公开(公告)号：US07061345B2

公开(公告)日：2006-06-13

申请号：US10493662

申请日：2002-12-13

申请人： Koichiro Misu ,  Koji Ibata ,  Kouji Murai ,  Kenji Yoshida ,  Kousaku Yamagata ,  Kenji Itoh ,  Isao Murase ,  Masao Koshinaka

发明人： Koichiro Misu ,  Koji Ibata ,  Kouji Murai ,  Kenji Yoshida ,  Kousaku Yamagata ,  Kenji Itoh ,  Isao Murase ,  Masao Koshinaka

IPC分类号： H03H9/54 ,  H03H9/64

CPC分类号： H03H9/6483 ,  H03H7/0115 ,  H03H7/0123 ,  H03H7/1758 ,  H03H7/1766 ,  H03H7/463

摘要： Filter circuitry is provided with a series element and a parallel element. The filter circuitry transmits signals that fall within a certain passband and attenuates signals that don't fall within the certain passband. The series element is comprised of a resonance element having antiresonance characteristics, and the parallel element is comprised of a series circuit including an inductor and a capacitor.

摘要翻译： 滤波器电路具有串联元件和并联元件。 滤波器电路传输落入一定通带内的信号，并衰减不落入某一通带内的信号。 串联元件由具有反谐振特性的谐振元件构成，并联元件由包括电感器和电容器的串联电路构成。

公开(公告)号：US06674215B1

公开(公告)日：2004-01-06

申请号：US09889392

申请日：2001-07-16

申请人： Kenji Yoshida ,  Shusou Wadaka ,  Koichiro Misu ,  Tsutomu Nagatsuka ,  Kouji Murai ,  Masatsune Yamaguchi ,  Kenya Hashimoto ,  Tatsuya Ohmori ,  Koji Ibata

发明人： Kenji Yoshida ,  Shusou Wadaka ,  Koichiro Misu ,  Tsutomu Nagatsuka ,  Kouji Murai ,  Masatsune Yamaguchi ,  Kenya Hashimoto ,  Tatsuya Ohmori ,  Koji Ibata

IPC分类号： H01L4104

CPC分类号： H03H9/02559

摘要： There is disclosed an acoustic wave apparatus, constructed in such a manner that a surface rotated in the range of 34° to 41° from a crystal Y axis around the crystal X axis of lithium tantalate is set as the surface of a substrate, a standardized electrode thickness (h/&lgr;) obtained by standardizing a thickness h of an electrode finger constituting at least a part of an interdigital transducer by a wavelength &lgr; of a surface acoustic wave is set to the range of 0.01 to 0.05, and a duty ratio (w/p) of the electrode finger decided based on a width w and an arraying cycle p of the electrode finger is set to the value ranging from 0.6 to just below 1.0.

摘要翻译： 公开了一种声波装置，其结构是将从钽酸锂的晶体X轴周围的晶体Y轴34°至41°范围内旋转的表面设定为基板表面，标准化 通过将构成至少一部分交叉指型换能器的电极指的厚度h通过声表面波的波长λ标准化得到的电极厚度（h /λ）设定为0.01〜0.05的范围，占空比 将基于电极指的宽度w和排列周期p决定的电极指的w / p设定为从0.6到刚刚低于1.0的值。

公开(公告)号：US06586861B2

公开(公告)日：2003-07-01

申请号：US09892606

申请日：2001-06-28

申请人： Koichiro Misu ,  Kenji Yoshida ,  Koji Ibata ,  Shusou Wadaka ,  Tsutomu Nagatsuka ,  Fusaoki Uchikawa ,  Akira Yamada ,  Chisako Maeda

发明人： Koichiro Misu ,  Kenji Yoshida ,  Koji Ibata ,  Shusou Wadaka ,  Tsutomu Nagatsuka ,  Fusaoki Uchikawa ,  Akira Yamada ,  Chisako Maeda

IPC分类号： H01L41047

CPC分类号： H03H9/174 ,  H03H3/04 ,  H03H9/02133 ,  H03H9/02157 ,  H03H9/176 ,  H03H2003/0428

摘要： There is provided a film bulk acoustic wave device comprising: a silicon substrate 1, a dielectric film 21 including a silicon nitride 16 formed on the substrate 1 and a silicon oxide 2 on the silicon nitride 16, a bottom electrode 3 formed on the dielectric film 21, a piezoelectric film 17 formed on the bottom electrode 3, and a top electrode 5 formed on the piezoelectric film 17, wherein a via hole is formed in such a manner that the thickness direction of a part of the silicon substrate 1 which is opposite to a region including a part where the top electrode 5 exists is removed from the bottom surface of the silicon substrate 1 to a boundary surface with the silicon nitride 16.

