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公开(公告)号：US5924794A
公开(公告)日：1999-07-20
申请号：US395374
申请日：1995-02-21
CPC分类号： G05D11/138 , B01F15/00227 , B01F15/0408 , Y10T137/2509
摘要： A chemical blending system for blending two or more constituent chemicals to a desired concentration. One embodiment of the system includes a mix tank, a recirculation line having an inlet and an outlet in the tank, and a pump in the recirculation line for recirculating and mixing the blended chemical. A source of diluent is fluidly coupled to the mix tank through a diluent inlet and supply line. A source of concentrated chemical is fluidly coupled to the recirculation line through a concentrated chemical inlet, supply line, and an adding valve located in the recirculation line between the inlet and pump. A conductivity-type sensor in the recirculation line provides continuous measurements of the blended chemical concentration. A titration analyzer is coupled to the recirculation line to provide periodic blended chemical concentration measurements. A programmable logic control system including a processor and associated memory is coupled to the adding valve, conductivity-type sensor and titration analyzer. A blending control program and process control values are stored in the memory. The processor executes the blending control program and controls the concentrate adding valve as a function of the concentration measurements provided by the conductivity-type sensor and titration analyzer to blend the chemical to the desired concentration.
摘要翻译： 用于将两种或更多种组分化学品混合至所需浓度的化学共混体系。 该系统的一个实施例包括混合罐，在罐中具有入口和出口的再循环管线，以及用于再循环和混合混合的化学品的再循环管线中的泵。 稀释剂源通过稀释剂入口和供应管线流体地耦合到混合罐。 浓缩化学品的来源通过集中的化学品入口，供应管线和位于入口和泵之间的再循环管线中的添加阀流体耦合到再循环管线。 再循环管线中的导电型传感器提供了混合化学浓度的连续测量。 滴定分析仪连接到再循环管线，以提供周期性的混合化学浓度测量。 包括处理器和相关存储器的可编程逻辑控制系统耦合到加法阀，导电型传感器和滴定分析器。 混合控制程序和过程控制值存储在存储器中。 处理器执行混合控制程序，并根据由导电型传感器和滴定分析仪提供的浓度测量值来控制浓缩液添加阀，以将化学品与期望的浓度混合。
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公开(公告)号：US20120312084A1
公开(公告)日：2012-12-13
申请号：US13592022
申请日：2012-08-22
申请人： Donald C. Grant , Mark R. Litchy , David Blackford
发明人： Donald C. Grant , Mark R. Litchy , David Blackford
IPC分类号： G01N1/28
CPC分类号： G01N15/0266 , G01N1/4022 , G01N1/44 , G01N15/0205 , G01N15/0255 , G01N15/065 , G01N2001/2223 , G01N2001/4027 , G01N2015/0038
摘要： A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
摘要翻译： 用于测量液体中颗粒的颗粒浓度和尺寸分布的方法和装置。 该方法包括分离液体中的溶解和颗粒残留物，以确定颗粒物质的大小和浓度。 该方法包括以下步骤：从待分析的液体样品形成气溶胶，将气溶胶中的液滴蒸发至干，并检测颗粒。 还公开了用于分离液体中的溶解和颗粒残余物以确定颗粒物质的尺寸和浓度的装置。 该装置包括液滴形成器，与液滴形成器通信地连接的干燥器，以及与蒸发器通信连接以检测颗粒的检测器。
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公开(公告)号：US08573034B2
公开(公告)日：2013-11-05
申请号：US13068396
申请日：2011-05-10
申请人： Donald C. Grant , Mark R. Litchy
发明人： Donald C. Grant , Mark R. Litchy
IPC分类号： G01N1/28
CPC分类号： G01N1/4077 , G01N1/4022 , G01N15/02 , G01N2001/4027
