公开(公告)号：US5807062A

公开(公告)日：1998-09-15

申请号：US663487

申请日：1996-06-13

申请人： Klaus Schultz ,  Harald Beckert ,  Berndt Lahne ,  Manfred Heinze

发明人： Klaus Schultz ,  Harald Beckert ,  Berndt Lahne ,  Manfred Heinze

IPC分类号： B65G1/00 ,  H01L21/00 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67161 ,  H01L21/67196 ,  H01L21/67766 ,  Y10S414/141

摘要： An arrangement for handling wafer-shaped objects is to ensure a high degree of positioning accuracy with increased productivity, freely selectable transport paths, and low mechanical expenditure under SMIF conditions. The arrangement has at least one indexing device for supplying and accepting the objects at a supplying and accepting location situated in a handling plane and at least one transporting device for transporting the wafer-shaped objects between the supplying and accepting location and a work station. The work station, together with at least one other work station, is arranged substantially coaxially to a central point through which passes a rotational axis of a changer. The arrangement is applicable in the manufacture of integrated circuits.

摘要翻译： 用于处理晶圆形物体的装置是确保高度的定位精度，提高生产率，自由选择的传送路径以及SMIF条件下的低机械性能。 该装置具有至少一个用于在位于处理平面中的供应和接受位置处供应和接收物体的分度装置，以及用于在供应和接受位置与工作站之间输送晶片形物体的至少一个输送装置。 工作站与至少一个其他工作站一起大致同轴地布置在通过更换器的旋转轴线的中心点处。 该装置适用于集成电路的制造。

公开(公告)号：US07109509B2

公开(公告)日：2006-09-19

申请号：US10692047

申请日：2003-10-23

申请人： Ulysses Gilchrist ,  Louise S. Barriss ,  Hagen Raue ,  Berndt Lahne ,  Manfred Heinze ,  Joachim König ,  Klaus Schultz

发明人： Ulysses Gilchrist ,  Louise S. Barriss ,  Hagen Raue ,  Berndt Lahne ,  Manfred Heinze ,  Joachim König ,  Klaus Schultz

IPC分类号： G01N21/00 ,  G01V8/12

CPC分类号： H01L21/67265 ,  H01L21/67259 ,  H01L21/681 ,  Y10S414/137

摘要： For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation.A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.

摘要翻译： 对于用于检测堆叠在壁元件的开口处的基板的装置，存在构造检测装置的问题，使得能够相对于基板的过程更灵活地执行基板的位置的检测 测量和使用的测量方法以及传感器系统对待检测的半导体衬底的限定方法被确保在具有降低的颗粒产生风险的测量的确定位置。 发送和接收装置（11）由安装在壁元件（1）上的垂直驱动机构（10）和传感器头（13）组成，该传感器头可通过垂直驱动机构在下位和上位之间进行调节 （10），所述传感器头被布置成在垂直驱动机构（10）上枢转，以便枢转到所述开口（4）中。 该装置特别适用于半导体工业，用于记录具有诸如半导体晶片，平板显示器或掩模的基板的盒或容器的占有状态。

公开(公告)号：US07168419B2

公开(公告)日：2007-01-30

申请号：US11390118

申请日：2006-03-28

申请人： Jürgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

发明人： Jürgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

IPC分类号： F02M25/07 ,  F02B47/06 ,  F01N5/02 ,  F28F27/02

CPC分类号： F28D7/1684 ,  F02M26/26 ,  F02M26/32 ,  F02M26/55 ,  F28D21/0003 ,  F28F27/02 ,  F28F2250/06 ,  Y02T10/16

摘要： The invention relates to an exhaust gas heat exchanger comprising a bundle of pipes consisting of exhaust gas pipes and a bypass channel in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the by pass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap that is fixed with a longitudinal side to a drive shaft that is arranged crosswise relative to the exhaust gas flow.

摘要翻译： 本发明涉及一种排气热交换器，其包括由公共壳体中的排气管和旁路通道组成的管束。 管束布置在由液体冷却剂横向流动的第一室中，并且旁路通道布置在第二分离室中。 管束和旁路通道引入共同的排气入口区域和排放气体出口区域，其中布置有由伺服驱动器致动的排气阀，所述阀引导排气流过管束或 旁路通道。 根据本发明，排气阀具有抵抗弯曲的可移动的关闭器官，所述器官优选地被实施为枢转半翼片，该枢转半翼片以纵向侧固定到相对于排气管横向布置的驱动轴 气流。

公开(公告)号：US07032577B2

公开(公告)日：2006-04-25

申请号：US10502030

申请日：2003-01-22

申请人： Jürgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

发明人： Jürgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

IPC分类号： F02M25/07 ,  F01N5/02 ,  F28F27/02

CPC分类号： F28D7/1684 ,  F02M26/26 ,  F02M26/32 ,  F02M26/55 ,  F28D21/0003 ,  F28F27/02 ,  F28F2250/06 ,  Y02T10/16

摘要： The invention relates to an exhaust gas heat exchanger (2) comprising a bundle of pipes (21) consisting of exhaust gas pipes (22) and a bypass channel (23) in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the bypass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap (27) that is fixed with a longitudinal side (28) to a drive shaft (30) that is arranged crosswise relative to the exhaust gas flow (A).

