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公开(公告)号：US09263305B2
公开(公告)日：2016-02-16
申请号：US13599648
申请日：2012-08-30
申请人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Robert Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
发明人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Robert Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
CPC分类号： H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
摘要： An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.
摘要翻译： 例如，提供一种用于半导体处理设备的加热器，该加热器包括具有至少一个功能区的基本功能层。 将基板固定到基底功能层，并且调谐层固定到与基底功能层相对的基板。 调谐层包括多个区域，其数量大于基底功能层的区域，并且调谐层具有比基底功能层低的功率。 此外，通过示例的方式将诸如卡盘的部件固定到与基板相对的调谐层。 衬底限定热导率以从基底功能层消散所需量的功率。
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公开(公告)号：US09553006B2
公开(公告)日：2017-01-24
申请号：US13599692
申请日：2012-08-30
申请人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Robert Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
发明人： Kevin Ptasienski , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Robert Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
CPC分类号： H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
摘要： An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.
摘要翻译： 提供了一种诸如加热器的装置，其包括具有至少一个流体通道的基座构件。 两相流体设置在流体通道内，两相流体的压力被控制，使得两相流体提供加热和冷却至少一个到基底构件。 调谐层被固定到基底构件上，调谐层包括多个区域。 此外，通过示例的方式将诸如卡盘的部件固定到调谐层。
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公开(公告)号：US20130220575A1
公开(公告)日：2013-08-29
申请号：US13599692
申请日：2012-08-30
申请人： Kevin Ptasienski , Kevin Robert SMITH , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Robert Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
发明人： Kevin Ptasienski , Kevin Robert SMITH , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Robert Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
IPC分类号： H01L21/67 , H05B1/02 , H01L21/683
CPC分类号： H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
摘要： An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.
摘要翻译： 提供了一种诸如加热器的装置，其包括具有至少一个流体通道的基座构件。 两相流体设置在流体通道内，两相流体的压力被控制，使得两相流体提供加热和冷却至少一个到基底构件。 调谐层被固定到基底构件上，调谐层包括多个区域。 此外，通过示例的方式将诸如卡盘的部件固定到调谐层。
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公开(公告)号：US20130161305A1
公开(公告)日：2013-06-27
申请号：US13599648
申请日：2012-08-30
申请人： Kevin PTASIENSKI , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
发明人： Kevin PTASIENSKI , Kevin Robert Smith , Cal Thomas Swanson , Philip Steven Schmidt , Mohammad Nosrati , Jacob Lindley , Allen Norman Boldt , Sanhong Zhang , Louis P. Steinhauser , Dennis Stanley Grimard
CPC分类号： H01L21/67103 , H01L21/67098 , H01L21/67109 , H01L21/67248 , H01L21/6833 , H05B1/00 , H05B1/02 , H05B1/0202 , H05B1/0227 , H05B1/0233 , H05B3/02 , H05B3/06 , H05B3/20 , H05B2203/005 , H05B2203/013 , H05B2213/03 , Y10T156/10
摘要： An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.
摘要翻译： 例如，提供一种用于半导体处理设备的加热器，该加热器包括具有至少一个功能区的基本功能层。 将基板固定到基底功能层，并且调谐层固定到与基底功能层相对的基板。 调谐层包括多个区域，其数量大于基底功能层的区域，并且调谐层具有比基底功能层低的功率。 此外，通过示例的方式将诸如卡盘的部件固定到与基板相对的调谐层。 衬底限定热导率以从基底功能层消散所需量的功率。
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公开(公告)号：US20120292308A1
公开(公告)日：2012-11-22
申请号：US13540094
申请日：2012-07-02
IPC分类号： H05B3/10
CPC分类号： H05B1/023 , B29C45/2737 , B29C2045/274 , B29C2045/2745 , H05B3/26 , H05B3/28 , H05B3/42 , H05B3/46 , H05B2203/002 , H05B2203/011 , H05B2203/013 , H05B2203/017 , H05B2203/035
摘要： A heater is provided that includes a resistive layer formed by a layered process (e.g., thick film, thin film, thermal spray, and sol-gel) and two electrical lead wires connected to the resistive layer. The resistive layer has sufficient temperature coefficient of resistance characteristics such that the resistive layer is a heater element and a sensor, and the resistive layer is in communication with a two-wire controller through the two electrical lead wires. Preferably, the sensor is a temperature sensor, and the heater includes additional layers formed by layered processes.