摘要： A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
摘要翻译： 用于测量液体，特别是胶体悬浮液中溶解的残留物浓度和颗粒残留物颗粒浓度和尺寸分布的方法和装置。 该方法包括分离液体中的溶解和颗粒残余物，以便随后分析残留物种。 该方法包括以下步骤：从待分析的液体样品形成气溶胶，将气溶胶中的液滴蒸发至干，检测和确定颗粒的尺寸，并确定液体体积检测率。 还公开了用于分离液体中的溶解和颗粒残余物以确定两种残留物种的浓度以及颗粒物质的尺寸分布的装置。 该装置包括液滴形成器，与液滴形成器通信地连接的干燥器，以及与蒸发器通信地连接以检测和调整颗粒尺寸的检测器。
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公开(公告)号：US20090183554A1
公开(公告)日：2009-07-23
申请号：US12357088
申请日：2009-01-21
申请人： Donald C. Grant , Mark R. Litchy , David Blackford
发明人： Donald C. Grant , Mark R. Litchy , David Blackford
CPC分类号： G01N15/0266 , G01N1/4022 , G01N1/44 , G01N15/0205 , G01N15/0255 , G01N15/065 , G01N2001/2223 , G01N2001/4027 , G01N2015/0038
摘要： A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
摘要翻译： 用于测量液体中颗粒的颗粒浓度和尺寸分布的方法和装置。 该方法包括分离液体中的溶解和颗粒残留物，以确定颗粒物质的大小和浓度。 该方法包括以下步骤：从待分析的液体样品形成气溶胶，将气溶胶中的液滴蒸发至干，并检测颗粒。 还公开了用于分离液体中的溶解和颗粒残余物以确定颗粒物质的尺寸和浓度的装置。 该装置包括液滴形成器，与液滴形成器通信地连接的干燥器，以及与蒸发器通信连接以检测颗粒的检测器。
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公开(公告)号：US20140013831A1
公开(公告)日：2014-01-16
申请号：US14031298
申请日：2013-09-19
申请人： Donald C. Grant , Mark R. Litchy
发明人： Donald C. Grant , Mark R. Litchy
IPC分类号： G01N1/40
CPC分类号： G01N1/4077 , G01N1/4022 , G01N15/02 , G01N2001/4027
摘要： A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
摘要翻译： 用于测量液体，特别是胶体悬浮液中溶解的残留物浓度和颗粒残留物颗粒浓度和尺寸分布的方法和装置。 该方法包括分离液体中的溶解和颗粒残余物，以便随后分析残留物种。 该方法包括以下步骤：从待分析的液体样品形成气溶胶，将气溶胶中的液滴蒸发至干，检测和确定颗粒的尺寸，并确定液体体积检测率。 还公开了用于分离液体中的溶解和颗粒残余物以确定两种残留物种的浓度以及颗粒物质的尺寸分布的装置。 该装置包括液滴形成器，与液滴形成器通信地连接的干燥器，以及与蒸发器通信地连接以检测和调整颗粒尺寸的检测器。
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公开(公告)号：US06947126B2
公开(公告)日：2005-09-20
申请号：US10322238
申请日：2002-12-18
CPC分类号： G01N35/1097 , G01N1/38 , G01N2035/00544
摘要： A dilution apparatus for continuously producing a diluted liquid sample, e.g., a chemical-mechanical polishing slurry, for analysis, e.g., particle size distribution, comprises a mixer manifold, a diluent-introducing means, e.g., a flow controlling device, for introducing a diluent, e.g., water, into the mixer manifold, and a liquid sample introducing means, e.g., a pump, for introducing the sample into the mixer manifold. The mixer manifold includes a plurality of ports for receiving a plurality of liquid samples from a plurality of sample points. The dilution apparatus can include a second mixer manifold for continuously producing a second diluted liquid sample, and it can be associated with one or more sensors operable to measure sample properties, e.g., an optical particle counter. The sensors can be operated simultaneously, and the measurements of the sensors can be compared. The dilution apparatus is capable of improving accuracy, reliability, repeatability, sensitivity and versatility of the associated sensors, and it is less complex than conventional dilution systems.
