公开(公告)号：US06291828B1

公开(公告)日：2001-09-18

申请号：US09469068

申请日：1999-12-21

申请人： Kourosh Saadatmand ,  David R. Swenson ,  William F. DiVergilio ,  Stephen M. Quinn ,  Zhimin Wan ,  Victor M. Benveniste

发明人： Kourosh Saadatmand ,  David R. Swenson ,  William F. DiVergilio ,  Stephen M. Quinn ,  Zhimin Wan ,  Victor M. Benveniste

IPC分类号： G21K510

CPC分类号： H01J37/3171 ,  H01J37/12 ,  H01J2237/038 ,  H01J2237/04737 ,  H01J2237/04924

摘要： An electrostatic quadrupole lens assembly (60) is provided for an ion implanter (10) having an axis (86) along which an ion beam passes, comprising: (i) four electrodes (84a-84d) oriented radially outward from the axis (86), approximately 90° apart from each other, such that a first pair of electrodes (84a and 84c) oppose each other approximately 180° apart, and a second pair of electrodes (84b and 84d) also oppose each other approximately 180° apart; (ii) a housing (62) having a mounting surface (64) for mounting the assembly (60) to the implanter, the housing at least partially enclosing the four electrodes (84a-84d); (iii) a first electrical lead (104) for providing electrical power to the first pair of electrodes (84a and 84c); (iv) a second electrical lead (108) for providing electrical power to the second pair of electrodes (84b and 84d); and (v) a plurality of electrically insulating members (92) formed of a glass-like material, comprising at least a first electrically insulating member for attaching the first pair of electrodes (84a and 84c) to the housing, and at least a second electrically insulating member for attaching the second pair of electrodes (84b and 84d) to the housing. The plurality of electrically insulating members (92) are preferably comprised of quartz (SiO2), or a heat resistant and chemical resistant glass material such as Pyrex®. The members (92) resist accumulation of material such as graphite sputtered off of the electrodes (84a-84d) by the ion beam, thus reducing the occurrence of high voltage breakdown and electrical current breakdown.

摘要翻译： 为具有离子束通过的轴线（86）的离子注入机（10）提供静电四极透镜组件（60），包括：（i）从轴线（86）径向向外取向的四个电极（84a-84d） ）彼此大约90°，使得第一对电极（84a和84c）彼此相对大约180°，并且第二对电极（84b和84d）也彼此相对大约180°; （ii）具有用于将所述组件（60）安装到所述注入器的安装表面（64）的壳体（62），所述壳体至少部分地包围所述四个电极（84a-84d）; （iii）用于向所述第一对电极（84a和84c）提供电力的第一电引线（104）; （iv）用于向所述第二对电极（84b和84d）提供电力的第二电引线（108）; 和（v）由玻璃状材料形成的多个电绝缘构件（92），至少包括用于将第一对电极（84a和84c）附接到壳体的第一电绝缘构件，以及至少第二 用于将第二对电极（84b和84d）附接到壳体的电绝缘构件。 多个电绝缘构件（92）优选地由石英（SiO 2）或耐热和耐化学腐蚀的玻璃材料（例如Pyrex）组成。 构件（92）通过离子束阻止溅射在电极（84a-84d）之外的诸如石墨的材料的堆积，从而减少高压击穿和电流击穿的发生。

公开(公告)号：US06208095B1

公开(公告)日：2001-03-27

申请号：US09219686

申请日：1998-12-23

申请人： William F. DiVergilio ,  Kourosh Saadatmand ,  Stephen M. Quinn

发明人： William F. DiVergilio ,  Kourosh Saadatmand ,  Stephen M. Quinn

IPC分类号： H01P700

CPC分类号： H05H7/18

摘要： A compact coil design is provided for a linear accelerator resonator (70) capable of resonating at a predetermined frequency. The coil (90) comprises a plurality of generally circular coil segments (90a-90n), each of the coil segments having a polygonal cross section wherein flat surfaces (122) of adjacent coil segments face each other. The polygonal cross section may take the form of a rectangle having dimensions of length x and width y, wherein dimension x section defines the flat surfaces (122) of adjacent coil segments (90a-90n). The coil segments (90a-90n) are provided with a dual channel construction for providing the introduction of a cooling medium into the coil. The dual channel construction comprises an inlet passageway (118) and an outlet passageway (120) having separate a separate inlet (100) and outlet (102), respectively, at a first end (94) of the coil, and wherein the inlet and outlet passageways (118, 120) are connected and in communication with each other at a second end (96) of the coil.

摘要翻译： 为能够以预定频率谐振的线性加速器谐振器（70）提供了紧凑的线圈设计。 线圈（90）包括多个大致圆形的线圈段（90a-90n），每个线圈段具有多边形横截面，其中相邻线圈段的平坦表面（122）彼此面对。 多边形横截面可以采取具有长度x和宽度y的尺寸的矩形的形式，其中尺寸x部分限定相邻线圈段（90a-90n）的平坦表面（122）。 线圈段（90a-90n）设置有用于将冷却介质引入线圈的双通道结构。 双通道结构包括入口通道（118）和出口通道（120），分别在线圈的第一端（94）处具有单独的入口（100）和出口（102），并且其中入口和 出口通道（118,120）在线圈的第二端（96）处彼此连接并且彼此连通。