公开(公告)号：US20130161305A1

公开(公告)日：2013-06-27

申请号：US13599648

申请日：2012-08-30

申请人： Kevin PTASIENSKI ,  Kevin Robert Smith ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

发明人： Kevin PTASIENSKI ,  Kevin Robert Smith ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

IPC分类号： H05B3/02 ,  H05B1/02 ,  H05B3/20

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6833 ,  H05B1/00 ,  H05B1/02 ,  H05B1/0202 ,  H05B1/0227 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/06 ,  H05B3/20 ,  H05B2203/005 ,  H05B2203/013 ,  H05B2213/03 ,  Y10T156/10

摘要： An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.

摘要翻译： 例如，提供一种用于半导体处理设备的加热器，该加热器包括具有至少一个功能区的基本功能层。 将基板固定到基底功能层，并且调谐层固定到与基底功能层相对的基板。 调谐层包括多个区域，其数量大于基底功能层的区域，并且调谐层具有比基底功能层低的功率。 此外，通过示例的方式将诸如卡盘的部件固定到与基板相对的调谐层。 衬底限定热导率以从基底功能层消散所需量的功率。

公开(公告)号：US09263305B2

公开(公告)日：2016-02-16

申请号：US13599648

申请日：2012-08-30

申请人： Kevin Ptasienski ,  Kevin Robert Smith ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Robert Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

发明人： Kevin Ptasienski ,  Kevin Robert Smith ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Robert Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

IPC分类号： F27B5/14 ,  H05B3/28 ,  H01L21/67 ,  H05B3/20 ,  H05B1/02 ,  H05B1/00 ,  H05B3/02 ,  H01L21/683

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6833 ,  H05B1/00 ,  H05B1/02 ,  H05B1/0202 ,  H05B1/0227 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/06 ,  H05B3/20 ,  H05B2203/005 ,  H05B2203/013 ,  H05B2213/03 ,  Y10T156/10

摘要： An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.

摘要翻译： 例如，提供一种用于半导体处理设备的加热器，该加热器包括具有至少一个功能区的基本功能层。 将基板固定到基底功能层，并且调谐层固定到与基底功能层相对的基板。 调谐层包括多个区域，其数量大于基底功能层的区域，并且调谐层具有比基底功能层低的功率。 此外，通过示例的方式将诸如卡盘的部件固定到与基板相对的调谐层。 衬底限定热导率以从基底功能层消散所需量的功率。

公开(公告)号：US09553006B2

公开(公告)日：2017-01-24

申请号：US13599692

申请日：2012-08-30

申请人： Kevin Ptasienski ,  Kevin Robert Smith ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Robert Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

发明人： Kevin Ptasienski ,  Kevin Robert Smith ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Robert Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

IPC分类号： G05D23/00 ,  H01L21/67 ,  H05B3/20 ,  H05B1/02 ,  H05B1/00 ,  H05B3/02 ,  H01L21/683

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6833 ,  H05B1/00 ,  H05B1/02 ,  H05B1/0202 ,  H05B1/0227 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/06 ,  H05B3/20 ,  H05B2203/005 ,  H05B2203/013 ,  H05B2213/03 ,  Y10T156/10

摘要： An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.

摘要翻译： 提供了一种诸如加热器的装置，其包括具有至少一个流体通道的基座构件。 两相流体设置在流体通道内，两相流体的压力被控制，使得两相流体提供加热和冷却至少一个到基底构件。 调谐层被固定到基底构件上，调谐层包括多个区域。 此外，通过示例的方式将诸如卡盘的部件固定到调谐层。

公开(公告)号：US20130220575A1

公开(公告)日：2013-08-29

申请号：US13599692

申请日：2012-08-30

申请人： Kevin Ptasienski ,  Kevin Robert SMITH ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Robert Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

发明人： Kevin Ptasienski ,  Kevin Robert SMITH ,  Cal Thomas Swanson ,  Philip Steven Schmidt ,  Mohammad Nosrati ,  Jacob Robert Lindley ,  Allen Norman Boldt ,  Sanhong Zhang ,  Louis P. Steinhauser ,  Dennis Stanley Grimard

IPC分类号： H01L21/67 ,  H05B1/02 ,  H01L21/683

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6833 ,  H05B1/00 ,  H05B1/02 ,  H05B1/0202 ,  H05B1/0227 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/06 ,  H05B3/20 ,  H05B2203/005 ,  H05B2203/013 ,  H05B2213/03 ,  Y10T156/10

摘要： An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.

摘要翻译： 提供了一种诸如加热器的装置，其包括具有至少一个流体通道的基座构件。 两相流体设置在流体通道内，两相流体的压力被控制，使得两相流体提供加热和冷却至少一个到基底构件。 调谐层被固定到基底构件上，调谐层包括多个区域。 此外，通过示例的方式将诸如卡盘的部件固定到调谐层。

公开(公告)号：US07132822B1

公开(公告)日：2006-11-07

申请号：US11364968

申请日：2006-02-28

申请人： Stanton Hopkins Breitlow ,  Philip Steven Schmidt

发明人： Stanton Hopkins Breitlow ,  Philip Steven Schmidt

IPC分类号： G01R11/32 ,  G01R31/28

CPC分类号： G06F1/30

摘要： A supervisory system and method including a voltage detection circuit, a status signal interface, a memory, and a supervisory processor configured to predict a pending low power condition, to save status parameters, and to take actions to manage a plurality of processors receiving power from a power source susceptible to low voltage conditions, to stabilize the processors prior to and during a low voltage condition, and to restart the processors based on the status parameters.

摘要翻译： 一种监视系统和方法，包括电压检测电路，状态信号接口，存储器和配置成预测未决低功率状况的监控处理器，以保存状态参数，以及采取行动来管理从多个处理器接收功率的多个处理器 一个易受低电压条件影响的电源，用于在低电压状态之前和期间稳定处理器，并根据状态参数重启处理器。