公开(公告)号：US5665922A

公开(公告)日：1997-09-09

申请号：US548476

申请日：1995-10-26

申请人： Kouji Tsukada ,  Hidekazu Nishigaki ,  Yasuaki Ikeda ,  Shigeru Sakuma ,  Shin-ichi Ishiyama ,  Fumio Matsuoka ,  Yoshihisa Kanno ,  Shigeki Hayashi

发明人： Kouji Tsukada ,  Hidekazu Nishigaki ,  Yasuaki Ikeda ,  Shigeru Sakuma ,  Shin-ichi Ishiyama ,  Fumio Matsuoka ,  Yoshihisa Kanno ,  Shigeki Hayashi

IPC分类号： G01B7/16 ,  G01M17/007 ,  G01N3/20 ,  G01M19/00

CPC分类号： G01M17/0078

摘要： A bending strain measurement apparatus for an abdomen of an anthropomorphic dummy comprises a band constituted of an elastic thin plate member. The band is arranged in a longitudinal direction of the abdomen, has one end thereof fixed in the vicinity of the abdomen of the dummy, and a plurality of gauges are arranged in a longitudinal direction of the band for detecting a bending strain of the abdomen when an obstacle collides with the abdomen. A measuring device measures time history of the bending strain based on bending strain of the respective portions of the band detected by the gauges arranged on the band, as a time transition of the bending strain of respective portions of the band.

摘要翻译： 人造假体腹部的弯曲应变测量装置包括由弹性薄板构件构成的带。 该带沿腹部的长度方向排列，其一端固定在假人的腹部附近，沿带的长度方向配置有多个量规，用于检测腹部的弯曲应变， 障碍物与腹部碰撞。 测量装置测量基于由布置在带上的量规所检测到的带的各部分的弯曲应变作为带的各部分的弯曲应变的时间变化的弯曲应变的时间历程。

公开(公告)号：US06671331B1

公开(公告)日：2003-12-30

申请号：US09441333

申请日：1999-11-16

申请人： Shigeru Sakuma

发明人： Shigeru Sakuma

IPC分类号： H03K900

CPC分类号： H04B17/309

摘要： An RSSI block cumulating circuit block-cumulates an RSSI signal that has been A/D converted and calculates an RSSI signal in a low level. An RSSI level raising circuit raises the level of the RSSI signal and outputs the resultant signal as a threshold value. An RSSI continuous cumulating circuit always cumulates the RSSI signal. A comparing circuit compares the threshold value with the output signal of the RSSI continuous cumulating circuit and determines whether or not a carrier is present.

摘要翻译： RSSI块累积电路块累积经过A / D转换的RSSI信号，并计算低电平的RSSI信号。 RSSI电平提升电路提高RSSI信号的电平，并将结果信号作为阈值输出。 RSSI连续累加电路总是累加RSSI信号。 比较电路将阈值与RSSI连续累积电路的输出信号进行比较，并确定载波是否存在。

公开(公告)号：US06411384B1

公开(公告)日：2002-06-25

申请号：US09748195

申请日：2000-12-27

申请人： Shigeru Sakuma ,  Shuuichi Takano

发明人： Shigeru Sakuma ,  Shuuichi Takano

IPC分类号： G01J400

摘要： The present invention provides a method for calculating the birefringence of an optical element and selecting the direction of minimum birefringence in the optical element. The birefringence of the optical element is calculated by converting known piezo-optical constants in a specified three-dimensional orthogonal coordinate system for the optical material into piezo-optical constants in an arbitrary three-dimensional orthogonal coordinate system. The amount of change in the refractive index &Dgr;n1 of the optical material in a first direction and the amount of change in the refractive index &Dgr;n2 of the optical material in a second direction which is perpendicular to the first direction are calculated using a uniaxial stress that is applied to the optical material along the first direction. The amount of birefringence as seen from a third direction perpendicular to the first direction and the second direction is determined in the arbitrary three-dimensional orthogonal coordinate system by determining the difference between the amount of change in the refractive index &Dgr;n1 and the amount of change in the refractive index &Dgr;n2.

