Remote wafer flow and recipe editor for simiconductor processing control
    3.
    发明授权
    Remote wafer flow and recipe editor for simiconductor processing control 有权
    远程晶圆流程和配方编辑器,用于模拟控制

    公开(公告)号:US06907308B1

    公开(公告)日:2005-06-14

    申请号:US10210945

    申请日:2002-08-02

    IPC分类号: G05B19/418 G06F19/00

    摘要: A remote track editor system, method, and computer readable medium is provided to remotely edit track flows and recipes of semiconductor processing tools. The editor system includes a processing track, a track controller, and a remote track editor for remotely editing recipes of at least one semiconductor processing tool. The editor system communicates with remote terminals and accesses multiple flows and recipes stored on network databases through a SECS/GEM interface. The remote track editor edits recipes without interrupting the process track and correctly renumbers line and flow numbers of the recipes when editing, deleting, or inserting steps. The remote track editor also performs side-by-side comparisons of multiple recipes, verifies the contents of recipes to master recipes, and provides indicators of mismatches.

    摘要翻译: 提供远程轨迹编辑器系统,方法和计算机可读介质以远程编辑半导体处理工具的轨迹流和配方。 编辑器系统包括处理轨道,轨道控制器和用于远程编辑至少一个半导体处理工具的配方的远程轨道编辑器。 编辑器系统与远程终端进行通信,通过SECS / GEM接口访问存储在网络数据库中的多个流和配方。 远程跟踪编辑器在编辑,删除或插入步骤时编辑配方,而不会中断进程轨迹,并正确地重新编号配方的线和流编号。 远程跟踪编辑器还执行多个配方的并行比较,验证配方的内容以掌握配方,并提供不匹配的指标。