摘要翻译： 本发明涉及一种排气热交换器（2），其包括由公共壳体中的排气管（22）和旁路通道（23）组成的管束（21）。 管束布置在由液体冷却剂横向流动的第一室中，并且旁路通道布置在第二分离室中。 管束和旁通通道引入共同的排气入口区域和排放气体出口区域，其中布置有由伺服驱动器致动的排气阀，所述阀引导废气流通过管束或 旁路通道。 根据本发明，排气阀具有抵抗弯曲的可移动关闭器官，所述器官优选地被实施为枢转半翼片（27），其将纵向侧面（28）固定到驱动轴（30） ），其相对于废气流（A）交叉排列。

公开(公告)号：US20050039729A1

公开(公告)日：2005-02-24

申请号：US10502030

申请日：2003-01-22

申请人： Jurgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

发明人： Jurgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

IPC分类号： F02M26/26 ,  F28D7/16 ,  F28F27/02 ,  F01N3/02 ,  F02M25/07

CPC分类号： F28D7/1684 ,  F02M26/26 ,  F02M26/32 ,  F02M26/55 ,  F28D21/0003 ,  F28F27/02 ,  F28F2250/06 ,  Y02T10/16

摘要： The invention relates to an exhaust gas heat exchanger (2) comprising a bundle of pipes (21) consisting of exhaust gas pipes (22) and a bypass channel (23) in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the bypass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap (27) that is fixed with a longitudinal side (28) to a drive shaft (30) that is arranged crosswise relative to the exhaust gas flow (A).

摘要翻译： 本发明涉及一种排气热交换器（2），其包括由公共壳体中的排气管（22）和旁路通道（23）组成的管束（21）。 管束布置在由液体冷却剂横向流动的第一室中，并且旁路通道布置在第二分离室中。 管束和旁通通道引入共同的排气入口区域和排放气体出口区域，其中布置有由伺服驱动器致动的排气阀，所述阀引导废气流通过管束或 旁路通道。 根据本发明，排气阀具有抵抗弯曲的可移动关闭器官，所述器官优选地被实施为枢转半翼片（27），其将纵向侧面（28）固定到驱动轴（30） ），其相对于废气流（A）交叉排列。

公开(公告)号：US20060162706A1

公开(公告)日：2006-07-27

申请号：US11390118

申请日：2006-03-28

申请人： Jurgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

发明人： Jurgen Rosin ,  Bernhard Bronischewski ,  Ulrich Fassbender ,  Manfred Heinze ,  Andreas Krien ,  Markus Wallraven

IPC分类号： F02M25/07

CPC分类号： F28D7/1684 ,  F02M26/26 ,  F02M26/32 ,  F02M26/55 ,  F28D21/0003 ,  F28F27/02 ,  F28F2250/06 ,  Y02T10/16

摘要： The invention relates to an exhaust gas heat exchanger comprising a bundle of pipes consisting of exhaust gas pipes and a bypass channel in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the by pass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap that is fixed with a longitudinal side to a drive shaft that is arranged crosswise relative to the exhaust gas flow.

摘要翻译： 本发明涉及一种排气热交换器，其包括由公共壳体中的排气管和旁路通道组成的管束。 管束布置在由液体冷却剂横向流动的第一室中，并且旁路通道布置在第二分离室中。 管束和旁路通道引入共同的排气入口区域和排放气体出口区域，其中布置有由伺服驱动器致动的排气阀，所述阀引导排气流过管束或 旁路通道。 根据本发明，排气阀具有抵抗弯曲的可移动的关闭器官，所述器官优选地被实施为枢转半翼片，该枢转半翼片以纵向侧固定到相对于排气管横向布置的驱动轴 气流。

公开(公告)号：US06986636B2

公开(公告)日：2006-01-17

申请号：US10297485

申请日：2001-05-10

申请人： Joachim Konig ,  Steffen Kruger ,  Bjorn Zimmer ,  Manfred Heinze

发明人： Joachim Konig ,  Steffen Kruger ,  Bjorn Zimmer ,  Manfred Heinze

IPC分类号： G06F7/00

CPC分类号： H01L21/68 ,  Y10S414/136

摘要： A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object. The frame-shaped object holder (9), which carries the object in the edge region of the latter, surrounds a center through which passes a pivoting axis aligned parallel to the adjustment plane and intended for setting the angle of tilt of the second axis of rotation relative to the adjustment plane. Devices of this kind can be used to position flat objects in space for purposes of inspecting semiconductor wafers or flat panels.

摘要翻译： 一种用于定位盘形物体（1）的装置，用于检查盘形物体的前侧和后侧，并减少保持器和盘形物体之间的大面积接触的负面影响。 该装置包括可在调节平面中沿x-y方向调节并可用于容纳平台（3）的可旋转工作台（24）。 叉形框架（8）安装在平台上以能够围绕垂直于平台（3）的表面对准的旋转轴线旋转，并且可以相对于调节台设置倾斜角度 飞机 叉形框架（8）具有另一个旋转轴线，其垂直于叉形框架（8）的旋转轴线对齐，并且框架形物体保持器（9）围绕该轴线安装 以便能够在叉形框架（8）中旋转以转动物体。 承载物体在其边缘区域中的框架形物体保持器（9）围绕中心，通过该中心通过平行于调节平面的枢转轴线，并且用于将第二轴线的倾斜角度设置为 相对于调整平面的旋转。 为了检查半导体晶片或平板的目的，这种装置可用于将平坦物体放置在空间中。