摘要:
Embodiments of the invention are directed to a method of controlling a mover device The method includes generating a moving force from a moving force generating unit to move a processing base with respect to a movable base, thereby moving the processing base with respect to a fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base. The method further includes controlling the moving velocity of the processing base with respect to the fixed base.
摘要:
A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.
摘要:
A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.
摘要:
Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process chamber and the vacuum intermediate chamber. Two wafer retaining arms are installed between a platen device in the vacuum process chamber and the vacuum intermediate chamber. The two wafer retaining arms are reciprocatingly movable between the corresponding load lock pedestals and the platen device while passing through the passage opening and crossing with an overpass each other at different levels. By retaining an unprocessed wafer by one of the wafer retaining arms and retaining a processed wafer by the other wafer retaining arm, transfer of the unprocessed wafer from one of the load lock pedestals to the platen device and transfer of the processed wafer from the platen device to the other load lock pedestal are performed simultaneously.
摘要:
Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process chamber and the vacuum intermediate chamber. Two wafer retaining arms are installed between a platen device in the vacuum process chamber and the vacuum intermediate chamber. The two wafer retaining arms are reciprocatingly movable between the corresponding load lock pedestals and the platen device while passing through the passage opening and crossing with an overpass each other at different levels. By retaining an unprocessed wafer by one of the wafer retaining arms and retaining a processed wafer by the other wafer retaining arm, transfer of the unprocessed wafer from one of the load lock pedestals to the platen device and transfer of the processed wafer from the platen device to the other load lock pedestal are performed simultaneously.
摘要:
This invention relates to a composition and a method for prediction of a response to Trastuzumab therapy in a breast cancer patient, and more specifically, a composition, a kit, a DNA chip, and a method for predicting a response to Trastuzumab therapy by using polynucleotides each comprising a nucleotide sequence represented by any of SEQ ID NOs: 1 to 9, 11 to 19, and 21 to 23 in the Sequence Listing or a nucleotide sequence derived therefrom by substitution of u with t, mutants thereof, derivatives thereof, or fragments thereof comprising at least 16 continuous nucleotides, or a polynucleotide comprising a complementary sequence thereof, and using an increase or decrease in Her2 protein expression level as an indicator.
摘要:
The wiring-harness routing device 1 includes two wiring harness 10, a support body 3 mounted slidably at a rail 2 and supporting a seat, and a protector 4 sliding interlockingly with the support body 3 and leading the two wiring harnesses 10 to the seat. The protector 4 includes a pair of wiring-harness hold portion 43 holding the two wiring harnesses 10 led through an opening 20 into the rail 2 to be arranged in parallel; a lead portion arranged between the pair of wiring-harness hold portions 43, and passing the two wiring harnesses 10 therethrough, and extending with a cylindrical shape so as to go through the slit and be led to an outside of the rail 2; and a mount portion 68 attached at the support body 3 so as to have a gap allowing motion in the widthwise direction of the rail 2.
摘要:
A golf club includes: a shaft; a head mounted on a leading end of the shaft; and a substantially cylindrical shaft case fixed to the leading end of the shaft, wherein: the shaft case is inserted into the tubular portion of the hosel of the head; the tubular portion includes a partition plate section in the lower portion thereof; a spacer is interposed between the leading end of the shaft case and partition plate section; the shaft case is unrotatably engaged with the spacer; the spacer and partition plate section respectively include stopper portions for preventing the rotation of the spacer; and a bolt inserted through bolt insertion holes respectively formed in the partition plate section and spacer from the sole side of the head is screwed into the shaft case, whereby the shaft case is fixed to the head.
摘要:
A golf club includes: a shaft; a head including a hosel formed with a hosel hole; a shaft case with a substantially tube shape being bonded to a leading end of the shaft, the shaft case being inserted into the hosel hole, the shaft case being fixed to the hosel by a ring-shaped screw member fitted onto an upper portion of the shaft case and detachably screwed into a female screw in an inner circumferential surface of the hosel hole, wherein an outer side surface of a lower side part of the shaft case and a lower side part of the hosel hole have non-circular cross-section shapes.
摘要:
A putter head includes: a face; a first group of grooves which are mutually-parallel grooves; and a second group of grooves which differ in depth from the first group of grooves, wherein the face includes the first group of grooves and the second group of grooves.