摘要:
Disclosed are a substrate inspection apparatus and a method for displaying a component in a three-dimensional inspection of a substrate. The substrate inspection apparatus measures a substrate or an inspection target region of interest of the substrate and displays an image of components positioned within the measured region on a display unit. The image of the components displayed on the display unit may be displayed in a predetermined reference direction. The difference between the reference direction and a direction in which the actual component is disposed on the substrate is displayed in the form of a numerical value or a figure. Alternatively, the image of the component in the reference direction and the image of the actually disposed component are simultaneously displayed on a screen, and a user may convert a display method of the image by using a toggle button.
摘要:
The present invention provides measuring apparatus and method for three-dimensional profilometry of an object, wherein a random-speckle beam and a structured fringe beam are projected onto the object and reflected therefrom for forming deformed random-speckle beam and structured fringe beams that are separately acquired by an image acquiring device thereby obtaining a random-speckle image utilized to determine an absolute phase information of each position on the surface of the object, and a structured fringe image utilized to determine a relative phase information for each position of the surface of the object. Each absolute phase information and each relative phase information corresponding to each position are converted into an absolute depth and a relative depth, respectively. Finally, the depth information of each position on the surface of the object is calculated by combining the corresponding absolute depth and the relative depth whereby the surface profile of the object can be established.
摘要:
Methods, systems, and devices involving patterned radiation are provided in accordance with various embodiments. Some embodiments include a device for projecting pattern radiation. Some embodiments include a method for estimating coordinates of a location on an object in a 3D scene. Some embodiments include a system for estimating the coordinates of a location on an object in a 3D scene. A variety of radiation patterns are provided in accordance with various embodiments. Some embodiments may relate to the use of patterned illumination to identify the angular information that may be utilized to measure depth by triangulation.
摘要:
A noncontact optical three-dimensional measuring device that includes a first projector, a first camera, and a second camera; a processor electrically coupled to the first projector, the first camera and the second camera; and computer readable media which, when executed by the processor, causes the first digital signal to be collected at a first time and the second digital signal to be collected at a second time different than the first time and determines three-dimensional coordinates of a first point on the surface based at least in part on the first signal and the first distance and determines three-dimensional coordinates of a second point on the surface based at least in part on the second signal.
摘要:
A system for measuring the profile or the refractive index of a transparent object by fringe projection techniques is provided and has an image generating device, an image capture device, and an image processor. The image generating device produces a reference image with a long depth of focus. This reference image is emitted into an inspected transparent object, and is distorted by the refractive index and the profile of the transparent object. The image capture device receives the distorted image. The image processor analyzes the difference between the distorted image and the reference image, so as to identify the profile or the refractive index of the inspected transparent object.
摘要:
An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.
摘要:
A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.
摘要:
A method for determining 3D coordinates of points on a surface of the object by providing a non-contact 3D measuring device having a projector and camera coupled to a processor, projecting a pattern onto the surface to determine a first set of 3D coordinates of points on the surface, determining susceptibility of the object to multipath interference by projecting and reflecting rays from the measured 3D coordinates of the points, selecting a pattern as a single line stripe or a single spot based on the susceptibility to multipath interference, and projecting the pattern onto the surface to determine a second set of 3D coordinates.
摘要:
Disclosed is an optical imaging method and device enabling display and 3D measurement of tridimensional objects (1), whereby at least two individual images are captured one after the other and the image conversion is controlled or regulated differently for these individual images. By employing adjustable optical means (10-14) for the illumination of the object or in the optical path for the imaging of the object on the image converter (15) it is possible to acquire a larger amount of visual information on the object observed than that which is available in an individual image due to the limitations imposed by the design of the converter used (15). The invention relates to processes and design forms of the device enabling recording units to be designed, using simply and generally commercial components, which are able to display and measure larger objects (1) despite a reduced field of vision imposed by the design. This is especially useful for diagnosis in invasive applications in the bodies of humans or animals.
摘要:
A method of measuring a height of 3-dimensional shape measurement apparatus includes irradiating a first grid pattern light from a plurality of first lighting devices and a second grid pattern light from a plurality of second lighting devices which are alternatively arranged to the first lighting devices toward a target object wherein the first grid pattern light has a first equivalent wavelength and the second grid pattern light has a second equivalent wavelength that is different from the first equivalent wavelength, and obtaining a first pattern image corresponding to the first grid pattern light and a second pattern image corresponding to the second grid pattern light, generating combined pattern images by combining the first and second pattern images obtained from the first and second lighting devices adjacent to each other among the plurality of first and second lighting devices, calculating heights of the target object according to a combined equivalent wavelength of the combined pattern images, and determining a representative height of the target object by using the calculated heights of the target object. And therefore, it is possible to measure a height of a target object which exceeds an available height of measurement by each of the first and second lighting devices, as well as, more accurate and reliable height may be obtained.