摘要翻译： 提供一种加热器，其包括通过分层工艺（例如，厚膜，薄膜，热喷涂和溶胶 - 凝胶）形成的电阻层和连接到电阻层的两个电引线。 电阻层具有足够的电阻特性的温度系数，使得电阻层是加热元件和传感器，并且电阻层通过两根电引线与双线控制器连通。 优选地，传感器是温度传感器，并且加热器包括通过分层工艺形成的附加层。
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公开(公告)号：US6037574A
公开(公告)日：2000-03-14
申请号：US964385
申请日：1997-11-06
申请人： Christopher C. Lanham , Kevin Ptasienski , Louis P. Steinhauser , Robin H. Lake , James H. Kreisel
发明人： Christopher C. Lanham , Kevin Ptasienski , Louis P. Steinhauser , Robin H. Lake , James H. Kreisel
CPC分类号： H05B3/28
摘要： An electric, resistance element heater utilizes quartz as a sheath material and has a resistance (heating) element that is in intimate, substantially continuous contact with a surface of the quartz. This allows the heater to operate in any one or all of the three modes of heat transfer, namely, radiation, conduction and convection. Such intimate, substantially continuous contact of the resistance element is achieved by applying the element in direct contact with the quartz surface. This is accomplished by applying a heating circuit directly to the quartz surface, which heating element can be a foil element, or a thick or a thin film deposition element. The overall heater is formed by covering the heater element by a quartz sheath and attaching leads formed on the ends of the heater element to a source of electric energy. Sensors such as thermocouples, RTD's and the like can also be incorporated directly into the heater structure. Also, the heater can be fashioned into a variety of shapes.
摘要翻译： 电阻元件加热器采用石英作为护套材料，并具有与石英表面紧密，基本上连续接触的电阻（加热）元件。 这允许加热器在三种传热模式，即辐射，传导和对流中的任何一种或全部中操作。 通过施加与石英表面直接接触的元件来实现电阻元件的这种紧密，基本上连续的接触。 这是通过将加热电路直接施加到石英表面，该加热元件可以是箔元件或厚的或薄膜沉积元件来实现的。 整个加热器是通过用石英护套覆盖加热器元件并将形成在加热器元件的端部上的引线附着到电能源上而形成的。 诸如热电偶，RTD等的传感器也可以直接结合到加热器结构中。 此外，加热器可以被制成各种形状。
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公开(公告)号：US08378266B2
公开(公告)日：2013-02-19
申请号：US11475534
申请日：2006-06-27
CPC分类号： A47J37/0676 , H05B1/0258 , H05B3/26 , H05B3/68 , H05B2203/005 , H05B2203/009 , H05B2203/011 , H05B2203/013 , H05B2203/017 , H05B2213/03 , H05B2213/07
摘要： A heater system and related methods of heating a surface are provided by the present disclosure that includes, in one form, a substrate defining a heating surface and a layered heater formed on the heating surface. A plurality of nodes are disposed along the heating surface and are in electrical contact with a resistive heating layer of the layered heater, along with a plurality of lead wires connected to the plurality of nodes. In one form, a multiplexer is in communication with the plurality of nodes through the plurality of lead wires, and a controller is in communication with the multiplexer, wherein the multiplexer sequences and transmits resistances from the plurality of nodes to the controller, and the controller controls an amount of power provided to each of the plurality of nodes based on the differences in resistances between the nodes.