摘要翻译： 用于连续生产用于分析的化学机械抛光浆料的稀释液体样品例如粒度分布的稀释装置包括混合器歧管，稀释剂引入装置，例如流动控制装置，用于引入 稀释剂，例如水，进入混合器歧管，以及用于将样品引入混合器歧管的液体样品引入装置，例如泵。 混合器歧管包括用于从多个采样点接收多个液体样品的多个端口。 稀释装置可以包括用于连续生产第二稀释液体样品的第二混合器歧管，并且其可以与可操作以测量样品性质的一个或多个传感器相关联，例如光学颗粒计数器。 传感器可以同时运行，可以比较传感器的测量。 稀释装置能够提高相关传感器的精度，可靠性，重复性，灵敏度和通用性，并且比传统稀释系统复杂。
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公开(公告)号：US09513198B2
公开(公告)日：2016-12-06
申请号：US14031298
申请日：2013-09-19
申请人： Donald C. Grant , Mark R. Litchy
发明人： Donald C. Grant , Mark R. Litchy
CPC分类号： G01N1/4077 , G01N1/4022 , G01N15/02 , G01N2001/4027
摘要： A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
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8.发明授权
公开(公告)号：US5641895A
公开(公告)日：1997-06-24
申请号：US431729
申请日：1995-05-01
申请人： Donald C. Grant
发明人： Donald C. Grant
CPC分类号： G01N1/2035 , G01N1/40 , Y10T137/2562 , Y10T137/6579 , Y10T137/8359 , Y10T137/86718
摘要： A method for qualifying a chemical distribution system and components used therein to ensure that the quantity of contaminants extracted from the system by the chemical is below a predetermined specification level. A volume of the chemical is continuously circulated through the system. The concentrations of extracted contaminants in the chemical are periodically measured, and the contaminant extraction rate determined as a function of the measurements. The system is qualified for production when the extraction rate has decreased to the specification level.
摘要翻译： 一种用于限定化学品分配系统及其中使用的组分的方法，以确保化学品从系统中提取的污染物的量低于预定规格水平。 化学品的体积连续循环通过系统。 周期性地测量化学品中提取的污染物的浓度，并且根据测量确定污染物提取速率。 当提取率降低到规格水平时，该系统符合生产要求。
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公开(公告)号：US5632866A
公开(公告)日：1997-05-27
申请号：US180546
申请日：1994-01-12
申请人： Donald C. Grant
发明人： Donald C. Grant
IPC分类号： B01D3/36 , B01D3/34 , C01B7/01 , C01B7/07 , C01B7/09 , C01B7/19 , C01B9/04 , C01B21/46 , H01L21/304 , C01B17/90
CPC分类号： C01B7/0712 , B01D3/343 , C01B21/46 , C01B7/093 , C01B7/196 , Y10S159/19
摘要： A method of recycling and purifying cleaning chemicals used in the production of semiconductor circuits and containing hydrofluoric acid and or hydrochloric acid. Recycling of such chemicals is accomplished using separation and reconstitution steps Hydrofluoric acid and hydrochloric acid cannot be distilled directly from a chemical solution as they form azeotropes with water. A low vapor pressure substance such as sulfuric acid or phosphoric acid is used to break the azeotrope while increasing the purity of the recovered chemicals and decreasing disposal problems. The method is useable at the point of use of the chemicals.
摘要翻译： 一种用于生产半导体电路并含有氢氟酸和/或盐酸的清洁化学品的再循环和净化方法。 这种化学品的回收利用分离和重构步骤完成。当氢氟酸和盐酸与水形成共沸物时，不能直接从化学溶液中蒸馏出氢氟酸和盐酸。 使用低蒸汽压物质如硫酸或磷酸来破坏共沸物，同时提高回收的化学品的纯度并减少处理问题。 该方法可用于化学品的使用。
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公开(公告)号：US09086350B2
公开(公告)日：2015-07-21
申请号：US13592022
申请日：2012-08-22
CPC分类号： G01N15/0266 , G01N1/4022 , G01N1/44 , G01N15/0205 , G01N15/0255 , G01N15/065 , G01N2001/2223 , G01N2001/4027 , G01N2015/0038
摘要： A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
摘要翻译： 用于测量液体中颗粒的颗粒浓度和尺寸分布的方法和装置。 该方法包括分离液体中的溶解和颗粒残留物，以确定颗粒物质的大小和浓度。 该方法包括以下步骤：从待分析的液体样品形成气溶胶，将气溶胶中的液滴蒸发至干，并检测颗粒。 还公开了用于分离液体中的溶解和颗粒残余物以确定颗粒物质的尺寸和浓度的装置。 该装置包括液滴形成器，与液滴形成器通信地连接的干燥器，以及与蒸发器通信连接以检测颗粒的检测器。
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