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    Chemical blending system with titrator control
    1.
    发明授权
    Chemical blending system with titrator control 失效
    化学混合系统与滴定仪控制

    公开(公告)号：US5924794A

    公开(公告)日：1999-07-20

    申请号：US395374

    申请日：1995-02-21

    申请人： Kevin T. O'Dougherty ,  Travis A. Lemke ,  Donald C. Grant

    发明人： Kevin T. O'Dougherty ,  Travis A. Lemke ,  Donald C. Grant

    IPC分类号： B01F15/04 ,  G05D11/13 ,  B01F15/02 ,  G05D11/08

    CPC分类号： G05D11/138 ,  B01F15/00227 ,  B01F15/0408 ,  Y10T137/2509

    摘要： A chemical blending system for blending two or more constituent chemicals to a desired concentration. One embodiment of the system includes a mix tank, a recirculation line having an inlet and an outlet in the tank, and a pump in the recirculation line for recirculating and mixing the blended chemical. A source of diluent is fluidly coupled to the mix tank through a diluent inlet and supply line. A source of concentrated chemical is fluidly coupled to the recirculation line through a concentrated chemical inlet, supply line, and an adding valve located in the recirculation line between the inlet and pump. A conductivity-type sensor in the recirculation line provides continuous measurements of the blended chemical concentration. A titration analyzer is coupled to the recirculation line to provide periodic blended chemical concentration measurements. A programmable logic control system including a processor and associated memory is coupled to the adding valve, conductivity-type sensor and titration analyzer. A blending control program and process control values are stored in the memory. The processor executes the blending control program and controls the concentrate adding valve as a function of the concentration measurements provided by the conductivity-type sensor and titration analyzer to blend the chemical to the desired concentration.

    摘要翻译： 用于将两种或更多种组分化学品混合至所需浓度的化学共混体系。 该系统的一个实施例包括混合罐，在罐中具有入口和出口的再循环管线，以及用于再循环和混合混合的化学品的再循环管线中的泵。 稀释剂源通过稀释剂入口和供应管线流体地耦合到混合罐。 浓缩化学品的来源通过集中的化学品入口，供应管线和位于入口和泵之间的再循环管线中的添加阀流体耦合到再循环管线。 再循环管线中的导电型传感器提供了混合化学浓度的连续测量。 滴定分析仪连接到再循环管线，以提供周期性的混合化学浓度测量。 包括处理器和相关存储器的可编程逻辑控制系统耦合到加法阀，导电型传感器和滴定分析器。 混合控制程序和过程控制值存储在存储器中。 处理器执行混合控制程序，并根据由导电型传感器和滴定分析仪提供的浓度测量值来控制浓缩液添加阀，以将化学品与期望的浓度混合。

    ZERO LAG DISPENSE APPARATUS
    2.
    发明申请
    ZERO LAG DISPENSE APPARATUS 审中-公开

    公开(公告)号：US20140352738A1

    公开(公告)日：2014-12-04

    申请号：US14289017

    申请日：2014-05-28

    申请人： Don C. Burkman ,  Cary M. Ley ,  Kevin T. O'Dougherty ,  Charlie A. Peterson

    发明人： Don C. Burkman ,  Cary M. Ley ,  Kevin T. O'Dougherty ,  Charlie A. Peterson

    IPC分类号： H01L21/67

    CPC分类号： H01L21/67051

    摘要： A liquid dispenser for a wafer processing system includes a supply tube with an inlet at one end and an outlet at the other end. Attached to the supply tube at the outlet end is a liquid reservoir. The liquid reservoir has a dispensing plate that has an outlet for dispensing liquid onto a wafer. There is also a dispensing valve for controlling the dispensing of the liquid.

