摘要:
A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
摘要:
A leak sensor and a leak sensing system are provided. The leak sensor preferably includes a fluid sensing member that is capable of sensing and indicating the presence of a fluid leaked from a fluid storage or transport member. The leak sensor further preferably includes at least two wires communicating with the fluid sensing member. The wires are preferably configured to be short-circuited when they contact the fluid leaked from the fluid storage or transport member. An electrical signal corresponding to a leak sensor location can thereby be sent to a control terminal of the leak sensing system. A portion of the wires may be arranged in a cable coated with a protective material such as Teflon®. The control box (or terminal) preferably receives electrical signals from a plurality of leak sensors. The electrical signals can provide information on whether the fluid has leaked and on which leak sensor or sensors have detected the fluid leak.
摘要:
Disclosed is a CO2 capturing device for improving CO2 removal efficiency and use of a dry solid absorbent. The device comprises a CO2 recovery reactor 1 to permit CO2 containing gas externally supplied to be in contact with a dry solid absorbent to capture CO2; a recovery cyclone 4 connected to the recovery reactor 1 to exhaust CO2-free gas while separating a solid portion containing CO2; a fluidized bed type regeneration reactor 2 which receives the solid portion through a solid feeding pipe 5 connected to the recovery cyclone 4 and divides the solid portion into CO2 and the other part containing the dry solid absorbent by using a fluidizing gas fed through a fluidizing gas supply pipe 8; a regeneration cyclone 6 to exhaust the separated CO2 outside in order to use CO2 in the regeneration reactor 2; and a water vapor pretreatment device 3 connected to the regeneration reactor 2 to absorb H2O in the dry solid absorbent and feedback the H2O containing absorbent to the recovery reactor.
摘要:
Disclosed are an exhaust gas treating apparatus and a treating method for a carbon dioxide capture process, in which harmful substances remaining in the exhaust gas discharged from the conventional flue-gas desulfurization process are additionally removed for efficient performance of the carbon dioxide capture process. According to the exhaust gas treating apparatus for a carbon dioxide capture process, it has the effects of minimizing the installation space of desulfurization equipment and reducing the process cost. In addition, by keeping the contaminants contained in the gas introduced in the carbon dioxide capture equipment below a proper level, absorption performance can be improved as degradation of the absorbent used in the carbon dioxide capture process is prevented. After all, it has an advantage of preventing the pollution by the exhaust gas discharged into the atmosphere.
摘要:
A regeneration reactor of a CO2 capture system is disclosed. According to an embodiment of the present invention, in the CO2 capture system comprising a capture reactor selectively adsorbing CO2 by bringing a CO2-containing gas supplied from the outside into contact with a solid adsorbent, and a regeneration reactor separating the adsorbed CO2 from the solid adsorbent adsorbed with the CO2, the regeneration reactor includes a chamber having an inverted truncated cone shape being widened toward an upper part and narrowed toward a lower part, such that a pressure in the regeneration reactor is constantly maintained through the whole part and accordingly, a flow velocity in the chamber can be constantly maintained.
摘要:
Disclosed is a dry carbon dioxide capture apparatus with improved carbon dioxide capture efficiency through preventing gas backflows into vertical transport lines. The dry CO2 capture apparatus includes a capture reactor having a capture buffer chamber on the bottom side, a capture diffusion plate on top of the capture buffer chamber, and adsorbent particles in a space above the capture diffusion plate; a first separator connected to the capture reactor through a vertical transport line; a regenerator having a regeneration buffer chamber on the bottom side, a regenerating diffusion plate on top of the regeneration buffer chamber, and adsorbent particles in a space above the regenerating diffusion plate; a second separator connected to the regenerator through a gas separation line; and a second particle transfer line connected to the regenerator at one end and connected to the capture reactor at the other end.
摘要:
A regeneration reactor of a CO2 capture system is disclosed. According to an embodiment of the present invention, in the CO2 capture system comprising a capture reactor selectively adsorbing CO2 by bringing a CO2-containing gas supplied from the outside into contact with a solid adsorbent, and a regeneration reactor separating the adsorbed CO2 from the solid adsorbent adsorbed with the CO2, the regeneration reactor includes a chamber having an inverted truncated cone shape being widened toward an upper part and narrowed toward a lower part, such that a pressure in the regeneration reactor is constantly maintained through the whole part and accordingly, a flow velocity in the chamber can be constantly maintained.
摘要:
A field emission display (FED) includes first and second substrates opposing one another with a predetermined gap therebetween. The FED also includes cathode electrodes formed in a stripe pattern on the first substrate, and a plurality of electron emission sources formed on the cathode electrodes; gate electrodes formed on the first substrate in a state insulated from the cathode electrodes and the electron emission sources by an insulating layer; and anode electrodes formed on a surface of the second substrate opposing the first substrate, and including phosphor layers formed thereon. A pair of fixing rails are formed along two opposing edges of one of the first and second substrates, the fixing rails having undergone a blackening process; and a metal grid provided between the first and second substrates and welded to an upper surface of the fixing rails.
摘要:
Disclosed is a dry carbon dioxide capture apparatus with improved carbon dioxide capture efficiency through preventing gas backflows into vertical transport lines. The dry CO2 capture apparatus includes a capture reactor having a capture buffer chamber on the bottom side, a capture diffusion plate on top of the capture buffer chamber, and adsorbent particles in a space above the capture diffusion plate; a first separator connected to the capture reactor through a vertical transport line; a regenerator having a regeneration buffer chamber on the bottom side, a regenerating diffusion plate on top of the regeneration buffer chamber, and adsorbent particles in a space above the regenerating diffusion plate; a second separator connected to the regenerator through a gas separation line; and a second particle transfer line connected to the regenerator at one end and connected to the capture reactor at the other end.
摘要:
A field emission display (FED) includes first and second substrates opposing one another with a predetermined gap therebetween. The FED also includes cathode electrodes formed in a stripe pattern on the first substrate, and a plurality of electron emission sources formed on the cathode electrodes; gate electrodes formed on the first substrate in a state insulated from the cathode electrodes and the electron emission sources by an insulating layer; and anode electrodes formed on a surface of the second substrate opposing the first substrate, and including phosphor layers formed thereon. A pair of fixing rails are formed along two opposing edges of one of the first and second substrates, the fixing rails having undergone a blackening process; and a metal grid provided between the first and second substrates and welded to an upper surface of the fixing rails.