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公开(公告)号：US20080202925A1
公开(公告)日：2008-08-28
申请号：US11908017
申请日：2006-02-23
IPC分类号： C23C14/00
CPC分类号： C23C14/3407 , H01J37/3405 , H01J37/3497
摘要： A single, right-angled end-block is claimed for rotatably carrying a target in a sputtering apparatus. The end-block comprises all necessary means to drive, energise, bear and seal (coolant and gas) the target in the sputtering apparatus from the outside through a single opening in a wall or door. The right-angled end-block rotates the target around an axis of rotation that is parallel to the wall on which the target is mounted. By preference the end-block is situated below the target in order to allow easy drainage of the coolant.
摘要翻译： 要求用于在溅射装置中可旋转地携带目标的单个直角端块。 端块包括通过壁或门中的单个开口从外部驱动，激励，承载和密封（冷却剂和气体）溅射装置中的靶的所有必要装置。 直角端块围绕围绕安装目标的墙壁的旋转轴旋转目标。 优选地，端块位于目标下方，以便容易地排出冷却剂。
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公开(公告)号：US20080087541A1
公开(公告)日：2008-04-17
申请号：US11665563
申请日：2005-10-11
IPC分类号： H01J37/34
CPC分类号： H01J37/3435 , H01J37/3405
摘要： An end-block for electrically energising a rotatable tubular target in a vacuum coating installation is disclosed. The end-block has a rotary electrical contact that reduces the joule heating effects when operating in alternating current mode. When compared to known end-blocks, this is achieved by increasing the number of contact areas between a contacting ring and a series of circumferentially mounted contacting shoes. Also the contact shoes are being pressed radially outwardly by means of resilient elements against the contacting ring.
摘要翻译： 公开了一种用于对真空涂覆装置中的可旋转管状靶进行电激励的端块。 端块具有旋转电接触，可在交流模式下工作时减少焦耳加热效应。 当与已知的端块相比时，这通过增加接触环和一系列周向安装的接触鞋之间的接触面积的数量来实现。 此外，接触鞋被抵靠接触环的弹性元件径向向外挤压。
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公开(公告)号：US08562799B2
公开(公告)日：2013-10-22
申请号：US11665562
申请日：2005-10-11
CPC分类号： C23C14/3407 , H01J37/3435
摘要： An end-block for use in a tubular magnetron sputtering apparatus is disclosed. Such an end-block rotatably transfers movement, coolant 5 and electrical current to the target while maintaining vacuum integrity and a closed coolant circuit. It hence comprises a drive means, a rotary electrical contact means, a bearing means, a number of rotary coolant seal means and a number of vacuum seal means. The inventive end-block occupies a minimal axial length along the target thus allowing 10 space savings in existing equipment such as e.g. display coaters. The axial length is reduced by mounting at least two of the means radial to one another.
摘要翻译： 公开了一种用于管状磁控溅射装置的端块。 这种端块可以将运动，冷却剂5和电流转移到目标物上，同时保持真空完整性和封闭的冷却剂回路。 因此，它包括驱动装置，旋转电接触装置，轴承装置，多个旋转冷却剂密封装置和多个真空密封装置。 本发明的端块沿着目标占据最小的轴向长度，从而允许现有设备中的10个空间节省，例如， 显示涂布机 通过将至少两个装置相对于彼此径向地安装来减小轴向长度。
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公开(公告)号：US07824528B2
公开(公告)日：2010-11-02
申请号：US11665563
申请日：2005-10-11
CPC分类号： H01J37/3435 , H01J37/3405
摘要： An end-block for electrically energising a rotatable tubular target in a vacuum coating installation is disclosed. The end-block has a rotary electrical contact that reduces the joule heating effects when operating in alternating current mode. When compared to known end-blocks, this is achieved by increasing the number of contact areas between a contacting ring and a series of circumferentially mounted contacting shoes. Also the contact shoes are being pressed radially outwardly by means of resilient elements against the contacting ring.
摘要翻译： 公开了一种用于对真空涂覆装置中的可旋转管状靶进行电激励的端块。 端块具有旋转电接触，可在交流模式下工作时减少焦耳加热效应。 当与已知的端块相比时，这通过增加接触环和一系列周向安装的接触鞋之间的接触面积的数量来实现。 此外，接触鞋被抵靠接触环的弹性元件径向向外挤压。
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公开(公告)号：US20080105543A1
公开(公告)日：2008-05-08
申请号：US11665562
申请日：2005-10-11
IPC分类号： C23C14/50
CPC分类号： C23C14/3407 , H01J37/3435
摘要： An end-block for use in a tubular magnetron sputtering apparatus is disclosed. Such an end-block rotatably transfers movement, coolant 5 and electrical current to the target while maintaining vacuum integrity and a closed coolant circuit. It hence comprises a drive means, a rotary electrical contact means, a bearing means, a number of rotary coolant seal means and a number of vacuum seal means. The inventive end-block occupies a minimal axial length along the target thus allowing 10 space savings in existing equipment such as e.g. display coaters. The axial length is reduced by mounting at least two of the means radial to one another.
摘要翻译： 公开了一种用于管状磁控溅射装置的端块。 这种端块可以将运动，冷却剂5和电流转移到目标物上，同时保持真空完整性和封闭的冷却剂回路。 因此，它包括驱动装置，旋转电接触装置，轴承装置，多个旋转冷却剂密封装置和多个真空密封装置。 本发明的端块沿着目标占据最小的轴向长度，从而允许现有设备中的10个空间节省，例如， 显示涂布机 通过将至少两个装置相对于彼此径向地安装来减小轴向长度。
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