与处理基座的移动方向相反的方向移动到固定基座上,以移动处理基座,使得可移动基座移动 在与固定基座上的处理基座的移动方向相反的方向上。 该方法还包括控制处理基座相对于固定基座的移动速度。

    Mover device and semiconductor manufacturing apparatus and method
    2.
    发明授权
    Mover device and semiconductor manufacturing apparatus and method 有权
    移动装置及半导体制造装置及方法

    公开(公告)号:US07187143B2

    公开(公告)日:2007-03-06

    申请号:US10781756

    申请日:2004-02-20

    IPC分类号: H02P1/00

    CPC分类号: H01L21/67709 Y10T74/15

    摘要: A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.

    摘要翻译: 提供了具有处理基座的移动装置和离子注入机装置,该处理基座高速往复运动而没有不期望的噪声和振动。 动子装置包括:固定基座; 可移动基座,其相对于固定基座线性移动; 处理基座,其相对于所述可动基座线性移动; 主线性电动机,其产生相对于可移动基座移动处理基座的移动力,从而相对于固定基座移动处理基座; 以及速度控制单元,其控制所述处理基座相对于所述固定基座的移动速度。 在这种移动装置中,可移动基座由于由移动力引起的反作用力而移动,以移动处理基座。

    Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device
    3.
    发明申请
    Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device 失效
    移动器装置的方法,移动装置的协同装置,移动装置的协作方法,半导体制造装置,液晶制造装置和机械扫描离子注入装置

    公开(公告)号:US20050188924A1

    公开(公告)日:2005-09-01

    申请号:US11044632

    申请日:2005-01-28

    摘要: A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.

    摘要翻译: 一种控制动子装置的方法,包括:固定基座; 可移动基座,其相对于所述固定基座在直线方向上移动; 处理基座,其相对于可动基座在直线方向上移动,所述线性方向与所述可动基座的线性移动方向平行; 以及设置在所述处理基座和所述可动基座之间并与所述处理基座和所述可动基座协作形成主移动单元的移动力产生单元,包括以下步骤:从所述移动力产生单元产生移动力 相对于可移动基座移动处理基座,从而由于处理基座相对于可移动基座的移动而相对于固定基座移动处理基座; 通过由从移动力产生单元产生的移动力产生的反作用力使处于移动方向的方向与处理基座的移动方向相反的方向移动到固定基座上,以移动处理基座,使得可移动基座移动 在与固定基座上的处理基座的移动方向相反的方向上; 并且控制处理基座相对于固定基座的移动速度。

    Wafer processing system, wafer processing method, and ion implantation system
    4.
    发明授权
    Wafer processing system, wafer processing method, and ion implantation system 有权
    晶圆处理系统,晶圆加工方法和离子注入系统

    公开(公告)号:US08096744B2

    公开(公告)日:2012-01-17

    申请号:US11254854

    申请日:2005-10-21

    IPC分类号: H01L21/677

    摘要: Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process chamber and the vacuum intermediate chamber. Two wafer retaining arms are installed between a platen device in the vacuum process chamber and the vacuum intermediate chamber. The two wafer retaining arms are reciprocatingly movable between the corresponding load lock pedestals and the platen device while passing through the passage opening and crossing with an overpass each other at different levels. By retaining an unprocessed wafer by one of the wafer retaining arms and retaining a processed wafer by the other wafer retaining arm, transfer of the unprocessed wafer from one of the load lock pedestals to the platen device and transfer of the processed wafer from the platen device to the other load lock pedestal are performed simultaneously.

    摘要翻译: 具有负载锁定基座的两个负载锁定室通过真空中间室邻近真空处理室设置。 在真空处理室和真空中间室之间设有通道开口。 两个晶片保持臂安装在真空处理室中的压板装置和真空中间室之间。 两个晶片保持臂在相应的负载锁定基座和压板装置之间可往复运动,同时穿过通道开口并与不同级别的立交桥交叉。 通过用晶片保持臂中的一个保持未加工的晶片并通过另一个晶片保持臂保持经处理的晶片,将未加工的晶片从负载锁定基座之一转移到压板装置,并将经处理的晶片从压板装置 到另一个负载锁定基座同时进行。

    Wafer processing system, wafer processing method, and ion implantation system
    5.
    发明申请
    Wafer processing system, wafer processing method, and ion implantation system 有权
    晶圆处理系统,晶圆加工方法和离子注入系统

