公开(公告)号：US5568337A

公开(公告)日：1996-10-22

申请号：US935927

申请日：1995-08-27

申请人： Tadashi Eguchi ,  Katsumi Momose ,  Hiroji Narumi ,  Tetsuharu Nishimura ,  Kotaro Hosaka ,  Masaaki Tsukiji ,  Koh Ishizuka

发明人： Tadashi Eguchi ,  Katsumi Momose ,  Hiroji Narumi ,  Tetsuharu Nishimura ,  Kotaro Hosaka ,  Masaaki Tsukiji ,  Koh Ishizuka

IPC分类号： G11B5/596 ,  G11B21/10 ,  C11B5/596

CPC分类号： G11B5/59677 ,  G11B21/106

摘要： A device for detecting the position of an information recording or reproducing head relative to a recording medium; the head is relatively rotatable around a first axis with respect to the recording medium, and rotatable around a second axis parallel to the first axis. The device includes an autocollimator for measuring a relative positional relationship of the head substantially along the direction of the rotation around the second axis, a rotating table on which either the combination of the recording medium and the head or the autocollimator is mounted to activate the rotational movement substantially around the second axis, and a control unit. The control unit rotates the rotating table in response to the obtained position of the head with respect to the recording medium. According to the measurement result by the autocollimator, the control unit accomplishes a relative positional controlling in which a relative positional relationship between the autocollimator and the head is kept constant. As a result, a compact and high-accuracy head positioning device is achieved.

摘要翻译： 一种用于检测信息记录或再现头相对于记录介质的位置的装置; 头部相对于记录介质相对于第一轴线相对旋转，并且能够围绕平行于第一轴线的第二轴线旋转。 该装置包括自动准直仪，用于基本上围绕第二轴线的旋转方向测量头部的相对位置关系;旋转台，其上安装有记录介质和头部或自动准直仪的组合以激活旋转 基本上围绕第二轴线的运动，以及控制单元。 控制单元响应于获得的头部相对于记录介质的位置旋转旋转台。 根据自动准直仪的测量结果，控制单元实现自动准直仪和头部之间的相对位置关系保持恒定的相对位置控制。 结果，实现了紧凑且高精度的头部定位装置。

公开(公告)号：US5392121A

公开(公告)日：1995-02-21

申请号：US953045

申请日：1992-09-29

申请人： Kotaro Hosaka ,  Hiroji Narumi

发明人： Kotaro Hosaka ,  Hiroji Narumi

IPC分类号： G01B9/02 ,  G01B11/00

CPC分类号： G01B9/02081 ,  G01B9/02041 ,  G01B9/02094

摘要： It is an object of the present invention to provide a speckle interference apparatus capable of selecting given phase information at a speed higher than speckle interference fringe patterns with a higher precision. For a speckle interference apparatus in which a light beam from a light source is divided into plural light beams, and one of the light beams is passed through a measuring surface and the other light beam through a reference surface to be superposed respectively for the formation of speckle interference fringe patterns, there are arranged in the optical paths spatial filters having windows for sampling the area of a given phase among the speckle interference fringe patterns. Hence, with such filters, speckle interference fringe patterns of the same phase are produced.

摘要翻译： 本发明的目的是提供一种能够以高于散斑干涉条纹图案的速度以更高精度选择给定相位信息的散斑干涉装置。 对于散射干涉装置，其中来自光源的光束被分成多个光束，并且一个光束通过测量表面，另一个光束通过参考表面分别叠加以形成 斑点干涉条纹图案，在光路中布置有具有用于对斑点干涉条纹图案中的给定相位的区域进行采样的窗口的空间滤波器。 因此，通过这样的滤光器，产生相同相位的斑点干涉条纹图案。

