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公开(公告)号：US08013342B2
公开(公告)日：2011-09-06
申请号：US11939612
申请日：2007-11-14
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
IPC分类号： H01L29/04
CPC分类号： G06F17/5077 , H01L21/6835 , H01L21/76895 , H01L21/84 , H01L23/481 , H01L23/535 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L29/045 , H01L2221/6835 , H01L2221/68359 , H01L2221/68368 , H01L2224/83894 , H01L2224/9202 , H01L2225/06513 , H01L2924/01019 , H01L2924/01029 , H01L2924/0132 , H01L2924/1305 , H01L2924/14 , H01L2924/19041 , H01L2924/01007 , H01L2924/01022 , H01L2924/00
摘要： A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
摘要翻译： 双面集成电路芯片，制造双面集成电路芯片的方法和双面集成电路芯片的设计结构。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅，并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触，并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号：US07960245B2
公开(公告)日：2011-06-14
申请号：US12029575
申请日：2008-02-12
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC分类号： H01L21/30
CPC分类号： H01L21/76898 , H01L21/84 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
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公开(公告)号：US07939914B2
公开(公告)日：2011-05-10
申请号：US12029589
申请日：2008-02-12
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC分类号： H01L29/40 , H01L21/02 , H01L29/06 , H01L23/48 , H01L23/52 , H01L21/331 , H01L21/302
CPC分类号： H01L21/76898 , H01L21/84 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
摘要翻译： 具有相对侧的布线电平的半导体器件以及制造与相对侧的器件和布线电平接触的半导体结构的方法。 该方法包括在绝缘体上硅衬底上制造器件，其中器件的第一接触和第一侧的第一接触处的布线电平，去除下硅层以暴露所述掩埋氧化物层，形成第二接触器件 通过掩埋氧化物层形成掩埋氧化物层上方的布线电平到第二触点。
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公开(公告)号：US07670927B2
公开(公告)日：2010-03-02
申请号：US11383586
申请日：2006-05-16
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
IPC分类号： H01L21/30
CPC分类号： H01L25/0657 , H01L21/76895 , H01L23/481 , H01L23/522 , H01L23/5329 , H01L25/50 , H01L27/0688 , H01L2225/06513 , H01L2225/06527 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor structure and method of fabricating the structure. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
摘要翻译： 一种半导体结构及其制造方法。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅，并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触，并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号：US20070267723A1
公开(公告)日：2007-11-22
申请号：US11383586
申请日：2006-05-16
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
CPC分类号： H01L25/0657 , H01L21/76895 , H01L23/481 , H01L23/522 , H01L23/5329 , H01L25/50 , H01L27/0688 , H01L2225/06513 , H01L2225/06527 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor structure and method of fabricating the structure. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
摘要翻译： 一种半导体结构及其制造方法。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅，并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触，并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号：US20090121260A1
公开(公告)日：2009-05-14
申请号：US11939612
申请日：2007-11-14
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
IPC分类号： H01L29/78
CPC分类号： G06F17/5077 , H01L21/6835 , H01L21/76895 , H01L21/84 , H01L23/481 , H01L23/535 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L29/045 , H01L2221/6835 , H01L2221/68359 , H01L2221/68368 , H01L2224/83894 , H01L2224/9202 , H01L2225/06513 , H01L2924/01019 , H01L2924/01029 , H01L2924/0132 , H01L2924/1305 , H01L2924/14 , H01L2924/19041 , H01L2924/01007 , H01L2924/01022 , H01L2924/00
摘要： A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
摘要翻译： 双面集成电路芯片，制造双面集成电路芯片的方法和双面集成电路芯片的设计结构。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅，并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触，并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号：US20080213948A1
公开(公告)日：2008-09-04
申请号：US12029575
申请日：2008-02-12
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC分类号： H01L21/84
CPC分类号： H01L21/76898 , H01L21/84 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
摘要翻译： 具有相对侧的布线电平的半导体器件以及制造与相对侧的器件和布线电平接触的半导体结构的方法。 该方法包括在绝缘体上硅衬底上制造器件，其中器件的第一接触和第一侧的第一接触处的布线电平，去除下硅层以暴露所述掩埋氧化物层，形成第二接触器件 通过掩埋氧化物层形成掩埋氧化物层上方的布线电平到第二触点。
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公开(公告)号：US07285477B1
公开(公告)日：2007-10-23
申请号：US11383563
申请日：2006-05-16
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC分类号： H01L21/30
CPC分类号： H01L21/76898 , H01L21/84 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
摘要翻译： 具有相对侧的布线电平的半导体器件以及制造与相对侧的器件和布线电平接触的半导体结构的方法。 该方法包括在绝缘体上硅衬底上制造器件，其中器件的第一接触和第一侧的第一接触处的布线电平，去除下硅层以暴露所述掩埋氧化物层，形成第二接触器件 通过掩埋氧化物层形成掩埋氧化物层上方的布线电平到第二触点。
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公开(公告)号：US20090121287A1
公开(公告)日：2009-05-14
申请号：US11939582
申请日：2007-11-14
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC分类号： H01L27/12
CPC分类号： H01L21/84 , H01L21/76898 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having wiring levels on opposite sides, a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides, and a design structure of a semiconductor device having wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
摘要翻译： 具有相对侧的布线电平的半导体器件，制造与相对侧的器件和布线电平接触的半导体结构的方法以及在相对侧具有布线电平的半导体器件的设计结构。 该方法包括在绝缘体上硅衬底上制造器件，其中器件的第一接触和第一侧的第一接触处的布线电平，去除下硅层以暴露所述掩埋氧化物层，形成第二接触器件 通过掩埋氧化物层形成掩埋氧化物层上方的布线电平到第二触点。
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公开(公告)号：US20110302542A1
公开(公告)日：2011-12-08
申请号：US13192608
申请日：2011-07-28
申请人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
发明人： Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
IPC分类号： G06F17/50
CPC分类号： G06F17/5077 , H01L21/6835 , H01L21/76895 , H01L21/84 , H01L23/481 , H01L23/535 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L29/045 , H01L2221/6835 , H01L2221/68359 , H01L2221/68368 , H01L2224/83894 , H01L2224/9202 , H01L2225/06513 , H01L2924/01019 , H01L2924/01029 , H01L2924/0132 , H01L2924/1305 , H01L2924/14 , H01L2924/19041 , H01L2924/01007 , H01L2924/01022 , H01L2924/00
摘要： A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
摘要翻译： 双面集成电路芯片，制造双面集成电路芯片的方法和双面集成电路芯片的设计结构。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅，并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触，并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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