Ion implanting apparatus
    1.
    发明授权
    Ion implanting apparatus 有权
    离子注入装置

    公开(公告)号:US08791433B2

    公开(公告)日:2014-07-29

    申请号:US13096280

    申请日:2011-04-28

    IPC分类号: G21G1/00

    摘要: An ion implanting apparatus is provided, which can accurately measure a quantity of atoms that are implanted. The ion implanting apparatus according to the present invention has an object to be measured, and the object to be measured is arranged in an irradiating range in which ions are irradiated. When atoms are implanted into an object to be processed by irradiating ions of a processing gas and neutralized particles thereof, the object to be measured is heated through the irradiation with the processing gas ions and the neutralized particles. A control unit determines a quantity of the atoms that are implanted into the object to be processed from the temperature of the object to be measured.

    摘要翻译: 提供离子注入装置,其可以精确地测量植入的原子的量。 根据本发明的离子注入装置具有待测量的目的,并且被测量对象被布置在照射离子的照射范围内。 当通过照射处理气体的离子和其中和颗粒将原子注入待处理物体时,通过用处理气体离子和中和的颗粒的照射来加热被测量物体。 控制单元根据被测量物体的温度确定被植入物体的原子数量。

    ION IMPLANTING APPARATUS
    2.
    发明申请
    ION IMPLANTING APPARATUS 有权
    离子植入装置

    公开(公告)号:US20110248182A1

    公开(公告)日:2011-10-13

    申请号:US13096280

    申请日:2011-04-28

    IPC分类号: G21K5/08

    摘要: An ion implanting apparatus is provided, which can accurately measure a quantity of atoms that are implanted. The ion implanting apparatus according to the present invention has an object to be measured, and the object to be measured is arranged in an irradiating range in which ions are irradiated. When atoms are implanted into an object to be processed by irradiating ions of a processing gas and neutralized particles thereof, the object to be measured is heated through the irradiation with the processing gas ions and the neutralized particles. A control unit determines a quantity of the atoms that are implanted into the object to be processed from the temperature of the object to be measured.

    摘要翻译: 提供离子注入装置,其可以精确地测量植入的原子的量。 根据本发明的离子注入装置具有待测量的目的,并且被测量对象被布置在照射离子的照射范围内。 当通过照射处理气体的离子和其中和颗粒将原子注入待处理物体时,通过用处理气体离子和中和的颗粒的照射来加热被测量物体。 控制单元根据被测量物体的温度确定被植入物体的原子数量。

    MANUFACTURING METHOD FOR MAGNETIC RECORDING MEDIUM
    3.
    发明申请
    MANUFACTURING METHOD FOR MAGNETIC RECORDING MEDIUM 审中-公开
    磁记录介质的制造方法

    公开(公告)号:US20110212272A1

    公开(公告)日:2011-09-01

    申请号:US13049250

    申请日:2011-03-16

    IPC分类号: C23C14/04

    CPC分类号: G11B5/855

    摘要: A magnetic recording medium having a high magnetic pattern contrast is manufactured. By changing an acceleration voltage that accelerates ions in a process gas, depths (peak depths D0 and D1) from a magnetic layer 44, at which an injection amount of a target element is the maximum, can be made with set depths even if a film thickness of an ion permeation portion 48, which is a thin film portion of a resist 49, decreases. Since the set depths are achieved for the peak depths D0 and D1, a portion to be processed 43 of the magnetic film 44 is made non-magnetized from a top surface to a bottom surface, and a magnetic portion is separated; thus, the magnetic recording medium with a high magnetic pattern contrast can be obtained.

    摘要翻译: 制造具有高磁性图案对比度的磁记录介质。 通过改变加速工艺气体中的离子的加速电压,即使目标元素的注入量最大的磁性层44的深度(峰值深度D0和D1)也可以设定深度,即使是膜 作为抗蚀剂49的薄膜部分的离子透过部分48的厚度减小。 由于对于峰值深度D0和D1实现了设定深度,所以使磁性膜44的被处理部分43从顶面到底面不被磁化,并且磁性部分被分离; 因此,可以获得具有高磁性图案对比度的磁记录介质。

    METHOD OF PRODUCING MAGNETIC STORAGE MEDIUM, MAGNETIC STORAGE MEDIUM AND INFORMATION STORAGE DEVICE
    4.
    发明申请
    METHOD OF PRODUCING MAGNETIC STORAGE MEDIUM, MAGNETIC STORAGE MEDIUM AND INFORMATION STORAGE DEVICE 审中-公开
    磁存储介质的生产方法,磁存储介质和信息存储设备

    公开(公告)号:US20110194207A1

    公开(公告)日:2011-08-11

    申请号:US13123287

    申请日:2009-11-18

    CPC分类号: G11B5/855

    摘要: It is an object to provide a simple method capable of producing a magnetic storage medium, a magnetic storage medium and an information storage device which may be produced by a simple production method with a high recording density, and a magnetic disk is produced by a production method having: a film-forming process of forming, on a substrate 61, a magnetic film made of a Co—Cr—Pt alloy and having a thickness of less than 10 nm; and an ion injection process of forming, by reducing saturation magnetization by locally injecting ions into a point other than plural points that become magnetic dots on each of which information is magnetically recorded, a between-dot separator having saturation magnetization smaller than saturation magnetization of the magnetic dots, between the magnetic dots.

