公开(公告)号：US20060278612A1

公开(公告)日：2006-12-14

申请号：US11448032

申请日：2006-06-07

申请人： Kenji Tokunaga ,  Kazuhiko Kawai ,  Sakae Terakado

发明人： Kenji Tokunaga ,  Kazuhiko Kawai ,  Sakae Terakado

IPC分类号： C03C25/68 ,  B44C1/22 ,  C23F1/00 ,  H01L21/302

CPC分类号： H01L21/67167 ,  H01L21/02057 ,  H01L21/0206 ,  H01L21/02063 ,  H01L21/67017 ,  H01L21/6735

摘要： To provide a semiconductor integrated circuit device having improved reliability. An EFEM unit upstream of a plasma processing unit is equipped with a chemical filer for alkali removal. In the plasma processing unit, a semiconductor wafer is subjected to plasma processing with a gas containing fluorine. The resulting semiconductor wafer is put in a carrier via a transfer chamber, load lock chamber and EFEM chamber. During this operation, the concentration of amines in the EFEM chamber is adjusted to be lower than that of amines in a clean room outside the chamber by a chemical filter.

摘要翻译： 提供具有提高的可靠性的半导体集成电路器件。 在等离子体处理单元上游的EFEM单元配备有用于除碱的化学清洁器。 在等离子体处理单元中，用含氟气体对半导体晶片进行等离子体处理。 所得到的半导体晶片通过传送室，负载锁定室和EFEM室放入载体中。 在该操作中，通过化学过滤器将EFEM室中的胺浓度调节至低于室外洁净室的胺浓度。

公开(公告)号：US07136433B2

公开(公告)日：2006-11-14

申请号：US10200339

申请日：2002-07-23

申请人： Takao Kobayashi ,  Masaaki Shida ,  Kazuhiko Kawai

发明人： Takao Kobayashi ,  Masaaki Shida ,  Kazuhiko Kawai

IPC分类号： H04L22/14 ,  H04L27/06 ,  H03D1/00

CPC分类号： H04L27/2271 ,  H04L2027/003 ,  H04L2027/0095

摘要： A demodulating semiconductor integrated circuit device used in a wireless communication system of an FM-modulation scheme, wherein a circuit for canceling a frequency offset is made of a digital circuit, so as to make a high-accuracy decision as to received data and prevent error frequency offset cancel due to a pseudo pattern contained in the received data. Consequently, a high-accuracy received data decision is carried out.

摘要翻译： 一种在FM调制方式的无线通信系统中使用的解调半导体集成电路装置，其特征在于，使用数字电路来取消频偏的电路，对接收到的数据进行高精度判定，防止误差 由于接收到的数据中包含的伪图案导致的频率偏移消除。 因此，执行高精度的接收数据判定。

公开(公告)号：US07386067B2

公开(公告)日：2008-06-10

申请号：US11580009

申请日：2006-10-13

申请人： Takao Kobayashi ,  Masaaki Shida ,  Kazuhiko Kawai

发明人： Takao Kobayashi ,  Masaaki Shida ,  Kazuhiko Kawai

IPC分类号： H03D1/00

CPC分类号： H04L27/2271 ,  H04L2027/003 ,  H04L2027/0095

摘要： A demodulating semiconductor integrated circuit device used in a wireless communication system of an FM-modulation scheme, wherein a circuit for canceling a frequency offset is made of a digital circuit, so as to make a high-accuracy decision as to received data and prevent error frequency offset cancel due to a pseudo pattern contained in the received data. Consequently, a high-accuracy received data decision is carried out.

摘要翻译： 一种在FM调制方式的无线通信系统中使用的解调半导体集成电路装置，其特征在于，使用数字电路来取消频偏的电路，对接收到的数据进行高精度判定，防止误差 由于接收到的数据中包含的伪图案导致的频率偏移消除。 因此，执行高精度的接收数据判定。

公开(公告)号：US20070030928A1

公开(公告)日：2007-02-08

申请号：US11580009

申请日：2006-10-13

申请人： Takao Kobayashi ,  Masaaki Shida ,  Kazuhiko Kawai

发明人： Takao Kobayashi ,  Masaaki Shida ,  Kazuhiko Kawai

IPC分类号： H04L27/06

CPC分类号： H04L27/2271 ,  H04L2027/003 ,  H04L2027/0095

摘要： A demodulating semiconductor integrated circuit device used in a wireless communication system of an FM-modulation scheme, wherein a circuit for canceling a frequency offset is made of a digital circuit, so as to make a high-accuracy decision as to received data and prevent error frequency offset cancel due to a pseudo pattern contained in the received data. Consequently, a high-accuracy received data decision is carried out.

