EXHAUST GAS PROCESSING APPARATUS AND METHOD FOR PROCESSING EXHAUST GAS
    1.
    发明申请
    EXHAUST GAS PROCESSING APPARATUS AND METHOD FOR PROCESSING EXHAUST GAS 审中-公开
    排气处理装置和处理排气的方法

    公开(公告)号:US20120210873A1

    公开(公告)日:2012-08-23

    申请号:US13256026

    申请日:2010-03-11

    IPC分类号: B01D53/02

    摘要: An exhaust gas processing apparatus for processing a mixed gas discharged from a semiconductor manufacturing apparatus is provided with: an adsorption separation unit for separating a monosilane gas that requires abatement and a hydrogen gas that does not require abatement by allowing the mixed gas to pass through and then by mainly adsorbing the monosilane gas among a plurality of types of gases contained in the mixed gas; a heating unit for desorbing the monosilane adsorbed onto the adsorption separation unit; a silane gas abatement unit for abating a monosilane gas desorbed from the adsorption separation unit; and a hydrogen gas discharge unit for discharging a hydrogen gas separated from the mixed gas by the adsorption separation unit.

    摘要翻译: 一种用于处理从半导体制造装置排出的混合气体的排气处理装置具备:吸附分离部,其通过使混合气体通过而分离需要减少的单硅烷气体和不需要减少的氢气, 然后主要在混合气体中所含的多种气体中吸附甲硅烷气体; 用于解吸吸附在吸附分离单元上的单硅烷的加热单元; 用于减轻从吸附分离单元解吸的单硅烷气体的硅烷气体消除单元; 以及用于排出由吸附分离单元从混合气体分离的氢气的氢气排出单元。

    Hydrogen Production Apparatus, Fuel Cell System and Operation Method Thereof
    2.
    发明申请
    Hydrogen Production Apparatus, Fuel Cell System and Operation Method Thereof 有权
    氢气生产设备,燃料电池系统及其操作方法

    公开(公告)号:US20090011298A1

    公开(公告)日:2009-01-08

    申请号:US12281425

    申请日:2007-02-26

    IPC分类号: H01M8/22

    摘要: There are provided a hydrogen production apparatus, a fuel cell system and operation method thereof, which can more reliably suppress degradation due to oxidation of a catalyst in a hydrogen production apparatus even when start-ups and shutdowns are repeated without a purge operation during the shutdowns. The hydrogen production apparatus includes a reforming part, a shift reaction part, and a selective oxidation reaction part having a selective oxidation catalyst bed packed with a selective oxidation catalyst, wherein the hydrogen production apparatus has an oxygen absorbent bed packed with an oxygen absorbent capable of absorbing oxygen and capable of being regenerated by a reducing gas, and the oxygen absorbent bed and the selective oxidation catalyst bed are stacked with the oxygen absorbent bed on the downstream side, and the hydrogen production apparatus has means for opening the downstream of the oxygen absorbent bed to the atmosphere. The fuel cell system has this hydrogen production apparatus. The operation method of this fuel cell system includes opening the downstream of the oxygen absorbent bed to the atmosphere upon shutdown of the fuel cell system, and regenerating the oxygen absorbent using a hydrogen-containing gas during hydrogen production by the hydrogen production apparatus.

    摘要翻译: 本发明提供一种氢制造装置,燃料电池系统及其动作方法,即使在关闭时不进行清扫动作而重复启动和关闭,也能够更可靠地抑制由于氢制造装置中的催化剂的氧化引起的劣化 。 氢气制备装置包括重整部分,变换反应部分和具有选择性氧化催化剂床的选择性氧化反应部分,所述选择性氧化反应部分装有选择性氧化催化剂,其中所述氢气生产装置具有填充有能够 吸收氧气并能够通过还原气体再生,并且氧吸收剂床和选择性氧化催化剂床与下游侧的吸氧剂床层叠,氢气制备装置具有用于打开氧吸收剂的下游的装置 睡觉到大气。 该燃料电池系统具有该氢气制造装置。 这种燃料电池系统的运行方法包括:在关闭燃料电池系统时将氧吸收剂床的下游打开到大气中,并且在制氢装置的氢气生产期间,使用含氢气体再生氧吸收剂。