公开(公告)号：US06377332B1

公开(公告)日：2002-04-23

申请号：US09494039

申请日：2000-01-31

申请人： Shigeru Sakuma ,  Masaki Shiozawa

发明人： Shigeru Sakuma ,  Masaki Shiozawa

IPC分类号： G03B2742

CPC分类号： G03F7/70058 ,  G03F7/70241 ,  G03F7/70591

摘要： An optical member for photolithography made of a calcium fluoride crystal exhibits an internal transmittance of 99.5%/cm or greater with respect to light having a specific wavelength of 185 nm or shorter.

摘要翻译： 相对于特定波长为185nm以下的光，由氟化钙晶体构成的光刻用光学构件的内透射率为99.5％/ cm以上。

公开(公告)号：US06332922B1

公开(公告)日：2001-12-25

申请号：US09257296

申请日：1999-02-25

申请人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

发明人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Kazuo Kimura ,  Shuuichi Takano

IPC分类号： C30B3306

CPC分类号： G03F7/70958 ,  C30B29/12 ,  C30B33/00 ,  G02B1/02 ,  G03F7/70966 ,  Y10S117/906

摘要： A manufacturing method for a single crystal of calcium fluoride by which it is possible to obtain a single crystal of calcium fluoride with adequately small double refraction, which can be used in optical systems for photolithography, and in particular, a single crystal of calcium fluoride with a large diameter (ø 200 mm or larger) having superior optical properties, which can be used for photolithography with a wavelength of 250 nm or less. A manufacturing method for a single crystal of calcium fluoride, having its optical properties improved through an annealing process in which a single crystal of calcium fluoride is contained in a sealable container, and said container is sealed and vacuumed, followed by, a process of heating with a heater arranged external to said container so that the temperature inside said container is raised to a first temperature, which is lower than the melting point of said single crystal of calcium fluoride, a process by which the temperature inside said container is maintained at said first temperature for a designated period of time, and a process by which the temperature inside said container is lowered to room temperature, wherein, the maximum temperature of the annealing process is set to be a first temperature within the range of 1020 to 1150° C. Also provided is a manufacturing method for a single crystal of calcium fluoride having its optical properties improved through an annealing process such that, its maximum temperature during the thermal process is set to a first temperature which is within the range of 1020 to 1150° C., and which is maintained for a designated period of time, and its cooling speed for reaching a second temperature, which is in the range of (or around) 600 to 800° C., from said first temperature is set to be 1.2° C./hour or less, or its cooling speed for reaching a second temperature, which is in the range of (or around) 700 to 900° C., from said first temperature is set to be 1.2° C./hour or less.

公开(公告)号：US06201634B1

公开(公告)日：2001-03-13

申请号：US09265893

申请日：1999-03-11

申请人： Shigeru Sakuma ,  Shuuichi Takano

发明人： Shigeru Sakuma ,  Shuuichi Takano

IPC分类号： G02F100

CPC分类号： G03F7/70958 ,  G02B1/02 ,  G02B5/3083

摘要： The present invention provides a method for calculating the birefringence of an optical element and selecting the direction of minimum birefringence in the optical element. A material for manufacturing the optical element is a fluoride single crystal with a birefringence value that is reduced compared to conventional materials. The fluoride single crystal is cut from a fluoride single crystal ingot obtained by crystal growth so that the {111} crystal planes are two parallel planes, after which the optical performance is improved by subjecting this material to a heat treatment. The birefringence of the optical element is calculated by converting known piezo-optical constants in a specified three-dimensional orthogonal coordinate system for the optical material into piezo-optical constants in an arbitrary three-dimensional orthogonal coordinate system. The amount of change in the refractive index &Dgr;n1 of the optical material in a first direction along the direction of one coordinate axis of the arbitrary three-dimensional orthogonal coordinate system, and the amount of change in the refractive index &Dgr;n2 of the optical material in a second direction which is perpendicular to the first direction are calculated using a uniaxial stress that is applied to the optical material along the first direction and the piezo-optical constants in the arbitrary three-dimensional coordinate system. The amount of birefringence as seen from a third direction perpendicular to the first direction and the second direction is determined in the arbitrary three-dimensional orthogonal coordinate system by determining the difference between the amount of change in the refractive index &Dgr;n1 and the amount of change in the refractive index &Dgr;n2.