摘要翻译： 本发明提供了一种加热器系统和加热表面的相关方法，其一种形式包括限定加热表面的基板和形成在加热表面上的分层加热器。 多个节点沿着加热表面设置，并且与层状加热器的电阻加热层电连接，以及连接到多个节点的多条引线。 在一种形式中，多路复用器通过多条引线与多个节点通信，并且控制器与多路复用器进行通信，其中多路复用器将多个序列和从多个节点传输电阻到控制器，以及控制器 基于节点之间的电阻差来控制提供给多个节点中的每一个的功率量。
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公开(公告)号：US07601935B2
公开(公告)日：2009-10-13
申请号：US11517434
申请日：2006-09-07
CPC分类号： H05B1/023 , B29C45/2737 , B29C2045/274 , B29C2045/2745 , H05B3/26 , H05B3/28 , H05B3/42 , H05B3/46 , H05B2203/002 , H05B2203/011 , H05B2203/013 , H05B2203/017 , H05B2203/035
摘要： A hot runner nozzle heater system is provided with a layered heater in communication with a two-wire controller, wherein a resistive layer of the layered heater is both a heater element and a temperature sensor. The two-wire controller thus determines temperature of the layered heater using the resistance of the resistive layer and controls heater temperature through a power source.
摘要翻译： 热流道喷嘴加热器系统设置有与二线控制器连通的层状加热器，其中层状加热器的电阻层是加热器元件和温度传感器。 因此，双线控制器使用电阻层的电阻来确定层状加热器的温度，并且通过电源来控制加热器温度。
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公开(公告)号：US07518090B2
公开(公告)日：2009-04-14
申请号：US11517401
申请日：2006-09-07
CPC分类号： H05B3/44 , B29C45/1782 , B29C45/2737 , H05B3/46 , Y10T29/49083
摘要： Methods of assembling a high heat transfer and tailored heat transfer layered heater systems are provided. One method includes a step of pressing one of a target part and a layered heater into the other one of the target part and the layered heater to create an interference fit between the layered heater and the target part. When the target part is disposed within the layered heater, the layered heater includes a substrate defining an inner periphery less than or equal to an outer periphery of the target part. When the layered heater is disposed within the target part, the layered heater includes a substrate defining an outer periphery larger than or equal to an inner periphery of the target.
摘要翻译： 提供组装高热传递和定制的传热分层加热器系统的方法。 一种方法包括将目标部件和层状加热器中的一个按压到目标部件和层状加热器中的另一个中以在层状加热器和目标部件之间形成干涉配合的步骤。 当目标部件设置在分层加热器内时，分层加热器包括限定内周小于或等于目标部分的外周的基板。 当层状加热器设置在目标部分内时，层状加热器包括限定大于或等于靶的内周的外周的基板。
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公开(公告)号：US08680443B2
公开(公告)日：2014-03-25
申请号：US10752359
申请日：2004-01-06
CPC分类号： H05B3/28
摘要： A layered heater is provided with a dielectric layer formed by a first layered process, a resistive layer formed on the dielectric layer, the resistive layer formed by a second layered process, and a protective layer formed on the resistive layer, wherein the protective layer is formed by one of the first or second layered processes or yet another layered process. The first layered process is different than the second layered process in order to take advantage of the unique processing benefits of each of the first and second layered processes for a synergistic result. The layered processes include, by way of example, thick film, thin film, thermal spraying, and sol-gel. Additional functional layers are also provided by the present invention, along with methods of forming each of the individual layers.
摘要翻译： 层状加热器设置有通过第一层叠工艺形成的电介质层，形成在电介质层上的电阻层，由第二层叠工艺形成的电阻层和形成在电阻层上的保护层，其中保护层为 由第一或第二分层过程中的一个或另一个分层过程形成。 第一分层过程不同于第二分层过程，以便利用每个第一和第二分层过程的独特处理优点来获得协同效果。 分层方法包括例如厚膜，薄膜，热喷涂和溶胶 - 凝胶。 本发明还提供了另外的功能层以及形成每个单独层的方法。
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