Exposure apparatus and method
    1.
    发明授权
    Exposure apparatus and method 失效
    曝光装置和方法

    公开(公告)号:US07068353B2

    公开(公告)日:2006-06-27

    申请号:US10011974

    申请日:2001-12-11

    IPC分类号: G03B27/54

    CPC分类号: G03F7/70058 G03B27/42

    摘要: An exposure apparatus includes a light-emitting portion arranged so as to be opposite to a photosensitive member at a position for exposure. A part of the light-emitting portion is smaller in width than a wavelength of light from the light-emitting portion.

    摘要翻译: 曝光装置包括在曝光位置处与感光部件相对配置的发光部。 发光部的一部分的宽度比来自发光部的光的波长小。

    Micro-processing method using a probe
    3.
    发明授权
    Micro-processing method using a probe 失效
    使用探针的微处理方法

    公开(公告)号:US6166386A

    公开(公告)日:2000-12-26

    申请号:US88758

    申请日:1998-06-02

    申请人: Koji Yano Ryo Kuroda

    发明人: Koji Yano Ryo Kuroda

    摘要: A micro-processing method is provided for forming a structure adapted to confine electrons within a micro-region. The method comprises steps of arranging a probe oppositely relative to a non-electroconductive thin film arranged on an electroconductive substrate, placing the probe on or near the surface to be processed of the non-electroconductive thin film, applying a voltage between the probe and the substrate to form an enhanced electroconductivity region as compared with the remaining area in the non-electroconductive thin film, and oxidizing the interface of the substrate and the non-electroconductive thin film.

    摘要翻译: 提供微加工方法用于形成适于将电子限制在微区域内的结构。 该方法包括以下步骤:将探针相对于布置在导电基底上的非导电薄膜相对地布置,将探针放置在非导电薄膜的待处理表面上或附近,在探针和探针之间施加电压 衬底以与非导电薄膜中的剩余面积相比形成增强的导电区域,并且氧化衬底和非导电薄膜的界面。

    Micro-processing method using a probe
    4.
    发明授权
    Micro-processing method using a probe 失效
    使用探针的微处理方法

    公开(公告)号:US06252238B1

    公开(公告)日:2001-06-26

    申请号:US09149277

    申请日:1998-09-09

    申请人: Koji Yano Ryo Kuroda

    发明人: Koji Yano Ryo Kuroda

    IPC分类号: A61N500

    摘要: An electroconductive micro-region surrounded by a non-electroconductive region is formed on a non-electroconductive substrate surface. Such an electroconductive micro-region is formed by forming a non-electroconductive thin film on a non-electroconductive substrate surface, then approximating a probe having a micro-aperture for irradiation of light to the spot to be processed of the non-electroconductive thin film, and irradiating the non-electroconductive thin film with light through the micro-aperture of the probe to thereby increasing the electroconductivity of the non-electroconductive thin film at the spot. The electroconductive micro-region can be formed so that it confines electrons to exhibit quantum effects.

    摘要翻译: 由非导电区域包围的导电微区域形成在非导电基板表面上。 通过在非导电性基体表面上形成非导电性薄膜来形成这样的导电性微区域,然后将具有用于照射光的微孔的探针近似为非导电性薄膜的被处理点 ,并且通过探针的微孔照射非导电薄膜,从而在该点增加非导电薄膜的导电性。 可以形成导电微区,使得它限制电子以显示量子效应。

    Optical tomography apparatus with timing detection element including optical resonator having variable resonator length
    5.
    发明授权
    Optical tomography apparatus with timing detection element including optical resonator having variable resonator length 有权
    具有包括具有可变谐振器长度的光学谐振器的定时检测元件的光学断层摄影装置

    公开(公告)号:US08488125B2

    公开(公告)日:2013-07-16

    申请号:US12865171

    申请日:2009-05-12

    IPC分类号: G01B9/02

    摘要: An optical tomography imaging a tomogram by using a coherent light by a backscattering light of a measured object and a reflected light of a reference mirror, which has supercontinuum light sources, an optical system having group velocity dispersion connected to the supercontinuum light source, an optical detection element detecting a coherent light by a backscattering light of the measured object and a reflected light of the reference mirror, a timing detection element detecting a timing of each wavelength component in an output light from the optical system having the group velocity dispersion, and a unit sampling a signal from the optical detector by using a timing signal from the timing detection element with a signal from the supercontinuum light source as a trigger, and detecting an optical tomogram signal imaging a tomogram, thereby acquiring an optical tomogram at a higher speed than a conventional SS-OCT.

    摘要翻译: 光学断层摄影通过使用具有超连续光源的测量对象的反向散射光和参考反射镜的反射光使用相干光来成像断层图像,具有连接到超连续光源的组速度色散的光学系统,光学 检测元件通过测量对象的后向散射光和参考反射镜的反射光来检测相干光,定时检测元件,检测来自具有组速度色散的光学系统的输出光中的每个波长分量的定时,以及 通过使用来自定时检测元件的来自超连续光源的信号的定时信号作为触发来对来自光学检测器的信号进行采样,并且检测成像断层图像的光学层析图像信号,从而以更高的速度获取光学层析图像 常规的SS-OCT。

    OPTICAL FILTER
    6.
    发明申请
    OPTICAL FILTER 有权
    光学过滤器

    公开(公告)号:US20120038995A1

    公开(公告)日:2012-02-16

    申请号:US13279119

    申请日:2011-10-21

    IPC分类号: G02B5/22

    CPC分类号: G02B5/204 B82Y20/00 G02B5/008

    摘要: An optical filter includes a light-shielding conductive layer provided with a plurality of apertures on a substrate surface that selectively transmits light of a first wavelength, and a dielectric layer in contact with the conductive layer. A size of the apertures is a size equal to or less than the first wavelength, and a ratio of a surface area of the conductive layer to a surface area of the substrate surface is within a range of equal to or greater than 36% and equal to or less than 74%. A transmissivity of the first wavelength is increased by surface plasmons induced in the apertures by light falling on the conductive layer.

