Exposure apparatus and method of manufacturing device
    1.
    发明授权
    Exposure apparatus and method of manufacturing device 有权
    曝光装置及其制造方法

    公开(公告)号:US08456612B2

    公开(公告)日:2013-06-04

    申请号:US12791539

    申请日:2010-06-01

    摘要: An exposure apparatus projects a pattern of an original onto a substrate by a projection optical system to expose the substrate, wherein the projection optical system includes a mirror assembly, and the mirror assembly includes a first mirror member which has a first reflecting surface and is configured to bend an optical axis of the projection optical system, a second mirror member which has a second reflecting surface and is configured to bend the optical axis, a supporting mechanism configured to support the first mirror member and the second mirror member, and the supporting mechanism is positioned to position the first mirror member and the second mirror member while a positional relationship between the first mirror member and the second mirror member is maintained.

    摘要翻译: 曝光装置通过投影光学系统将原稿的图案投射到基板上以露出基板,其中投影光学系统包括反射镜组件,并且反射镜组件包括具有第一反射表面并被配置的第一反射镜部件 使投影光学系统的光轴弯曲,具有第二反射面并被配置为使光轴弯曲的第二反射镜部件,配置为支撑第一反射镜部件和第二反射镜部件的支撑机构,以及支撑机构 定位成在第一反射镜部件和第二反射镜部件之间保持位置关系的同时定位第一反射镜部件和第二反射镜部件。

    Zoom lens of the internal focus type
    2.
    发明授权
    Zoom lens of the internal focus type 失效
    缩放镜头的内部焦点类型

    公开(公告)号:US5136431A

    公开(公告)日:1992-08-04

    申请号:US630761

    申请日:1990-12-21

    IPC分类号: G02B15/17

    CPC分类号: G02B15/17

    摘要: A zoom lens is disclosed comprising a front lens unit, an intermediate lens unit having two lens sub-units with their axial separation varying for zooming purposes, and a rear lens unit, wherein at the wide-angle end, focusing is performed by moving at least the rear lens unit, and, at the telephoto end, focusing is performed by moving the intermediate lens unit and the rear lens unit, whereby the amount of focusing movement of the intermediate lens unit from an infinitely distant object to an object at a certain short distance is greater at the telephoto end than at the wide-angled end.

    摘要翻译: 公开了一种变焦透镜,包括前透镜单元,具有两个透镜子单元的中间透镜单元,其具有用于变焦的轴向分离变化,以及后透镜单元,其中在广角端,通过在 至少后透镜单元,并且在远摄端,通过移动中间透镜单元和后透镜单元来执行聚焦,由此中间透镜单元从无限远的对象到某个物体的聚焦运动的量 在远摄端的短距离大于广角端。

    Zoom lens of the inner focus type

    公开(公告)号:US5745300A

    公开(公告)日:1998-04-28

    申请号:US854773

    申请日:1997-05-12

    CPC分类号: G02B15/173 G02B15/17

    摘要: A zoom lens is disclosed comprising, from front to rear a first lens unit of positive refractive power, a second lens unit of negative refractive power for varying the focal length, a third lens unit for compensating for the image shift with zooming, and a fourth lens unit having the image forming function and stationary during zooming, wherein the first lens unit is divided into two or three lens subunits, one of which is moved to effect focusing, and various rules of design are set forth to suppress well the variation of aberrations with focusing.

    Zoom lens and photographing apparatus using the same

    公开(公告)号:US06560016B2

    公开(公告)日:2003-05-06

    申请号:US09821357

    申请日:2001-03-29

    IPC分类号: G02B2764

    CPC分类号: G02B15/17

    摘要: A zoom lens includes, in order from an object side to an image side, a first lens unit of positive refractive power, a second lens unit of negative refractive power arranged to move during variation of magnification, a third lens unit of negative refractive power arranged to compensate for shift of an image plane due to the variation of magnification, and a fourth lens unit of positive refractive power. The fourth lens unit has a focal-length changeover subunit arranged to be insertable onto and detachable from an optical axis of the zoom lens and provided for changing the focal length of the zoom lens, and an image-stabilizing lens subunit different from the focal-length changeover subunit. The image-stabilizing lens subunit is movable in such a way as to have a component perpendicular to the optical axis so as to displace an image.

