公开(公告)号：US06242930B1

公开(公告)日：2001-06-05

申请号：US09196953

申请日：1998-11-20

申请人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Toru Taura ,  Masahiko Nikaidou ,  Yuuichi Yamagishi ,  Satoshi Hayakawa ,  Hironori Tsugane

发明人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Toru Taura ,  Masahiko Nikaidou ,  Yuuichi Yamagishi ,  Satoshi Hayakawa ,  Hironori Tsugane

IPC分类号： G01R3102

CPC分类号： G01R1/06772

摘要： In a high-frequency probe having a detachable end according to the present invention, parts relating to replacement of an end unit are three parts, that is, an end unit, a probe body, and a pressure block. The end unit comprises a coaxial cable, two slender plate-like ground plates. The coaxial cable is linear in the direction of the end of the high-frequency probe. The ground plates sandwich the coaxial cable. The probe body has an end unit support surface, a circuit board, an end unit arrangement surface and an end part guide. The end unit support surface forms a perpendicular surface used for fixing the end unit to a predetermined position in the end side of the central block in a central part of a surface of the body block. The circuit board connects the end unit to a coaxial connector. The end unit arrangement surface forms a plane in an end side of the body block. And further the guide groove positions and fixes the ground plate in the end part. It is capable to supply positioning pins and a positioning pin holes in mutual contact surfaces for positioning. The present invention makes it possible to adjust characteristic impedance of the probe end part by providing an elastically-shaped part for securing contact pressure and using a pipe or the ground plate in an exposed part of the coaxial inner conductor for performing gap adjustment.

摘要翻译： 在根据本发明的具有可拆卸端部的高频探头中，与端部单元的更换相关的部件是端部单元，探针主体和压力块三部分。 端部单元包括同轴电缆，两个细长的板状接地板。 同轴电缆在高频探头端部的方向是线性的。 接地板夹着同轴电缆。 探头主体具有端部单元支撑表面，电路板，端部单元布置表面和端部引导件。 端部单元支撑表面形成垂直表面，用于将端部单元固定在主体块的表面的中心部分中的中心块的端侧中的预定位置。 电路板将端部单元连接到同轴连接器。 端部单元布置表面在主体块的端侧形成平面。 此外，引导槽定位并将接地板固定在端部。 能够在相互接触的表面上提供定位销和定位销孔，用于定位。 本发明通过提供一种用于确保接触压力的弹性形状部分并且在同轴内部导体的暴露部分中使用管道或接地板来进行间隙调节，可以调节探针端部的特性阻抗。

公开(公告)号：US06400168B2

公开(公告)日：2002-06-04

申请号：US09886033

申请日：2001-06-22

申请人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Toru Taura ,  Masahiko Nikaidou ,  Yuuichi Yamagishi ,  Satoshi Hayakawa

发明人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Toru Taura ,  Masahiko Nikaidou ,  Yuuichi Yamagishi ,  Satoshi Hayakawa

IPC分类号： G01R3102

CPC分类号： G01R1/06738 ,  G01R1/06772 ,  Y10T29/49123

摘要： In a tip portion structure basically having a substrate, a plate spring, and a ground block, the substrate is attached to a signal line on a back surface of the substrate and is contacted on the tip with the signal electrode of the DUT placed on a device stage. The plate spring is made of a resilient material, placed on the front side of the substrate, and positioned to apply a pressure to the substrate. The ground block is positioned between the signal line and the device stage functioned as a ground electrode of the DUT. Alternatively, the tip portion structure further may have a ground plate or a ground surface formed of a conductive thin plate covering entirely the front surface of the substrate, and shaped to surround the signal line in cooperation with the ground block. A plurality of the signal lines may be arranged in parallel on the same plane of the substrate. Another tip portion structure is based on a coaxial cable to be cut from the center at a plane perpendicular to the axial direction thereof along one or more oblique plane. A metal ring fitted over a periphery of the coaxial outer conductor may be used.

摘要翻译： 在基本上具有基板，板簧和接地块的尖端部分结构中，将基板附着到基板的背面上的信号线上，并将其与被放置在基板上的DUT的信号电极接触 设备阶段 板簧由弹性材料制成，放置在基片的正面，并定位成对基片施加压力。 接地块位于作为DUT接地电极的信号线和器件级之间。 或者，尖端部分结构还可以具有由完全覆盖基板的前表面的导电薄板形成的接地板或接地表面，并且成形为与接地块一起包围信号线。 多个信号线可以平行布置在基板的同一平面上。 另一个尖端部分结构是基于同轴电缆，沿着一个或多个倾斜平面在垂直于其轴向方向的平面处从中心切割。 可以使用安装在同轴外导体周边上的金属环。

公开(公告)号：US06229321B1

公开(公告)日：2001-05-08

申请号：US09238268

申请日：1999-01-27

申请人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Masahiko Nikaidou ,  Toru Taura ,  Yuuichi Yamagishi ,  Satoshi Hayakawa

发明人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Masahiko Nikaidou ,  Toru Taura ,  Yuuichi Yamagishi ,  Satoshi Hayakawa

IPC分类号： G01R3102

CPC分类号： H01L22/20 ,  G01R1/06772 ,  G01R31/2851 ,  G01R31/318513 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49171 ,  H01L2924/01019 ,  H01L2924/1423 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/19041 ,  H01L2924/00014 ,  H01L2924/00

摘要： A process for manufacturing a high frequency multichip module includes a reception inspection step which includes steps of preparing a vertical-type probe, setting the high frequency bare chip on a device stage, and measuring high frequency characteristics of the high frequency bare chip using the vertical-type probe. The prepared vertical-type probe has a center conductor and ground conductors arranged at both sides of the tip portion of the center conductor in the vertical direction in which the probe is pressed to electrodes of the high frequency bare chip. The high frequency bare chip has a ground electrode disposed at the opposite side of the chip from the signal electrodes on the upper surface of a device stage. Then, only a good product is fed to the next step. After the reception inspection, the process goes to a component mounting step. Preferably, the process goes to the next step when the high frequency multichip modules passes at least on of a performance test and visual inspection after the component mounting step.

