公开(公告)号：US20150285633A1

公开(公告)日：2015-10-08

申请号：US14171691

申请日：2014-02-03

申请人： King Abdullah University of Science and Technology

发明人： Ahmed Kamal Said Abdel Aziz ,  Abdel Hameed Sharaf ,  Mohamed Yousef Serry ,  Sherif Salah Sedky

IPC分类号： G01C19/5719 ,  G01P15/125 ,  G01P15/08

CPC分类号： G01C19/5719 ,  B81B3/0062 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

摘要： MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

摘要翻译： 公开了使用平面外（或垂直）悬挂方案的MEMS质量弹簧阻尼器系统（包括MEMS陀螺仪和加速度计），其中悬架与检验质量通常。 这种平面外悬架方案有助于这种MEMS质量弹簧阻尼器系统实现惯性等级性能。 还公开了在MEMS质量弹簧阻尼器系统（包括MEMS陀螺仪和加速度计）中制造平面外悬架的方法。

公开(公告)号：US09791274B2

公开(公告)日：2017-10-17

申请号：US14171691

申请日：2014-02-03

申请人： King Abdullah University of Science and Technology

发明人： Ahmed Kamal Said Abdel Aziz ,  Abdel Hameed Sharaf ,  Mohamed Yousef Serry ,  Sherif Salah Sedky

IPC分类号： G01C19/5719 ,  B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC分类号： G01C19/5719 ,  B81B3/0062 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

摘要： MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.