    公开(公告)号:US20060182532A1

    公开(公告)日:2006-08-17

    申请号:US11254854

    申请日:2005-10-21

    IPC分类号: B65G1/00

    摘要: Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process chamber and the vacuum intermediate chamber. Two wafer retaining arms are installed between a platen device in the vacuum process chamber and the vacuum intermediate chamber. The two wafer retaining arms are reciprocatingly movable between the corresponding load lock pedestals and the platen device while passing through the passage opening and crossing with an overpass each other at different levels. By retaining an unprocessed wafer by one of the wafer retaining arms and retaining a processed wafer by the other wafer retaining arm, transfer of the unprocessed wafer from one of the load lock pedestals to the platen device and transfer of the processed wafer from the platen device to the other load lock pedestal are performed simultaneously.

    摘要翻译: 具有负载锁定基座的两个负载锁定室通过真空中间室邻近真空处理室设置。 在真空处理室和真空中间室之间设有通道开口。 两个晶片保持臂安装在真空处理室中的压板装置和真空中间室之间。 两个晶片保持臂在相应的负载锁定基座和压板装置之间可往复运动,同时穿过通道开口并与不同级别的立交桥交叉。 通过用晶片保持臂中的一个保持未加工的晶片并通过另一个晶片保持臂保持经处理的晶片,将未加工的晶片从负载锁定基座之一转移到压板装置,并将经处理的晶片从压板装置 到另一个负载锁定基座同时进行。

    Golf club and method for adjusting characteristics of golf club
    8.
    发明授权
    Golf club and method for adjusting characteristics of golf club 有权
    高尔夫球杆及高尔夫球杆特性调整方法

    公开(公告)号:US08795099B2

    公开(公告)日:2014-08-05

    申请号:US13365314

    申请日:2012-02-03

    IPC分类号: A63B53/02

    摘要: A golf club includes: a shaft; a head mounted on a leading end of the shaft; and a substantially cylindrical shaft case fixed to the leading end of the shaft, wherein: the shaft case is inserted into the tubular portion of the hosel of the head; the tubular portion includes a partition plate section in the lower portion thereof; a spacer is interposed between the leading end of the shaft case and partition plate section; the shaft case is unrotatably engaged with the spacer; the spacer and partition plate section respectively include stopper portions for preventing the rotation of the spacer; and a bolt inserted through bolt insertion holes respectively formed in the partition plate section and spacer from the sole side of the head is screwed into the shaft case, whereby the shaft case is fixed to the head.

    摘要翻译: 高尔夫球杆包括:轴; 安装在轴的前端的头部; 以及固定在所述轴的前端的大致圆柱形的轴壳体,其中:所述轴壳体插入到所述头部的所述插鞘的管状部分中; 管状部分在其下部包括隔板部分; 在轴壳的前端和隔板部之间插入间隔件; 轴壳不能与间隔件接合; 间隔件和分隔板部分分别包括用于防止间隔件旋转的止动部分; 并且分别形成在隔板部分中的螺栓插入孔和从头部的鞋底侧的间隔件插入的螺栓被拧入轴壳中,由此将轴壳固定到头部。

    Golf club
    9.
    发明授权
    Golf club 有权
    高尔夫俱乐部

    公开(公告)号:US08632418B2

    公开(公告)日:2014-01-21

    申请号:US13110964

    申请日:2011-05-19

    申请人: Fumiaki Sato

    发明人: Fumiaki Sato

    IPC分类号: A63B53/02

    CPC分类号: A63B53/02 A63B60/08

    摘要: A golf club includes: a shaft; a head including a hosel formed with a hosel hole; a shaft case with a substantially tube shape being bonded to a leading end of the shaft, the shaft case being inserted into the hosel hole, the shaft case being fixed to the hosel by a ring-shaped screw member fitted onto an upper portion of the shaft case and detachably screwed into a female screw in an inner circumferential surface of the hosel hole, wherein an outer side surface of a lower side part of the shaft case and a lower side part of the hosel hole have non-circular cross-section shapes.

    摘要翻译: 高尔夫球杆包括:轴; 包括形成有插鞘孔的插鞘的头部; 具有基本管状的轴壳体与轴的前端接合,轴壳体插入到插孔中,轴壳体通过安装在所述轴套的上部的环形螺钉部件固定到所述插鞘上 轴壳体,并且可拆卸地旋入插孔的内周面中的内螺纹,其中轴壳体的下侧部分的外侧表面和插孔孔的下侧部分具有非圆形横截面形状 。