Measuring apparatus for three-dimensional profilometry and method thereof

    公开(公告)号:US09858671B2

    公开(公告)日:2018-01-02

    申请号:US14483821

    申请日:2014-09-11

    摘要: The present invention provides measuring apparatus and method for three-dimensional profilometry of an object, wherein a random-speckle beam and a structured fringe beam are projected onto the object and reflected therefrom for forming deformed random-speckle beam and structured fringe beams that are separately acquired by an image acquiring device thereby obtaining a random-speckle image utilized to determine an absolute phase information of each position on the surface of the object, and a structured fringe image utilized to determine a relative phase information for each position of the surface of the object. Each absolute phase information and each relative phase information corresponding to each position are converted into an absolute depth and a relative depth, respectively. Finally, the depth information of each position on the surface of the object is calculated by combining the corresponding absolute depth and the relative depth whereby the surface profile of the object can be established.

    THREE-DIMENSIONAL COORDINATE SCANNER AND METHOD OF OPERATION
    4.
    发明申请
    THREE-DIMENSIONAL COORDINATE SCANNER AND METHOD OF OPERATION 审中-公开
    三维坐标扫描仪及其操作方法

    公开(公告)号:US20160364874A1

    公开(公告)日:2016-12-15

    申请号:US15246619

    申请日:2016-08-25

    摘要: A noncontact optical three-dimensional measuring device that includes a first projector, a first camera, and a second camera; a processor electrically coupled to the first projector, the first camera and the second camera; and computer readable media which, when executed by the processor, causes the first digital signal to be collected at a first time and the second digital signal to be collected at a second time different than the first time and determines three-dimensional coordinates of a first point on the surface based at least in part on the first signal and the first distance and determines three-dimensional coordinates of a second point on the surface based at least in part on the second signal.

    摘要翻译: 一种非接触光学三维测量装置,包括第一投影仪,第一相机和第二相机; 处理器,电耦合到第一投影仪,第一相机和第二相机; 以及计算机可读介质,所述计算机可读介质在由所述处理器执行时使得所述第一数字信号在第一时间被收集,并且所述第二数字信号将在与所述第一时间不同的第二时间收集,并且确定所述第一数字信号的第一数字信号 至少部分地基于第一信号和第一距离在表面上指向,并且至少部分地基于第二信号来确定表面上的第二点的三维坐标。

    SYSTEM FOR MEASURING THREE-DIMENSIONAL PROFILE OF TRANSPARENT OBJECT OR REFRACTIVE INDEX BY FRINGE PROJECTION
    5.
    发明申请
    SYSTEM FOR MEASURING THREE-DIMENSIONAL PROFILE OF TRANSPARENT OBJECT OR REFRACTIVE INDEX BY FRINGE PROJECTION 有权
    通过FREE投影测量透明物体或折射率三维轮廓的系统

    公开(公告)号:US20160238381A1

    公开(公告)日:2016-08-18

    申请号:US14833174

    申请日:2015-08-24

    IPC分类号: G01B11/25 H04N5/372

    摘要: A system for measuring the profile or the refractive index of a transparent object by fringe projection techniques is provided and has an image generating device, an image capture device, and an image processor. The image generating device produces a reference image with a long depth of focus. This reference image is emitted into an inspected transparent object, and is distorted by the refractive index and the profile of the transparent object. The image capture device receives the distorted image. The image processor analyzes the difference between the distorted image and the reference image, so as to identify the profile or the refractive index of the inspected transparent object.

    摘要翻译: 提供了一种通过边缘投影技术测量透明物体的轮廓或折射率的系统,并具有图像生成装置,图像捕获装置和图像处理器。 图像产生装置产生具有长焦距的参考图像。 该参考图像被发射到被检查的透明物体中,并且被透明物体的折射率和轮廓变形。 图像捕获设备接收失真的图像。 图像处理器分析失真图像和参考图像之间的差异,以便识别检查的透明对象的轮廓或折射率。

    Measurement microscope device, image generating method, measurement microscope device operation program, and computer-readable recording medium
    6.
    发明授权
    Measurement microscope device, image generating method, measurement microscope device operation program, and computer-readable recording medium 有权
    测量显微镜装置,图像生成方法,测量显微镜装置操作程序和计算机可读记录介质

    公开(公告)号:US09291450B2

    公开(公告)日:2016-03-22

    申请号:US14042998

    申请日:2013-10-01

    发明人: Shinya Takahashi

    摘要: An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.

    摘要翻译: 可以捕获具有宽视野的图像,而不会导致测量精度的劣化。 提供:放置物体的阶段; 用于显示高度图像或观察图像的显示单元; 用于对所述高度图像进行测量的测量单元; 图像连接单元,被配置为通过移动所述平台并捕获不同的区域,获取多个高度图像,并且连接所获得的多个高度图像和观察图像以生成连接图像; 测量误差区域显示单元,被配置为将测量误差区域叠加并显示在所述物体的图像上; 以及测量图像成像条件设置单元,用于调整用于生成高度图像所需的条纹图像的成像条件以减少测量误差区域。

    Shape measurement apparatus and method
    7.
    发明授权
    Shape measurement apparatus and method 有权
    形状测量装置及方法

    公开(公告)号:US09275292B2

    公开(公告)日:2016-03-01

    申请号:US12784707

    申请日:2010-05-21

    摘要: A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.