公开(公告)号：US5114234A

公开(公告)日：1992-05-19

申请号：US750695

申请日：1991-08-20

申请人： Hiroyuki Otsuka ,  Kotaro Hosaka ,  Makoto Higomura

发明人： Hiroyuki Otsuka ,  Kotaro Hosaka ,  Makoto Higomura

IPC分类号： G05D3/12 ,  B23Q15/22 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70716 ,  G03F7/70775

摘要： Control method and apparatus for positioning an X-ray stage which is movable in X and Y directions to move a semiconductor wafer, for example, in a stepper wherein a pattern formed in the mask is sequentially printed on the shot areas of a semiconductor wafer in a step-and-repeat manner. The X-Y stage is provided with a wafer chuck supported by means of a tilting stage to control the tilting of the wafer chuck relative to the X-Y plane. In order to detect the position of the wafer chuck in the X and Y directions, the inclination of a laser interferometer mirror provided integrally with the wafer chuck relative to the X-Y plane can be detected. By this, when a positioning error for the X-Y stage occurs due to the Abbe length, in the Z direction, between the wafer supporting surface of the wafer chuck and the point in the mirror at which the laser beam from the laser interferometer is incident and due to the pitching and rolling of the X-Y stage, the error is detected on the basis of the attitude change by the movement of the X-Y stage, and is corrected.

摘要翻译： 用于定位在X和Y方向上可移动的X射线台的控制方法和装置，例如在步进机中移动半导体晶片，其中形成在掩模中的图案被顺序地印刷在半导体晶片的照射区域上 一步一步的方式。 X-Y平台设置有通过倾斜台支撑的晶片卡盘，以控制晶片卡盘相对于X-Y平面的倾斜。 为了检测晶片卡盘在X和Y方向的位置，可以检测与晶片卡盘相对于X-Y平面一体设置的激光干涉仪反射镜的倾斜度。 由此，当晶片卡盘的晶片支撑表面和来自激光干涉仪的激光束入射的反射镜中的点之间的阿贝长度，Z方向上发生XY台阶的定位误差时， 由于XY台的俯仰和滚动，基于通过XY台的移动的姿态变化来检测误差，并且被校正。

公开(公告)号：US5896292A

公开(公告)日：1999-04-20

申请号：US660051

申请日：1996-05-31

申请人： Kotaro Hosaka ,  Hiroyuki Ohtsuka ,  Masaru Matsuhisa ,  Nobuyuki Yoshida

发明人： Kotaro Hosaka ,  Hiroyuki Ohtsuka ,  Masaru Matsuhisa ,  Nobuyuki Yoshida

IPC分类号： G05B19/418 ,  G05B23/00

CPC分类号： G05B19/4184 ,  G05B2219/31316 ,  G05B2219/31467 ,  G05B2219/32196 ,  G05B2219/32407 ,  G05B2219/33156 ,  G05B2219/36395 ,  G05B2219/45188 ,  Y02P90/14 ,  Y02P90/22

摘要： An automated system has a monitor computer, which is for remote monitoring and/or analysis of control information of an input/output control device connected to a production facility, a control computer for controlling the processes of operation of the production facility via the input/output control device, and a dual-port memory as an information transmission unit capable of transmitting the control information between the monitor computer and the control computer at a timing that is independent of control of the processes of operation, which is capable of real-time reading/writing to/from all or a part of a memory of the control computer and is written, workpiece-related data, such as status of operation, results of measurement and flags representing the sequence flow information on a per-workpiece basis or per-process basis.

摘要翻译： 自动化系统具有监控计算机，用于远程监视和/或分析连接到生产设备的输入/输出控制设备的控制信息，控制计算机，用于通过输入/输出控制器控制生产设施的操作过程， 输出控制装置和作为信息发送单元的双端口存储器，其能够在独立于能够实时操作的操作处理的定时的时刻在监视计算机和控制计算机之间发送控制信息 对控制计算机的存储器的全部或部分进行读/写，并且写入与工件相关的工件相关数据，例如操作状态，测量结果和代表每个工件的序列流信息的标志或每个 过程基础