公开(公告)号：US11874178B2

公开(公告)日：2024-01-16

申请号：US17354257

申请日：2021-06-22

Applicant: King Abdullah University of Science and Technology

Inventor： Congli Wang ,  Xiong Dun ,  Qiang Fu ,  Wolfgang Heidrich

IPC: G01J9/02 ,  G03F7/00 ,  G01J9/00

CPC classification number: G01J9/02 ,  G01J9/00 ,  G01J9/0215 ,  G03F7/001 ,  G01J2009/002

Abstract: A wavefront sensor includes a mask and a sensor utilized to capture a diffraction pattern generated by light incident to the mask. A reference image is captured in response to a plane wavefront incident on the mask, and another measurement image is captured in response to a distorted wavefront incident on the mask. The distorted wavefront is reconstructed based on differences between the reference image and the measurement image.

公开(公告)号：US11073427B2

公开(公告)日：2021-07-27

申请号：US16346773

申请日：2017-10-26

Applicant: King Abdullah University of Science and Technology

Inventor： Congli Wang ,  Xiong Dun ,  Qiang Fu ,  Wolfgang Heidrich

IPC: G01J9/02 ,  G03F7/00 ,  G01J9/00

Abstract: A wavefront sensor includes a mask and a sensor utilized to capture a diffraction pattern generated by light incident to the mask. A reference image is captured in response to a plane wavefront incident on the mask, and another measurement image is captured in response to a distorted wavefront incident on the mask. The distorted wavefront is reconstructed based on differences between the reference image and the measurement image.