摘要:
An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.
摘要:
Pressing means is provided to press a movable base to a surface of a reference base to make the movable base in contact with the surface of the reference base to thereby lock-down the movable base on the surface of the reference base. The movable base is moved while slightly floating with respect to the reference base. A movable floating mechanism is provided to float the movable base from the reference base against pressing force of the pressing means exerted on the movable base to thereby relieve the locking. A floating amount of the movable base from the reference base may be small enough to reduce or substantially remove sliding friction between the movable base and the reference base. For example, the floating amount may be as small as ten to several hundreds microns.
摘要:
In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accommodation container is performed at the first relaying point and a load/unload process of works between the relay stand and the plurality of work inspection machines is performed at the second relaying point.
摘要:
The improved for measuring the flying height of a magnetic head comprises a clear disk made of single-crystal sapphire, a spindle on which said disk is mounted for rotation, a mechanism for loading the magnetic head above one surface of said disk, measuring optics having a photoelectric converter that receives the light produced by interference of reflected light from said one surface of said disk with reflected light from the surface of said magnetic head as a result of application of light to said one surface through the other surface of said disk, and which converts the received interference light to an electric signal by means of said photoelectric converter, and a processing unit for calculating the flying height of said magnetic head in response to said electric signal from said measuring optics.
摘要:
An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
摘要:
In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.
摘要:
An inspection method and inspection apparatus of a magnetic disk are provided. A gliding test and a certification test are performed at the same time by simultaneously moving a head for the certification test and a head for the gliding test with a heat distortion utilization mechanism (a micro thermal actuator) along a recording surface of the magnetic disk during rotation at a predetermined revolving speed. A flying height of the head for the gliding test is determined according to a revolving speed of the disk. When the flying height of the head for gliding test is determined according to the revolving speed at the certification test, the head for the gliding test is adjusted to a desired height by adjusting a variation of the heat distortion utilization mechanism disposed on the head for the gliding test. The gliding and certification inspections can be performed at the same time.
摘要:
A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.
摘要:
A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.
摘要:
A stamper is used for the transfer of microscopic structures, the stamper including a base and a microscopic structure layer on a surface thereof, in which the microscopic structure layer has a surface layer including a polymer derived from a resin composition containing a polymerization initiator and a silsesquioxane derivative having two or more polymerizable functional groups, the microscopic structure layer has a modulus of elasticity of less than 2.0 GPa and has a thickness of 4 times or more the height of a microscopic structure formed on the surface of the microscopic structure layer.