摘要翻译： 本发明提供一种薄膜压电元件，其特征在于，具备硅基板1，在基板1上形成有氮化硅16的电介质膜21和在氮化硅16上形成的氧化硅2，在电介质膜上形成的底部电极3 如图21所示，形成在底部电极3上的压电膜17和形成在压电膜17上的顶部电极5，其中形成通孔，使得硅衬底1的与其相对的部分的厚度方向 到包括顶部电极5存在的部分的区域从硅衬底1的底表面去除到与氮化硅16的边界面的区域。

公开(公告)号：US08869620B2

公开(公告)日：2014-10-28

申请号：US13498050

申请日：2009-10-19

申请人： Tomonori Kimura ,  Koji Ibata ,  Satoru Inoue

发明人： Tomonori Kimura ,  Koji Ibata ,  Satoru Inoue

IPC分类号： G01H5/00 ,  G01S7/521 ,  G01S15/93

CPC分类号： G01S7/521 ,  G01S15/931 ,  G01S2015/938

摘要： An airborne ultrasonic sensor is obtained in which a sensor body and a housing have an integrated structure, and which can reduce spurious waves which propagate through the housing to arrive at the sensor body. The sensor is provided with the sensor body that radiates ultrasonic waves into air and at the same time receives reflected waves from a reflection source which exists in the air, a transmission and reception device that drives the sensor body and at the same time obtains a distance to the reflection source or a propagation speed of sound based on the reflected waves, and the housing that has the sensor body fixedly secured thereto with an integrated structure. The housing has groove portions which are different in acoustic impedance from their surroundings. The groove portions are arranged obliquely regarding either one of a horizontal direction or a vertical direction of the sensor body.

摘要翻译： 获得了一种机载超声波传感器，其中传感器主体和壳体具有一体结构，并且可以减少传播通过壳体的寄生波到达传感器体。 该传感器设置有将超声波辐射到空气中并同时接收来自存在于空气中的反射源的反射波的传感器本体，驱动传感器主体并且同时获得距离的传输和接收装置 基于反射波的反射源或声音的传播速度，以及具有一体结构的传感器主体固定在其上的壳体。 壳体具有与其周围不同的声阻抗的凹槽部分。 槽部相对于传感器主体的水平方向或垂直方向的任一方倾斜地配置。

公开(公告)号：US20130169111A1

公开(公告)日：2013-07-04

申请号：US13822308

申请日：2010-12-10

申请人： Koji Ibata ,  Tomonori Kimura ,  Satoru Inoue

发明人： Koji Ibata ,  Tomonori Kimura ,  Satoru Inoue

IPC分类号： H01L41/053

CPC分类号： H01L41/053 ,  G01S7/521 ,  G10K9/122

摘要： An air-coupled ultrasonic sensor capable of changing setting of an output sound pressure or an ultrasonic wave propagation distance depending on a use application, an installation site, or the like, with a simple structure. An air-coupled ultrasonic sensor includes: a closed-end cylindrical case including an opening portion at one end in its axial direction and a bottom surface at another end; a piezoelectric oscillator firmly fixed onto an inner bottom surface of the closed-end cylindrical case; an open-end cylindrical case including opening portions at both ends in its axial direction; and a thin film firmly fixed on one of the opening portions at one end of the open-end cylindrical case. The open-end cylindrical case is fitted to the closed-end cylindrical case, and includes a structure capable of moving along a side wall of the closed-end cylindrical case.

摘要翻译： 一种能够根据使用应用，安装地点等改变输出声压或超声波传播距离的设定的空气耦合超声波传感器。 一种空气耦合超声波传感器包括：封闭端圆筒形壳体，其在其轴向一端具有开口部分，在另一端部具有底面; 一个牢固地固定在闭合圆筒形壳体的内底表面上的压电振荡器; 开口圆筒形壳体，其轴向两端分别具有开口部; 以及牢固地固定在开口圆筒形壳体的一端的一个开口部分上的薄膜。 开口圆筒形壳体装配到封闭端圆柱形壳体，并且包括能够沿着封闭端圆筒形壳体的侧壁移动的结构。

公开(公告)号：US20120269039A1

公开(公告)日：2012-10-25

申请号：US13512043

申请日：2009-12-02

申请人： Koji Ibata ,  Tomonori Kimura ,  Satoru Inoue

发明人： Koji Ibata ,  Tomonori Kimura ,  Satoru Inoue

IPC分类号： G01S7/521

CPC分类号： G01S7/521 ,  G10K11/28

摘要： An airborne ultrasonic sensor capable of obtaining an asymmetric directivity pattern in a predetermined direction with a simple structure. The airborne ultrasonic sensor includes: a case whose one end is open and another end is a closed surface, so as to have a hollow portion; and a piezoelectric element which is disposed on an inner side of the closed surface, the closed surface being a vibration surface, in which the case has a side surface at least partially provided with a region which is obtained by removing the side surface from an opening surface side. The closed surface has a circular, elliptical, oval, square, or rectangular shape.