    摘要翻译: 本发明的目的是提供一种能够制造可以通过具有高记录密度的简单制造方法制造的磁存储介质,磁存储介质和信息存储装置的简单方法,并且通过生产生产磁盘 方法具有:在基板61上形成厚度小于10nm的由Co-Cr-Pt合金制成的磁膜的成膜工艺; 以及离子注入方法,通过将离子局部注入除磁性地记录有各自信息的磁点以外的点以外的点来降低饱和磁化,形成饱和磁化强度小于饱和磁化强度的饱和磁化强度的点间隔离体 磁点之间,磁点之间。

    MAGNETIC RECORDING MEDIUM MANUFACTURING DEVICE
    5.
    发明申请
    MAGNETIC RECORDING MEDIUM MANUFACTURING DEVICE 审中-公开
    磁记录介质制造设备

    公开(公告)号:US20110186225A1

    公开(公告)日:2011-08-04

    申请号:US13055329

    申请日:2009-07-21

    IPC分类号: H01L21/3065

    CPC分类号: G11B5/855

    摘要: A magnetic recording medium is manufactured without the disappearance of the surface of a substrate that comprises a magnetic recording layer by ion milling and without being influenced by the atmosphere. A magnetic recording medium manufacturing device manufactures a magnetic recording medium by implanting an ion beam into a substrate that comprises a magnetic recording layer and removing by ashing the surface of the substrate that comprises the magnetic recording layer after the ion beam is implanted. The magnetic recording medium manufacturing device comprising an ion implantation chamber for implanting the ion beam into the substrate that comprises the magnetic recording layer coated with a resist film or a metal mask, and an ashing chamber for removing, by ashing, with plasma, the resist film or the metal mask of the substrate that comprises the magnetic recording layer coated with the resist film or the metal mask. The ion implantation chamber and the ashing chamber are coupled in a vacuum state. The magnetic recording medium manufactured device is provided with a substrate carrier for carrying the substrate into which the ion beam is implanted from the ion implantation chamber to the ashing chamber.

    摘要翻译: 通过离子研磨而不受大气的影响,制造磁记录介质,而不会消失包括磁记录层的基板的表面。 磁记录介质制造装置通过将离子束注入到包含磁记录层的基板中,并且在离子束被植入之后通过灰化包括磁记录层的基板的表面去除而制造磁记录介质。 该磁记录介质制造装置包括用于将离子束注入基片的离子注入室,所述离子注入室包括涂覆有抗蚀剂膜或金属掩模的磁记录层,以及灰化室,用灰浆除去等离子体, 膜或包含涂覆有抗蚀剂膜或金属掩模的磁记录层的基板的金属掩模。 离子注入室和灰化室在真空状态下耦合。 磁记录介质制造装置设置有用于承载离子束从离子注入室注入至灰化室的基板的基板载体。

    METHOD OF PRODUCING MAGNETIC STORAGE MEDIUM, MAGNETIC STORAGE MEDIUM AND INFORMATION STORAGE DEVICE
    6.
    发明申请
    METHOD OF PRODUCING MAGNETIC STORAGE MEDIUM, MAGNETIC STORAGE MEDIUM AND INFORMATION STORAGE DEVICE 审中-公开
    磁存储介质的生产方法,磁存储介质和信息存储设备

    公开(公告)号:US20110242700A1

    公开(公告)日:2011-10-06

    申请号:US13131803

    申请日:2009-12-22

    IPC分类号: G11B5/64 G11B21/02 G21K5/00

    CPC分类号: G11B5/855

    摘要: The following abstract replace prior abstract in the application. It is an object to provide a simple and practical method capable of producing a magnetic storage medium of a type such as a bit-patterned type, a magnetic storage medium of the above-mentioned type and an information storage device which may be produced by such a simple and practical method, and in a method of producing a magnetic disk, there are performed: a film-forming process of forming, on a glass substrate 61, a magnetic film 62 so that the Curie temperature becomes 600 K or lower; and an ion injection process (C) of injecting ions locally into an area other than a predetermined protected area on the magnetic film 62.