公开(公告)号：US06061174A

公开(公告)日：2000-05-09

申请号：US40663

申请日：1998-03-18

申请人： Masaki Shiozawa ,  Tsutomu Mizugaki ,  Shigeru Sakuma ,  Norio Komine ,  Seishi Fujiwara ,  Hiroki Jinbo

发明人： Masaki Shiozawa ,  Tsutomu Mizugaki ,  Shigeru Sakuma ,  Norio Komine ,  Seishi Fujiwara ,  Hiroki Jinbo

IPC分类号： C03C3/06 ,  C30B11/00 ,  C30B29/12 ,  G02B1/02 ,  G02B13/14 ,  G03F7/20 ,  H01L21/027 ,  H01S3/225 ,  G02B5/20 ,  G02B27/42 ,  F21V9/06

CPC分类号： G02B13/22 ,  C30B11/00 ,  C30B29/12 ,  G02B1/08 ,  G02B13/143 ,  G03F7/70216 ,  G03F7/70958

摘要： An optical member is provided for use in an image-focusing optical system for guiding light having a wavelength shorter than about 300 nm. The optical member includes a calcium fluoride crystal having a sodium concentration of less than about 0.2 ppm.

摘要翻译： 提供一种用于图像聚焦光学系统中用于引导波长短于约300nm的光的光学部件。 光学构件包括钠浓度小于约0.2ppm的氟化钙晶体。

公开(公告)号：US4969355A

公开(公告)日：1990-11-13

申请号：US477093

申请日：1990-02-08

申请人： Shunichi Doi ,  Satoru Matsushima ,  Yoshiteru Mizutani ,  Yuzo Yamamoto ,  Michio Ishiguro ,  Shigeru Sakuma ,  Noboru Sugiura

发明人： Shunichi Doi ,  Satoru Matsushima ,  Yoshiteru Mizutani ,  Yuzo Yamamoto ,  Michio Ishiguro ,  Shigeru Sakuma ,  Noboru Sugiura

IPC分类号： G01M1/16 ,  G01M17/02

CPC分类号： G01M17/022

摘要： A tire uniformity measuring apparatus having: a drum for rotating a tire; an oscillating member disposed parallel to a drum rotating shaft and pivotally supported on a machine base through a fulcrum; a movable member disposed in parallel to the drum rotating shaft in the plane including the drum rotating shaft and a tire rotating shaft, the movable member being laterally movable in response to a load acting on the tire in a lateral direction perpendicular to the radial direction of the tire; a load applying member for applying in advance a predetermined load to the tire; and a displacement detecting member for detecting as a displacement of the movable member the displacement of the tire rotating shaft which is dependent on variation in the lateral load; thereby detecting a variation in the lateral load of the tire. The apparatus may comprise a further movable member which is a shaft member constituting the fulcrum, the movable member being slidably movable along the longitudinal axis only in response to a variation in the tangential load, and a further displacement detecting member for detecting a displacement of the movable member, thereby detecting a variation in the tangential load acting on the tire.

摘要翻译： 一种轮胎均匀性测量装置，具有：用于使轮胎旋转的滚筒; 摆动构件，其平行于鼓旋转轴设置并通过支点枢转地支撑在机器基座上; 可动构件，其在包括所述滚筒旋转轴和轮胎旋转轴的平面中平行于所述滚筒旋转轴设置，所述可动构件能够在与所述滚筒旋转轴的径向方向垂直的横向方向上作用在轮胎上的负载侧向移动 轮胎; 负载施加部件，用于预先向轮胎施加预定的载荷; 以及位移检测构件，用于检测所述可动构件的位移，所述位移取决于所述横向载荷的变化，所述轮胎旋转轴的位移; 从而检测轮胎的横向载荷的变化。 该装置可以包括作为构成支点的轴构件的另一个可移动构件，该可移动构件仅在响应于切向载荷的变化时可沿着纵向轴线可滑动地移动;以及另一位移检测构件，用于检测 从而检测作用在轮胎上的切向负载的变化。

