Signal quality of field effect transistor-based humidity sensors or gas sensors
    10.
    发明申请
    Signal quality of field effect transistor-based humidity sensors or gas sensors 有权
    基于场效应晶体管的湿度传感器或气体传感器的信号质量

    公开(公告)号:US20100071460A1

    公开(公告)日:2010-03-25

    申请号:US12585792

    申请日:2009-09-24

    IPC分类号: G01N19/10

    CPC分类号: G01N27/4143

    摘要: Humidity or a gas concentration or a solvent concentration in at least one gas is detected by a field effect transistor-based gas sensor whose sensor signal is generated by the change in the work function on a sensitive film. Detection is to be provided in a simple, effective and inexpensive manner. An additional change in potential is impressed at a gate of the field effect transistor and a variable of the resulting change in the sensor signal relative to the additional change in potential is evaluated. For example, each variable, which is e.g. a ratio, can be assigned a relative humidity, a gas concentration, or a solvent concentration. Sensitive films having at least one polymer are particularly advantageous.

    摘要翻译: 通过基于场效应晶体管的气体传感器检测至少一种气体中的湿度或气体浓度或溶剂浓度,其传感器信号由敏感膜上的功函数的变化产生。 以简单,有效和廉价的方式提供检测。 在场效应晶体管的栅极上施加额外的电位变化,并且评估所导致的传感器信号相对于附加的电位变化的变化的变量。 例如,每个变量,例如, 一个比例,可以分配相对湿度,气体浓度或溶剂浓度。 具有至少一种聚合物的敏感膜是特别有利的。