摘要翻译： 一种能够以简单的结构在预定方向上获得非对称指向性图案的机载超声波传感器。 机载超声波传感器包括：一端敞开，另一端为封闭面的壳体，具有中空部; 以及压电元件，其设置在所述封闭表面的内侧，所述封闭表面是振动表面，所述封闭表面是所述壳体具有侧表面，所述侧表面至少部分地设置有通过从开口去除侧表面而获得的区域 表面 封闭表面具有圆形，椭圆形，椭圆形，方形或矩形形状。

公开(公告)号：US20120204647A1

公开(公告)日：2012-08-16

申请号：US13498050

申请日：2009-10-19

申请人： Tomonori Kimura ,  Koji Ibata ,  Satoru Inoue

发明人： Tomonori Kimura ,  Koji Ibata ,  Satoru Inoue

IPC分类号： G01H5/00

CPC分类号： G01S7/521 ,  G01S15/931 ,  G01S2015/938

摘要： An airborne ultrasonic sensor is obtained in which a sensor body and a housing have an integrated structure, and which can reduce spurious waves which propagate through the housing to arrive at the sensor body. The sensor is provided with the sensor body that radiates ultrasonic waves into air and at the same time receives reflected waves from a reflection source which exists in the air, a transmission and reception device that drives the sensor body and at the same time obtains a distance to the reflection source or a propagation speed of sound based on the reflected waves, and the housing that has the sensor body fixedly secured thereto with an integrated structure. The housing has groove portions which are different in acoustic impedance from their surroundings. The groove portions are arranged obliquely regarding either one of a horizontal direction or a vertical direction of the sensor body.

摘要翻译： 获得了一种机载超声波传感器，其中传感器主体和壳体具有一体结构，并且可以减少传播通过壳体的寄生波到达传感器体。 该传感器设置有将超声波辐射到空气中并同时接收来自存在于空气中的反射源的反射波的传感器本体，驱动传感器主体并且同时获得距离的传输和接收装置 基于反射波的反射源或声音的传播速度，以及具有一体结构的传感器主体固定在其上的壳体。 壳体具有与其周围不同的声阻抗的凹槽部分。 槽部相对于传感器主体的水平方向或垂直方向的任一方倾斜地配置。

公开(公告)号：US09105835B2

公开(公告)日：2015-08-11

申请号：US13822308

申请日：2010-12-10

申请人： Koji Ibata ,  Tomonori Kimura ,  Satoru Inoue

发明人： Koji Ibata ,  Tomonori Kimura ,  Satoru Inoue

IPC分类号： H01L41/053 ,  G10K9/122 ,  G01S7/521

CPC分类号： H01L41/053 ,  G01S7/521 ,  G10K9/122

摘要： An air-coupled ultrasonic sensor capable of changing setting of an output sound pressure or an ultrasonic wave propagation distance depending on a use application, an installation site, or the like, with a simple structure. An air-coupled ultrasonic sensor includes: a closed-end cylindrical case including an opening portion at one end in its axial direction and a bottom surface at another end; a piezoelectric oscillator firmly fixed onto an inner bottom surface of the closed-end cylindrical case; an open-end cylindrical case including opening portions at both ends in its axial direction; and a thin film firmly fixed on one of the opening portions at one end of the open-end cylindrical case. The open-end cylindrical case is fitted to the closed-end cylindrical case, and includes a structure capable of moving along a side wall of the closed-end cylindrical case.

摘要翻译： 一种能够根据使用应用，安装地点等改变输出声压或超声波传播距离的设定的空气耦合超声波传感器。 一种空气耦合超声波传感器包括：封闭端圆筒形壳体，其在其轴向一端具有开口部分，在另一端部具有底面; 一个牢固地固定在闭合圆筒形壳体的内底表面上的压电振荡器; 开口圆筒形壳体，其轴向两端分别具有开口部; 以及牢固地固定在开口圆筒形壳体的一端的一个开口部分上的薄膜。 开口圆筒形壳体装配到封闭端圆柱形壳体，并且包括能够沿着封闭端圆筒形壳体的侧壁移动的结构。