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1.发明授权Surface acoustic wave device and communication device utilizing shear horizontal waves 有权表面声波装置和利用剪切水平波的通信装置公开(公告)号：US06369667B1
公开(公告)日：2002-04-09
申请号：US09561757
申请日：2000-04-26
申请人： Michio Kadota , Toshimaro Yoneda , Koji Fujimoto
发明人： Michio Kadota , Toshimaro Yoneda , Koji Fujimoto
IPC分类号： H03H964
CPC分类号： H03H9/02551 , H03H3/08 , H03H9/14538
摘要： A surface acoustic wave device includes a quartz substrate having Euler angles (0°, &thgr;, 90°±5°) in which &thgr; is in a range of 119°≦&thgr;≦140°, and an IDT for exciting an SH wave is formed on the quartz substrate by use of an electrode material containing as a major component at least one of Ag, Mo, Cu, Ni, Cr, and Zn and having a density of at least about 7 g/cm3. The film thickness of the IDT is such that the attenuation constant is approximately zero.
摘要翻译： 表面声波装置包括具有欧拉角（0，θ，90 5）的石英基板，其中θ在119 <θ= 140的范围内，并且在石英基板上形成用于激发SH波的IDT 通过使用包含Ag，Mo，Cu，Ni，Cr和Zn中的至少一种作为主要成分并具有至少约7g / cm 3的密度的电极材料。 IDT的膜厚度使得衰减常数近似为零
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公开(公告)号：US06617752B2
公开(公告)日：2003-09-09
申请号：US09964831
申请日：2001-09-27
申请人： Takeshi Nakao , Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
发明人： Takeshi Nakao , Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
IPC分类号： H03H925
CPC分类号： H03H9/6483 , H03H3/08 , H03H9/25 , H03H9/6436 , H03H9/6459 , Y10T29/42 , Y10T29/49121 , Y10T29/49126 , Y10T29/49128
摘要： In a surface acoustic wave device using a Shear Horizontal type surface acoustic wave, at least one interdigital transducer (IDT) is made of a material having a larger mass-load effect than that of aluminum. The metallization ratio of the IDT and the normalization film thickness h/&lgr; of the IDT are controlled such that ripple caused by a transversal mode wave is about 0.5 dB or less, where “h” indicates the film thickness of the electrodes and “&lgr;” indicates the wavelength of a surface acoustic wave.
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3.发明授权Surface acoustic wave resonator, filter, duplexer and communication apparatus 有权表面声波谐振器，滤波器，双工器和通信装置公开(公告)号：US06218763B1
公开(公告)日：2001-04-17
申请号：US09378655
申请日：1999-08-20
申请人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
发明人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
IPC分类号： H03H925
CPC分类号： H03H9/02559 , H03H9/64
摘要： A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed thereon. The surface acoustic wave resonator operates using a shear horizontal wave, and the interdigital transducer includes an electrode film made of a metal containing W or Ta as its main component and a thin film made of Al.
摘要翻译： 声表面波谐振器包括压电基片和设置在其上的叉指换能器。 表面声波谐振器使用剪切水平波进行操作，并且叉指式换能器包括由以W或Ta为主要成分的金属制成的电极膜和由Al制成的薄膜。
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公开(公告)号：US06185801B1
公开(公告)日：2001-02-13
申请号：US09192774
申请日：1998-11-16
申请人： Michio Kadota , Toshimaro Yoneda , Koji Fujimoto
发明人： Michio Kadota , Toshimaro Yoneda , Koji Fujimoto
IPC分类号： H01L4100
摘要： A method of manufacturing a surface acoustic wave device having a piezoelectric substrate and an interdigital transducer provided thereon, includes the steps of forming a coating layer made of inorganic material or organic material on the piezoelectric substrate so as to cover the interdigital transducer and etching the coating layer via a laser light to adjust an operation frequency of the surface acoustic wave device.
摘要翻译： 一种制造具有压电基板和设置在其上的叉指式换能器的声表面波装置的方法包括以下步骤：在压电基板上形成由无机材料或有机材料制成的涂层，以覆盖指数间换能器并蚀刻涂层 层，经由激光调节声表面波装置的工作频率。
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公开(公告)号：US6088462A
公开(公告)日：2000-07-11
申请号：US348108
申请日：1999-07-06
申请人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
发明人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
CPC分类号： H03H9/02669 , H03H9/02551
摘要： A surface acoustic wave device includes a quartz rotated Y-cut plate and at least one interdigital transducer disposed on the quartz rotated Y-cut plate. The quartz rotated Y-cut plate has a Euler angle represented by (0, .theta., .phi.). The angle .theta. is within a range of about 125.degree.
摘要翻译： 表面声波装置包括石英旋转Y切割板和设置在石英旋转Y切割板上的至少一个叉指换能器。 石英旋转Y切割板具有由（0，θ，phi）表示的欧拉角。 角度θ在大约125°<130°的范围内或其等同角度，并且角度φi约为90度。 叉指式换能器由钨制成。
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公开(公告)号：US5953433A
公开(公告)日：1999-09-14
申请号：US38716
申请日：1998-01-28
申请人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
发明人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
CPC分类号： H03H9/02669 , H03H9/02551
摘要： A surface acoustic wave device includes a quartz rotated Y-cut plate and at least one interdigital transducer disposed on the quartz rotated Y-cut plate. The quartz rotated Y-cut plate has a Euler angle represented by (0, .theta., .o slashed.). The angle .theta. is within a range of about 125.degree.
