公开(公告)号：US08440566B2

公开(公告)日：2013-05-14

申请号：US13189006

申请日：2011-07-22

申请人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

发明人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

IPC分类号： H01L21/44

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/45576

摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.

摘要翻译： 该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤， 含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

公开(公告)号：US20120100698A1

公开(公告)日：2012-04-26

申请号：US13189006

申请日：2011-07-22

申请人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

发明人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

IPC分类号： H01L21/205

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/45576

摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.

摘要翻译： 该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤， 含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

公开(公告)号：US20120107613A1

公开(公告)日：2012-05-03

申请号：US13137837

申请日：2011-09-16

申请人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

发明人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

IPC分类号： B32B33/00 ,  C23C16/56 ,  C23C16/34 ,  C23C16/44 ,  B32B9/00 ,  B32B15/04

CPC分类号： C23C16/34 ,  C23C16/56 ,  Y10T428/30

摘要： A corrosion-resistant article is proposed which is coated with an aluminum nitride wherein the aluminum nitride grains contain oxygen by 0.1 mass % or greater but not greater than 20 mass % so that the thermal expansion coefficient of the coating layer is made even with that of the base body; the relative density of the coating layer is preferably 50% or higher but lower than 98%. It is preferred that the coating layer is first made by chemical vapor deposition and then subjected to an oxidizing atmosphere of a temperature of 700 degrees centigrade or higher but 1150 degrees centigrade or lower; or it is preferable that after the chemical vapor deposition step the coating layer is exposed to the natural atmosphere to adsorb hydrate and then subjected to a heat treatment in an inert atmosphere of a temperature of 900 degrees centigrade but 1300 degrees centigrade or lower.

摘要翻译： 提出了一种耐蚀制品，其涂覆有氮化铝，其中氮化铝颗粒含有0.1质量％以上但不大于20质量％的氧，使得涂层的热膨胀系数甚至与 基体; 涂层的相对密度优选为50％以上且低于98％。 优选首先通过化学气相沉积制造涂层，然后经受700摄氏度或更高但1150摄氏度或更低的氧化气氛; 或者优选在化学气相沉积步骤之后，将涂层暴露于天然气氛中以吸附水合物，然后在900摄氏度至1300摄氏度或更低的惰性气氛中进行热处理。

公开(公告)号：US20070241095A1

公开(公告)日：2007-10-18

申请号：US11783580

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H05B3/143 ,  H05B2203/003

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p，或者由在保护层上形成的含有掺杂剂的化合物构成 第4层。 可以提供一种加热元件，其中在保护层上形成氮气渗透性，电阻率或硬度的耐腐蚀层，即使在高温环境下也难以将腐蚀性气体透过 并且可以避免腐蚀性气体，并且可以避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，并且另外，即使当具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有 使用寿命长，能够以低成本生产。

公开(公告)号：US08829397B2

公开(公告)日：2014-09-09

申请号：US12285108

申请日：2008-09-29

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： H05B3/68 ,  C23C16/00 ,  H01L21/683 ,  H02N13/00 ,  H01L21/687 ,  H05B3/14 ,  H01L21/67

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05B3/143

摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

摘要翻译： 本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。 由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。

公开(公告)号：US20070274021A1

公开(公告)日：2007-11-29

申请号：US11797726

申请日：2007-05-07

申请人： Shoji Kano ,  Waichi Yamamura

发明人： Shoji Kano ,  Waichi Yamamura

IPC分类号： H01T23/00

CPC分类号： H01L21/6831

摘要： An electrostatic chuck apparatus for holding a workpiece such as a semiconductor wafer or glass substrate comprises a support substrate, an electrode formed on one surface of the support substrate, and an insulating layer covering the electrode and having a bearing surface for the workpiece. The insulating layer comprises pyrolytic boron nitride containing carbon and at least one element selected from silicon, aluminum, yttrium, and titanium, and has a Vickers hardness Hv of 50 to 1000.

摘要翻译： 用于保持诸如半导体晶片或玻璃基板的工件的静电卡盘装置包括支撑基板，形成在支撑基板的一个表面上的电极以及覆盖电极并具有用于工件的支承面的绝缘层。 绝缘层包含含碳的热解氮化硼和选自硅，铝，钇和钛的至少一种元素，维氏硬度Hv为50〜1000。

公开(公告)号：US08115141B2

公开(公告)日：2012-02-14

申请号：US11783580

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H05B3/143 ,  H05B2203/003

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p，或由保护层4上形成的含有掺杂剂的化合物构成。可以提供一种加热元件，其中腐蚀 氮气渗透性，电阻率或硬度被控制的耐热层形成在保护层上，即使在高温环境和腐蚀性气体环境下腐蚀性气体也难以透过，腐蚀性降低 导电层，特别是电源端子部分，可以避免和附加地，即使当具有卡盘图案并且具有长的使用寿命并且能够在 低成本。

公开(公告)号：US07952054B2

公开(公告)日：2011-05-31

申请号：US11783581

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及作为在保护层上形成的具有化学计量比的氧的量的氧化物的耐腐蚀层4p。 可以提供一种加热元件，其中在保护层上形成电阻率或硬度被控制的耐腐蚀层，即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过， 由此，能够避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，另外即使具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有长的使用寿命并且是 能够以低成本生产。

公开(公告)号：US20100003510A1

公开(公告)日：2010-01-07

申请号：US12457781

申请日：2009-06-22

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： B32B7/00

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  Y10T428/26 ,  Y10T428/263 ,  Y10T428/264 ,  Y10T428/265

摘要： The present invention is a corrosion-resistant multilayer ceramic member including at least: a ceramic substrate, an electrode layer formed on the ceramic substrate, a feeding member that supplies electricity to the electrode layer, and a protection layer that prevents corrosion; wherein the electrode layer is formed on one surface or both surfaces of the ceramic substrate, the feeding member is connected with the electrode layer, the protection layer is formed with a thickness of 0.02 mm or above and 10 mm or less on that surface of the ceramic substrate where the electrode layer is formed so as to cover the electrode layer, and the protection layer contains any one of silicon oxide, rare-earth oxide, aluminum nitride, and aluminum oxide as a main component. Hereby, there is provided a corrosion-resistant multilayer ceramic member that has excellent corrosion resistance and a long life duration even when exposed to a corrosive gas.

摘要翻译： 本发明是一种耐腐蚀性多层陶瓷构件，至少包括：陶瓷基板，形成在陶瓷基板上的电极层，向电极层供电的进给构件和防止腐蚀的保护层; 其中所述电极层形成在所述陶瓷基板的一个表面或两个表面上，所述馈送构件与所述电极层连接，所述保护层在所述表面上形成为0.02mm以上且10mm以下的厚度 陶瓷基板，其中形成电极层以覆盖电极层，并且保护层包含氧化硅，稀土氧化物，氮化铝和氧化铝中的任一种作为主要成分。 因此，提供了即使暴露于腐蚀性气体时也具有优异的耐腐蚀性和长寿命的耐腐蚀性多层陶瓷构件。

公开(公告)号：US20090107635A1

公开(公告)日：2009-04-30

申请号：US12285108

申请日：2008-09-29

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： H01L21/302 ,  H01L21/30

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05B3/143

摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

摘要翻译： 本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。 由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。