    摘要翻译： 用于晶片处理系统的液体分配器包括在一端具有入口并在另一端具有出口的供给管。 在出口端连接到供应管是液体储存器。 液体储存器具有分配板，该分配板具有用于将液体分配到晶片上的出口。 还有一个用于控制液体分配的分配阀。

    LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE
    4.
    发明申请
    LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE 有权
    具有电子信息存储的液体处理系统

    公开(公告)号：US20100152891A1

    公开(公告)日：2010-06-17

    申请号：US12707449

    申请日：2010-02-17

    申请人： Kevin T. O'Dougherty ,  Robert E. Andrews ,  Tripunithura V. Jayaraman ,  Joseph P. Menning ,  Christopher A. Baye-Wallace

    发明人： Kevin T. O'Dougherty ,  Robert E. Andrews ,  Tripunithura V. Jayaraman ,  Joseph P. Menning ,  Christopher A. Baye-Wallace

    IPC分类号： G06F17/00

    CPC分类号： G05D7/0617 ,  B67D7/0283 ,  B67D7/348 ,  Y10T137/0318 ,  Y10T137/8158

    摘要： An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.

    摘要翻译： 电子存储装置与能够保持液体的容器结合，以电子地存储与存储在容器中的液体有关的信息。 该系统可以配置有天线，用于将信息存储到电子存储装置中并从其读取信息。 与天线耦合的基于微处理器的控制器可以用于基于通过天线从电子存储装置读取的信息来控制液体的处理。 具有读取器的安全读取器系统的连接器被提供以物理地耦合到具有信息存储机构的容器，用于从信息存储机构周期性地读取信息。 连接器可以与读数同时从容器中抽出材料。

    LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE
    5.
    发明申请
    LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE 有权
    具有电子信息存储的液体处理系统

    公开(公告)号：US20120186671A1

    公开(公告)日：2012-07-26

    申请号：US13438285

    申请日：2012-04-03

    申请人： Kevin T. O'Dougherty ,  Robert E. Andrews ,  Tripunithura V. Jayaraman ,  Joseph P. Menning ,  Christopher A. Baye-Wallace

    发明人： Kevin T. O'Dougherty ,  Robert E. Andrews ,  Tripunithura V. Jayaraman ,  Joseph P. Menning ,  Christopher A. Baye-Wallace

    IPC分类号： F17D3/00

    CPC分类号： G05D7/0617 ,  B67D7/0283 ,  B67D7/348 ,  Y10T137/0318 ,  Y10T137/8158

    摘要： An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.

    摘要翻译： 电子存储装置与能够保持液体的容器结合，以电子地存储与存储在容器中的液体有关的信息。 该系统可以配置有天线，用于将信息存储到电子存储装置中并从其读取信息。 与天线耦合的基于微处理器的控制器可以用于基于通过天线从电子存储装置读取的信息来控制液体的处理。 具有读取器的安全读取器系统的连接器被提供以物理地耦合到具有信息存储机构的容器，用于从信息存储机构周期性地读取信息。 连接器可以与读数同时从容器中抽出材料。

    Apparatus and method for dispensing high-viscosity liquid
    7.
    发明授权
    Apparatus and method for dispensing high-viscosity liquid 有权

    公开(公告)号：US07025234B2

    公开(公告)日：2006-04-11

    申请号：US10247107

    申请日：2002-09-19

    申请人： Ryan Priebe ,  Kevin T. O'Dougherty ,  Nicholas Cheesebrow

    发明人： Ryan Priebe ,  Kevin T. O'Dougherty ,  Nicholas Cheesebrow

    IPC分类号： B65D83/00

    CPC分类号： B67D7/0255 ,  B67D1/0054 ,  B67D7/0261 ,  Y10T137/85954

    摘要： The present invention relates to apparatus and method for re-circulating high viscosity liquids. The apparatus comprises a recirculating probe coupled to a fluid storage and dispensing vessel by a connector, and the recirculating probe comprises: (a) a dip tube defining an output flow path; (b) an output port; (c) a recirculating port; and (d) a return flow path. The output flow path and the return flow path preferably have substantially equal cross-sectional areas, which reduce or eliminate the unbalance between the discharge pressure in the output line and that in the re-circulation line, and prevent premature wearing-out of the dispensing/recirculating pump. The output flow path and the return flow path can also be concentric to each other, which not only maximizes the effective flow area for both output and return flow paths within the limited cross-sectional area of the opening of the fluid vessel, but also avoids liquid turbulence and/or formation of air bubbles caused by free-fall drip introduction of the re-circulated liquid that is commonly observed in conventional recirculating probe designs.