摘要翻译： 一种制造高频多芯片模块的方法，包括接收检查步骤，包括准备垂直型探针，在器件载物台上设置高频裸芯片，以及使用垂直方向测量高频裸芯片的高频特性 型探针。 所制备的垂直型探针具有中心导体和布置在中心导体的尖端部分的两侧的接地导体，该垂直方向上的探针被压到高频裸芯片的电极上。 高频裸芯片具有设置在与器件级的上表面上的信号电极的芯片相对侧的接地电极。 然后，只有一个好的产品被送入下一步。 在接收检查之后，处理进行到组件安装步骤。 优选地，当高频多芯片模块在部件安装步骤之后至少进行性能测试和目视检查时，该过程进行到下一步骤。

公开(公告)号：US06281691B1

公开(公告)日：2001-08-28

申请号：US09328362

申请日：1999-06-09

申请人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Toru Taura ,  Masahiko Nikaidou ,  Yuuichi Yamagishi ,  Satoshi Hayakawa

发明人： Kouji Matsunaga ,  Hirobumi Inoue ,  Masao Tanehashi ,  Toru Taura ,  Masahiko Nikaidou ,  Yuuichi Yamagishi ,  Satoshi Hayakawa

IPC分类号： G01R3102

CPC分类号： G01R1/06738 ,  G01R1/06772 ,  Y10T29/49123

摘要： In a tip portion structure basically having a substrate, a plate spring, and a ground block, the substrate is attached to a signal line on a back surface of the substrate and is contacted on the tip with the signal electrode of the DUT placed on a device stage. The plate spring is made of a resilient material, placed on the front side of the substrate, and positioned to apply a pressure to the substrate. The ground block is positioned between the signal line and the device stage functioned as a ground electrode of the DUT. Alternatively, the tip portion structure further may have a ground plate or a ground surface formed of a conductive thin plate covering entirely the front surface of the substrate, and shaped to surround the signal line in cooperation with the ground block . A plurality of the signal lines may be arranged in parallel on the same plane of the substrate. Another tip portion structure is based on a coaxial cable to be cut from the center at a plane perpendicular to the axial direction thereof along one or more oblique plane. A metal ring fitted over a periphery of the coaxial outer conductor may be used.

摘要翻译： 在基本上具有基板，板簧和接地块的尖端部分结构中，将基板附着到基板的背面上的信号线上，并将其与被放置在基板上的DUT的信号电极接触 设备阶段 板簧由弹性材料制成，放置在基片的正面，并定位成对基片施加压力。 接地块位于作为DUT接地电极的信号线和器件级之间。 或者，尖端部分结构还可以具有由完全覆盖基板的前表面的导电薄板形成的接地板或接地表面，并且成形为与接地块一起包围信号线。 多个信号线可以平行布置在基板的同一平面上。 另一个尖端部分结构是基于同轴电缆，沿着一个或多个倾斜平面在垂直于其轴向方向的平面处从中心切割。 可以使用安装在同轴外导体周边上的金属环。

公开(公告)号：US06807000B2

公开(公告)日：2004-10-19

申请号：US10364725

申请日：2003-02-10

申请人： Masahiko Nikaidou

发明人： Masahiko Nikaidou

IPC分类号： H01S300

CPC分类号： H01S3/06754 ,  H01S3/1305 ,  H01S5/0014 ,  H01S5/0085 ,  H01S5/0683 ,  H01S5/50 ,  H04B10/0797

摘要： The present invention provides a gain measurement device for an optical amplifier and measurement method therefore enable continuous measurement at high speed and high precision with quite simple construction. The device includes a first light source outputting a light for using in measurement of a plurality of wavelength points, a second light source outputting a light having a plurality of wavelengths for using in measurement of a plurality of wavelength points other than the former wavelength points, means for selectively leading out one of the output of the first light source and a multiplexed output of the outputs from the first and second sources, and measuring means for deriving the gain versus wavelength characteristics of the optical amplifier on the basis of input and output characteristics when the output of the first light source is supplied to the optical amplifier and input and output characteristics when the multiplexed output is supplied to the optical amplifier.

摘要翻译： 本发明提供一种用于光放大器的增益测量装置和测量方法，因此能够以非常简单的结构实现高速，高精度的连续测量。 该装置包括输出用于测量多个波长点的光的第一光源，输出具有多个波长的光的第二光源，用于在除了前述波长点以外的多个波长点的测量中使用， 用于选择性地引出第一光源的输出中的一个和来自第一和第二源的输出的多路复用输出的装置，以及用于基于输入和输出特性导出光放大器的增益对波长特性的测量装置 当第一光源的输出被提供给光放大器时，并且当多路复用输出被提供给光放大器时的输入和输出特性。