公开(公告)号：US09889652B2

公开(公告)日：2018-02-13

申请号：US15032449

申请日：2014-10-10

Applicant: Konica Minolta, Inc.

Inventor： Kazuki Shibuya

IPC: B41J2/14 ,  H01L41/31 ,  H01L41/29 ,  B41J2/16 ,  H01L41/047 ,  H01L41/08 ,  H01L41/09 ,  H01L41/319 ,  H01L41/187 ,  H01L41/314

CPC classification number: B41J2/14209 ,  B41J2/14233 ,  B41J2/1607 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/31 ,  H01L41/314 ,  H01L41/319

Abstract: An actuator as a piezoelectric device has a bonding layer including titanium, a lower electrode including platinum, a piezoelectric thin film, and an upper electrode formed in this order on a substrate. Ti particles precipitate from the bonding layer onto the lower electrode. Pt that forms the lower electrode has a crystal grain size of 75 nm to 150 nm.