    Zoom lens and camera system
    5.
    发明授权
    Zoom lens and camera system 有权
    变焦镜头和相机系统

    公开(公告)号:US06545818B2

    公开(公告)日:2003-04-08

    申请号:US09562933

    申请日:2000-05-02

    IPC分类号: G02B1514

    CPC分类号: G02B15/173

    摘要: A zoom lens includes, in order from an object side to an image side, a first lens unit of positive refractive power, a second lens unit of negative refractive power for variation of magnification, a third lens unit for compensating for shift of an image plane caused by the variation of magnification, and a fixed fourth lens unit of positive refractive power, wherein the first lens unit comprises a first lens subunit of negative refractive power fixed during focusing, a second lens subunit having a focusing function, and a third lens subunit of positive refractive power fixed during focusing, and at least one of the first lens subunit and the second lens subunit and the third lens subunit respectively have aspheric lenses.

    摘要翻译: 变焦透镜从物体侧到像侧依次包括正屈光力的第一透镜单元,用于变倍放大的负折射力的第二透镜单元,用于补偿像平面偏移的第三透镜单元 由倍率变化引起的正屈光力固定的第四透镜单元,其中第一透镜单元包括在聚焦期间固定的负折光力的第一透镜子单元,具有聚焦功能的第二透镜子单元和第三透镜子单元 在聚焦期间固定正屈光力,并且第一透镜子单元和第二透镜子单元和第三透镜子单元中的至少一个分别具有非球面透镜。

    Color television camera incorporating a color resolving prism system
    6.
    发明授权
    Color television camera incorporating a color resolving prism system 失效
    彩色电视摄像机采用彩色分辨棱镜系统

    公开(公告)号:US4857997A

    公开(公告)日:1989-08-15

    申请号:US186654

    申请日:1988-04-19

    IPC分类号: H04N9/097

    CPC分类号: H04N9/097

    摘要: In a television camera having a color resolving prism system for forming monochromatic images on the image pickup surfaces of a plurality of image pickup devices by an objective lens the color resolving prism system has first, second, third and fourth prisms as is named in the order from a side of the objective lens along the optic axis of the objective lens, the first and second prisms, with their refracting angles opening in opposite directions, are edisposed with an air layer interposed therebetween or are joined together with a dichroic layer interposed therebetween, the second and third prisms are disposed with an air layer interposed therebetween, the third and fourth prisms are joined together with a second dichroic layer interposed therebetween, and the values of the refracting angles of the first .theta..sub.10 or .theta..sub.21), second .theta..sub.10 +.theta..sub.11 or .theta..sub.22, third .theta..sub.23 and fourth .theta..sub.24 prisms satisfy the following conditions:(1) in the case where the first and second prisms are disposed with the air layer interposed therebetween,5.2.degree.

    摘要翻译: 在具有用于通过物镜在多个图像拾取装置的图像拾取表面上形成单色图像的颜色分辨棱镜系统的电视摄像机中,彩色分辨棱镜系统具有按顺序命名的第一,第二,第三和第四棱镜 沿着物镜的光轴从物镜的一侧开始,第一和第二棱镜以其相反的方向打开的折射角被插入其间的空气层,或者通过其间的二向色层连接在一起, 第二和第三棱镜设置有介于其间的空气层,第三和第四棱镜通过插入其间的第二二向色层连接在一起,第一θ10或θ21的折射角值,第二θ10 +θ11或θ22,第三theta 23和第四theta 24棱镜满足以下条件:(1)在第一和第二pr 将空气层置于其间,5.2°θ<12°26.7°θθθ<30°,(2)在第一和第二棱镜与二向色层连接的情况下 介于它们之间,25.8°±30°±18°±20°28.1°θ= 35.4°24 =-θ21°θ22°θ23° 。

    Zoom lens of the inner focus type
    7.
    发明授权
    Zoom lens of the inner focus type 失效
    变焦镜头的内聚焦类型

    公开(公告)号:US5986820A

    公开(公告)日:1999-11-16

    申请号:US7723

    申请日:1998-01-15

    CPC分类号: G02B15/173 G02B15/17

    摘要: A zoom lens is disclosed comprising, from front to rear a first lens unit of positive refractive power, a second lens unit of negative refractive power for varying the focal length, a third lens unit for compensating for the image shift with zooming, and a fourth lens unit having the image forming function and stationary during zooming, wherein the first lens unit is divided into two or three lens subunits, one of which is moved to effect focusing, and various rules of design are set forth to suppress well the variation of aberrations with focusing.