    摘要翻译: 一种形状测量装置,包括支撑目标基板的工作台,包括光源的图案投影部分,部分地透射和遮挡由光源产生的光以产生光栅图像的光栅部分,以及使光栅图像产生的投影透镜部分 在目标基板的测量目标上,捕获由目标基板的测量目标反射的光栅图像的图像捕获部分,以及控制工作台,图案投影部分和图像捕获部分的控制部分,计算 光栅图像的可靠性指标和与测量对象对应的光栅图像的相位,并且通过使用可靠性指标和相位来检查测量对象。 因此,可以提高测量的精度。

    METHOD AND DEVICE FOR CARRYING OUT OPTICAL PICKUP
    9.
    发明申请
    METHOD AND DEVICE FOR CARRYING OUT OPTICAL PICKUP 有权
    执行光学拾取的方法和装置

    公开(公告)号:US20150164621A1

    公开(公告)日:2015-06-18

    申请号:US14499088

    申请日:2014-09-27

    申请人: ORAMETRIX, INC.

    发明人: Rudger Rubbert

    IPC分类号: A61C9/00 G01B11/25

    摘要: Disclosed is an optical imaging method and device enabling display and 3D measurement of tridimensional objects (1), whereby at least two individual images are captured one after the other and the image conversion is controlled or regulated differently for these individual images. By employing adjustable optical means (10-14) for the illumination of the object or in the optical path for the imaging of the object on the image converter (15) it is possible to acquire a larger amount of visual information on the object observed than that which is available in an individual image due to the limitations imposed by the design of the converter used (15). The invention relates to processes and design forms of the device enabling recording units to be designed, using simply and generally commercial components, which are able to display and measure larger objects (1) despite a reduced field of vision imposed by the design. This is especially useful for diagnosis in invasive applications in the bodies of humans or animals.

    摘要翻译: 公开了一种能够进行三维物体(1)的显示和3D测量的光学成像方法和装置,由此至少两个单独的图像被一个接一个地捕获,并且针对这些单独的图像对图像转换进行不同的控制或调节。 通过采用可调节的光学装置(10-14),用于对物体的照明或用于在图像转换器(15)上的物体成像的光路中,可以获得比观察到的物体更大量的视觉信息, 由于所使用的转换器的设计所施加的限制,在单个图像中可用的(15)。 本发明涉及使得能够使用简单且通常商业的部件来设计记录单元的装置的过程和设计形式,尽管设计所施加的视野减弱,能够显示和测量较大物体(1)。 这对于在人体或动物身体的侵入性应用中的诊断特别有用。

    METHOD OF MEASURING A HEIGHT OF 3-DIMENSIONAL SHAPE MEASUREMENT APPARATUS
    10.
    发明申请
    METHOD OF MEASURING A HEIGHT OF 3-DIMENSIONAL SHAPE MEASUREMENT APPARATUS 有权
    测量三维形状测量装置高度的方法

    公开(公告)号:US20150124081A1

    公开(公告)日:2015-05-07

    申请号:US14397520

    申请日:2013-05-22

    IPC分类号: G01B11/14

    摘要: A method of measuring a height of 3-dimensional shape measurement apparatus includes irradiating a first grid pattern light from a plurality of first lighting devices and a second grid pattern light from a plurality of second lighting devices which are alternatively arranged to the first lighting devices toward a target object wherein the first grid pattern light has a first equivalent wavelength and the second grid pattern light has a second equivalent wavelength that is different from the first equivalent wavelength, and obtaining a first pattern image corresponding to the first grid pattern light and a second pattern image corresponding to the second grid pattern light, generating combined pattern images by combining the first and second pattern images obtained from the first and second lighting devices adjacent to each other among the plurality of first and second lighting devices, calculating heights of the target object according to a combined equivalent wavelength of the combined pattern images, and determining a representative height of the target object by using the calculated heights of the target object. And therefore, it is possible to measure a height of a target object which exceeds an available height of measurement by each of the first and second lighting devices, as well as, more accurate and reliable height may be obtained.

    摘要翻译: 测量三维形状测量装置的高度的方法包括:照射来自多个第一照明装置的第一格栅图案光和来自多个第二照明装置的第二格栅图案光,所述第二照明装置交替地布置到第一照明装置 目标物体,其中所述第一格栅图案光具有第一等效波长,并且所述第二格栅图案光具有与所述第一等效波长不同的第二等效波长,并且获得与所述第一格栅图案光对应的第一图案图像, 对应于第二格栅图案光的图案图像,通过组合从多个第一和第二照明装置中彼此相邻的第一和第二照明装置获得的第一和第二图案图像来生成组合图案图像,计算目标对象的高度 根据组合的组合等效波长 d图案图像,并且通过使用所计算的目标对象的高度来确定目标对象的代表性高度。 因此,可以通过第一和第二照明装置中的每一个来测量超过可用测量高度的目标物体的高度,并且可以获得更准确和可靠的高度。