    Hydrogen production apparatus, fuel cell system and operation method thereof
    3.
    发明授权
    Hydrogen production apparatus, fuel cell system and operation method thereof 有权
    氢气生产设备,燃料电池系统及其运行方法

    公开(公告)号:US09112201B2

    公开(公告)日:2015-08-18

    申请号:US12281425

    申请日:2007-02-26

    摘要: There are provided a hydrogen production apparatus, a fuel cell system and operation method thereof, which can more reliably suppress degradation due to oxidation of a catalyst in a hydrogen production apparatus even when start-ups and shutdowns are repeated without a purge operation during the shutdowns. The hydrogen production apparatus includes a reforming part, a shift reaction part, and a selective oxidation reaction part having a selective oxidation catalyst bed packed with a selective oxidation catalyst, wherein the hydrogen production apparatus has an oxygen absorbent bed packed with an oxygen absorbent capable of absorbing oxygen and capable of being regenerated by a reducing gas, and the oxygen absorbent bed and the selective oxidation catalyst bed are stacked with the oxygen absorbent bed on the downstream side, and the hydrogen production apparatus has means for opening the downstream of the oxygen absorbent bed to the atmosphere. The fuel cell system has this hydrogen production apparatus. The operation method of this fuel cell system includes opening the downstream of the oxygen absorbent bed to the atmosphere upon shutdown of the fuel cell system, and regenerating the oxygen absorbent using a hydrogen-containing gas during hydrogen production by the hydrogen production apparatus.

    摘要翻译: 本发明提供一种氢制造装置,燃料电池系统及其动作方法,即使在关闭时不进行清扫动作而重复启动和关闭,也能够更可靠地抑制由于氢制造装置中的催化剂的氧化引起的劣化 。 氢气制备装置包括重整部分,变换反应部分和具有选择性氧化催化剂床的选择性氧化反应部分,所述选择性氧化反应部分装有选择性氧化催化剂,其中所述氢气生产装置具有填充有能够 吸收氧气并能够通过还原气体再生,并且氧吸收剂床和选择性氧化催化剂床与下游侧的吸氧剂床层叠,氢气制备装置具有用于打开氧吸收剂的下游的装置 睡觉到大气。 该燃料电池系统具有该氢气制造装置。 这种燃料电池系统的运行方法包括:在关闭燃料电池系统时将氧吸收剂床的下游打开到大气中,并且在制氢装置的氢气生产期间,使用含氢气体再生氧吸收剂。

    Reforming apparatus for fuel cell
    8.
    发明授权
    Reforming apparatus for fuel cell 失效
    燃料电池重整装置

    公开(公告)号:US08178062B2

    公开(公告)日:2012-05-15

    申请号:US12238859

    申请日:2008-09-26

    IPC分类号: B01J8/04 B01J10/00

    摘要: In a reforming apparatus, for use in a fuel cell, for reforming a raw fuel into a hydrogen-rich reformed gas, a reformer generates the reformed gas from the raw fuel. A shift reactor reduces carbon monoxide contained in the reformed gas through a shift reaction. A selective oxidation unit reduces the carbon monoxide contained in the reformed gas that has passed through the shift reactor by performing selective oxidation on the carbon monoxide. A reforming reaction tube houses linearly the reformer, the shift reactor and the selective oxidation unit in this order. A combustion means produces combustion exhaust gas by combusting the raw fuel. An outer casing is placed around the reforming reaction tube, and the outer casing has a larger diameter than that of the reforming reaction tube. A heated flow passage through which the combustion exhaust gas passes to heat the reforming reaction tube is formed between the reforming reaction tube and the outer casing.

    摘要翻译: 在用于燃料电池的重整装置中,用于将原料燃料重整成富氢重整气体,重整器从原料燃料产生重整气体。 换档反应器通过转换反应减少重整气体中所含的一氧化碳。 选择性氧化装置通过对一氧化碳进行选择性氧化来减少已经通过换档反应器的重整气体中所含的一氧化碳。 重整反应管按顺序容纳重整器,换档反应器和选择性氧化装置。 燃烧装置通过燃烧原燃料产生燃烧废气。 外壳围绕重整反应管放置,外壳的直径大于重整反应管的直径。 在重整反应管和外壳之间形成有燃烧废气通过以加热重整反应管的加热流道。