公开(公告)号：US07677707B2

公开(公告)日：2010-03-16

申请号：US11581334

申请日：2006-10-17

申请人： Kyo-yeol Lee ,  Tae-kyun Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

发明人： Kyo-yeol Lee ,  Tae-kyun Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

摘要： A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

摘要翻译： 通过丝网印刷形成厚层的方法以及形成喷墨头的压电致动器的方法。 形成厚层的方法包括在表面上形成预定深度的引导槽，并且通过丝网印刷将引导槽内的表面施加材料形成厚层。 形成压电致动器的方法包括在振动板的顶表面上形成绝缘层，并且在与振动板的顶表面对应的位置处在振动板的顶表面或绝缘层中形成预定深度的引导槽 的压力室，在绝缘层的顶表面上形成下电极; 通过丝网印刷在引导槽内形成压电层，并在压电层的顶表面上形成上电极。

公开(公告)号：US07603756B2

公开(公告)日：2009-10-20

申请号：US11583798

申请日：2006-10-20

申请人： Seung-mo Lim ,  Kyo-yeol Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Jae-chang Lee

发明人： Seung-mo Lim ,  Kyo-yeol Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Jae-chang Lee

IPC分类号： H04R17/00 ,  H01L41/24

CPC分类号： B41J2/161 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49401

摘要： A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

摘要翻译： 提供一种形成在振动板上的喷墨头的压电致动器的方法，以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极，在下电极上形成压电层，位于每个压力室之上，形成覆盖下电极和压电层的保护层，暴露压电层的上表面 通过减小保护层和压电层的厚度，在压电层的上表面上形成上电极，除去保护层。 根据本发明，由于具有平坦的上表面的压电层形成均匀的图形，所以形成在其上的上电极的面积和厚度被均匀地控制。

公开(公告)号：US20070195134A1

公开(公告)日：2007-08-23

申请号：US11581333

申请日：2006-10-17

申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

公开(公告)号：US20070195132A1

公开(公告)日：2007-08-23

申请号：US11581334

申请日：2006-10-17

申请人： Kyo-yeol Lee ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

发明人： Kyo-yeol Lee ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

摘要： A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

摘要翻译： 通过丝网印刷形成厚层的方法以及形成喷墨头的压电致动器的方法。 形成厚层的方法包括在表面上形成预定深度的引导槽，并且通过丝网印刷将引导槽内的表面施加材料形成厚层。 形成压电致动器的方法包括在振动板的顶表面上形成绝缘层，并且在与振动板的顶表面对应的位置处在振动板的顶表面或绝缘层中形成预定深度的引导槽 的压力室，在绝缘层的顶表面上形成下电极; 通过丝网印刷在引导槽内形成压电层，并在压电层的顶表面上形成上电极。

公开(公告)号：US20100146756A1

公开(公告)日：2010-06-17

申请号：US12712442

申请日：2010-02-25

申请人： Tae-kyung LEE ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Tae-kyung LEE ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： H01L41/22

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

公开(公告)号：US20080122319A1

公开(公告)日：2008-05-29

申请号：US11877717

申请日：2007-10-24

申请人： Kyo-yeol LEE ,  Hwa-sun Lee ,  Seung-mo Lim ,  Tae-kyung Lee ,  Jae-woo Chung

发明人： Kyo-yeol LEE ,  Hwa-sun Lee ,  Seung-mo Lim ,  Tae-kyung Lee ,  Jae-woo Chung

IPC分类号： H01L41/24 ,  B05D5/12 ,  H01L41/187

CPC分类号： H01L41/43 ,  H01L41/0815 ,  H01L41/319

摘要： A method of forming a high density thick piezoelectric layer and a piezoelectric device the same. The method of forming the thick piezoelectric layer includes: forming a seed layer on a substrate by coating a sol including a piezoelectric material; primary heat-treating the seed layer; forming the thick piezoelectric layer by coating a paste that includes a piezoelectric material on the seed layer using a screen printing method; and secondary heat-treating the thick piezoelectric layer at a temperature higher than the primary heat-treating temperature. The piezoelectric material included in the sol has a composition identical or similar to the composition of the piezoelectric material included in the paste. The density of the thick piezoelectric layer is increased by particles of the piezoelectric material that penetrate into the thick piezoelectric layer from the seed layer in the secondary heat-treating, and thus, a high density thick piezoelectric layer can be formed.

摘要翻译： 形成高密度厚压电层的方法及其压电装置。 形成厚压电层的方法包括：通过涂布包括压电材料的溶胶在基板上形成种子层; 初级热处理种子层; 通过使用丝网印刷法在种子层上涂布包含压电材料的糊料来形成厚的压电层; 并且在比第一热处理温度高的温度下对厚的压电层进行二次热处理。 包含在溶胶中的压电材料具有与糊料中包含的压电材料的组成相同或相似的组成。 通过在二次热处理中从种子层渗透到厚压电体层中的压电体的粒子，能够增加厚的压电体层的密度，能够形成高密度的厚的压电体层。

公开(公告)号：US08806727B2

公开(公告)日：2014-08-19

申请号：US12712442

申请日：2010-02-25

申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： H04R17/00

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

摘要翻译： 在振动板上形成压电致动器以向多个压力室中的每一个提供驱动力的方法包括在振动板上形成下电极，在下电极上形成压电层，位于对应于 在所述下电极上形成支撑垫，所述支撑垫接触所述压电层的一端并且远离所述压电层的一端延伸，形成从所述压电层的顶表面延伸到顶部的上电极 并且将上电极连接到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。

公开(公告)号：US20100132176A1

公开(公告)日：2010-06-03

申请号：US12696325

申请日：2010-01-29

申请人： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

发明人： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC分类号： H01L41/22

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

摘要： A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

摘要翻译： 通过丝网印刷形成厚层的方法以及形成喷墨头的压电致动器的方法。 形成厚层的方法包括在表面上形成预定深度的引导槽，并且通过丝网印刷将引导槽内的表面施加材料形成厚层。 形成压电致动器的方法包括在振动板的顶表面上形成绝缘层，并且在与振动板的顶表面对应的位置处在振动板的顶表面或绝缘层中形成预定深度的引导槽 的压力室，在绝缘层的顶表面上形成下电极; 通过丝网印刷在引导槽内形成压电层，并在压电层的顶表面上形成上电极。

公开(公告)号：US20100126364A1

公开(公告)日：2010-05-27

申请号：US12696320

申请日：2010-01-29

申请人： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

发明人： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC分类号： B41M1/12

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

摘要： A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

公开(公告)号：US07682001B2

公开(公告)日：2010-03-23

申请号：US11581333

申请日：2006-10-17

申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。