    Liquid chemical dispensing system with pressurization
    8.
    发明授权
    Liquid chemical dispensing system with pressurization 有权
    液体化学分配系统加压

    公开(公告)号：US06206240B1

    公开(公告)日：2001-03-27

    申请号：US09274723

    申请日：1999-03-23

    申请人： Michael L. Osgar ,  Kevin T. O'Dougherty

    发明人： Michael L. Osgar ,  Kevin T. O'Dougherty

    IPC分类号： B67D532

    CPC分类号： B67D7/0255 ,  B67D7/3263

    摘要： The present invention is a system for handling high purity liquid and a method for the same. The system has a container with a mouth. The container is configured to hold liquid. A cap is coupled with the mouth of the container. A connector is coupled with the cap. The connector has a connector head and a probe extending from the connector head. The probe is insertable through the cap and through the mouth into the container. The probe has a flow passage. The system also has a pressurization source that communicates with the container. Pressure delivered from the source acts upon the container forcing liquid out of the container through the flow passage in the probe. There is also a pressurization port communicating with the connector, the cap, and the pressurization source. Pressure from the pressurization source is delivered to the container when the cap and the connector are properly mated. Pressure from the pressurization source is not delivered to the container when the cap and the connector are not mated.

    摘要翻译： 本发明是用于处理高纯度液体的系统及其方法。 系统有一个容器口。 容器被配置成保持液体。 盖与容器的口连接。 连接器与盖连接。 连接器具有连接器头和从连接器头延伸的探头。 探头可以通过盖子插入并通过口进入容器。 探头具有流动通道。 该系统还具有与容器连通的加压源。 从源输送的压力作用在容器上，迫使液体通过探针中的流动通道流出容器。 还具有与连接器，盖和加压源连通的加压口。 当盖和连接器适当配合时，来自加压源的压力被传送到容器。 当帽和连接器不配合时，来自加压源的压力不会传递到容器。

    Empty drum detecting apparatus
    9.
    发明授权
    Empty drum detecting apparatus 失效
    空鼓检测装置

    公开(公告)号：US5293893A

    公开(公告)日：1994-03-15

    申请号：US009725

    申请日：1993-01-27

    申请人： Kevin T. O'Dougherty

    发明人： Kevin T. O'Dougherty

    IPC分类号： B67D1/12 ,  G05D7/06 ,  H01L21/00

    CPC分类号： H01L21/6715 ,  B67D1/1247 ,  G05D7/0688 ,  Y10T137/2569 ,  Y10T137/3003 ,  Y10T137/87265

    摘要： Empty drum detecting apparatus comprises an upright manifold chamber connected at its intermediate portion to a supply line extended to a supply drum of liquid chemical, and a pump for directing pumped liquid to process equipment utilizing the liquid chemical and having an inlet line. An outlet line is connected to the bottom portion of the upright manifold chamber and connected to the inlet line of the pump; and a shunt line with a flow restriction therein is connected between the upper portion of the manifold chamber and the outlet line for delivering collected gases and liquid to the inlet line and pump. An alternate flow restricting valve may be placed in the outlet line to restrict liquid flow from the lower portion of the manifold chamber. A capacitance proximity sensor is mounted above the inlet of the manifold chamber and senses the liquid level in the manifold chamber to produce an indication of the liquid level.

    摘要翻译： 空鼓检测装置包括在其中间部分处连接到延伸到液体化学品的供应鼓的供应管线的直立歧管室，以及用于将泵送的液体引导到利用液体化学品处理设备并具有入口管线的泵。 出口管线连接到直立歧管腔室的底部并连接到泵的入口管线; 并且其中具有流动限制的分流管连接在歧管室的上部和用于将收集的气体和液体输送到入口管线和泵之间的出口管线。 可以在出口管路中放置一个可选择的流量限制阀，以限制来自歧管腔室下部的液体流动。 电容接近传感器安装在歧管腔室的入口上方，并感测歧管腔室中的液面以产生液面的指示。