    摘要翻译: 以下抽象代替应用程序中的以前的摘要。 本发明的目的是提供一种能够制造诸如位图型的磁存储介质,上述类型的磁存储介质和可以通过这种方式制造的信息存储装置的简单实用的方法 一种简单实用的方法,并且在制造磁盘的方法中,进行:在玻璃基板61上形成磁性膜62使得居里温度变为600K以下的成膜工序; 以及将离子局部注入磁性膜62上的预定保护区以外的区域的离子注入工序(C)。

    METHOD OF PRODUCING MAGNETIC STORAGE MEDIUM, MAGNETIC STORAGE MEDIUM AND INFORMATION STORAGE DEVICE
    7.
    发明申请
    METHOD OF PRODUCING MAGNETIC STORAGE MEDIUM, MAGNETIC STORAGE MEDIUM AND INFORMATION STORAGE DEVICE 审中-公开
    磁存储介质的生产方法,磁存储介质和信息存储设备

    公开(公告)号:US20110205663A1

    公开(公告)日:2011-08-25

    申请号:US13120974

    申请日:2009-09-30

    IPC分类号: G11B21/02 B05D5/12 G11B5/706

    CPC分类号: G11B5/855

    摘要: It is an object to produce a magnetic storage medium of a high recording density by a production method that does not impair mass productivity, and a magnetic storage medium 10 is produced by a production method including: a magnetic-film forming step of forming a magnetic film 61 on a substrate 62; and a dots separating step of reducing saturation magnetization by locally injecting mixed ions of N2+ ion and N+ ion into an area, of the substrate 62, other than plural areas which respectively become magnetic dots 62c where information is to be magnetically recorded, thereby forming, between the magnetic dots 62c, a between-dot separator 62d having saturation magnetization smaller than saturation magnetization of the magnetic dots 62c.

    摘要翻译: 本发明的目的是通过不损害批量生产率的制造方法制造高记录密度的磁存储介质,并且通过包括以下的制造方法制造磁性存储介质10:磁性成膜步骤,其形成磁性 基板62上的膜61; 以及通过将N2 +离子和N +离子的混合离子局部注入基板62的区域中除了分别成为要磁记录的信息的磁点62c的多个区域以外的区域来降低饱和磁化的点分离步骤, 在磁点62c之间,具有小于磁点62c的饱和磁化强度的饱和磁化强度的点间分离器62d。

    Contact/non-contact type hybrid IC card, communication method, program and communication system
    9.
    发明授权
    Contact/non-contact type hybrid IC card, communication method, program and communication system 有权
    接触/非接触式混合IC卡,通讯方式,程序通讯系统

    公开(公告)号:US09058553B2

    公开(公告)日:2015-06-16

    申请号:US12477632

    申请日:2009-06-03

    申请人: Tadashi Morita

    发明人: Tadashi Morita

    IPC分类号: G06K19/00 G06K19/077

    摘要: A contact/non-contact type hybrid IC card is provided which includes a non-contact interface to communicate in a non-contact manner with a non-contact type reader/writer through an antenna, a contact interface to communicate in a contact manner with a contact type reader/writer through a contact terminal, a storage unit to store personal identification information input from the contact type reader/writer through the contact interface during a contact communication mode by the contact interface, and a control unit to remove a limitation of a prescribed function in a non-contact communication mode by the non-contact interface based on the personal identification information stored in the storage unit during the contact communication mode and switch a communication mode from the contact communication mode to the non-contact communication mode with the limitation of the prescribed function being removed.

    摘要翻译: 提供一种接触/非接触式混合IC卡,其包括非接触式接口,以非接触方式通过天线与非接触式读取器/写入器进行通信,接触界面以接触方式与 通过接触终端的接触型读取器/写入器,存储单元,用于通过接触界面在接触通信模式期间通过接触接口存储从接触型读取器/写入器输入的个人识别信息;以及控制单元, 基于在接触通信模式期间存储在存储单元中的个人识别信息,通过非接触式接口在非接触通信模式中的规定功能,并且将通信模式从接触通信模式切换到非接触通信模式, 规定功能的限制被删除。

    Information processing system, information processor, information processing method, and program

    公开(公告)号:US09001048B2

    公开(公告)日:2015-04-07

    申请号:US12430601

    申请日:2009-04-27

    申请人: Tadashi Morita

    发明人: Tadashi Morita

    IPC分类号: G09G5/00 G06F3/0488

    CPC分类号: G06F3/0488

    摘要: An information processing system includes a first information processor to process data to be displayed in a first display unit and a second information processor to indicate the data displayed in the first display unit. The first information processor includes a first display control unit to control the data to be displayed; a first communication unit to receive operation information from the second information processor and transmit data information about a piece of data indicated by the second information processor; and a first detecting unit to detect a position on the first display unit indicated by the second information processor. The second information processor includes an accepting unit to accept an operation by a user; a second communication unit to transmit operation information to the first information processor and receive the data information from the first information processor; and a received data storage unit to store the data information.