摘要翻译： 表面声波装置包括石英旋转Y切割板和设置在石英旋转Y切割板上的至少一个叉指换能器。 石英旋转Y切割板具有由（0，θ，+ 526）表示的欧拉角。 角度θ在约125°<130°或其等同范围内，角度+526约为90度。 叉指式换能器由钨制成。
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7.发明授权公开(公告)号：US06865786B2
公开(公告)日：2005-03-15
申请号：US10614412
申请日：2003-07-07
申请人： Takeshi Nakao , Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
发明人： Takeshi Nakao , Koji Fujimoto , Michio Kadota , Toshimaro Yoneda
CPC分类号： H03H9/6483 , H03H3/08 , H03H9/25 , H03H9/6436 , H03H9/6459 , Y10T29/42 , Y10T29/49121 , Y10T29/49126 , Y10T29/49128
摘要： In a method of manufacturing a surface acoustic wave device using a Shear Horizontal type surface acoustic wave, at least one interdigital transducer (IDT) is made of a material having a larger mass-load effect than that of aluminum. The metallization ratio of the IDT and the normalization film thickness h/λ of the IDT are controlled such that ripple caused by a transversal mode wave is about 1.5 dB or less, where “h” indicates the film thickness of the electrodes and “h” indicates the wavelength of a surface acoustic wave.
摘要翻译： 在使用剪切水平型声表面波的制造表面声波装置的方法中，至少一个叉指式换能器（IDT）由具有比铝高的质量负荷效应的材料制成。 控制IDT的金属化率和IDT的归一化膜厚度h /λ，使得由横向模式波引起的纹波为约1.5dB或更小，其中“h”表示电极的膜厚度，而“h” 表示声表面波的波长。
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8.发明授权Surface acoustic wave resonator, surface acoustic wave device, and communication device using shear horizontal waves 有权表面声波谐振器，表面声波装置和使用剪切水平波的通信装置公开(公告)号：US06437668B1
公开(公告)日：2002-08-20
申请号：US09557805
申请日：2000-04-25
申请人： Takeshi Nakao , Toshimaro Yoneda , Koji Fujimoto , Michio Kadota
发明人： Takeshi Nakao , Toshimaro Yoneda , Koji Fujimoto , Michio Kadota
IPC分类号： H03H925
CPC分类号： H03H9/25
摘要： A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed on the piezoelectric substrate and made of a metal or an alloy having a higher specific weight than that of the piezoelectric material of the piezoelectric substrate so as to generate shear horizontal waves. The interdigital transducer includes a plurality of electrode fingers. A ratio of the electrode finger width relative to the electrode finger width plus the space between adjacent electrode fingers is about 0.55 to about 0.85.
摘要翻译： 弹性表面波谐振器包括压电基片和配置在压电基片上并由与压电基片的压电材料相比具有更高比重的金属或合金制成的叉指换能器，以产生剪切水平波。 叉指换能器包括多个电极指。 电极指宽度相对于电极指宽度加上相邻电极指之间的空间的比率为约0.55至约0.85。
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9.发明授权Surface acoustic wave device with specific electrode materials and quartz substrate euler angles 有权具有特定电极材料的表面声波器件和石英衬底欧拉角
公开(公告)号：US6154105A
公开(公告)日：2000-11-28
申请号：US249036
申请日：1999-02-12
申请人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda , Takeshi Nakao
发明人： Koji Fujimoto , Michio Kadota , Toshimaro Yoneda , Takeshi Nakao
CPC分类号： H03H9/6436 , H03H9/02551 , H03H9/25 , H03H9/6459
摘要： A surface acoustic wave device includes a quartz substrate having an angle .theta. of Euler angles (0, .theta., 90.degree.) that satisfies 122.degree..ltoreq..theta..ltoreq.131.degree.. An interdigital transducer made of an electrode material including at least one of Ta and W is disposed on the quartz substrate.
摘要翻译： 表面声波装置包括具有满足122°θ131°的欧拉角（0°，θ，90°）的角度θ的石英基板。 由包括Ta和W中的至少一个的电极材料制成的叉指式换能器设置在石英基板上。
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公开(公告)号：US06625855B1
公开(公告)日：2003-09-30
申请号：US09678928
申请日：2000-10-04
IPC分类号： H04R1700
CPC分类号： H03H3/08 , Y10T29/42 , Y10T29/49005
摘要： A method for producing a surface acoustic wave device, includes the steps of preparing a piezoelectric substrate, forming a thin film electrode on the piezoelectric substrate, etching the thin film electrode for forming an IDT, trimming at least one of the piezoelectric substrate and the IDT to adjust an operation frequency of the surface acoustic wave device, and rapidly altering the surface of the IDT for stabilizing the surface of the IDT.
摘要翻译： 一种表面声波装置的制造方法，其特征在于，包括以下步骤：在压电基板上形成薄膜电极，蚀刻形成IDT的薄膜电极，修整压电基板和IDT中的至少一个 调整声表面波器件的工作频率，并快速地改变IDT的表面以稳定IDT的表面。
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