    摘要翻译: 光学滤波器包括在衬底表面上设置有选择性透射第一波长的光的多个孔的光屏蔽导电层和与导电层接触的电介质层。 孔的尺寸为等于或小于第一波长的尺寸,并且导电层的表面积与基板表面的表面积的比率在等于或大于36%的范围内并且等于 至或小于74%。 第一波长的透射率通过落在导电层上的光在孔中引起的表面等离子体激元而增加。

    OPTICAL FILTER, SOLID-STATE IMAGING ELEMENT HAVING THE FILTER, AND IMAGING APPARATUS
    8.
    发明申请
    OPTICAL FILTER, SOLID-STATE IMAGING ELEMENT HAVING THE FILTER, AND IMAGING APPARATUS 有权
    光学过滤器,具有过滤器的固态成像元件和成像设备

    公开(公告)号:US20100328587A1

    公开(公告)日:2010-12-30

    申请号:US12824067

    申请日:2010-06-25

    IPC分类号: G02F1/1335

    CPC分类号: G02B5/1809 G02B5/203

    摘要: An optical filter includes a substrate, and a periodic structure in which a plurality of members formed of silicon are periodically arranged on a surface of the substrate. The filter selectively transmits light of a first wavelength included in light incident on the periodic structure in the direction of the substrate. The members are two-dimensionally arranged with a period of 400 nm to 500 nm. The dimension of the members in the direction parallel to the surface is of 120 nm to 160 nm. A local maximum value of the transmission spectrum of the first wavelength is within the range of 400 nm to 500 nm.

    摘要翻译: 光学滤波器包括衬底,并且周期性结构,其中由硅形成的多个构件周期性地布置在衬底的表面上。 滤光器选择性地透射入射在周期性结构上的光在基板的方向上包括的第一波长的光。 构件以400nm至500nm的周期二维排列。 构件在平行于表面的方向上的尺寸为120nm至160nm。 第一波长的透射光谱的局部最大值在400nm至500nm的范围内。

    OPTICAL ELEMENT, SENSOR DEVICE, MANUFACTURING METHOD OF OPTICAL ELEMENT, DETECTION ELEMENT, TARGET SUBSTANCE MEASURING DEVICE AND DETECTION METHOD
    9.
    发明申请
    OPTICAL ELEMENT, SENSOR DEVICE, MANUFACTURING METHOD OF OPTICAL ELEMENT, DETECTION ELEMENT, TARGET SUBSTANCE MEASURING DEVICE AND DETECTION METHOD 有权
    光学元件,传感器装置,光学元件的制造方法,检测元件,目标物质测量装置和检测方法

    公开(公告)号:US20080297800A1

    公开(公告)日:2008-12-04

    申请号:US12045335

    申请日:2008-03-10

    IPC分类号: G01N21/59 B29D11/00

    摘要: An optical element 4 of the present invention includes a conductive microstructure 6 having a conductive property, and detects an optical spectrum signal varied by the binding of measured molecules on the surface of the conductive microstructure 6. The optical element 4 has a distribution in the direction to the electric displacement vector generated inside the conductive microstructure 6 by the binding capacity of the measured molecules on the surface of the conductive microstructure 6. As a result, it is possible to provide an optical element capable of measuring the density at high accuracy without depending on the binding position of the measured molecules.

    摘要翻译: 本发明的光学元件4包括具有导电特性的导电微结构6,并且检测由导电微结构6的表面上测量分子的结合而变化的光谱信号。光学元件4在方向 通过导电微结构6的表面上测量的分子的结合能力,在导电性微结构体6内产生的电位移矢量。结果,可以提供能够以高精度测量密度的光学元件,而不依赖于 在测量分子的结合位置。

    SENSOR DEVICE AND TESTING METHOD UTILIZING LOCALIZED PLASMON RESONANCE
    10.
    发明申请
    SENSOR DEVICE AND TESTING METHOD UTILIZING LOCALIZED PLASMON RESONANCE 失效
    传感器设备和测试方法利用本地化的PLASMON共振

    公开(公告)号:US20080246970A1

    公开(公告)日:2008-10-09

    申请号:US12131433

    申请日:2008-06-02

    IPC分类号: G01N21/55

    摘要: A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.

    摘要翻译: 传感器装置由具有多个开口的金属膜形成,位于每个开口内的传感器材料,发射具有第一波长的光的光源和检测从光源发出的光并发射的光检测器 从开口穿过或反射。 多个开口在金属膜中沿第一方向周期性地布置,并且多个开口中的每一个的尺寸和第一方向上的间隔都等于或小于光的波长。