摘要翻译： 一种在FM调制方式的无线通信系统中使用的解调半导体集成电路装置，其特征在于，使用数字电路来取消频偏的电路，对接收到的数据进行高精度判定，防止误差 由于接收到的数据中包含的伪图案导致的频率偏移消除。 因此，执行高精度的接收数据判定。

公开(公告)号：US5747387A

公开(公告)日：1998-05-05

申请号：US519399

申请日：1995-08-25

申请人： Koutarou Koizumi ,  Sukeyoshi Tsunekawa ,  Kazuhiko Kawai ,  Maki Shimoda ,  Katsuhiko Itoh ,  Haruo Itoh ,  Akio Saito

发明人： Koutarou Koizumi ,  Sukeyoshi Tsunekawa ,  Kazuhiko Kawai ,  Maki Shimoda ,  Katsuhiko Itoh ,  Haruo Itoh ,  Akio Saito

IPC分类号： G03F7/42 ,  H01L21/027 ,  H01L21/302 ,  H01L21/304 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/00

CPC分类号： H01L21/02043 ,  G03F7/42 ,  H01L21/31138 ,  Y10S438/906

摘要： According to the present invention, the surface of the sample is cleaned with water immediately after ashing of the resist the quality of which has been changed through ion implantation by ozone-containing gas, or ozone-containing gas and ultraviolet ray, or the sample is cleaned with water without being exposed to the atmosphere after ashing, thereby allowing the number of residues to be reduced to 1/100, decreasing the load in cleaning process by solution, cutting down the semiconductor device production cost and improving the semiconductor device productivity.

摘要翻译： 根据本发明，在通过含臭氧气体或含臭氧气体和紫外线的离子注入改变了质量的抗蚀剂灰化后，样品的表面立即被清洗，或者样品是 在灰化后不用暴露于大气中，用水清洗，从而使残留物数减少到+ E，fra 1/100 + EE，减少溶液清洗过程中的负荷，减少半导体器件的生产成本，改善 半导体器件的生产率。

公开(公告)号：US4748652A

公开(公告)日：1988-05-31

申请号：US5953

申请日：1987-01-22

申请人： Yasuo Nagai ,  Kazuhiko Kawai

发明人： Yasuo Nagai ,  Kazuhiko Kawai

IPC分类号： H04M3/18 ,  H04M3/22 ,  H04M3/30 ,  H04M19/00 ,  H04M1/24 ,  H04M3/08

CPC分类号： H04M19/001 ,  H04M3/30

摘要： A detecting circuit for detecting electric abnormality of a pair of feeders is provided with resistors R.sub.A and R.sub.B converting the abnormality of the feeders into a change in voltage, transistors (Q.sub.8, Q.sub.9 and Q.sub.10) supplying or interrupting a current I.sub.B in response to presence or absence of an abnormal state, transistors (Q.sub.5, Q.sub.6 and Q.sub.17) drawing in or blocking a current I.sub.A in response to the abnormal state, a current subtraction element (I) conducting a subtraction of the currents I.sub.B and I.sub.A on an absolute value basis, a current addition element (II) conducting an addition of the currents I.sub.A and I.sub.B, a current addition element (III) adding the output currents of the current subtraction element (I) and current addition element (II), and a voltage comparator (6) subjecting the output current of the current addition element (III) to current-voltage conversion and comparing a voltage thus obtained with a reference voltage so as to obtain an abnormality detection signal, which is used to interrupt the feeding of electricity to the paired feeders when an abnormality is detected.

摘要翻译： 用于检测一对馈线的电气异常的检测电路设有电阻器RA和RB，将馈电线的异常转换成电压变化，晶体管（Q8，Q9和Q10）响应于存在或提供电流IB而提供或中断电流IB 不存在异常状态，响应于异常状态引入或阻塞电流IA的晶体管（Q5，Q6和Q17），以绝对值为基础进行电流IB和IA的减法的电流减法元件（I） 导入电流IA和IB的电流添加元件（II），将电流减法元件（I）和电流相加元件（II）的输出电流相加的电流相加元件（III）和电压比较器（6） ）对当前添加元件（III）的输出电流进行电流 - 电压转换，并将由此获得的电压与参考电压进行比较，以获得用于中断的异常检测信号 当检测到异常时，将电力馈送到成对的馈线。