公开(公告)号：US06639909B1

公开(公告)日：2003-10-28

申请号：US09396321

申请日：1999-09-15

申请人： Shigeru Sakuma

发明人： Shigeru Sakuma

IPC分类号： H04J306

CPC分类号： H04L25/061 ,  H03D3/008 ,  H04B1/30 ,  H04B17/318

摘要： An improved system and method for canceling a DC offset and measuring a carrier detection threshold value. A control circuit provides a signal based upon a frame synchronizing signal for shutting down the power to a mixer. Thereafter, at a predetermined time, the control circuit provides a signal to a DC offset cancel circuit to cancel the DC offset. Then, the control circuit provides a RSSI gate signal to a carrier detection circuit based upon the next frame synchronizing signal, for determining whether a carrier exists.

摘要翻译： 一种用于消除DC偏移并测量载波检测阈值的改进的系统和方法。 控制电路提供基于帧同步信号的信号，以关闭混合器的功率。 此后，在预定时间，控制电路向DC偏移消除电路提供信号以消除DC偏移。 然后，控制电路基于下一帧同步信号向载波检测电路提供RSSI门信号，以确定载波是否存在。

公开(公告)号：US5978070A

公开(公告)日：1999-11-02

申请号：US26507

申请日：1998-02-19

申请人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Masaki Shiozawa

发明人： Shigeru Sakuma ,  Tsutomu Mizugaki ,  Masaki Shiozawa

IPC分类号： C30B11/00 ,  G02B1/02 ,  G03F7/20 ,  G03B27/52

CPC分类号： G03F7/70958 ,  C30B11/00 ,  C30B29/12 ,  G02B1/02 ,  G03F7/70058 ,  G03F7/70241

摘要： A projection exposure apparatus capable of projecting and exposing mask pattern images onto a substrate by means of a optical projection system, the apparatus includes an optical illumination system capable of illuminating a mask utilizing an excimer laser illuminating light source in a wavelength range of 230 nm or less, and an optical projection system including optical members that include a calcium fluoride crystal with a total alkaline earth metal impurity content of 1.times.10.sup.18 atom/cm.sup.3 or less, and which projects images of the mask pattern onto a substrate. The calcium fluoride crystal is manufactured by a method including the steps of adding a fluorinating agent to a powdered calcium fluoride forming a mixture, placing the mixture in a growing crucible inside a vacuum furnace, and evacuating the vacuum furnace. Once the vacuum furnace is evacuated, the temperature is elevated a first time inside the vacuum furnace to a temperature exceeding a melting point of the mixture and is maintained at a predetermined constant temperature inside the vacuum furnace until a polycrystalline material is formed. The polycrystalline material is then cooled and the temperature inside the vacuum furnace is elevated until the polycrystalline material is melted, wherein crystal growth of the polycrystalline material is promoted and a crystal ingot is formed.

摘要翻译： 一种投影曝光装置，其能够通过光学投影系统将掩模图案图像投影并曝光到基板上，该装置包括：能够利用在230nm的波长范围内的准分子激光照明光源照射掩模的光学照明系统，或 以及包括光学部件的光学投影系统，其包括总碱土金属杂质含量为1×10 18原子/ cm 3以下的氟化钙晶体，并将掩模图案的图像投影到基板上。 氟化钙晶体通过以下方法制造：将氟化剂添加到形成混合物的粉末状氟化钙中的步骤，将混合物放置在真空炉内的生长坩埚内，抽空真空炉。 一旦真空炉抽真空，将真空炉内的温度首次升高到超过混合物熔点的温度，并保持在真空炉内部的预定恒定温度，直至形成多晶材料。 然后将多晶材料冷却，使真空炉内的温度升高直到多晶材料熔融，其中促进多晶材料的晶体生长并形成晶锭。