公开(公告)号：US08091430B1

公开(公告)日：2012-01-10

申请号：US12924027

申请日：2010-09-14

申请人： Kevin Cochran ,  Michael Deeds

发明人： Kevin Cochran ,  Michael Deeds

IPC分类号： G01L7/00

CPC分类号： G01L19/0618 ,  G01L19/0645

摘要： A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device includes a housing coupled to the MEMS device such that its sensing diaphragm is surrounded thereby. A perforated barrier in the housing is adjacent to the sensing diaphragm. A protection diaphragm in the housing has its first side exposed to an external environment of interest, and has its second side facing the perforated barrier and spaced apart therefrom. A fluid is disposed contiguously between the second side of the protection diaphragm and the sensing diaphragm.

摘要翻译： 用于保护微机电系统（MEMS）装置的隔膜的系统包括耦合到MEMS装置的壳体，使得其感测膜片被围绕。 壳体中的穿孔屏障与传感隔膜相邻。 壳体中的保护隔膜具有其第一面暴露于感兴趣的外部环境，并且其第二侧面向穿孔的阻挡层并与之隔开。 流体在保护膜片的第二侧和感测膜片之间连续地设置。

公开(公告)号：US06835582B1

公开(公告)日：2004-12-28

申请号：US10342656

申请日：2003-01-15

申请人： Michael A. Deeds ,  Kevin Cochran

发明人： Michael A. Deeds ,  Kevin Cochran

IPC分类号： H01L2100

CPC分类号： G02B6/3636 ,  G02B6/3692

摘要： A method of sealing an optical fiber in a microchip includes providing a device microchip, a top microchip and an optical fiber; forming a groove in at least one of the device microchip and the top microchip; coating metal on the optical fiber; depositing metal on the groove and top surfaces of the device microchip and the top microchip; depositing solder on the top surface of at least one of the device microchip and the top microchip; placing the optical fiber in the groove; placing the top microchip on the device microchip; and reflowing the solder to form a hermetic seal.

摘要翻译： 密封微芯片中的光纤的方法包括提供器件微芯片，顶部微芯片和光纤; 在装置微芯片和顶部微芯片中的至少一个中形成凹槽; 在光纤上涂上金属; 将金属沉积在器件微芯片和顶部微芯片的凹槽和顶表面上; 在装置微芯片和顶部微芯片中的至少一个的顶表面上沉积焊料; 将光纤放置在槽中; 将顶部微芯片放置在器件微芯片上; 并回流焊料以形成气密封。

公开(公告)号：US06853765B1

公开(公告)日：2005-02-08

申请号：US10401951

申请日：2003-03-31

申请人： Kevin Cochran

发明人： Kevin Cochran

IPC分类号： G02B6/35

CPC分类号： G02B6/3576 ,  G02B6/3508 ,  G02B6/3552 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/3594

摘要： A MEMS type optical switch includes a substrate, the substrate including at least one groove formed therein; first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fibers; a thermal actuator disposed adjacent one of the first and second optical fibers, the thermal actuator comprising at least one v-beam, a pair of anchors connected to ends of the v-beam, and a yoke disposed in a central portion of the v-beam.

摘要翻译： MEMS型光开关包括基板，所述基板包括形成在其中的至少一个凹槽; 设置在所述至少一个槽中的第一和第二光纤，所述至少一个凹槽包括用于使所述第一和第二光纤中的至少一个光纤移动的加宽部分; 设置在所述第一和第二光纤中的一个上的热致动器，所述热致动器包括至少一个v形梁，连接到所述v形梁的端部的一对锚固件，以及设置在所述v形梁的中心部分中的轭， 光束。

公开(公告)号：US09531302B1

公开(公告)日：2016-12-27

申请号：US13998722

申请日：2013-11-27

申请人： Kevin Cochran ,  Daniel Jean ,  Ezra Chen

发明人： Kevin Cochran ,  Daniel Jean ,  Ezra Chen

IPC分类号： H02N10/00 ,  H02K41/02 ,  H02N2/02 ,  H02N2/04

CPC分类号： H02N2/021 ,  F03G7/06 ,  H02N2/043

摘要： A ratcheting micromotor includes a ratchet bar defining ratchet teeth along an edge thereof, and first and second ends in opposition to one another. The first end is adapted to be coupled to an object to be moved. A spring is coupled on one end thereof to the second end of the ratchet bar and adapted to be fixed at another end thereof to a base. A bi-directional actuator configured for linear movement in one of a first direction and a second direction, and when energized has a common yoke coupled to a central portion thereof for movement in correspondence therewith. The common yoke includes teeth formed along an edge and positioned such that its teeth engage a portion of the ratchet teeth. A control system energizes the bi-directional actuator to move, alternately, in the first direction and the second direction.

摘要翻译： 棘轮式微型电动机包括沿其边缘限定棘轮齿的棘轮杆，并且第一和第二端部彼此相对。 第一端适于联接到要移动的物体。 弹簧在其一端连接到棘轮杆的第二端，并且适于在另一端固定到基座。 一种双向致动器，其构造成用于在第一方向和第二方向中的一个方向上线性运动，并且当被激励时具有联接到其中心部分的公共轭，用于与其对应地运动。 公共轭包括沿着边缘形成的齿并且定位成使得其齿接合棘轮齿的一部分。 控制系统激励双向致动器，以交替地在第一方向和第二方向上移动。

公开(公告)号：US08076921B1

公开(公告)日：2011-12-13

申请号：US12284475

申请日：2008-09-18

申请人： Kristopher Nodianos ,  Laura Blachek ,  Khoa Nguyen ,  Adedayo Oyelowo ,  Tan Tran ,  Bernice Sanford ,  Kevin Cochran

发明人： Kristopher Nodianos ,  Laura Blachek ,  Khoa Nguyen ,  Adedayo Oyelowo ,  Tan Tran ,  Bernice Sanford ,  Kevin Cochran

IPC分类号： G05F3/02

CPC分类号： H02M3/158

摘要： Systems and methods for a self-regulating power supply for MEMS thermal actuators to achieve maximum actuator displacement while preventing over powering. The present invention includes a power supply configured to regulate electrical input power to a MEMS thermal actuator in order to provide the maximum possible electrical input power. Accordingly, the present invention provides a maximum actuator displacement while preventing device failure from over powering. The present invention utilizes resistivity versus temperature properties for silicon or the like to provide a self-regulating power supply that can be utilized to power a variety of MEMS components without requiring custom actuator control circuits for each type of component.

摘要翻译： 用于MEMS热致动器的自调节电源的系统和方法，以在防止过功率的情况下实现最大的致动器位移。 本发明包括被配置为调节对MEMS热致动器的电输入功率以便提供最大可能的电输入功率的电源。 因此，本发明提供最大的致动器位移，同时防止装置发生过功率故障。 本发明利用硅等的电阻率对温度特性来提供可用于为各种MEMS部件供电的自调节电源，而不需要针对每种类型的部件的定制的致动器控制电路。