    摘要翻译: 公开了一种变焦透镜,包括从前到后具有正屈光力的第一透镜单元,用于改变焦距的负折射力的第二透镜单元,用于通过变焦来补偿图像偏移的第三透镜单元,以及第四透镜单元 具有图像形成功能的透镜单元和在变焦期间静止的第一透镜单元,其中第一透镜单元被分成两个或三个透镜子单元,其中一个透镜子单元被移动以实现聚焦,并且提出各种设计规则以良好地抑制像差的变化 与聚焦。

    Zoom lens
    8.
    发明授权
    Zoom lens 失效
    变焦镜头

    公开(公告)号:US5757554A

    公开(公告)日:1998-05-26

    申请号:US665500

    申请日:1996-06-18

    申请人: Kiyoshi Fukami

    发明人: Kiyoshi Fukami

    CPC分类号: G02B15/173

    摘要: A zoom lens comprises, in order from an object side to an image side, a first lens unit of positive refractive power which is stationary during zooming, a second lens unit of negative refractive power which is axially movable during zooming, a third lens unit which is axially movable during zooming, and a fourth lens unit of positive refractive power which is stationary during zooming, wherein the first lens unit comprises a front lens sub-unit including at least one positive lens and having a negative refractive power as a whole, an intermediate lens sub-unit including at least one positive lens and a cemented lens and having a positive refractive power as a whole, and a rear lens sub-unit including a cemented lens and having a positive refractive power as a whole, and wherein the intermediate lens sub-unit is moved toward the image side to effect focusing from an infinitely distant object to an object at a minimum object distance.

    摘要翻译: 变焦透镜从物体侧到像侧依次包括在变焦期间静止的正屈光力的第一透镜单元,在变焦期间可以轴向移动的负折射力的第二透镜单元,第三透镜​​单元, 在变焦期间可轴向移动;以及正变焦度的第四透镜单元,其在变焦期间是静止的,其中所述第一透镜单元包括包括至少一个正透镜并且整体具有负折光力的前透镜子单元, 包括至少一个正透镜和胶合透镜并且整体具有正折射光焦度的中间透镜子单元和包括胶结透镜并具有正折射光焦度的后透镜子单元,并且其中中间体 镜头子单元朝向图像侧移动,以便以最小对象距离从无限远的物体到物体进行聚焦。

    Zoom lens
    9.
    发明授权
    Zoom lens 失效
    变焦镜头

    公开(公告)号:US5191475A

    公开(公告)日:1993-03-02

    申请号:US804513

    申请日:1991-12-10

    IPC分类号: G02B15/17

    CPC分类号: G02B15/17

    摘要: A zoom lens comprising, from front to rear, a focusing lens group, a variator lens group, a compensator lens group and a relay lens group, the relay lens group consisting of a front part and a rear part with a longest air spacing therebetween, and the rear part including a first movable lens component arranged upon setting of macro photography made to move along an optical axis, and a second movable lens component arranged upon setting of tracking adjustment made to move along the optical axis.

    摘要翻译: 一种变焦透镜,包括从前到后的聚焦透镜组,变倍透镜组,补偿透镜组和中继透镜组,所述中继透镜组由前部和后部之间具有最长的空气间隔组成, 并且后部包括设置为沿着光轴移动的微距拍摄时布置的第一可移动透镜部件,以及设置为沿着光轴移动的跟踪调整的第二可移动透镜部件。

    Zoom lens capable of changing a range of variable focal length
    10.
    发明授权
    Zoom lens capable of changing a range of variable focal length 失效
    变焦镜头能够改变可变焦距的范围

    公开(公告)号:US5097360A

    公开(公告)日:1992-03-17

    申请号:US742474

    申请日:1991-08-05

    IPC分类号: G02B15/17

    CPC分类号: G02B15/17

    摘要: A zoom lens capable of changing the range of variable focal length to another limit, comprising, from front to rear, a zoom section including a variator and a compensator arranged upon zooming movement to vary the focal length in a predetermined range, a diaphragm, and a relay lens section receptive of the afocal light beam from the zoom section to form an image and having a front lens unit and a rear lens unit, the front lens unit being provided with a fixed sub-unit and an interchangeable sub-unit in this order from the front, wherein the interchangeable sub-unit is removed to create a space between the fixed sub-unit and the rear lens unit, into which a range changing lens unit is then inserted, so that the range of variable focal length is changed.

    摘要翻译: 一种变焦透镜,其能够将可变焦距的范围改变到另一极限,包括从前到后的包括变焦器和补偿器的变焦部分,变焦部分和补偿器被布置在变焦运动上以改变预定范围内的焦距,隔膜和 接收来自变焦部分的远焦光束以形成图像并具有前透镜单元和后透镜单元的中继透镜部分,所述前透镜单元在其中设置有固定子单元和可互换子单元 其中可拆卸子单元被移除以在固定子单元和后透镜单元之间形成空间,然后插入范围改变透镜单元,使得可变焦距的范围被改变 。